Shreyas S. Kher

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatuses for atomic layer deposition
- Patent number 8,343,279
- Issue date Jan 1, 2013
- Applied Materials, Inc.
- Nyi Oo Myo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stabilization of high-k dielectric materials
- Patent number 8,323,754
- Issue date Dec 4, 2012
- Applied Materials, Inc.
- Christopher Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for atomic layer deposition of hafnium-containing high-K di...
- Patent number 8,282,992
- Issue date Oct 9, 2012
- Applied Materials, Inc.
- Nyi Oo Myo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming an aluminum oxide layer
- Patent number 8,163,343
- Issue date Apr 24, 2012
- Applied Materials, Inc.
- Shreyas S. Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface pre-treatment for enhancement of nucleation of high dielect...
- Patent number 8,071,167
- Issue date Dec 6, 2011
- Applied Materials, Inc.
- Shreyas S. Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition processes for non-volatile memory devices
- Patent number 8,043,907
- Issue date Oct 25, 2011
- Applied Materials, Inc.
- Yi Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated scheme for forming inter-poly dielectrics for non-volati...
- Patent number 7,910,446
- Issue date Mar 22, 2011
- Applied Materials, Inc.
- Yi Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for manufacturing high dielectric constant film
- Patent number 7,871,942
- Issue date Jan 18, 2011
- Applied Materials, Inc.
- Shreyas S. Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware set for growth of high k and capping material films
- Patent number 7,816,200
- Issue date Oct 19, 2010
- Applied Materials, Inc.
- Shreyas Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of gas flow and delivery to suppress the formation of parti...
- Patent number 7,794,544
- Issue date Sep 14, 2010
- Applied Materials, Inc.
- Son T. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ampoule for liquid draw and vapor draw with a continuous level sensor
- Patent number 7,775,508
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Kenric T. Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition processes for non-volatile memory devices
- Patent number 7,659,158
- Issue date Feb 9, 2010
- Applied Materials, Inc.
- Yi Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating an integrated gate dielectric layer for fiel...
- Patent number 7,601,648
- Issue date Oct 13, 2009
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ALD metal oxide deposition process using direct oxidation
- Patent number 7,569,500
- Issue date Aug 4, 2009
- Applied Materials, Inc.
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD metal oxide deposition process using direct oxidation
- Patent number 7,569,501
- Issue date Aug 4, 2009
- Applied Materials, Inc.
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for hafnium nitride deposition
- Patent number 7,547,952
- Issue date Jun 16, 2009
- Applied Materials, Inc.
- Craig Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for forming a gate dielectric
- Patent number 7,531,468
- Issue date May 12, 2009
- Applied Materials, Inc.
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for forming a gate dielectric
- Patent number 7,304,004
- Issue date Dec 4, 2007
- Applied Materials, Inc.
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD metal oxide deposition process using direct oxidation
- Patent number 7,067,439
- Issue date Jun 27, 2006
- Applied Materials, Inc.
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for forming a gate dielectric
- Patent number 6,858,547
- Issue date Feb 22, 2005
- Applied Materials, Inc.
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SURFACE PRE-TREATMENT FOR ENHANCEMENT OF NUCLEATION OF HIGH DIELECT...
- Publication number 20100239758
- Publication date Sep 23, 2010
- Shreyas S. Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition Processes for Non-Volatile Memory Devices
- Publication number 20100102376
- Publication date Apr 29, 2010
- Applied Materials, Inc.
- Yi Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING AN ALUMINUM OXIDE LAYER
- Publication number 20100055905
- Publication date Mar 4, 2010
- Applied Materials, Inc.
- SHREYAS S. KHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE SET FOR GROWTH OF HIGH K & CAPPING MATERIAL FILMS
- Publication number 20090263961
- Publication date Oct 22, 2009
- SHREYAS KHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR MANUFACTURING HIGH DIELECTRIC CONSTANT FILM
- Publication number 20090246972
- Publication date Oct 1, 2009
- SHREYAS S. KHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PROCESSES FOR NON-VOLATILE MEMORY DEVICES
- Publication number 20090242957
- Publication date Oct 1, 2009
- Yi Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SCHEME FOR FORMING INTER-POLY DIELECTRICS FOR NON-VOLATI...
- Publication number 20090020802
- Publication date Jan 22, 2009
- YI MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING A HIGH-K DIELECTRIC MATERIAL USING CHEMICAL...
- Publication number 20080268154
- Publication date Oct 30, 2008
- SHREYAS KHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMPOULE FOR LIQUID DRAW AND VAPOR DRAW WITH A CONTINOUS LEVEL SENSOR
- Publication number 20080099933
- Publication date May 1, 2008
- Kenric T. Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS AND HARDWARE FOR CVD AND ALD
- Publication number 20080063798
- Publication date Mar 13, 2008
- Shreyas S. Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR FORMING A GATE DIELECTRIC
- Publication number 20080057737
- Publication date Mar 6, 2008
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF GAS FLOW AND DELIVERY TO SUPPRESS THE FORMATION OF PARTI...
- Publication number 20080041307
- Publication date Feb 21, 2008
- Son T. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR ATOMIC LAYER DEPOSITION OF HAFNIUM-CONTAINING HIGH-K DI...
- Publication number 20080044569
- Publication date Feb 21, 2008
- Nyi Oo Myo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for fabricating an integrated gate dielectric layer for fiel...
- Publication number 20080026553
- Publication date Jan 31, 2008
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALD METAL OXIDE DEPOSITION PROCESS USING DIRECT OXIDATION
- Publication number 20070059948
- Publication date Mar 15, 2007
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nitrogen profile engineering in HI-K nitridation for device perform...
- Publication number 20070049043
- Publication date Mar 1, 2007
- APPLIED MATERIALS, INC.
- Shankar Muthukrishnan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PRE-TREATMENT FOR ENHANCEMENT OF NUCLEATION OF HIGH DIELECT...
- Publication number 20060264067
- Publication date Nov 23, 2006
- Shreyas S. Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD METAL OXIDE DEPOSITION PROCESS USING DIRECT OXIDATION
- Publication number 20060223339
- Publication date Oct 5, 2006
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR HAFNIUM NITRIDE DEPOSITION
- Publication number 20060208215
- Publication date Sep 21, 2006
- Craig Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for fabricating a dielectric stack
- Publication number 20060153995
- Publication date Jul 13, 2006
- APPLIED MATERIALS, INC.
- Pravin K. Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor deposition of hafnium silicate materials with tris(dimethylam...
- Publication number 20060062917
- Publication date Mar 23, 2006
- Shankar Muthukrishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma treatment of hafnium-containing materials
- Publication number 20060019033
- Publication date Jan 26, 2006
- APPLIED MATERIALS, INC.
- Shankar Muthukrishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatuses and methods for atomic layer deposition of hafnium-cont...
- Publication number 20050271812
- Publication date Dec 8, 2005
- Nyi Oo Myo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatuses and methods for atomic layer deposition of hafnium-cont...
- Publication number 20050271813
- Publication date Dec 8, 2005
- Shreyas Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Stabilization of high-k dielectric materials
- Publication number 20050260357
- Publication date Nov 24, 2005
- APPLIED MATERIALS, INC.
- Christopher Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Control of gas flow and delivery to suppress the formation of parti...
- Publication number 20050252449
- Publication date Nov 17, 2005
- Son T. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method for forming a gate dielectric
- Publication number 20050009371
- Publication date Jan 13, 2005
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for hafnium nitride deposition
- Publication number 20040198069
- Publication date Oct 7, 2004
- APPLIED MATERIALS, INC.
- Craig Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Surface pre-treatment for enhancement of nucleation of high dielect...
- Publication number 20030232501
- Publication date Dec 18, 2003
- Shreyas S. Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALD metal oxide deposition process using direct oxidation
- Publication number 20030232511
- Publication date Dec 18, 2003
- APPLIED MATERIALS, INC.
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shreyas S. Kher

Person

Patents Grantslast 30 patents

Apparatuses for atomic layer deposition

Stabilization of high-k dielectric materials

Methods for atomic layer deposition of hafnium-containing high-K di...

Method of forming an aluminum oxide layer

Surface pre-treatment for enhancement of nucleation of high dielect...

Atomic layer deposition processes for non-volatile memory devices

Integrated scheme for forming inter-poly dielectrics for non-volati...

Methods for manufacturing high dielectric constant film

Hardware set for growth of high k and capping material films

Control of gas flow and delivery to suppress the formation of parti...

Ampoule for liquid draw and vapor draw with a continuous level sensor

Atomic layer deposition processes for non-volatile memory devices

Method for fabricating an integrated gate dielectric layer for fiel...

ALD metal oxide deposition process using direct oxidation

ALD metal oxide deposition process using direct oxidation

Method for hafnium nitride deposition

System and method for forming a gate dielectric

System and method for forming a gate dielectric

ALD metal oxide deposition process using direct oxidation

System and method for forming a gate dielectric

Patents Applicationslast 30 patents

SURFACE PRE-TREATMENT FOR ENHANCEMENT OF NUCLEATION OF HIGH DIELECT...

Atomic Layer Deposition Processes for Non-Volatile Memory Devices

METHOD OF FORMING AN ALUMINUM OXIDE LAYER

HARDWARE SET FOR GROWTH OF HIGH K & CAPPING MATERIAL FILMS

METHODS FOR MANUFACTURING HIGH DIELECTRIC CONSTANT FILM

ATOMIC LAYER DEPOSITION PROCESSES FOR NON-VOLATILE MEMORY DEVICES

INTEGRATED SCHEME FOR FORMING INTER-POLY DIELECTRICS FOR NON-VOLATI...

METHODS FOR DEPOSITING A HIGH-K DIELECTRIC MATERIAL USING CHEMICAL...

AMPOULE FOR LIQUID DRAW AND VAPOR DRAW WITH A CONTINOUS LEVEL SENSOR

PRECURSORS AND HARDWARE FOR CVD AND ALD

SYSTEM AND METHOD FOR FORMING A GATE DIELECTRIC

CONTROL OF GAS FLOW AND DELIVERY TO SUPPRESS THE FORMATION OF PARTI...

METHODS FOR ATOMIC LAYER DEPOSITION OF HAFNIUM-CONTAINING HIGH-K DI...

Method for fabricating an integrated gate dielectric layer for fiel...

ALD METAL OXIDE DEPOSITION PROCESS USING DIRECT OXIDATION

Nitrogen profile engineering in HI-K nitridation for device perform...

SURFACE PRE-TREATMENT FOR ENHANCEMENT OF NUCLEATION OF HIGH DIELECT...

ALD METAL OXIDE DEPOSITION PROCESS USING DIRECT OXIDATION

METHOD FOR HAFNIUM NITRIDE DEPOSITION

Method for fabricating a dielectric stack

Vapor deposition of hafnium silicate materials with tris(dimethylam...

Plasma treatment of hafnium-containing materials

Apparatuses and methods for atomic layer deposition of hafnium-cont...

Apparatuses and methods for atomic layer deposition of hafnium-cont...

Stabilization of high-k dielectric materials

Control of gas flow and delivery to suppress the formation of parti...

System and method for forming a gate dielectric

Method for hafnium nitride deposition

Surface pre-treatment for enhancement of nucleation of high dielect...

ALD metal oxide deposition process using direct oxidation