Membership
Tour
Register
Log in
Thomas Sutton
Follow
Person
Mesa, AZ, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Gate valve for plus-atmospheric pressure semiconductor process vessels
Patent number
7,494,107
Issue date
Feb 24, 2009
Supercritical Systems, Inc.
Alexei Sheydayi
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
High pressure processing chamber for semiconductor substrate
Patent number
7,255,772
Issue date
Aug 14, 2007
Tokyo Electron Limited
Maximilian A. Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of supercritical processing of a workpiece
Patent number
7,060,422
Issue date
Jun 13, 2006
Tokyo Electron Limited
Maximilian Albert Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for supercritical processing of a workpiece
Patent number
6,926,798
Issue date
Aug 9, 2005
Tokyo Electron Limited
Maximilian Albert Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for supercritical processing of multiple workpieces
Patent number
6,926,012
Issue date
Aug 9, 2005
Tokyo Electron Limited
Maximilian Albert Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High pressure processing chamber for semiconductor substrate
Patent number
6,921,456
Issue date
Jul 26, 2005
Tokyo Electron Limited
Maximilian A. Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for supercritical processing of multiple workpieces
Patent number
6,748,960
Issue date
Jun 15, 2004
Tokyo Electron Limited
Maximilian Albert Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for supercritical processing of multiple workp...
Patent number
6,736,149
Issue date
May 18, 2004
Supercritical Systems, Inc.
Maximilian Albert Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High pressure compatible vacuum chuck for semiconductor wafer inclu...
Patent number
6,722,642
Issue date
Apr 20, 2004
Tokyo Electron Limited
Thomas R. Sutton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for agitation of workpiece in high pressure en...
Patent number
6,487,792
Issue date
Dec 3, 2002
Tokyo Electron Limited
Thomas R. Sutton
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Gate valve for plus-atmospheric pressure semiconductor process vessels
Publication number
20060225811
Publication date
Oct 12, 2006
Alexei Sheydayi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High pressure processing chamber for semiconductor substrate
Publication number
20050000651
Publication date
Jan 6, 2005
Maximilian A. Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for supercritical processing of a workpiece
Publication number
20030150559
Publication date
Aug 14, 2003
Maximilian Albert Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of supercritical processing of a workpiece
Publication number
20030136514
Publication date
Jul 24, 2003
Maximilian Albert Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for supercritical processing of multiple workp...
Publication number
20030121534
Publication date
Jul 3, 2003
Maximilian Albert Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for supercritical processing of multiple workpieces
Publication number
20030121535
Publication date
Jul 3, 2003
Maximilian Albert Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High pressure processing chamber for semiconductor substrate includ...
Publication number
20020189543
Publication date
Dec 19, 2002
Maximilian A. Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High pressure processing chamber for semiconductor substrate
Publication number
20020046707
Publication date
Apr 25, 2002
Maximilian A. Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for agitation of workpiece in high pressure en...
Publication number
20010037586
Publication date
Nov 8, 2001
Thomas R. Sutton
H01 - BASIC ELECTRIC ELEMENTS