Turgut Sahin

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for reducing the intrinsic stress of high density plasma films
- Patent number 7,294,205
- Issue date Nov 13, 2007
- Applied Materials, Inc.
- K. V. Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated phase angle and optical critical dimension measurement m...
- Patent number 7,250,309
- Issue date Jul 31, 2007
- Applied Materials, Inc.
- Alfred W. Mak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chamber seasoning method to improve adhesion of F-containing dielec...
- Patent number 6,624,064
- Issue date Sep 23, 2003
- Applied Materials, Inc.
- Turgut Sahin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for modifying the profile of narrow, high-aspe...
- Patent number 6,579,811
- Issue date Jun 17, 2003
- Applied Materials Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for integrating a metal nitride film in a semi...
- Patent number 6,518,203
- Issue date Feb 11, 2003
- Applied Materials, Inc.
- Pravin Narwankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating high density plasma CVD reactor with combined i...
- Patent number 6,465,051
- Issue date Oct 15, 2002
- Applied Materials, Inc.
- Turgut Sahin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition reactor having vaporizing, mixing and cleaning capabilities
- Patent number 6,454,860
- Issue date Sep 24, 2002
- Applied Materials, Inc.
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for exposing a substrate to plasma radicals
- Patent number 6,450,116
- Issue date Sep 17, 2002
- Applied Materials, Inc.
- David B. Noble
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anneal for enhancing the electrical characteristic of semiconductor...
- Patent number 6,387,761
- Issue date May 14, 2002
- Applied Materials, Inc.
- Wong-Cheng Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process gas distribution for forming stable fluorine-doped silicate...
- Patent number 6,383,954
- Issue date May 7, 2002
- Applied Materials, Inc.
- Yaxin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled gas distribution plate
- Patent number 6,379,466
- Issue date Apr 30, 2002
- Applied Materials, Inc.
- Turgut Sahin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential in-situ heating and deposition of halogen-doped silicon...
- Patent number 6,375,744
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for integrating a metal nitride film in a semi...
- Patent number 6,337,289
- Issue date Jan 8, 2002
- Applied Materials Inc.
- Pravin Narwankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD deposition method to improve adhesion of F-containing dielectri...
- Patent number 6,323,119
- Issue date Nov 27, 2001
- Applied Materials, Inc.
- Ming Xi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential in-situ heating and deposition of halogen-doped silicon...
- Patent number 6,228,781
- Issue date May 8, 2001
- Applied Materials, Inc.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming a titanium doped tantalum pentaoxi...
- Patent number 6,218,300
- Issue date Apr 17, 2001
- Applied Materials, Inc.
- Pravin K. Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing and amorphous fluorocarbon film using HDP-CVD
- Patent number 6,211,065
- Issue date Apr 3, 2001
- Applied Materials, Inc.
- Ming Xi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post deposition treatment of dielectric films for interface control
- Patent number 6,204,203
- Issue date Mar 20, 2001
- Applied Materials, Inc.
- Pravin K. Narwankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for modifying the profile of narrow, high-aspe...
- Patent number 6,200,911
- Issue date Mar 13, 2001
- Applied Materials, Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High deposition rate recipe for low dielectric constant films
- Patent number 6,136,685
- Issue date Oct 24, 2000
- Applied Materials, Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduction of mobile ion and metal contamination in HDP-CVD chambers...
- Patent number 6,121,161
- Issue date Sep 19, 2000
- Applied Materials, Inc.
- Kent Rossman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen anneal for curing defects of silicon/nitride interfaces of...
- Patent number 6,037,235
- Issue date Mar 14, 2000
- Applied Materials, Inc.
- Pravin K. Narwankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reducing the intrinsic stress of high density plasma films
- Patent number 5,976,993
- Issue date Nov 2, 1999
- Applied Materials, Inc.
- K. V. Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma cleaning of a CVD or etch reactor using a low or mixed frequ...
- Patent number 5,882,424
- Issue date Mar 16, 1999
- Applied Materials, Inc.
- Brad Taylor
- B08 - CLEANING
Information Patent Grant
Reduction in mobile ion and metal contamination by varying season t...
- Patent number 5,811,356
- Issue date Sep 22, 1998
- Applied Materials, Inc.
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-conductive alignment member for uniform plasma processing of su...
- Patent number 5,626,678
- Issue date May 6, 1997
- Applied Materials, Inc.
- Turgut Sahin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for treating aluminum surfaces in a vacuum apparatus
- Patent number 5,201,990
- Issue date Apr 13, 1993
- Applied Materials, Inc.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED PHASE ANGLE AND OPTICAL CRITICAL DIMENSION MEASUREMENT M...
- Publication number 20070296980
- Publication date Dec 27, 2007
- ALFRED W. MAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Integrated phase angle and optical critical dimension measurement m...
- Publication number 20050153564
- Publication date Jul 14, 2005
- APPLIED MATERIALS, INC.
- Alfred W. Mak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Tuned potential pedestal for mask etch processing apparatus
- Publication number 20050133166
- Publication date Jun 23, 2005
- APPLIED MATERIALS, INC.
- Peter Satitpunwaycha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated equipment set for forming shallow trench isolation regions
- Publication number 20030220708
- Publication date Nov 27, 2003
- APPLIED MATERIALS, INC.
- Turgut Sahin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for modifying the profile of narrow, high-aspe...
- Publication number 20030157812
- Publication date Aug 21, 2003
- Applied Materials, Inc.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition reactor having vaporizing, mixing and cleaning capabilities
- Publication number 20020192370
- Publication date Dec 19, 2002
- Craig R. Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of forming a nitridated surface on a metallic layer and pro...
- Publication number 20020168847
- Publication date Nov 14, 2002
- APPLIED MATERIALS, INC.
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO PLASMA RADICALS
- Publication number 20020073925
- Publication date Jun 20, 2002
- DAVID B. NOBLE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for integrating a metal nitride film in a semi...
- Publication number 20020055270
- Publication date May 9, 2002
- Pravin Narwankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR THE FORMATION OF DIELECTRIC LAYERS
- Publication number 20020009861
- Publication date Jan 24, 2002
- PRAVIN K. NARWANKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION REACTOR HAVING VAPORIZING, MIXING AND CLEANING CAPABILITIES
- Publication number 20010035127
- Publication date Nov 1, 2001
- CRAIG R. METZNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sequential in-situ heating and deposition of halogen-doped silicon...
- Publication number 20010020447
- Publication date Sep 13, 2001
- Laxman Murugesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for modifying the profile of narrow, high-aspe...
- Publication number 20010001175
- Publication date May 17, 2001
- Pravin Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Turgut Sahin

Person

Patents Grantslast 30 patents

Method for reducing the intrinsic stress of high density plasma films

Integrated phase angle and optical critical dimension measurement m...

Chamber seasoning method to improve adhesion of F-containing dielec...

Method and apparatus for modifying the profile of narrow, high-aspe...

Method and apparatus for integrating a metal nitride film in a semi...

Method of operating high density plasma CVD reactor with combined i...

Deposition reactor having vaporizing, mixing and cleaning capabilities

Apparatus for exposing a substrate to plasma radicals

Anneal for enhancing the electrical characteristic of semiconductor...

Process gas distribution for forming stable fluorine-doped silicate...

Temperature controlled gas distribution plate

Sequential in-situ heating and deposition of halogen-doped silicon...

Method and apparatus for integrating a metal nitride film in a semi...

CVD deposition method to improve adhesion of F-containing dielectri...

Sequential in-situ heating and deposition of halogen-doped silicon...

Method and apparatus for forming a titanium doped tantalum pentaoxi...

Method of depositing and amorphous fluorocarbon film using HDP-CVD

Post deposition treatment of dielectric films for interface control

Method and apparatus for modifying the profile of narrow, high-aspe...

High deposition rate recipe for low dielectric constant films

Reduction of mobile ion and metal contamination in HDP-CVD chambers...

Hydrogen anneal for curing defects of silicon/nitride interfaces of...

Method for reducing the intrinsic stress of high density plasma films

Plasma cleaning of a CVD or etch reactor using a low or mixed frequ...

Reduction in mobile ion and metal contamination by varying season t...

Non-conductive alignment member for uniform plasma processing of su...

Process for treating aluminum surfaces in a vacuum apparatus

Patents Applicationslast 30 patents

INTEGRATED PHASE ANGLE AND OPTICAL CRITICAL DIMENSION MEASUREMENT M...

Integrated phase angle and optical critical dimension measurement m...

Tuned potential pedestal for mask etch processing apparatus

Integrated equipment set for forming shallow trench isolation regions

Method and apparatus for modifying the profile of narrow, high-aspe...

Deposition reactor having vaporizing, mixing and cleaning capabilities

Methods of forming a nitridated surface on a metallic layer and pro...

APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO PLASMA RADICALS

Method and apparatus for integrating a metal nitride film in a semi...

METHOD AND APPARATUS FOR THE FORMATION OF DIELECTRIC LAYERS

DEPOSITION REACTOR HAVING VAPORIZING, MIXING AND CLEANING CAPABILITIES

Sequential in-situ heating and deposition of halogen-doped silicon...

Method and apparatus for modifying the profile of narrow, high-aspe...