Keith William Gaff

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with ceramic monolithic body
- Patent number 11,967,517
- Issue date Apr 23, 2024
- Lam Research Corporation
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatically clamped edge ring
- Patent number 11,935,776
- Issue date Mar 19, 2024
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-plate electrostatic chucks with ceramic baseplates
- Patent number 11,848,177
- Issue date Dec 19, 2023
- Lam Research Corporation
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 11,781,650
- Issue date Oct 10, 2023
- Lam Research Corporation
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic Chuck design for cooling-gas light-up prevention
- Patent number 11,651,991
- Issue date May 16, 2023
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with features for preventing electrical arcing...
- Patent number 11,069,553
- Issue date Jul 20, 2021
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck design for cooling-gas light-up prevention
- Patent number 11,024,532
- Issue date Jun 1, 2021
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatically clamped edge ring
- Patent number 10,923,380
- Issue date Feb 16, 2021
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge seal configurations for a lower electrode assembly
- Patent number 10,892,197
- Issue date Jan 12, 2021
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for correcting non-uniformities in plasma proce...
- Patent number 10,872,748
- Issue date Dec 22, 2020
- Lam Research Corporation
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly incorporation a gasket for distributin...
- Patent number 10,804,129
- Issue date Oct 13, 2020
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring dimensioned to extend lifetime of elastomer seal in a pla...
- Patent number 10,804,081
- Issue date Oct 13, 2020
- Lam Research Corporation
- Ambarish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power switching system for ESC with array of thermal control elements
- Patent number 10,770,363
- Issue date Sep 8, 2020
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with thermal zones for semiconductor processing
- Patent number 10,720,346
- Issue date Jul 21, 2020
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-plane heater for semiconductor substrate support
- Patent number 10,690,414
- Issue date Jun 23, 2020
- Lam Research Corporation
- Keith William Gaff
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Method of determining thermal stability of a substrate support asse...
- Patent number 10,437,236
- Issue date Oct 8, 2019
- Lam Research Corporation
- Ole Waldmann
- G05 - CONTROLLING REGULATING
Information Patent Grant
Component of a substrate support assembly producing localized magne...
- Patent number 10,388,493
- Issue date Aug 20, 2019
- Lam Research Corporation
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto-correction of electrostatic chuck temperature non-uniformity
- Patent number 10,381,248
- Issue date Aug 13, 2019
- Lam Research Corporation
- Benny Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supports with multi-layer structure including independent...
- Patent number 10,236,193
- Issue date Mar 19, 2019
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 10,090,211
- Issue date Oct 2, 2018
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck design for cooling-gas light-up prevention
- Patent number 10,083,853
- Issue date Sep 25, 2018
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjusting substrate temperature to improve CD uniformity
- Patent number 10,056,225
- Issue date Aug 21, 2018
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power switching system for ESC with array of thermal control elements
- Patent number 10,049,948
- Issue date Aug 14, 2018
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ESC assembly including an electrically conductive gasket for unifor...
- Patent number 10,002,782
- Issue date Jun 19, 2018
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatically clamped edge ring
- Patent number 9,922,857
- Issue date Mar 20, 2018
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 9,869,392
- Issue date Jan 16, 2018
- Lam Research Corporation
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 9,859,142
- Issue date Jan 2, 2018
- Lam Research Corporation
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining thermal stability of a substrate support asse...
- Patent number 9,716,022
- Issue date Jul 25, 2017
- Lam Research Corporation
- Ole Waldmann
- G05 - CONTROLLING REGULATING
Information Patent Grant
Heating plate with heating zones for substrate processing and metho...
- Patent number 9,646,861
- Issue date May 9, 2017
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Auto-correction of malfunctioning thermal control element in a temp...
- Patent number 9,543,171
- Issue date Jan 10, 2017
- Lam Research Corporation
- Ole Waldmann
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES
- Publication number 20240112893
- Publication date Apr 4, 2024
- LAM RESEARCH CORPORATION
- Feng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20240077138
- Publication date Mar 7, 2024
- LAM RESEARCH CORPORATION
- David SCHAEFER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT TEMPERATURE PROBE DIAGNOSTICS AND MANAGEMENT
- Publication number 20230127806
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Anthony John RICCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH VARYING DEPTHS OF AREAS BETWEEN MESAS AND CO...
- Publication number 20220380894
- Publication date Dec 1, 2022
- Keith GAFF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH CERAMIC MONOLITHIC BODY
- Publication number 20220148903
- Publication date May 12, 2022
- LAM RESEARCH CORPORATION
- Feng WANG
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION
- Publication number 20210296099
- Publication date Sep 23, 2021
- LAM RESEARCH CORPORATION
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATICALLY CLAMPED EDGE RING
- Publication number 20210166965
- Publication date Jun 3, 2021
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CORRECTING NON-UNIFORMITIES IN PLASMA PROCE...
- Publication number 20190371576
- Publication date Dec 5, 2019
- LAM RESEARCH CORPORATION
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES
- Publication number 20190267218
- Publication date Aug 29, 2019
- LAM RESEARCH CORPORATION
- Feng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION
- Publication number 20190006225
- Publication date Jan 3, 2019
- LAM RESEARCH CORPORATION
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS
- Publication number 20180374763
- Publication date Dec 27, 2018
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Edge Seal Configurations For A Lower Electrode Assembly
- Publication number 20180366379
- Publication date Dec 20, 2018
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY INCORPORATING A GASKET FOR DISTRIBUTIN...
- Publication number 20180277412
- Publication date Sep 27, 2018
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATICALLY CLAMPED EDGE RING
- Publication number 20180166312
- Publication date Jun 14, 2018
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH VARYING DEPTHS OF AREAS BETWEEN MESAS AND CO...
- Publication number 20180148835
- Publication date May 31, 2018
- LAM RESEARCH CORPORATION
- Ann Erickson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20180106371
- Publication date Apr 19, 2018
- LAM RESEARCH CORPORATION
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ELECTROSTATIC CHUCK WITH FEATURES FOR PREVENTING ELECTRICAL ARCING...
- Publication number 20180012785
- Publication date Jan 11, 2018
- LAM RESEARCH CORPORATION
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSE...
- Publication number 20170322546
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Ole Waldmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTS WITH MULTI-LAYER STRUCTURE INCLUDING INDEPENDENT...
- Publication number 20170229327
- Publication date Aug 10, 2017
- LAM RESEARCH CORPORATION
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PLANE HEATER FOR SEMICONDUCTOR SUBSTRATE SUPPORT
- Publication number 20170167790
- Publication date Jun 15, 2017
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION
- Publication number 20170110356
- Publication date Apr 20, 2017
- LAM RESEARCH CORPORATION
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTO-CORRECTION OF ELECTROSTATIC CHUCK TEMPERATURE NON-UNIFORMITY
- Publication number 20160372352
- Publication date Dec 22, 2016
- LAM RESEARCH CORPORATION
- Benny Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH THERMAL ZONES FOR SEMICONDUCTOR PROCESSING
- Publication number 20160300741
- Publication date Oct 13, 2016
- LAM RESEARCH CORPORATION
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ESC ASSEMBLY INCLUDING AN ELECTRICALLY CONDUCTIVE GASKET FOR UNIFOR...
- Publication number 20160111314
- Publication date Apr 21, 2016
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTO-CORRECTION OF MALFUNCTIONING THERMAL CONTROL ELEMENT IN A TEMP...
- Publication number 20150364388
- Publication date Dec 17, 2015
- LAM RESEARCH CORPORATION
- Ole Waldmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20150187614
- Publication date Jul 2, 2015
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK INCLUDING DECLAMPING ELECTRODE AND METHOD OF DE...
- Publication number 20150181683
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING DIMENSIONED TO EXTEND LIFETIME OF ELASTOMER SEAL IN A PLA...
- Publication number 20150179412
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Ambarish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSE...
- Publication number 20150168962
- Publication date Jun 18, 2015
- LAM RESEARCH CORPORATION
- Ole Waldmann
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROLLING CD AND CD UNIFORMITY WITH TRIM TIME AND TEMPERATURE ON...
- Publication number 20150053347
- Publication date Feb 26, 2015
- LAM RESEARCH CORPORATION
- Yoshie Kimura
- H01 - BASIC ELECTRIC ELEMENTS

Keith William Gaff

Person

Patents Grantslast 30 patents

Electrostatic chuck with ceramic monolithic body

Electrostatically clamped edge ring

Multi-plate electrostatic chucks with ceramic baseplates

Edge seal for lower electrode assembly

Electrostatic Chuck design for cooling-gas light-up prevention

Electrostatic chuck with features for preventing electrical arcing...

Electrostatic chuck design for cooling-gas light-up prevention

Electrostatically clamped edge ring

Edge seal configurations for a lower electrode assembly

Systems and methods for correcting non-uniformities in plasma proce...

Electrostatic chuck assembly incorporation a gasket for distributin...

Edge ring dimensioned to extend lifetime of elastomer seal in a pla...

Power switching system for ESC with array of thermal control elements

Substrate support with thermal zones for semiconductor processing

Multi-plane heater for semiconductor substrate support

Method of determining thermal stability of a substrate support asse...

Component of a substrate support assembly producing localized magne...

Auto-correction of electrostatic chuck temperature non-uniformity

Substrate supports with multi-layer structure including independent...

Edge seal for lower electrode assembly

Electrostatic chuck design for cooling-gas light-up prevention

Adjusting substrate temperature to improve CD uniformity

Power switching system for ESC with array of thermal control elements

ESC assembly including an electrically conductive gasket for unifor...

Electrostatically clamped edge ring

Edge seal for lower electrode assembly

Edge seal for lower electrode assembly

Method of determining thermal stability of a substrate support asse...

Heating plate with heating zones for substrate processing and metho...

Auto-correction of malfunctioning thermal control element in a temp...

Patents Applicationslast 30 patents

MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

SUBSTRATE SUPPORT TEMPERATURE PROBE DIAGNOSTICS AND MANAGEMENT

SUBSTRATE SUPPORT WITH VARYING DEPTHS OF AREAS BETWEEN MESAS AND CO...

ELECTROSTATIC CHUCK WITH CERAMIC MONOLITHIC BODY

ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION

ELECTROSTATICALLY CLAMPED EDGE RING

SYSTEMS AND METHODS FOR CORRECTING NON-UNIFORMITIES IN PLASMA PROCE...

MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES

ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION

POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS

Edge Seal Configurations For A Lower Electrode Assembly

ELECTROSTATIC CHUCK ASSEMBLY INCORPORATING A GASKET FOR DISTRIBUTIN...

ELECTROSTATICALLY CLAMPED EDGE RING

SUBSTRATE SUPPORT WITH VARYING DEPTHS OF AREAS BETWEEN MESAS AND CO...

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

ELECTROSTATIC CHUCK WITH FEATURES FOR PREVENTING ELECTRICAL ARCING...

METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSE...

SUBSTRATE SUPPORTS WITH MULTI-LAYER STRUCTURE INCLUDING INDEPENDENT...

MULTI-PLANE HEATER FOR SEMICONDUCTOR SUBSTRATE SUPPORT

ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION

AUTO-CORRECTION OF ELECTROSTATIC CHUCK TEMPERATURE NON-UNIFORMITY

SUBSTRATE SUPPORT WITH THERMAL ZONES FOR SEMICONDUCTOR PROCESSING

ESC ASSEMBLY INCLUDING AN ELECTRICALLY CONDUCTIVE GASKET FOR UNIFOR...

AUTO-CORRECTION OF MALFUNCTIONING THERMAL CONTROL ELEMENT IN A TEMP...

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

ELECTROSTATIC CHUCK INCLUDING DECLAMPING ELECTRODE AND METHOD OF DE...

EDGE RING DIMENSIONED TO EXTEND LIFETIME OF ELASTOMER SEAL IN A PLA...

METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSE...

CONTROLLING CD AND CD UNIFORMITY WITH TRIM TIME AND TEMPERATURE ON...