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Polishing media stabilizer
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Patent number 7,381,116
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Issue date Jun 3, 2008
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Applied Materials, Inc.
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Phillip R. Sommer
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B24 - GRINDING POLISHING
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Polishing media stabilizer
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Patent number 7,040,964
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Issue date May 9, 2006
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Applied Materials, Inc.
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Phillip R. Sommer
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B24 - GRINDING POLISHING
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Multimode substrate carrier
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Patent number 6,645,050
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Issue date Nov 11, 2003
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Applied Materials, Inc.
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Paul D. Butterfield
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B24 - GRINDING POLISHING
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Polishing media stabilizer
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Patent number 6,491,570
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Issue date Dec 10, 2002
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Applied Materials, Inc.
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Phillip R. Sommer
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B24 - GRINDING POLISHING
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Padless substrate carrier
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Patent number 6,276,998
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Issue date Aug 21, 2001
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Applied Materials, Inc.
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Phillip R. Sommer
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B24 - GRINDING POLISHING