Michael Sherwood

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing retaining ring
- Patent number RE44491
- Issue date Sep 10, 2013
- Applied Materials, Inc.
- Norman Shendon
- 451 - Abrading
Information Patent Grant
Fluid-pressure regulated wafer polishing head
- Patent number 7,101,261
- Issue date Sep 5, 2006
- Applied Materials, Inc.
- Norman Shendon
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing retaining ring
- Patent number 6,716,094
- Issue date Apr 6, 2004
- Applied Materials Inc.
- Norman Shendon
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing carrier head
- Patent number 6,652,368
- Issue date Nov 25, 2003
- Applied Materials, Inc.
- Norman Shendon
- B24 - GRINDING POLISHING
Information Patent Grant
Fluid-pressure regulated wafer polishing head
- Patent number 6,443,824
- Issue date Sep 3, 2002
- Applied Materials, Inc.
- Norman Shendon
- B24 - GRINDING POLISHING
Information Patent Grant
Fluid pressure regulated wafer polishing head
- Patent number 6,290,577
- Issue date Sep 18, 2001
- Applied Materials, Inc.
- Norman Shendon
- B24 - GRINDING POLISHING
Information Patent Grant
Fluid-pressure regulated wafer polishing head
- Patent number 6,024,630
- Issue date Feb 15, 2000
- Applied Materials, Inc.
- Norman Shendon
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad in a chemical...
- Patent number 6,019,670
- Issue date Feb 1, 2000
- Applied Materials, Inc.
- Tsungnan Cheng
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for using a retaining ring to control the edge...
- Patent number 5,795,215
- Issue date Aug 18, 1998
- Applied Materials, Inc.
- William L. Guthrie
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head design for a chemical mechanical polishing apparatus
- Patent number 5,681,215
- Issue date Oct 28, 1997
- Applied Materials, Inc.
- Michael T. Sherwood
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Fluid-pressure regulated wafer polishing head
- Publication number 20040087254
- Publication date May 6, 2004
- Norman Shendon
- B24 - GRINDING POLISHING
Information Patent Application
Chemical mechanical polishing carrier head
- Publication number 20020182995
- Publication date Dec 5, 2002
- Applied Materialsm, Inc., a Delaware corporation
- Norman Shendon
- B24 - GRINDING POLISHING
Information Patent Application
Chemical mechanical polishing retaining ring
- Publication number 20020173255
- Publication date Nov 21, 2002
- Norman Shendon
- B24 - GRINDING POLISHING
Information Patent Application
Fluid-pressure regulated wafer polishing head
- Publication number 20010041522
- Publication date Nov 15, 2001
- Applied Materials, Inc. Delaware Corporation
- Norman Shendon
- B24 - GRINDING POLISHING

Michael Sherwood

Person

Patents Grantslast 30 patents

Chemical mechanical polishing retaining ring

Fluid-pressure regulated wafer polishing head

Chemical mechanical polishing retaining ring

Chemical mechanical polishing carrier head

Fluid-pressure regulated wafer polishing head

Fluid pressure regulated wafer polishing head

Fluid-pressure regulated wafer polishing head

Method and apparatus for conditioning a polishing pad in a chemical...

Method and apparatus for using a retaining ring to control the edge...

Carrier head design for a chemical mechanical polishing apparatus

Patents Applicationslast 30 patents

Fluid-pressure regulated wafer polishing head

Chemical mechanical polishing carrier head

Chemical mechanical polishing retaining ring

Fluid-pressure regulated wafer polishing head