Kevin L. Beaman

Person

Boise, ID, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for controlling temperature during microfeature...
- Patent number 8,518,184
- Issue date Aug 27, 2013
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming small-scale capacitor structures
- Patent number 8,384,192
- Issue date Feb 26, 2013
- Micron Technology, Inc.
- Lingyi A. Zheng
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods of forming isolation structures, and methods of forming non...
- Patent number 8,030,170
- Issue date Oct 4, 2011
- Micron Technology, Inc.
- Yunjun Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a structure over a semiconductor substrate
- Patent number 8,017,470
- Issue date Sep 13, 2011
- Round Rock Research, LLC
- Kevin L. Beaman
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Liner for shallow trench isolation
- Patent number 7,919,829
- Issue date Apr 5, 2011
- Micron Technology, Inc.
- Jigish D. Trivedi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming small-scale capacitor structures
- Patent number 7,906,393
- Issue date Mar 15, 2011
- Micron Technology, Inc.
- Lingyi A. Zheng
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of forming a structure over a semiconductor substrate
- Patent number 7,803,678
- Issue date Sep 28, 2010
- Round Rock Research, LLC
- Kevin L. Beaman
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods and systems for controlling temperature during microfeature...
- Patent number 7,771,537
- Issue date Aug 10, 2010
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming programmable memory devices
- Patent number 7,651,910
- Issue date Jan 26, 2010
- Micron Technology, Inc.
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for depositing material onto workpieces in reaction chamber...
- Patent number 7,647,886
- Issue date Jan 19, 2010
- Micron Technology, Inc.
- David J. Kubista
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming shallow trench isolation
- Patent number 7,514,366
- Issue date Apr 7, 2009
- Micron Technology, Inc.
- Jigish D. Trivedi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing microfeature workpieces, e.g.,...
- Patent number 7,422,635
- Issue date Sep 9, 2008
- Micron Technology, Inc.
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a structure over a semiconductor substrate
- Patent number 7,399,714
- Issue date Jul 15, 2008
- Micron Technology, Inc.
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming transistors
- Patent number 7,371,647
- Issue date May 13, 2008
- Micron Technology, Inc.
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing microfeature workpieces; metho...
- Patent number 7,344,755
- Issue date Mar 18, 2008
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microfeature workpiece processing apparatus and methods for control...
- Patent number 7,279,398
- Issue date Oct 9, 2007
- Micron Technology, Inc.
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liner for shallow trench isolation
- Patent number 7,271,464
- Issue date Sep 18, 2007
- Micron Technology, Inc.
- Jigish D. Trivedi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for controlling temperature during microfeature...
- Patent number 7,258,892
- Issue date Aug 21, 2007
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microfeature workpiece processing apparatus and methods for batch d...
- Patent number 7,235,138
- Issue date Jun 26, 2007
- Micron Technology, Inc.
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming capacitors and methods of forming capacitor diel...
- Patent number 7,153,736
- Issue date Dec 26, 2006
- Micron Technology, Inc.
- Denise M. Eppich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microfeature workpiece processing apparatus and methods for control...
- Patent number 7,056,806
- Issue date Jun 6, 2006
- Micron Technology, Inc.
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtered insulating layer for wordline stacks
- Patent number 6,815,372
- Issue date Nov 9, 2004
- Micron Technology, Inc.
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PD-SOI substrate with suppressed floating body effect and method fo...
- Patent number 6,746,937
- Issue date Jun 8, 2004
- Micron Technology, Inc.
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming DRAM cells
- Patent number 6,734,062
- Issue date May 11, 2004
- Micron Technology, Inc.
- Fernando Gonzalez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming capacitors and methods of forming capacitor diel...
- Patent number 6,723,599
- Issue date Apr 20, 2004
- Micron Technology, Inc.
- Denise M. Eppich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
DRAM cell constructions
- Patent number 6,707,090
- Issue date Mar 16, 2004
- Micron Technology, Inc.
- Fernando Gonzalez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor assemblies, methods of forming structures over semico...
- Patent number 6,690,046
- Issue date Feb 10, 2004
- Micron Technology, Inc.
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming structures over semiconductor substrates, and me...
- Patent number 6,686,298
- Issue date Feb 3, 2004
- Micron Technology, Inc.
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
DRAM cell constructions
- Patent number 6,639,243
- Issue date Oct 28, 2003
- Micron Technology, Inc.
- Fernando Gonzalez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtered insulating layer for wordline stacks
- Patent number 6,617,262
- Issue date Sep 9, 2003
- Micron Technology, Inc.
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR FORMING SMALL-SCALE CAPACITOR STRUCTURES
- Publication number 20130166057
- Publication date Jun 27, 2013
- Micron Technology, Inc.
- Lingyi A. Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING SMALL-SCALE CAPACITOR STRUCTURES
- Publication number 20110163416
- Publication date Jul 7, 2011
- Micron Technology, Inc.
- Lingyi A. Zheng
- G05 - CONTROLLING REGULATING
Information Patent Application
Methods Of Forming Isolation Structures, And Methods Of Forming Non...
- Publication number 20110136319
- Publication date Jun 9, 2011
- Yunjun Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR CONTROLLING TEMPERATURE DURING MICROFEATURE...
- Publication number 20100282164
- Publication date Nov 11, 2010
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming a structure over a semiconductor substrate
- Publication number 20100267226
- Publication date Oct 21, 2010
- ROUND ROCK RESEARCH, LLC
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor assemblies, methods of forming structures over semico...
- Publication number 20080261388
- Publication date Oct 23, 2008
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINER FOR SHALLOW TRENCH ISOLATION
- Publication number 20070290293
- Publication date Dec 20, 2007
- Micron Technology, Inc.
- Jigish D. Trivedi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING SHALLOW TRENCH ISOLATION
- Publication number 20070004131
- Publication date Jan 4, 2007
- Micron Technology, Inc.
- Jigish D. Trivedi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of forming programmable memory devices
- Publication number 20060252207
- Publication date Nov 9, 2006
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for processing microfeature workpieces, e.g.,...
- Publication number 20060213440
- Publication date Sep 28, 2006
- Micron Technology, Inc.
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and systems for controlling temperature during microfeature...
- Publication number 20060204649
- Publication date Sep 14, 2006
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for processing microfeature workpieces, e.g.,...
- Publication number 20060205187
- Publication date Sep 14, 2006
- Micron Technology, Inc.
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems for depositing material onto workpieces in reaction chamber...
- Publication number 20060196538
- Publication date Sep 7, 2006
- Micron Technology, Inc.
- David J. Kubista
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for batch d...
- Publication number 20060198955
- Publication date Sep 7, 2006
- Micron Technology, Inc.
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma nitridization for adjusting transistor threshold voltage
- Publication number 20060194452
- Publication date Aug 31, 2006
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma nitridization for adjusting transistor threshold voltage
- Publication number 20060194446
- Publication date Aug 31, 2006
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Microfeature workpiece processing apparatus and methods for control...
- Publication number 20060121689
- Publication date Jun 8, 2006
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for control...
- Publication number 20060115957
- Publication date Jun 1, 2006
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liner for shallow trench isolation
- Publication number 20060043521
- Publication date Mar 2, 2006
- Jigish D. Trivedi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor assemblies, methods of forming structures over semico...
- Publication number 20060008998
- Publication date Jan 12, 2006
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for forming small-scale capacitor structures
- Publication number 20050164466
- Publication date Jul 28, 2005
- Lingyi A. Zheng
- G05 - CONTROLLING REGULATING
Information Patent Application
Methods and systems for controlling temperature during microfeature...
- Publication number 20050126489
- Publication date Jun 16, 2005
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems for depositing material onto workpieces in reaction chamber...
- Publication number 20050081786
- Publication date Apr 21, 2005
- David J. Kubista
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for control...
- Publication number 20050059261
- Publication date Mar 17, 2005
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for processing microfeature workpieces, e.g.,...
- Publication number 20050045102
- Publication date Mar 3, 2005
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for batch d...
- Publication number 20050039686
- Publication date Feb 24, 2005
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for processing microfeature workpieces; metho...
- Publication number 20050039680
- Publication date Feb 24, 2005
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma nitridization for adjusting transistor threshold voltage
- Publication number 20040183144
- Publication date Sep 23, 2004
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of forming capacitors and methods of forming capacitor diel...
- Publication number 20040161889
- Publication date Aug 19, 2004
- Denise M. Eppich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor assemblies, methods of forming structures over semico...
- Publication number 20040147069
- Publication date Jul 29, 2004
- Kevin L. Beaman
- H01 - BASIC ELECTRIC ELEMENTS

Kevin L. Beaman

Person

Patents Grantslast 30 patents

Methods and systems for controlling temperature during microfeature...

Methods for forming small-scale capacitor structures

Methods of forming isolation structures, and methods of forming non...

Method of forming a structure over a semiconductor substrate

Liner for shallow trench isolation

Methods for forming small-scale capacitor structures

Method of forming a structure over a semiconductor substrate

Methods and systems for controlling temperature during microfeature...

Methods of forming programmable memory devices

Systems for depositing material onto workpieces in reaction chamber...

Methods for forming shallow trench isolation

Methods and apparatus for processing microfeature workpieces, e.g.,...

Method of forming a structure over a semiconductor substrate

Methods of forming transistors

Methods and apparatus for processing microfeature workpieces; metho...

Microfeature workpiece processing apparatus and methods for control...

Liner for shallow trench isolation

Methods and systems for controlling temperature during microfeature...

Microfeature workpiece processing apparatus and methods for batch d...

Methods of forming capacitors and methods of forming capacitor diel...

Microfeature workpiece processing apparatus and methods for control...

Sputtered insulating layer for wordline stacks

PD-SOI substrate with suppressed floating body effect and method fo...

Methods of forming DRAM cells

Methods of forming capacitors and methods of forming capacitor diel...

DRAM cell constructions

Semiconductor assemblies, methods of forming structures over semico...

Methods of forming structures over semiconductor substrates, and me...

DRAM cell constructions

Sputtered insulating layer for wordline stacks

Patents Applicationslast 30 patents

METHODS FOR FORMING SMALL-SCALE CAPACITOR STRUCTURES

METHODS FOR FORMING SMALL-SCALE CAPACITOR STRUCTURES

Methods Of Forming Isolation Structures, And Methods Of Forming Non...

METHODS AND SYSTEMS FOR CONTROLLING TEMPERATURE DURING MICROFEATURE...

Method of forming a structure over a semiconductor substrate

Semiconductor assemblies, methods of forming structures over semico...

LINER FOR SHALLOW TRENCH ISOLATION

METHODS FOR FORMING SHALLOW TRENCH ISOLATION

Methods of forming programmable memory devices

Methods and apparatus for processing microfeature workpieces, e.g.,...

Methods and systems for controlling temperature during microfeature...

Methods and apparatus for processing microfeature workpieces, e.g.,...

Systems for depositing material onto workpieces in reaction chamber...

Microfeature workpiece processing apparatus and methods for batch d...

Plasma nitridization for adjusting transistor threshold voltage

Plasma nitridization for adjusting transistor threshold voltage

Microfeature workpiece processing apparatus and methods for control...

Microfeature workpiece processing apparatus and methods for control...

Liner for shallow trench isolation

Semiconductor assemblies, methods of forming structures over semico...

Methods for forming small-scale capacitor structures

Methods and systems for controlling temperature during microfeature...

Systems for depositing material onto workpieces in reaction chamber...

Microfeature workpiece processing apparatus and methods for control...

Methods and apparatus for processing microfeature workpieces, e.g.,...

Microfeature workpiece processing apparatus and methods for batch d...

Methods and apparatus for processing microfeature workpieces; metho...

Plasma nitridization for adjusting transistor threshold voltage

Methods of forming capacitors and methods of forming capacitor diel...

Semiconductor assemblies, methods of forming structures over semico...