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Takashi Mori
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Fujisawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Illumination optical system, exposure apparatus, device production...
Patent number
10,691,026
Issue date
Jun 23, 2020
Nikon Corporation
Osamu Tanitsu
G02 - OPTICS
Information
Patent Grant
Illumination optical system, exposure apparatus, device production...
Patent number
10,175,583
Issue date
Jan 8, 2019
Nikon Corporation
Osamu Tanitsu
G02 - OPTICS
Information
Patent Grant
Illumination optical system, exposure apparatus, device production...
Patent number
9,599,905
Issue date
Mar 21, 2017
Nikon Corporation
Osamu Tanitsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical apparatus and scanning exposure apparatus
Patent number
RE39846
Issue date
Sep 18, 2007
Nikon Corporation
Osamu Tanitsu
355 - Photocopying
Information
Patent Grant
Apparatus and method for pattern exposure and method for adjusting...
Patent number
6,727,980
Issue date
Apr 27, 2004
Nikon Corporation
Kazuya Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus with a catadioptric projection optica...
Patent number
6,661,499
Issue date
Dec 9, 2003
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Optical exposure apparatus and photo-cleaning method
Patent number
6,642,994
Issue date
Nov 4, 2003
Nikon Corporation
Takashi Mori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus and method, and illumination optical...
Patent number
6,526,118
Issue date
Feb 25, 2003
Nikon Corporation
Hideki Komatsuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus with a catadioptric projection optica...
Patent number
6,466,303
Issue date
Oct 15, 2002
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Grant
Optical exposure apparatus and photo-cleaning method
Patent number
6,268,904
Issue date
Jul 31, 2001
Nikon Corporation
Takashi Mori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illuminating apparatus
Patent number
6,108,126
Issue date
Aug 22, 2000
Nikon Corporation
Shigeru Hagiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical illumination device
Patent number
5,906,429
Issue date
May 25, 1999
Nikon Corporation
Takashi Mori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Proximity-type microlithography apparatus and method
Patent number
5,891,806
Issue date
Apr 6, 1999
Nikon Corporation
Masato Shibuya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor exposure device
Patent number
5,791,767
Issue date
Aug 11, 1998
Nikon Corporation
Osamu Inoue
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fly-eye lens, illumination optical apparatus, and exposure apparatus
Patent number
5,760,963
Issue date
Jun 2, 1998
Nikon Corporation
Takashi Mori
G02 - OPTICS
Information
Patent Grant
Illumination optical apparatus
Patent number
5,713,660
Issue date
Feb 3, 1998
Nikon Corporation
Takashi Mori
G02 - OPTICS
Information
Patent Grant
Optical element, production method of optical element, optical syst...
Patent number
5,669,708
Issue date
Sep 23, 1997
Nikon Corporation
Kiyoto Mashima
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Optical reflector, illumination optical system, light source system...
Patent number
5,640,284
Issue date
Jun 17, 1997
Nikon Corporation
Osamu Tanitsu
G02 - OPTICS
Information
Patent Grant
Illumination optical apparatus and scanning exposure apparatus
Patent number
5,636,003
Issue date
Jun 3, 1997
Nikon Corporation
Osamu Tanitsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination apparatus and exposure apparatus using it
Patent number
5,615,047
Issue date
Mar 25, 1997
Nikon Corporation
Hideki Komatsuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical integrator and projection exposure apparatus using the same
Patent number
5,594,526
Issue date
Jan 14, 1997
Nikon Corporation
Takashi Mori
G02 - OPTICS
Information
Patent Grant
Optical element, production method of optical element, optical syst...
Patent number
5,581,605
Issue date
Dec 3, 1996
Nikon Corporation
Katsuhiko Murakami
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Cadmium/rare gas discharge lamp of the short arc type, as well as p...
Patent number
5,471,278
Issue date
Nov 28, 1995
Ushiodenki Kabushiki Kaisha
Yukio Yasuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for continuous casting of slab
Patent number
5,307,863
Issue date
May 3, 1994
NKK Corporation
Jun Kubota
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Illuminating apparatus and projection exposure apparatus provided w...
Patent number
5,296,892
Issue date
Mar 22, 1994
Nikon Corporation
Takashi Mori
G02 - OPTICS
Information
Patent Grant
Illuminating optical apparatus and exposure apparatus having the same
Patent number
5,245,384
Issue date
Sep 14, 1993
Nikon Corporation
Takashi Mori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination light source device
Patent number
5,207,505
Issue date
May 4, 1993
Nikon Corporation
Tsuyoshi Naraki
F21 - LIGHTING
Information
Patent Grant
Projection-exposing apparatus
Patent number
4,806,987
Issue date
Feb 21, 1989
Nikon Corporation
Takashi Mori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...
Publication number
20190137887
Publication date
May 9, 2019
Nikon Corporation
Osamu Tanitsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...
Publication number
20170184978
Publication date
Jun 29, 2017
Nikon Corporation
Osamu Tanitsu
G02 - OPTICS
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION...
Publication number
20140233008
Publication date
Aug 21, 2014
Nikon Corporation
Osamu Tanitsu
G02 - OPTICS
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE MANUFACTURI...
Publication number
20090257043
Publication date
Oct 15, 2009
Nikon Corporation
Takashi MORI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection exposure apparatus with a catadioptric projection optica...
Publication number
20030011756
Publication date
Jan 16, 2003
Nikon Corporation
Yasuhiro Omura
G02 - OPTICS
Information
Patent Application
Projection exposure apparatus, projection exposure method and metho...
Publication number
20020180942
Publication date
Dec 5, 2002
NIKON CORPORATION
Kenji Suzuki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illuminating apparatus
Publication number
20020159142
Publication date
Oct 31, 2002
NIKON CORPORATION
Shigeru Hagiwara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD, AND ILLUMINATION OPTICAL...
Publication number
20020054660
Publication date
May 9, 2002
HIDEKI KOMATSUDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for pattern exposure and method for adjusting...
Publication number
20020041368
Publication date
Apr 11, 2002
NIKON CORPORATION
Kazuya Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical exposure apparatus and photo-cleaning method
Publication number
20010030740
Publication date
Oct 18, 2001
NIKON CORPORATION
Takashi Mori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY