Manjunatha KOPPA

Person

Bangalore, IN

People

Patents Grantslast 30 patents

Information Patent Grant
Gas distribution ceramic heater for deposition chamber
- Patent number 12,016,092
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detachable biasable electrostatic chuck for high temperature applic...
- Patent number 11,887,878
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Shreesha Yogish Rao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shadow ring lift pin
- Patent number D1009817
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Zubin Huang
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Shadow ring lift assembly
- Patent number D997894
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Zubin Huang
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Shadow ring lift plate
- Patent number D997893
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Zubin Huang
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
High temperature dual chamber showerhead
- Patent number 11,555,244
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-clean chamber with integrated shutter garage
- Patent number 11,251,028
- Issue date Feb 15, 2022
- Applied Materials, Inc.
- Cheng-Hsiung Matt Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process shield for a substrate processing chamber
- Patent number D942516
- Issue date Feb 1, 2022
- Applied Materials, Inc.
- Manjunatha P. Koppa
- D15 - Machines not elsewhere specified
Information Patent Grant
Deposition ring for a substrate processing chamber
- Patent number D933725
- Issue date Oct 19, 2021
- Applied Materials, Inc.
- Manjunatha P. Koppa
- D15 - Machines not elsewhere specified
Information Patent Grant
Lift pin assembly
- Patent number 10,892,180
- Issue date Jan 12, 2021
- Applied Materials, Inc.
- Bonnie T. Chia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Base plate for a processing chamber substrate support
- Patent number D893441
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Shreesha Yogish Rao
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Process shield for a substrate processing chamber
- Patent number D891382
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Manjunatha P. Koppa
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Apparatus to improve substrate temperature uniformity
- Patent number 10,711,348
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Cheng-Hsiung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quick disconnect resistance temperature detector assembly for rotat...
- Patent number 10,704,142
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batch processing apparatus
- Patent number 10,373,860
- Issue date Aug 6, 2019
- Applied Materials, Inc.
- Mukund Sundararajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck design for high temperature RF applications
- Patent number 9,984,911
- Issue date May 29, 2018
- Applied Materials, Inc.
- Ryan Hanson
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate support with multiple heating zones
- Patent number 9,888,528
- Issue date Feb 6, 2018
- Applied Materials, Inc.
- Tomoharu Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pad design for electrostatic chuck surface
- Patent number 9,613,846
- Issue date Apr 4, 2017
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HARDWARE TO UNIFORMLY DISTRIBUTE ACTIVE SPECIES FOR SEMICONDUCTOR F...
- Publication number 20230374660
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Harpreet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION CERAMIC HEATER FOR DEPOSITION CHAMBER
- Publication number 20210176831
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Pingyan LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE DUAL CHAMBER SHOWERHEAD
- Publication number 20210130956
- Publication date May 6, 2021
- Applied Materials, Inc.
- Pingyan LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR DUAL CHANNEL SHOWERHEADS
- Publication number 20210032753
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Jallepally RAVI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETACHABLE BIASABLE ELECTROSTATIC CHUCK FOR HIGH TEMPERATURE APPLIC...
- Publication number 20200411354
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Shreesha Yogish RAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-CLEAN CHAMBER WITH INTEGRATED SHUTTER GARAGE
- Publication number 20190348264
- Publication date Nov 14, 2019
- Applied Materials, Inc.
- Cheng-Hsiung Matt Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUICK DISCONNECT RESISTANCE TEMPERATURE DETECTOR ASSEMBLY FOR ROTAT...
- Publication number 20190032210
- Publication date Jan 31, 2019
- Applied Materials, Inc.
- Muhannad MUSTAFA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual PVD Chamber And Hybrid PVD-CVD Chambers
- Publication number 20180197760
- Publication date Jul 12, 2018
- Applied Materials, Inc.
- Deepak Jadhav
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH PROCESSING APPARATUS
- Publication number 20170004982
- Publication date Jan 5, 2017
- Applied Materials, Inc.
- Mukund SUNDARARAJAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY
- Publication number 20160258061
- Publication date Sep 8, 2016
- Applied Materials, Inc.
- CHENG-HSIUNG TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH MULTIPLE HEATING ZONES
- Publication number 20160192444
- Publication date Jun 30, 2016
- Applied Materials, Inc.
- TOMOHARU MATSUSHITA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC CHUCK DESIGN FOR HIGH TEMPERATURE RF APPLICATIONS
- Publication number 20160172227
- Publication date Jun 16, 2016
- Applied Materials, Inc.
- Ryan HANSON
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE SUPPORT WITH MORE UNIFORM EDGE PURGE
- Publication number 20160002778
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- JALLEPALLY RAVI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIFT PIN ASSEMBLY
- Publication number 20150348823
- Publication date Dec 3, 2015
- Applied Materials, Inc.
- BONNIE T. CHIA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE
- Publication number 20150146339
- Publication date May 28, 2015
- Applied Materials, Inc.
- Govinda RAJ
- H01 - BASIC ELECTRIC ELEMENTS

Manjunatha KOPPA

Person

Patents Grantslast 30 patents

Gas distribution ceramic heater for deposition chamber

Detachable biasable electrostatic chuck for high temperature applic...

Shadow ring lift pin

Shadow ring lift assembly

Shadow ring lift plate

High temperature dual chamber showerhead

Pre-clean chamber with integrated shutter garage

Process shield for a substrate processing chamber

Deposition ring for a substrate processing chamber

Lift pin assembly

Base plate for a processing chamber substrate support

Process shield for a substrate processing chamber

Apparatus to improve substrate temperature uniformity

Quick disconnect resistance temperature detector assembly for rotat...

Batch processing apparatus

Electrostatic chuck design for high temperature RF applications

Substrate support with multiple heating zones

Pad design for electrostatic chuck surface

Patents Applicationslast 30 patents

HARDWARE TO UNIFORMLY DISTRIBUTE ACTIVE SPECIES FOR SEMICONDUCTOR F...

GAS DISTRIBUTION CERAMIC HEATER FOR DEPOSITION CHAMBER

HIGH TEMPERATURE DUAL CHAMBER SHOWERHEAD

METHODS AND APPARATUS FOR DUAL CHANNEL SHOWERHEADS

DETACHABLE BIASABLE ELECTROSTATIC CHUCK FOR HIGH TEMPERATURE APPLIC...

PRE-CLEAN CHAMBER WITH INTEGRATED SHUTTER GARAGE

QUICK DISCONNECT RESISTANCE TEMPERATURE DETECTOR ASSEMBLY FOR ROTAT...

Dual PVD Chamber And Hybrid PVD-CVD Chambers

BATCH PROCESSING APPARATUS

APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY

SUBSTRATE SUPPORT WITH MULTIPLE HEATING ZONES

ELECTROSTATIC CHUCK DESIGN FOR HIGH TEMPERATURE RF APPLICATIONS

SUBSTRATE SUPPORT WITH MORE UNIFORM EDGE PURGE

LIFT PIN ASSEMBLY

PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE