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Issue date May 18, 2004
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Matsushita Electric Industrial Co., Ltd.
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Shinji Kishimura
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Pattern formation material and method
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Patent number 6,576,398
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Issue date Jun 10, 2003
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Matsushita Electric Industrial Co., Ltd.
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Shinji Kishimura
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Patterning material and patterning method
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Patent number 5,928,840
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Issue date Jul 27, 1999
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Matsushita Electric Industrial Co., Ltd.
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Takahiro Matsuo
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Method for forming a resist pattern
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Patent number 5,278,029
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Issue date Jan 11, 1994
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Nippon Paint Co., Ltd.
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Masamitsu Shirai
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