SARATH BABU

Person

SINGAPORE, SG

People

Patents Grantslast 30 patents

Information Patent Grant
Shutter disk
- Patent number 12,148,629
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High conductance inner shield for process chamber
- Patent number 12,100,577
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preclean chamber upper shield with showerhead
- Patent number 12,080,522
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for reducing defects in preclean chambers
- Patent number 11,881,385
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Yueh Sheng Ow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shutter disk
- Patent number 11,862,480
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Upper shield with showerhead for a process chamber
- Patent number D973609
- Issue date Dec 27, 2022
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Lower shield for a substrate processing chamber
- Patent number D971167
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Common electrostatic chuck for differing substrates
- Patent number 11,476,097
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Vinodh Ramachandran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for high voltage electrostatic chuck protection
- Patent number 11,289,357
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Yuichi Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-clean chamber with integrated shutter garage
- Patent number 11,251,028
- Issue date Feb 15, 2022
- Applied Materials, Inc.
- Cheng-Hsiung Matt Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shutter disk
- Patent number 11,171,017
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower shield for a substrate processing chamber
- Patent number D931241
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Two piece shutter disk assembly with self-centering feature
- Patent number 11,043,406
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Cheng-Hsiung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inner shield for a substrate processing chamber
- Patent number D913979
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Methods and apparatus for shutter disk assembly detection
- Patent number 10,851,453
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Cheng-Hsiung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Finger Electrostatic Chuck for High Resistance Substrate Chucking
- Publication number 20250015733
- Publication date Jan 9, 2025
- Applied Materials, Inc.
- Mukund SUNDARARAJAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Shutter Disk
- Publication number 20240087913
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shutter Disk
- Publication number 20220028702
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECLEAN CHAMBER UPPER SHIELD WITH SHOWERHEAD
- Publication number 20210335581
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Sarath BABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR REDUCING DEFECTS IN PRECLEAN CHAMBERS
- Publication number 20210335582
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Yueh Sheng OW
- B08 - CLEANING
Information Patent Application
Shutter Disk
- Publication number 20210074552
- Publication date Mar 11, 2021
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Common Electrostatic Chuck For Differing Substrates
- Publication number 20210074523
- Publication date Mar 11, 2021
- Applied Materials, Inc.
- Vinodh Ramachandran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH CONDUCTANCE INNER SHIELD FOR PROCESS CHAMBER
- Publication number 20210066050
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH CONDUCTANCE LOWER SHIELD FOR PROCESS CHAMBER
- Publication number 20210066051
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR HIGH VOLTAGE ELECTROSTATIC CHUCK PROTECTION
- Publication number 20200411353
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- YUICHI WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-CLEAN CHAMBER WITH INTEGRATED SHUTTER GARAGE
- Publication number 20190348264
- Publication date Nov 14, 2019
- Applied Materials, Inc.
- Cheng-Hsiung Matt Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TWO PIECE SHUTTER DISK ASSEMBLY WITH SELF-CENTERING FEATURE
- Publication number 20190326154
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- CHENG-HSIUNG TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SHUTTER DISK ASSEMBLY DETECTION
- Publication number 20190316251
- Publication date Oct 17, 2019
- CHENG-HSIUNG TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

SARATH BABU

Person

Patents Grantslast 30 patents

Shutter disk

High conductance inner shield for process chamber

Preclean chamber upper shield with showerhead

Methods and apparatus for reducing defects in preclean chambers

Shutter disk

Upper shield with showerhead for a process chamber

Lower shield for a substrate processing chamber

Common electrostatic chuck for differing substrates

Methods and apparatus for high voltage electrostatic chuck protection

Pre-clean chamber with integrated shutter garage

Shutter disk

Lower shield for a substrate processing chamber

Two piece shutter disk assembly with self-centering feature

Inner shield for a substrate processing chamber

Methods and apparatus for shutter disk assembly detection

Patents Applicationslast 30 patents

Finger Electrostatic Chuck for High Resistance Substrate Chucking

Shutter Disk

Shutter Disk

PRECLEAN CHAMBER UPPER SHIELD WITH SHOWERHEAD

METHODS AND APPARATUS FOR REDUCING DEFECTS IN PRECLEAN CHAMBERS

Shutter Disk

Common Electrostatic Chuck For Differing Substrates

HIGH CONDUCTANCE INNER SHIELD FOR PROCESS CHAMBER

HIGH CONDUCTANCE LOWER SHIELD FOR PROCESS CHAMBER

METHODS AND APPARATUS FOR HIGH VOLTAGE ELECTROSTATIC CHUCK PROTECTION

PRE-CLEAN CHAMBER WITH INTEGRATED SHUTTER GARAGE

TWO PIECE SHUTTER DISK ASSEMBLY WITH SELF-CENTERING FEATURE

METHODS AND APPARATUS FOR SHUTTER DISK ASSEMBLY DETECTION