Claims
- 1. A pattern forming material comprisinga polymer including a group which generates an acid when the polymer is heated and a compound which generates a base when the compound is irradiated with an energy beam.
- 2. The pattern forming material of claim 1,wherein said polymer is a binary polymer or a polymer of a higher degree obtained by polymerizing another group with a compound represented by the following general formula: where R1 indicates a hydrogen atom or an alkyl group, and R2 and R3 independently indicate a hydrogen atom, an alkyl group, a phenyl group or an alkenyl group, or together indicate a cyclic alkyl group, a cyclic alkenyl group, a cyclic alkyl group having a phenyl group or a cyclic alkenyl group having a phenyl group.
- 3. The pattern forming material of claim 1,wherein said polymer is a binary polymer or a polymer of a higher degree obtained by polymerizing another group with a compound represented by the following general formula: where R1 indicates a hydrogen atom or an alkyl group, and R4 indicates an alkyl group, an alkenyl group, a cyclic alkyl group or a cyclic alkenyl group.
- 4. The pattern forming material of claim 1,wherein the compound is acyloxime, a benzyloxycarbonyl compound or formamide.
- 5. A pattern forming material comprising:a polymer including a group which generates an acid when the polymer is irradiated with a first energy beam having a first energy band and a compound which generates a base when the compound is irradiated with a second energy band which is different from the first energy band wherein said polymer is a binary polymer or a polymer of a higher degree obtained by polymerizing another group with a compound represented by the following general formula: where R1 indicates a hydrogen atom or an alkyl group, and R2 and R3 independently indicate a hydrogen atom, an alkyl group, a phenyl group or an alkenyl group, or together indicate a cyclic alkyl group, a cyclic alkenyl group, a cyclic alkyl group having a phenyl group or a cyclic alkenyl group having a phenyl group.
Priority Claims (3)
Number |
Date |
Country |
Kind |
9-036551 |
Feb 1997 |
JP |
|
9-221724 |
Aug 1997 |
JP |
|
10-002300 |
Jan 1998 |
JP |
|
Parent Case Info
This application is a divisional of application Ser. No. 09/026,483 filed Feb. 19, 1998 now U.S. Pat. No. 6,017,683.
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