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Paul Schilling
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Sammamish, WA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of treating a composite spin-on glass/anti-reflective materi...
Patent number
7,399,708
Issue date
Jul 15, 2008
Tokyo Electron Limited
Paul Schilling
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of passivating of low dielectric materials in wafer processing
Patent number
7,270,941
Issue date
Sep 18, 2007
Tokyo Electron Limited
Dorel Ioan Toma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing metal film and metal deposition cluster tool i...
Patent number
7,208,411
Issue date
Apr 24, 2007
Tokyo Electron Limited
Maximilian A. Biberger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of treatment of porous dielectric films to reduce damage dur...
Patent number
7,169,540
Issue date
Jan 30, 2007
Tokyo Electron Limited
Paul Schilling
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Developing photoresist with supercritical fluid and developer
Patent number
7,044,662
Issue date
May 16, 2006
Tokyo Electron Limited
Chantal J. Arena-Foster
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Drying resist with a solvent bath and supercritical CO2
Patent number
6,928,746
Issue date
Aug 16, 2005
Tokyo Electron Limited
Chantal J. Arena-Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Developing photoresist with supercritical fluid and developer
Patent number
6,924,086
Issue date
Aug 2, 2005
Tokyo Electron Limited
Chantal J. Arena-Foster
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of depositing metal film and metal deposition cluster tool i...
Patent number
6,890,853
Issue date
May 10, 2005
Tokyo Electron Limited
Maximilian A. Biberger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Oxidizing polishing slurries for low dielectric constant materials
Patent number
6,610,114
Issue date
Aug 26, 2003
Honeywell International Inc.
Dan Towery
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Removal of photoresist and residue from substrate using supercritic...
Patent number
6,500,605
Issue date
Dec 31, 2002
Tokyo Electron Limited
William H. Mullee
B08 - CLEANING
Information
Patent Grant
Oxidizing polishing slurries for low dielectric constant materials
Patent number
6,270,395
Issue date
Aug 7, 2001
AlliedSignal, Inc.
Daniel L. Towery
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Poly(arylene ether) compositions and methods of manufacture thereof
Patent number
6,124,421
Issue date
Sep 26, 2000
AlliedSignal Inc.
Kreisler S. Y. Lau
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
Method of treating a composite spin-on glass/anti-reflective materi...
Publication number
20060223314
Publication date
Oct 5, 2006
Paul Schilling
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ionic fluid in supercritical fluid for semiconductor processing
Publication number
20050227187
Publication date
Oct 13, 2005
Supercritical Systems Inc.
Paul E. Schilling
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Developing photoresist with supercritical fluid and developer
Publication number
20050008980
Publication date
Jan 13, 2005
Chantal J. Arena-Foster
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Decontamination of supercritical wafer processing equipment
Publication number
20040231707
Publication date
Nov 25, 2004
Paul Schilling
B08 - CLEANING
Information
Patent Application
Method of depositing metal film and metal deposition cluster tool i...
Publication number
20040229449
Publication date
Nov 18, 2004
Maximilian A. Biberger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Oxidizing polishing slurries for low dielectric constant materials
Publication number
20040192172
Publication date
Sep 30, 2004
Dan Towery
B24 - GRINDING POLISHING
Information
Patent Application
Tetra-organic ammonium fluoride and HF in supercritical fluid for p...
Publication number
20040177867
Publication date
Sep 16, 2004
Supercritical Systems, Inc.
Paul E. Schilling
B08 - CLEANING
Information
Patent Application
Fluoride in supercritical fluid for photoresist and residue removal
Publication number
20040112409
Publication date
Jun 17, 2004
Supercritical Sysems, Inc.
Paul E. Schilling
B08 - CLEANING
Information
Patent Application
Removal of contaminants using supercritical processing
Publication number
20040072706
Publication date
Apr 15, 2004
Chantal J. Arena-Foster
B08 - CLEANING
Information
Patent Application
Drying resist with a solvent bath and supercritical CO2
Publication number
20040035021
Publication date
Feb 26, 2004
Chantal J. Arena-Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of treatment of porous dielectric films to reduce damage dur...
Publication number
20040018452
Publication date
Jan 29, 2004
Paul Schilling
B08 - CLEANING
Information
Patent Application
Method of passivating of low dielectric materials in wafer processing
Publication number
20030198895
Publication date
Oct 23, 2003
Dorel Ioan Toma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Oxidizing polishing slurries for low dielectric constant materials
Publication number
20020009955
Publication date
Jan 24, 2002
Daniel L. Towery
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Method of depositing metal film and metal deposition cluster tool i...
Publication number
20020001929
Publication date
Jan 3, 2002
Maximilian A. Biberger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...