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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma uniformity control in pulsed DC plasma chamber
Patent number
12,148,595
Issue date
Nov 19, 2024
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma chamber and chamber component cleaning methods
Patent number
11,984,306
Issue date
May 14, 2024
Applied Materials, Inc.
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic electrostatic chuck bias compensation during plasma proce...
Patent number
11,948,780
Issue date
Apr 2, 2024
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for manipulating power at an edge ring in pla...
Patent number
11,908,661
Issue date
Feb 20, 2024
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for controlling ion energy distribution
Patent number
11,901,157
Issue date
Feb 13, 2024
Applied Materials, Inc.
Linying Cui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Temperature and bias control of edge ring
Patent number
11,810,768
Issue date
Nov 7, 2023
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for controlling ion energy distribution
Patent number
11,798,790
Issue date
Oct 24, 2023
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic electrostatic chuck bias compensation during plasma proce...
Patent number
11,791,138
Issue date
Oct 17, 2023
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing assembly using pulsed-voltage and radio-frequency...
Patent number
11,776,789
Issue date
Oct 3, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic ESC bias compensation when using pulsed DC bias
Patent number
11,476,145
Issue date
Oct 18, 2022
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing assembly using pulsed-voltage and radio-frequency...
Patent number
11,462,388
Issue date
Oct 4, 2022
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed-voltage hardware assembly for use in a plasma processing system
Patent number
11,462,389
Issue date
Oct 4, 2022
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for manipulating radio frequency power at an...
Patent number
11,367,593
Issue date
Jun 21, 2022
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Circuits for edge ring control in shaped DC pulsed plasma process d...
Patent number
11,289,310
Issue date
Mar 29, 2022
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for manipulating power at an edge ring in a p...
Patent number
11,276,601
Issue date
Mar 15, 2022
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature and bias control of edge ring
Patent number
11,232,933
Issue date
Jan 25, 2022
APPLIED MATERIALS, INC.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature and bias control of edge ring
Patent number
10,784,089
Issue date
Sep 22, 2020
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for manipulating radio frequency power at an...
Patent number
10,763,081
Issue date
Sep 1, 2020
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING
Publication number
20240355586
Publication date
Oct 24, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING
Publication number
20240355587
Publication date
Oct 24, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBER IMPEDANCE MANAGEMENT IN A PROCESSING CHAMBER
Publication number
20240194446
Publication date
Jun 13, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-SHAPE VOLTAGE PULSE TRAINS FOR UNIFORMITY AND ETCH PROFILE TU...
Publication number
20240153741
Publication date
May 9, 2024
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20240030002
Publication date
Jan 25, 2024
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR CONTROLLING ION ENERGY DISTRIBUTION
Publication number
20230420229
Publication date
Dec 28, 2023
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE AND BIAS CONTROL OF EDGE RING
Publication number
20230360892
Publication date
Nov 9, 2023
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20230030927
Publication date
Feb 2, 2023
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA UNIFORMITY CONTROL IN PULSED DC PLASMA CHAMBER
Publication number
20220399193
Publication date
Dec 15, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA UNIFORMITY CONTROL IN PULSED DC PLASMA CHAMBER
Publication number
20220399184
Publication date
Dec 15, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CHAMBER AND CHAMBER COMPONENT CLEANING METHODS
Publication number
20220399194
Publication date
Dec 15, 2022
Applied Materials, Inc.
Rajinder DHINDSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CHAMBER AND CHAMBER COMPONENT CLEANING METHODS
Publication number
20220399185
Publication date
Dec 15, 2022
Applied Materials, Inc.
Rajinder DHINDSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO REDUCE FEATURE CHARGING IN PLASMA PROCESSIN...
Publication number
20220399183
Publication date
Dec 15, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO REDUCE FEATURE CHARGING IN PLASMA PROCESSIN...
Publication number
20220399186
Publication date
Dec 15, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC ELECTROSTATIC CHUCK BIAS COMPENSATION DURING PLASMA PROCE...
Publication number
20220367157
Publication date
Nov 17, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC ELECTROSTATIC CHUCK BIAS COMPENSATION DURING PLASMA PROCE...
Publication number
20220367158
Publication date
Nov 17, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR MANIPULATING POWER AT AN EDGE RING IN PLA...
Publication number
20220319811
Publication date
Oct 6, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS D...
Publication number
20220223386
Publication date
Jul 14, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR CONTROLLING ION ENERGY DISTRIBUTION
Publication number
20220157577
Publication date
May 19, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR CONTROLLING ION ENERGY DISTRIBUTION
Publication number
20220157561
Publication date
May 19, 2022
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED-VOLTAGE HARDWARE ASSEMBLY FOR USE IN A PLASMA PROCESSING SYSTEM
Publication number
20220037120
Publication date
Feb 3, 2022
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20220037119
Publication date
Feb 3, 2022
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR MANIPULATING POWER AT AN EDGE RING IN A P...
Publication number
20210320022
Publication date
Oct 14, 2021
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE AND BIAS CONTROL OF EDGE RING
Publication number
20210313156
Publication date
Oct 7, 2021
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE AND BIAS CONTROL OF EDGE RING
Publication number
20200402776
Publication date
Dec 24, 2020
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR MANIPULATING RADIO FREQUENCY POWER AT AN...
Publication number
20200381216
Publication date
Dec 3, 2020
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE AND BIAS CONTROL OF EDGE RING
Publication number
20200251313
Publication date
Aug 6, 2020
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC ESC BIAS COMPENSATION WHEN USING PULSED DC BIAS
Publication number
20200161155
Publication date
May 21, 2020
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CIRCUITS FOR EDGE RING CONTROL IN SHAPED DC PULSED PLASMA PROCESS D...
Publication number
20200161098
Publication date
May 21, 2020
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR MANIPULATING RADIO FREQUENCY POWER AT AN...
Publication number
20190013184
Publication date
Jan 10, 2019
Applied Materials, Inc.
Linying CUI
H01 - BASIC ELECTRIC ELEMENTS