Susumu Komoriya

Person

Ashigarakami-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern transfer method and imprint device
- Patent number 8,491,291
- Issue date Jul 23, 2013
- Hitachi, Ltd.
- Takashi Ando
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Pattern forming method and its mold
- Patent number 8,268,209
- Issue date Sep 18, 2012
- Hitachi, Ltd.
- Masahiko Ogino
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern transfer method and imprint device
- Patent number 8,133,418
- Issue date Mar 13, 2012
- Hitachi, Ltd.
- Takashi Ando
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint device and microstructure transfer method
- Patent number 8,109,751
- Issue date Feb 7, 2012
- Hitachi High-Technologies Corporation
- Takashi Ando
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Nanoimprint stamper and a fine-structure transfer apparatus using t...
- Patent number 8,096,802
- Issue date Jan 17, 2012
- Hitachi High-Technologies Corporation
- Kyoichi Mori
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprinting device
- Patent number 8,092,209
- Issue date Jan 10, 2012
- Hitachi High-Technologies Corporation
- Takashi Ando
- G11 - INFORMATION STORAGE
Information Patent Grant
Nanoimprint resin stamper
- Patent number 8,016,585
- Issue date Sep 13, 2011
- Hitachi High-Technologies Corporation
- Susumu Komoriya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Wafer having chamfered bend portions in the joint regions between t...
- Patent number RE40139
- Issue date Mar 4, 2008
- Renesas Technology Corp.
- Hisashi Maejima
- 438 - Semiconductor device manufacturing: process
Information Patent Grant
Controlling method of forming thin film, system for said controllin...
- Patent number 5,747,201
- Issue date May 5, 1998
- Hitachi, Ltd.
- Yasuhiko Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of making semiconductor integrated circuit, pattern detectin...
- Patent number 5,432,608
- Issue date Jul 11, 1995
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controlling method of forming thin film, system for said controllin...
- Patent number 5,409,538
- Issue date Apr 25, 1995
- Hitachi, Ltd.
- Yasuhiko Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of producing a wafer having a curved notch
- Patent number 5,279,992
- Issue date Jan 18, 1994
- Hitachi, Ltd.
- Hisashi Maejima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of making semiconductor integrated circuit, pattern detectin...
- Patent number 5,260,771
- Issue date Nov 9, 1993
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer having chamfered bend portions in the joint regions between t...
- Patent number 5,230,747
- Issue date Jul 27, 1993
- Hitachi, Ltd.
- Hisashi Maejima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of making semiconductor integrated circuit, pattern detectin...
- Patent number 5,094,539
- Issue date Mar 10, 1992
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 5,025,284
- Issue date Jun 18, 1991
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 4,974,018
- Issue date Nov 27, 1990
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer and method of working the same
- Patent number 4,783,225
- Issue date Nov 8, 1988
- Hitachi, Ltd.
- Hisashi Maejima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 4,699,505
- Issue date Oct 13, 1987
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection aligner and method of positioning a wafer
- Patent number 4,298,273
- Issue date Nov 3, 1981
- Hitachi, Ltd.
- Hiroshi Nishizuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of and apparatus for aligning photomask
- Patent number 4,218,136
- Issue date Aug 19, 1980
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MICROFINE STRUCTURE, METHOD FOR PRODUCING MICROFINE STRUCTURE, AND...
- Publication number 20130011632
- Publication date Jan 10, 2013
- Masahiko Ogino
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN TRANSFER METHOD AND IMPRINT DEVICE
- Publication number 20120195993
- Publication date Aug 2, 2012
- Takashi Ando
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT DEVICE AND MICROSTRUCTURE TRANSFER METHOD
- Publication number 20120074615
- Publication date Mar 29, 2012
- TAKASHI ANDO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINTING DEVICE
- Publication number 20100104682
- Publication date Apr 29, 2010
- Takashi ANDO
- G11 - INFORMATION STORAGE
Information Patent Application
NANOIMPRINT STAMPER AND A FINE-STRUCTURE TRANSFER APPARATUS USING T...
- Publication number 20100034911
- Publication date Feb 11, 2010
- Hitachi High-Technologies Corporation
- Kyoichi MORI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
NANOIMPRINT RESIN STAMPER
- Publication number 20090123590
- Publication date May 14, 2009
- Susumu Komoriya
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT DEVICE AND MICROSTRUCTURE TRANSFER METHOD
- Publication number 20080042319
- Publication date Feb 21, 2008
- TAKASHI ANDO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PATTERN TRANSFER METHOD AND IMPRINT DEVICE
- Publication number 20080028953
- Publication date Feb 7, 2008
- Takashi Ando
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PATTERN FORMING METHOD AND ITS MOLD
- Publication number 20070164458
- Publication date Jul 19, 2007
- Masahiko Ogino
- G11 - INFORMATION STORAGE
Information Patent Application
Imprint device and microstructure transfer method
- Publication number 20060286193
- Publication date Dec 21, 2006
- Takashi Ando
- B82 - NANO-TECHNOLOGY

Susumu Komoriya

Person

Patents Grantslast 30 patents

Pattern transfer method and imprint device

Pattern forming method and its mold

Pattern transfer method and imprint device

Imprint device and microstructure transfer method

Nanoimprint stamper and a fine-structure transfer apparatus using t...

Imprinting device

Nanoimprint resin stamper

Wafer having chamfered bend portions in the joint regions between t...

Controlling method of forming thin film, system for said controllin...

Method of making semiconductor integrated circuit, pattern detectin...

Controlling method of forming thin film, system for said controllin...

Method of producing a wafer having a curved notch

Method of making semiconductor integrated circuit, pattern detectin...

Wafer having chamfered bend portions in the joint regions between t...

Method of making semiconductor integrated circuit, pattern detectin...

Exposure method and exposure apparatus

Exposure method and exposure apparatus

Wafer and method of working the same

Exposure method and exposure apparatus

Projection aligner and method of positioning a wafer

Method of and apparatus for aligning photomask

Patents Applicationslast 30 patents

MICROFINE STRUCTURE, METHOD FOR PRODUCING MICROFINE STRUCTURE, AND...

PATTERN TRANSFER METHOD AND IMPRINT DEVICE

IMPRINT DEVICE AND MICROSTRUCTURE TRANSFER METHOD

IMPRINTING DEVICE

NANOIMPRINT STAMPER AND A FINE-STRUCTURE TRANSFER APPARATUS USING T...

NANOIMPRINT RESIN STAMPER

IMPRINT DEVICE AND MICROSTRUCTURE TRANSFER METHOD

PATTERN TRANSFER METHOD AND IMPRINT DEVICE

PATTERN FORMING METHOD AND ITS MOLD

Imprint device and microstructure transfer method