Todd Dunn

Person

Cave Creek, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reaction chamber base plate
- Patent number D1059311
- Issue date Jan 28, 2025
- ASM IP Holding B.V.
- Todd Dunn
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Channeled lift pin
- Patent number 12,033,885
- Issue date Jul 9, 2024
- ASM IP Holding B.V.
- Govindarajasekhar Singu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser alignment fixture for a reactor system
- Patent number 11,972,969
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Surojit Ganguli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor deposition reactor manifolds
- Patent number 11,830,731
- Issue date Nov 28, 2023
- ASM IP Holding B.V.
- Dinkar Nandwana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical source vessel with dip tube
- Patent number 11,781,221
- Issue date Oct 10, 2023
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone reactor, system including the reactor, and method of usi...
- Patent number 11,742,189
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Carl Louis White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus comprising one or more pyrometer...
- Patent number 11,629,406
- Issue date Apr 18, 2023
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laser alignment fixture for a reactor system
- Patent number 11,626,308
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Surojit Ganguli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor reaction chamber showerhead
- Patent number 11,501,956
- Issue date Nov 15, 2022
- ASM IP Holding B.V.
- Carl White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor manifolds
- Patent number 11,492,701
- Issue date Nov 8, 2022
- ASM IP Holding B.V.
- Dinkar Nandwana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate susceptor using edge purging
- Patent number 11,404,302
- Issue date Aug 2, 2022
- ASM IP Holding B.V.
- Raj Singu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Process feed management for semiconductor substrate processing
- Patent number 10,832,903
- Issue date Nov 10, 2020
- ASM IP Holding B.V.
- Fred Pettinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor reaction chamber showerhead
- Patent number 10,714,315
- Issue date Jul 14, 2020
- ASM IP Holdings B.V.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply manifold and method of supplying gases to chamber using...
- Patent number 10,683,571
- Issue date Jun 16, 2020
- ASM IP Holding B.V.
- Lucian C. Jdira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed valve manifold for atomic layer deposition
- Patent number 10,370,761
- Issue date Aug 6, 2019
- ASM America, Inc.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone reactor, system including the reactor, and method of usi...
- Patent number 10,276,355
- Issue date Apr 30, 2019
- ASM IP Holding B.V.
- Carl Louis White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed valve manifold for atomic layer deposition
- Patent number 10,266,946
- Issue date Apr 23, 2019
- ASM America, Inc.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process feed management for semiconductor substrate processing
- Patent number 9,892,908
- Issue date Feb 13, 2018
- ASM America, Inc.
- Fred Pettinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed valve manifold for atomic layer deposition
- Patent number 9,574,268
- Issue date Feb 21, 2017
- ASM America, Inc.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber sealing member
- Patent number 9,340,874
- Issue date May 17, 2016
- ASM IP Holding B.V.
- Michael Halpin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor heater and method of heating a substrate
- Patent number 9,299,595
- Issue date Mar 29, 2016
- ASM IP Holding B.V.
- Todd Dunn
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Susceptor heater shim
- Patent number 9,202,727
- Issue date Dec 1, 2015
- ASM IP Holding
- Todd Dunn
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Deposition valve assembly and method of heating the same
- Patent number 9,096,931
- Issue date Aug 4, 2015
- ASM America, Inc.
- Andrew M. Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process feed management for semiconductor substrate processing
- Patent number 9,017,481
- Issue date Apr 28, 2015
- ASM America, Inc.
- Fred Pettinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber sealing member
- Patent number 9,005,539
- Issue date Apr 14, 2015
- ASM IP Holding B.V.
- Michael Halpin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor heater and method of heating a substrate
- Patent number 8,933,375
- Issue date Jan 13, 2015
- ASM IP Holding B.V.
- Todd Dunn
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR DEPOSITING A FILM ON A SURFACE OF A SUBSTRATE BY CYCLIC...
- Publication number 20240401190
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Do Han Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE SOLID REFILL CHAMBER
- Publication number 20240401192
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL
- Publication number 20240401194
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Shuaidi Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE WITH EDGE PURGING
- Publication number 20240254629
- Publication date Aug 1, 2024
- ASM IP HOLDING B.V.
- Ankit Kimtee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WEIGHTED LIFT PIN CONSTRUCTIONS FOR SEMICONDUCTOR FABRICATION PROCE...
- Publication number 20240249971
- Publication date Jul 25, 2024
- ASM IP HOLDING B.V.
- Rohan Vijay Rane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE SOLID REFILL CHAMBER
- Publication number 20240218506
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID PRECURSOR WEIGHT MONITORING SYSTEM, REACTOR SYSTEM, AND METHO...
- Publication number 20240209505
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- William Petro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SOLID SOURCE REFILL
- Publication number 20240191352
- Publication date Jun 13, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CLEANING A VESSEL
- Publication number 20240165681
- Publication date May 23, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- B08 - CLEANING
Information Patent Application
SYSTEMS AND APPARATUS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20240162077
- Publication date May 16, 2024
- ASM IP HOLDING B.V.
- Rajmohan Muthaiah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
- Publication number 20240141486
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTANT DELIVERY SYSTEM AND REACTOR SYSTEM INCLUDING SAME
- Publication number 20240133033
- Publication date Apr 25, 2024
- ASM IP HOLDING B.V.
- Jacqueline Wrench
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND APPARATUS FOR A LIFT PIN
- Publication number 20240087944
- Publication date Mar 14, 2024
- ASM IP HOLDING B.V.
- George Brad Jackson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL SOURCE VESSEL WITH DIP TUBE
- Publication number 20230407480
- Publication date Dec 21, 2023
- ASM IP HOLDING B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LASER ALIGNMENT FIXTURE FOR A REACTOR SYSTEM
- Publication number 20230245911
- Publication date Aug 3, 2023
- ASM IP HOLDING B.V.
- Surojit Ganguli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MONITORING AND C...
- Publication number 20230243033
- Publication date Aug 3, 2023
- ASM IP HOLDING B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE LAMINATE HEATER PLATE
- Publication number 20230245905
- Publication date Aug 3, 2023
- ASM IP HOLDING B.V.
- Joaquin Aguilar Santillan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTOR SYSTEM WITH SOURCE VESSEL WEIGHT MONITORING
- Publication number 20230234014
- Publication date Jul 27, 2023
- ASM IP HOLDING B.V.
- Venkata Motupalli
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS AND THE METHOD THEREOF
- Publication number 20230203654
- Publication date Jun 29, 2023
- ASM IP HOLDING, B.V.
- Paridhi Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE WITH WAFER EDGE PURGING
- Publication number 20230207377
- Publication date Jun 29, 2023
- ASM IP HOLDING B.V.
- Rohan Vijay Rane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE WITH HEATER
- Publication number 20230183863
- Publication date Jun 15, 2023
- ASM IP HOLDING B.V.
- Shreyans Kedia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE SOLID SOURCE REACTANT DELIVERY SYSTEMS FOR VAPOR DEPOSITION...
- Publication number 20230175127
- Publication date Jun 8, 2023
- ASM IP HOLDING B.V.
- Todd Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS-PHASE REACTOR SYSTEM AND METHOD OF CLEANING SAME
- Publication number 20230089167
- Publication date Mar 23, 2023
- ASM IP HOLDING B.V.
- Jianqiu Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR MANIFOLDS
- Publication number 20230069359
- Publication date Mar 2, 2023
- ASM IP HOLDING B.V.
- Shuyang Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEALING SYSTEM FOR A REACTOR SYSTEM
- Publication number 20230061477
- Publication date Mar 2, 2023
- ASM IP HOLDING B.V.
- Thomas Fitzgerald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR SYSTEM AND METHOD FOR FORMING A LAYER COMPRISING INDIUM GAL...
- Publication number 20220403516
- Publication date Dec 22, 2022
- ASM IP HOLDING B.V.
- Paul Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUSCEPTOR USING EDGE PURGING
- Publication number 20220380895
- Publication date Dec 1, 2022
- ASM IP HOLDING B.V.
- Raj Singu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LASER ALIGNMENT FIXTURE FOR A REACTOR SYSTEM
- Publication number 20210358790
- Publication date Nov 18, 2021
- ASM IP HOLDING B.V.
- Surojit Ganguli
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT FIXTURE FOR A REACTOR SYSTEM
- Publication number 20210280448
- Publication date Sep 9, 2021
- ASM IP HOLDING B.V.
- Surojit Ganguli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHANNELED LIFT PIN
- Publication number 20210210373
- Publication date Jul 8, 2021
- ASM IP HOLDING B.V.
- Govindarajasekhar Singu
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Reaction chamber base plate

Channeled lift pin

Laser alignment fixture for a reactor system

Semiconductor deposition reactor manifolds

Chemical source vessel with dip tube

Multi-zone reactor, system including the reactor, and method of usi...

Semiconductor processing apparatus comprising one or more pyrometer...

Laser alignment fixture for a reactor system

Semiconductor reaction chamber showerhead

Reactor manifolds

Substrate susceptor using edge purging

Process feed management for semiconductor substrate processing

Semiconductor reaction chamber showerhead

Gas supply manifold and method of supplying gases to chamber using...

Pulsed valve manifold for atomic layer deposition

Multi-zone reactor, system including the reactor, and method of usi...

Pulsed valve manifold for atomic layer deposition

Process feed management for semiconductor substrate processing

Pulsed valve manifold for atomic layer deposition

Chamber sealing member

Susceptor heater and method of heating a substrate

Susceptor heater shim

Deposition valve assembly and method of heating the same

Process feed management for semiconductor substrate processing

Chamber sealing member

Susceptor heater and method of heating a substrate

Patents Applicationslast 30 patents

METHODS FOR DEPOSITING A FILM ON A SURFACE OF A SUBSTRATE BY CYCLIC...

REMOTE SOLID REFILL CHAMBER

METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL

SEMICONDUCTOR PROCESSING DEVICE WITH EDGE PURGING

WEIGHTED LIFT PIN CONSTRUCTIONS FOR SEMICONDUCTOR FABRICATION PROCE...

REMOTE SOLID REFILL CHAMBER

SOLID PRECURSOR WEIGHT MONITORING SYSTEM, REACTOR SYSTEM, AND METHO...

METHODS AND APPARATUS FOR SOLID SOURCE REFILL

METHODS AND APPARATUS FOR CLEANING A VESSEL

SYSTEMS AND APPARATUS FOR SEMICONDUCTOR EQUIPMENT

APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...

REACTANT DELIVERY SYSTEM AND REACTOR SYSTEM INCLUDING SAME

SYSTEM AND APPARATUS FOR A LIFT PIN

CHEMICAL SOURCE VESSEL WITH DIP TUBE

LASER ALIGNMENT FIXTURE FOR A REACTOR SYSTEM

SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MONITORING AND C...

MULTI-ZONE LAMINATE HEATER PLATE

REACTOR SYSTEM WITH SOURCE VESSEL WEIGHT MONITORING

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS AND THE METHOD THEREOF

SEMICONDUCTOR PROCESSING DEVICE WITH WAFER EDGE PURGING

SEMICONDUCTOR PROCESSING DEVICE WITH HEATER

REMOTE SOLID SOURCE REACTANT DELIVERY SYSTEMS FOR VAPOR DEPOSITION...

GAS-PHASE REACTOR SYSTEM AND METHOD OF CLEANING SAME

REACTOR MANIFOLDS

SEALING SYSTEM FOR A REACTOR SYSTEM

REACTOR SYSTEM AND METHOD FOR FORMING A LAYER COMPRISING INDIUM GAL...

SUBSTRATE SUSCEPTOR USING EDGE PURGING

LASER ALIGNMENT FIXTURE FOR A REACTOR SYSTEM

ALIGNMENT FIXTURE FOR A REACTOR SYSTEM

CHANNELED LIFT PIN