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Tomohiro Funakoshi
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Sample observation device having a selectable acceleration voltage
Patent number
10,141,159
Issue date
Nov 27, 2018
Hitachi High-Technologies Corporation
Ayumi Doi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and overlay misalignment measurement m...
Patent number
9,224,575
Issue date
Dec 29, 2015
Hitachi High-Technologies Corporation
Takuma Yamamoto
G01 - MEASURING TESTING
Information
Patent Grant
Defect image processing apparatus, defect image processing method,...
Patent number
8,995,748
Issue date
Mar 31, 2015
Hitachi High-Technologies Corporation
Tsunehiro Sakai
G01 - MEASURING TESTING
Information
Patent Grant
Pattern inspection method, pattern inspection program, and electron...
Patent number
8,653,456
Issue date
Feb 18, 2014
Hitachi High-Technologies Corporation
Yasutaka Toyoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image classification standard update method, program, and image cla...
Patent number
8,625,906
Issue date
Jan 7, 2014
Hitachi High-Technologies Corporation
Yuya Isomae
G01 - MEASURING TESTING
Information
Patent Grant
Observation condition determination support device and observation...
Patent number
8,472,696
Issue date
Jun 25, 2013
Hitachi High-Technologies Corporation
Junko Konishi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Surface inspection tool and surface inspection method
Patent number
8,462,352
Issue date
Jun 11, 2013
Hitachi High-Technologies Corporation
Yuji Miyoshi
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection method and defect inspection system
Patent number
8,358,406
Issue date
Jan 22, 2013
Hitachi High-Technologies Corporation
Masami Ikota
G01 - MEASURING TESTING
Information
Patent Grant
Analyzing apparatus, program, defect inspection apparatus, defect r...
Patent number
8,290,241
Issue date
Oct 16, 2012
Hitachi High-Technologies Corporation
Makoto Ono
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Wafer inspection data handling and defect review tool
Patent number
8,209,135
Issue date
Jun 26, 2012
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G01 - MEASURING TESTING
Information
Patent Grant
Surface inspection tool and surface inspection method
Patent number
8,189,205
Issue date
May 29, 2012
Hitachi High-Technologies Corporation
Yuji Miyoshi
G01 - MEASURING TESTING
Information
Patent Grant
Surface defect data display and management system and a method of d...
Patent number
8,041,443
Issue date
Oct 18, 2011
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Surface inspection tool and surface inspection method
Patent number
7,884,948
Issue date
Feb 8, 2011
Hitachi High-Technologies Corporation
Yuji Miyoshi
G01 - MEASURING TESTING
Information
Patent Grant
Recipe parameter management system and recipe parameter management...
Patent number
7,885,789
Issue date
Feb 8, 2011
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Data processing equipment, inspection assistance system, and data p...
Patent number
7,606,409
Issue date
Oct 20, 2009
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G07 - CHECKING-DEVICES
Patents Applications
last 30 patents
Information
Patent Application
Sample Observation Device
Publication number
20150371816
Publication date
Dec 24, 2015
Hitachi High-Technologies Corporation
Ayumi DOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device and Overlay Misalignment Measurement M...
Publication number
20150287569
Publication date
Oct 8, 2015
Hitachi High-Technologies Corporation
Takuma Yamamoto
G01 - MEASURING TESTING
Information
Patent Application
SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD
Publication number
20130258351
Publication date
Oct 3, 2013
Hitachi High-Technologies Corporation
Yuji Miyoshi
G01 - MEASURING TESTING
Information
Patent Application
Pattern Inspection Method, Pattern Inspection Program, and Electron...
Publication number
20120305767
Publication date
Dec 6, 2012
Yasutaka Toyoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD
Publication number
20120262723
Publication date
Oct 18, 2012
Hitachi High-Technologies Corporation
Yuji Miyoshi
G01 - MEASURING TESTING
Information
Patent Application
DEFECT REVIEW SUPPORT DEVICE, DEFECT REVIEW DEVICE AND INSPECTION S...
Publication number
20120233542
Publication date
Sep 13, 2012
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G01 - MEASURING TESTING
Information
Patent Application
DEFECT IMAGE PROCESSING APPARATUS, DEFECT IMAGE PROCESSING METHOD,...
Publication number
20120141011
Publication date
Jun 7, 2012
Hitachi High-Technologies Corporation
Tsunehiro Sakai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OBSERVATION CONDITION DETERMINATION SUPPORT DEVICE AND OBSERVATION...
Publication number
20110311125
Publication date
Dec 22, 2011
Junko Konishi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IMAGE CLASSIFICATION STANDARD UPDATE METHOD, PROGRAM, AND IMAGE CLA...
Publication number
20110274362
Publication date
Nov 10, 2011
Hitachi High-Techologies Corporation
Yuya Isomae
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
WAFER INSPECTION DATA HANDLING AND DEFECT REVIEW TOOL
Publication number
20110211060
Publication date
Sep 1, 2011
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G01 - MEASURING TESTING
Information
Patent Application
DATA PROCESSING SYSTEM, DATA PROCESSING METHOD, AND INSPECTION ASSI...
Publication number
20110150318
Publication date
Jun 23, 2011
Tomohiro Funakoshi
G01 - MEASURING TESTING
Information
Patent Application
SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD
Publication number
20110090512
Publication date
Apr 21, 2011
Hitachi High-Technologies Corporation
Yuji Miyoshi
G01 - MEASURING TESTING
Information
Patent Application
SURFACE DEFECT DATA DISPLAY AND MANAGEMENT SYSTEM AND A METHOD OF D...
Publication number
20090292387
Publication date
Nov 26, 2009
Hitachi High-Technologies Corporation
TOMOHIRO FUNAKOSHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
RECIPE PARAMETER MANAGEMENT SYSTEM AND RECIPE PARAMETER MANAGEMENT...
Publication number
20090281755
Publication date
Nov 12, 2009
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G05 - CONTROLLING REGULATING
Information
Patent Application
SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD
Publication number
20090185178
Publication date
Jul 23, 2009
Hitachi High-Technologies Corporation
Yuji Miyoshi
G01 - MEASURING TESTING
Information
Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION SYSTEM
Publication number
20090180109
Publication date
Jul 16, 2009
Hitachi High-Technologies Corporation
Masami Ikota
G01 - MEASURING TESTING
Information
Patent Application
DATA PROCESSING APPARATUS AND DATA PROCESSING METHOD
Publication number
20080298669
Publication date
Dec 4, 2008
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G01 - MEASURING TESTING
Information
Patent Application
Inspection Assistance System, Data Processing Equipment, and Data P...
Publication number
20080240545
Publication date
Oct 2, 2008
Hitachi High-Technologies Corporation
Fumiaki ENDO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ANALYZING APPARATUS, PROGRAM, DEFECT INSPECTION APPARATUS, DEFECT R...
Publication number
20080226153
Publication date
Sep 18, 2008
Makoto ONO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Data Processor and Data Processing Method
Publication number
20080226158
Publication date
Sep 18, 2008
Hitachi High-Technologies Corporation
Chikako ABE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of reviewing defects and an apparatus thereon
Publication number
20080123936
Publication date
May 29, 2008
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Wafer inspection data handling and defect review tool
Publication number
20070105245
Publication date
May 10, 2007
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G01 - MEASURING TESTING
Information
Patent Application
Data processing equipment, inspection assistance system, and data p...
Publication number
20060111879
Publication date
May 25, 2006
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G07 - CHECKING-DEVICES