Vinay K. Shah

Person

San Mateo, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System architecture for vacuum processing
- Patent number 10,115,617
- Issue date Oct 30, 2018
- Intevac, Inc.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering system and method using direction-dependent scan speed o...
- Patent number 10,106,883
- Issue date Oct 23, 2018
- Intevac, Inc.
- Vinay Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for bi-facial processing of substrates
- Patent number 10,062,600
- Issue date Aug 28, 2018
- Intevac, Inc.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-mask arrangement for solar cell fabrication
- Patent number 9,525,099
- Issue date Dec 20, 2016
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System architecture for vacuum processing
- Patent number 9,502,276
- Issue date Nov 22, 2016
- Intevac, Inc.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput load lock for solar wafers
- Patent number 8,998,553
- Issue date Apr 7, 2015
- Intevac, Inc.
- Vinay Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing sequence in a cartesian robot cluster tool
- Patent number 8,911,193
- Issue date Dec 16, 2014
- Applied Materials, Inc.
- Mike Rice
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods, systems and apparatus for rapid exchange of work material
- Patent number 8,886,354
- Issue date Nov 11, 2014
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and loadport for purging a substrate carrier
- Patent number 8,689,812
- Issue date Apr 8, 2014
- Applied Materials, Inc.
- Vinay K. Shah
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for masking solar cell substrates for deposition
- Patent number 8,677,929
- Issue date Mar 25, 2014
- Intevac, Inc.
- Alexander J. Berger
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods and apparatus for transporting substrate carriers
- Patent number 8,672,121
- Issue date Mar 18, 2014
- Applied Materials, Inc.
- Vinay K. Shah
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Methods and loadport apparatus for purging a substrate carrier
- Patent number 8,601,975
- Issue date Dec 10, 2013
- Applied Materials, Inc.
- Vinay K. Shah
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Laser material removal methods and apparatus
- Patent number 8,569,650
- Issue date Oct 29, 2013
- Applied Materials, Inc.
- Zhenhua Zhang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System, methods and apparatus for substrate carrier content verific...
- Patent number 8,379,082
- Issue date Feb 19, 2013
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for an efficient handshake between material h...
- Patent number 8,356,968
- Issue date Jan 22, 2013
- Applied Materials, Inc.
- Vinay K. Shah
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automated substrate handling and film quality inspection in solar c...
- Patent number 8,318,512
- Issue date Nov 27, 2012
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced platform for processing crystalline silicon solar cells
- Patent number 8,309,374
- Issue date Nov 13, 2012
- Applied Materials, Inc.
- Keith Brian Porthouse
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Laser material removal methods and apparatus
- Patent number 8,258,426
- Issue date Sep 4, 2012
- Applied Materials, Inc.
- Zhenhua Zhang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Solar panel edge deletion module
- Patent number 8,231,431
- Issue date Jul 31, 2012
- Applied Materials, Inc.
- Dhruv Gajaria
- B24 - GRINDING POLISHING
Information Patent Grant
Forming solar cells using a patterned deposition process
- Patent number 8,207,005
- Issue date Jun 26, 2012
- Applied Materials, Inc.
- Timothy W. Weidman
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for purging a substrate carrier
- Patent number 8,074,597
- Issue date Dec 13, 2011
- Applied Materials, Inc.
- Vinay K. Shah
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing sequence in a Cartesian robot cluster tool
- Patent number 8,066,466
- Issue date Nov 29, 2011
- Applied Materials, Inc.
- Mike Rice
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Methods for moving a substrate carrier
- Patent number 7,984,543
- Issue date Jul 26, 2011
- Applied Materials, Inc.
- Martin R. Elliott
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Back contact solar cells using printed dielectric barrier
- Patent number 7,951,637
- Issue date May 31, 2011
- Applied Materials, Inc.
- Timothy W. Weidman
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for sensing substrates in carriers
- Patent number 7,894,923
- Issue date Feb 22, 2011
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch processing platform for ALD and CVD
- Patent number 7,833,351
- Issue date Nov 16, 2010
- Applied Materials, Inc.
- Aaron Webb
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing sequence in a cartesian robot cluster tool
- Patent number 7,798,764
- Issue date Sep 21, 2010
- Applied Materials, Inc.
- Mike Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Small lot size lithography bays
- Patent number 7,778,721
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Eric Andrew Englhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for mapping carrier contents
- Patent number 7,720,558
- Issue date May 18, 2010
- Applied Materials, Inc.
- Martin R. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for transferring small lot size substrate carri...
- Patent number 7,711,445
- Issue date May 4, 2010
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM ARCHITECTURE FOR VACUUM PROCESSING
- Publication number 20170025300
- Publication date Jan 26, 2017
- INTEVAC, INC.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR SCANNING SPUTTERING SYSTEM AND METHOD
- Publication number 20160268110
- Publication date Sep 15, 2016
- INTEVAC, INC.
- David Ward Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SPUTTERING SYSTEM AND USING COUNTERWEIGHT
- Publication number 20160177438
- Publication date Jun 23, 2016
- INTEVAC, INC.
- Vinay Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR BI-FACIAL PROCESSING OF SUBSTRATES
- Publication number 20150170947
- Publication date Jun 18, 2015
- INTEVAC, INC.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL
- Publication number 20150098773
- Publication date Apr 9, 2015
- Applied Materials, Inc.
- Mike RICE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SPUTTERING SYSTEM AND METHOD USING COUNTERWEIGHT
- Publication number 20140332376
- Publication date Nov 13, 2014
- INTEVAC, INC.
- Vinay Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING SYSTEM AND METHOD USING DIRECTION-DEPENDENT SCAN SPEED O...
- Publication number 20140311893
- Publication date Oct 23, 2014
- INTEVAC, INC.
- Vinay Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM ARCHITECTURE FOR VACUUM PROCESSING
- Publication number 20130287526
- Publication date Oct 31, 2013
- INTEVAC, INC.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL-MASK ARRANGEMENT FOR SOLAR CELL FABRICATION
- Publication number 20130276978
- Publication date Oct 24, 2013
- INTEVAC, INC.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH THROUGHPUT LOAD LOCK FOR SOLAR WAFERS
- Publication number 20130149075
- Publication date Jun 13, 2013
- INTEVAC, INC.
- Vinay Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR SCANNING SPUTTERING SYSTEM AND METHOD
- Publication number 20130112546
- Publication date May 9, 2013
- INTEVAC, INC.
- David Ward Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER
- Publication number 20120325328
- Publication date Dec 27, 2012
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER MATERIAL REMOVAL METHODS AND APPARATUS
- Publication number 20120295440
- Publication date Nov 22, 2012
- Applied Materials, Inc.
- Zhenhua Zhang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER
- Publication number 20120210937
- Publication date Aug 23, 2012
- Applied Materials, Inc.
- RANDHIR THAKUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MASKING SUBSTRATES FOR DEPOSITION
- Publication number 20120171807
- Publication date Jul 5, 2012
- Alexander J. BERGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL
- Publication number 20120141237
- Publication date Jun 7, 2012
- Mike Rice
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHODS AND LOADPORT APPARATUS FOR PURGING A SUBSTRATE CARRIER
- Publication number 20120060971
- Publication date Mar 15, 2012
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED PLATFORM FOR PROCESSING CRYSTALLINE SILICON SOLAR CELLS
- Publication number 20110245957
- Publication date Oct 6, 2011
- Applied Materials, Inc.
- KEITH B. PORTHOUSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING SOLAR CELLS USING A PATTERNED DEPOSITION PROCESS
- Publication number 20110183458
- Publication date Jul 28, 2011
- Timothy W. Weidman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
PASSIVATED POLYSILICON EMITTER SOLAR CELL AND METHOD FOR MANUFACTUR...
- Publication number 20110162706
- Publication date Jul 7, 2011
- Applied Materials, Inc.
- Peter G. Borden
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SUBSTRATE ALIGNMENT APPARATUS
- Publication number 20110116900
- Publication date May 19, 2011
- Applied Materials, Inc.
- Tristan R. Holtam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH PROCESSING PLATFORM FOR ALD AND CVD
- Publication number 20110041764
- Publication date Feb 24, 2011
- Aaron Webb
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
END EFFECTOR FOR HANDLING SUBSTRATES
- Publication number 20100296903
- Publication date Nov 25, 2010
- Applied Materials, Inc.
- VINAY K. SHAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL
- Publication number 20100280654
- Publication date Nov 4, 2010
- Mike Rice
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
AUTOMATED SUBSTRATE HANDLING AND FILM QUALITY INSPECTION IN SOLAR C...
- Publication number 20100279439
- Publication date Nov 4, 2010
- Applied Materials, Inc.
- VINAY K. SHAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS, SYSTEMS AND APPARATUS FOR RAPID EXCHANGE OF WORK MATERIAL
- Publication number 20100179683
- Publication date Jul 15, 2010
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER
- Publication number 20100173495
- Publication date Jul 8, 2010
- APPLIED MATERIALS, INC.
- Randhir Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT
- Publication number 20100145513
- Publication date Jun 10, 2010
- Applied Materials, Inc.
- Pyongwon Yim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED PLATFORM FOR PROCESSING CRYSTALLINE SILICON SOLAR CELLS
- Publication number 20100087028
- Publication date Apr 8, 2010
- Applied Materials, Inc.
- Keith Brian Porthouse
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
BACK CONTACT SOLAR CELLS USING PRINTED DIELECTRIC BARRIER
- Publication number 20100055822
- Publication date Mar 4, 2010
- Timothy W. Weidman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Vinay K. Shah

Person

Patents Grantslast 30 patents

System architecture for vacuum processing

Sputtering system and method using direction-dependent scan speed o...

System and method for bi-facial processing of substrates

Dual-mask arrangement for solar cell fabrication

System architecture for vacuum processing

High throughput load lock for solar wafers

Substrate processing sequence in a cartesian robot cluster tool

Methods, systems and apparatus for rapid exchange of work material

Methods and loadport for purging a substrate carrier

Method and apparatus for masking solar cell substrates for deposition

Methods and apparatus for transporting substrate carriers

Methods and loadport apparatus for purging a substrate carrier

Laser material removal methods and apparatus

System, methods and apparatus for substrate carrier content verific...

Methods and apparatus for an efficient handshake between material h...

Automated substrate handling and film quality inspection in solar c...

Advanced platform for processing crystalline silicon solar cells

Laser material removal methods and apparatus

Solar panel edge deletion module

Forming solar cells using a patterned deposition process

Methods and apparatus for purging a substrate carrier

Substrate processing sequence in a Cartesian robot cluster tool

Methods for moving a substrate carrier

Back contact solar cells using printed dielectric barrier

Methods and apparatus for sensing substrates in carriers

Batch processing platform for ALD and CVD

Substrate processing sequence in a cartesian robot cluster tool

Small lot size lithography bays

Methods and apparatus for mapping carrier contents

Systems and methods for transferring small lot size substrate carri...

Patents Applicationslast 30 patents

SYSTEM ARCHITECTURE FOR VACUUM PROCESSING

LINEAR SCANNING SPUTTERING SYSTEM AND METHOD

METHOD FOR SPUTTERING SYSTEM AND USING COUNTERWEIGHT

SYSTEM AND METHOD FOR BI-FACIAL PROCESSING OF SUBSTRATES

SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL

SPUTTERING SYSTEM AND METHOD USING COUNTERWEIGHT

SPUTTERING SYSTEM AND METHOD USING DIRECTION-DEPENDENT SCAN SPEED O...

SYSTEM ARCHITECTURE FOR VACUUM PROCESSING

DUAL-MASK ARRANGEMENT FOR SOLAR CELL FABRICATION

HIGH THROUGHPUT LOAD LOCK FOR SOLAR WAFERS

LINEAR SCANNING SPUTTERING SYSTEM AND METHOD

METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER

LASER MATERIAL REMOVAL METHODS AND APPARATUS

SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER

METHOD AND APPARATUS FOR MASKING SUBSTRATES FOR DEPOSITION

SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL

METHODS AND LOADPORT APPARATUS FOR PURGING A SUBSTRATE CARRIER

ADVANCED PLATFORM FOR PROCESSING CRYSTALLINE SILICON SOLAR CELLS

FORMING SOLAR CELLS USING A PATTERNED DEPOSITION PROCESS

PASSIVATED POLYSILICON EMITTER SOLAR CELL AND METHOD FOR MANUFACTUR...

SUBSTRATE ALIGNMENT APPARATUS

BATCH PROCESSING PLATFORM FOR ALD AND CVD

END EFFECTOR FOR HANDLING SUBSTRATES

SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL

AUTOMATED SUBSTRATE HANDLING AND FILM QUALITY INSPECTION IN SOLAR C...

METHODS, SYSTEMS AND APPARATUS FOR RAPID EXCHANGE OF WORK MATERIAL

SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER

METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT

ADVANCED PLATFORM FOR PROCESSING CRYSTALLINE SILICON SOLAR CELLS

BACK CONTACT SOLAR CELLS USING PRINTED DIELECTRIC BARRIER