Membership
Tour
Register
Log in
Tomoaki Ishida
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing silicon carbide semiconductor device by for...
Patent number
9,653,297
Issue date
May 16, 2017
Sumitomo Electric Industries, Ltd
Taku Horii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring a semiconductor device and a method of making a...
Patent number
5,846,870
Issue date
Dec 8, 1998
Mitsubishi Denki Kabushiki Kaisha
Tomoaki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for cleaning semiconductor devices
Patent number
5,474,615
Issue date
Dec 12, 1995
Mitsubishi Denki Kabushiki Kaisha
Tomoaki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for cleaning a substrate with metastable helium
Patent number
5,318,654
Issue date
Jun 7, 1994
Mitsubishi Denki Kabushiki Kaisha
Takahiro Maruyama
B08 - CLEANING
Information
Patent Grant
Method of treating semiconductor substrate surface and method of ma...
Patent number
5,306,671
Issue date
Apr 26, 1994
Mitsubishi Denki Kabushiki Kaisha
Toshiaki Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
5,246,532
Issue date
Sep 21, 1993
Mitsubishi Denki Kabushiki Kaisha
Tomoaki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method of copper or copper alloy interconnection layer...
Patent number
5,240,559
Issue date
Aug 31, 1993
Mitsubishi Denki Kabushiki Kaisha
Tomoaki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
5,213,658
Issue date
May 25, 1993
Mitsubishi Denki Kabushiki Kaisha
Tomoaki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning a surface
Patent number
5,147,465
Issue date
Sep 15, 1992
Mitsubishi Denki Kabushiki Kaisha
Takahiro Maruyama
B08 - CLEANING
Information
Patent Grant
Plasma processing apparatus including an electromagnet with a bird...
Patent number
5,038,013
Issue date
Aug 6, 1991
Mitsubishi Denki Kabushiki Kaisha
Moriaki Akazawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer treating device utilizing a plasma
Patent number
4,982,138
Issue date
Jan 1, 1991
Mitsubishi Denki Kabushiki Kaisha
Nobuo Fujiwara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer treating device utilizing ECR plasma
Patent number
4,915,979
Issue date
Apr 10, 1990
Mitsubishi Denki Kabushiki Kaisha
Tomoaki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for plasma treatment
Patent number
4,891,095
Issue date
Jan 2, 1990
Mitsubishi Denki Kabushiki Kaisha
Tomoaki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE
Publication number
20160225624
Publication date
Aug 4, 2016
Sumitomo Electric Industries, Ltd.
Taku Horii
H01 - BASIC ELECTRIC ELEMENTS