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Klaus D. Beyer
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Poughkeepsie, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Shallow trench isolation structure for strained Si on SiGe
Patent number
7,183,175
Issue date
Feb 27, 2007
International Business Machines Corporation
Steven John Koester
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Triple oxide fill for trench isolation
Patent number
6,825,097
Issue date
Nov 30, 2004
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of formation of an oxynitride shallow trench isolation
Patent number
6,764,922
Issue date
Jul 20, 2004
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Oxynitride shallow trench isolation and method of formation
Patent number
6,709,951
Issue date
Mar 23, 2004
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shallow trench isolation for thin silicon/silicon-on-insulator subs...
Patent number
6,602,759
Issue date
Aug 5, 2003
International Business Machines Corporation
Atul C. Ajmera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming shallow trench isolation for thin silicon-on-insu...
Patent number
6,599,813
Issue date
Jul 29, 2003
International Business Machines Corporation
Klaus Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Oxynitride shallow trench isolation and method of formation
Patent number
6,498,383
Issue date
Dec 24, 2002
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing crevices induced by chemical-mechanical polishing
Patent number
5,965,459
Issue date
Oct 12, 1999
International Business Machines Corporation
Klaus Dietrich Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
SOI transistor having a self-aligned body contact
Patent number
5,962,895
Issue date
Oct 5, 1999
International Business Machines Corporation
Klaus Dietrich Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
SOI transistor having a self-aligned body contact
Patent number
5,729,039
Issue date
Mar 17, 1998
International Business Machines Corporation
Klaus Dietrich Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Large scale IC personalization method employing air dielectric stru...
Patent number
5,530,290
Issue date
Jun 25, 1996
International Business Machines Corporation
John M. Aitken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Larce scale IC personalization method employing air dielectric stru...
Patent number
5,444,015
Issue date
Aug 22, 1995
International Business Machines Corporation
John M. Aitken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a SOI transistor having a self-aligned body contact
Patent number
5,405,795
Issue date
Apr 11, 1995
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reach-through isolation silicon-on-insulator device
Patent number
5,391,911
Issue date
Feb 21, 1995
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonded wafer structure having a buried insulation layer
Patent number
5,366,923
Issue date
Nov 22, 1994
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal dissipation of integrated circuits using diamond paths
Patent number
5,313,094
Issue date
May 17, 1994
International Business Machines Corportion
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reach-through isolation etching method for silicon-on-insulator dev...
Patent number
5,306,659
Issue date
Apr 26, 1994
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonded wafer structure having a buried insulation layer
Patent number
5,276,338
Issue date
Jan 4, 1994
International Business Machines Corporation
Klaus Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming uniformly thin, isolated silicon mesas on an insu...
Patent number
5,264,387
Issue date
Nov 23, 1993
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing a thin silicon-on-insulator layer
Patent number
5,234,535
Issue date
Aug 10, 1993
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Isolated films using an air dielectric
Patent number
5,232,866
Issue date
Aug 3, 1993
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Buried air dielectric isolation of silicon islands
Patent number
5,227,658
Issue date
Jul 13, 1993
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sub-layer contact technique using in situ doped amorphous silicon a...
Patent number
5,192,708
Issue date
Mar 9, 1993
International Business Machines Corporation
Klaus Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Air-filled isolation trench with chemically vapor deposited silicon...
Patent number
5,098,856
Issue date
Mar 24, 1992
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chem-mech polishing method for producing coplanar metal/insulator f...
Patent number
4,944,836
Issue date
Jul 31, 1990
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of trench filling
Patent number
4,924,284
Issue date
May 8, 1990
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making defect free silicon islands using SEG
Patent number
4,758,531
Issue date
Jul 19, 1988
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of trench filling
Patent number
4,745,081
Issue date
May 17, 1988
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planar void free isolation structure
Patent number
4,680,614
Issue date
Jul 14, 1987
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing protuberances at the surface of a semiconductor...
Patent number
4,671,851
Issue date
Jun 9, 1987
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Shallow trench isolation structure for strained Si on SiGe
Publication number
20050260825
Publication date
Nov 24, 2005
International Business Machines Corporation
Steven John Koester
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Shallow trench isolation structure for strained Si on SiGe
Publication number
20040164373
Publication date
Aug 26, 2004
Steven John Koester
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OXYNITRIDE SHALLOW TRENCH ISOLATION AND METHOD OF FORMATION
Publication number
20040106267
Publication date
Jun 3, 2004
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Triple oxide fill for trench isolation
Publication number
20040029352
Publication date
Feb 12, 2004
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Oxynitride shallow trench isolation and method of formation
Publication number
20030015736
Publication date
Jan 23, 2003
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming shallow trench isolation for thin silicon-on-insu...
Publication number
20030003678
Publication date
Jan 2, 2003
International Business Machines Corporation
Klaus Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OXYNITRIDE SHALLOW TRENCH ISOLATION AND METHOD OF FORMATION
Publication number
20020177270
Publication date
Nov 28, 2002
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Shallow trench isolation for thin silicon/silicon-on-insulator subs...
Publication number
20020072196
Publication date
Jun 13, 2002
Atul C. Ajmera
H01 - BASIC ELECTRIC ELEMENTS