Vincent Ku

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Gas delivery apparatus and method for atomic layer deposition
- Patent number 8,668,776
- Issue date Mar 11, 2014
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for hybrid chemical processing
- Patent number 8,070,879
- Issue date Dec 6, 2011
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for generating a precursor for a semiconductor...
- Patent number 8,062,422
- Issue date Nov 22, 2011
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential deposition of tantalum nitride using a tantalum-containi...
- Patent number 7,867,896
- Issue date Jan 11, 2011
- Applied Materials, Inc.
- Wei Cao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery apparatus for atomic layer deposition
- Patent number 7,780,788
- Issue date Aug 24, 2010
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery apparatus for atomic layer deposition
- Patent number 7,780,785
- Issue date Aug 24, 2010
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery apparatus for atomic layer deposition
- Patent number 7,699,023
- Issue date Apr 20, 2010
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for providing gas to a processing chamber
- Patent number 7,678,194
- Issue date Mar 16, 2010
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical precursor ampoule for vapor deposition processes
- Patent number 7,597,758
- Issue date Oct 6, 2009
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for hybrid chemical processing
- Patent number 7,591,907
- Issue date Sep 22, 2009
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for generating a chemical precursor
- Patent number 7,588,736
- Issue date Sep 15, 2009
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for providing precursor gas to a processing ch...
- Patent number 7,569,191
- Issue date Aug 4, 2009
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for generating a precursor for a semiconductor...
- Patent number 7,524,374
- Issue date Apr 28, 2009
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential deposition of tantalum nitride using a tantalum-containi...
- Patent number 7,514,358
- Issue date Apr 7, 2009
- Applied Materials, Inc.
- Wei Cao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for providing precursor gas to a processing ch...
- Patent number 7,429,361
- Issue date Sep 30, 2008
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber configured for uniform gas flow
- Patent number 7,422,637
- Issue date Sep 9, 2008
- Applied Materials, Inc.
- Vincent Ku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for hybrid chemical processing
- Patent number 7,402,210
- Issue date Jul 22, 2008
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of generating PDMAT precursor
- Patent number 7,270,709
- Issue date Sep 18, 2007
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Valve design and configuration for fast delivery system
- Patent number 7,228,873
- Issue date Jun 12, 2007
- Applied Materials, Inc.
- Vincent W. Ku
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Apparatus and method for hybrid chemical processing
- Patent number 7,204,886
- Issue date Apr 17, 2007
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for providing gas to a processing chamber
- Patent number 7,186,385
- Issue date Mar 6, 2007
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Valve design and configuration for fast delivery system
- Patent number 7,066,194
- Issue date Jun 27, 2006
- Applied Materials, Inc.
- Vincent W. Ku
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Sequential deposition of tantalum nitride using a tantalum-containi...
- Patent number 6,972,267
- Issue date Dec 6, 2005
- Applied Materials, Inc.
- Wei Cao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for gas temperature control in a semiconductor...
- Patent number 6,955,211
- Issue date Oct 18, 2005
- Applied Materials, Inc.
- Vincent W. Ku
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Selective deposition of a barrier layer on a dielectric material
- Patent number 6,939,801
- Issue date Sep 6, 2005
- Applied Materials, Inc.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery apparatus and method for atomic layer deposition
- Patent number 6,916,398
- Issue date Jul 12, 2005
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of generating PDMAT precursor
- Patent number 6,905,541
- Issue date Jun 14, 2005
- Applied Materials, Inc.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of film deposition using activated precursor gases
- Patent number 6,838,125
- Issue date Jan 4, 2005
- Applied Materials, Inc.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for monitoring solid precursor delivery
- Patent number 6,772,072
- Issue date Aug 3, 2004
- Applied Materials, Inc.
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled gas feedthrough
- Patent number 6,527,865
- Issue date Mar 4, 2003
- Applied Materials, Inc.
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HEARING AID CONNECTOR
- Publication number 20190174240
- Publication date Jun 6, 2019
- EARLENS CORPORATION
- Eric B. JOHNSON
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SEQUENTIAL DEPOSITION OF TANTALUM NITRIDE USING A TANTALUM-CONTAINI...
- Publication number 20110070730
- Publication date Mar 24, 2011
- Wei Cao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DELIVERY APPARATUS AND METHOD FOR ATOMIC LAYER DEPOSITION
- Publication number 20100247767
- Publication date Sep 30, 2010
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR HYBRID CHEMICAL PROCESSING
- Publication number 20090308318
- Publication date Dec 17, 2009
- LING CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEQUENTIAL DEPOSITION OF TANTALUM NITRIDE USING A TANTALUM-CONTAINI...
- Publication number 20090197406
- Publication date Aug 6, 2009
- Applied Materials, Inc.
- Wei Cao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR GENERATING A PRECURSOR FOR A SEMICONDUCTOR...
- Publication number 20090151633
- Publication date Jun 18, 2009
- LING CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROVIDING PRECURSOR GAS TO A PROCESSING CH...
- Publication number 20090011129
- Publication date Jan 8, 2009
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR HYBRID CHEMICAL PROCESSING
- Publication number 20080274299
- Publication date Nov 6, 2008
- LING CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES
- Publication number 20080216743
- Publication date Sep 11, 2008
- LING CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DELIVERY APPARATUS FOR ATOMIC LAYER DEPOSITION
- Publication number 20080041313
- Publication date Feb 21, 2008
- LING CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PROCESS
- Publication number 20080038463
- Publication date Feb 14, 2008
- APPLIED MATERIALS, INC.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR HYBRID CHEMICAL PROCESSING
- Publication number 20070151514
- Publication date Jul 5, 2007
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROVIDING PRECURSOR GAS TO A PROCESSING CH...
- Publication number 20070110898
- Publication date May 17, 2007
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATION PROCESS OF TUNGSTEN ATOMIC LAYER DEPOSITION FOR METALLI...
- Publication number 20070099415
- Publication date May 3, 2007
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROVIDING GAS TO A PROCESSING CHAMBER
- Publication number 20070089817
- Publication date Apr 26, 2007
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for generating a precursor for a semiconductor...
- Publication number 20070067609
- Publication date Mar 22, 2007
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER CONFIGURED FOR UNIFORM GAS FLOW
- Publication number 20070044719
- Publication date Mar 1, 2007
- APPLIED MATERIALS, INC.
- Vincent Ku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR GENERATING A CHEMICAL PRECURSOR
- Publication number 20060257295
- Publication date Nov 16, 2006
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Valve design and configuration for fast delivery system
- Publication number 20060213557
- Publication date Sep 28, 2006
- Vincent W. Ku
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Valve design and configuration for fast delivery system
- Publication number 20060213558
- Publication date Sep 28, 2006
- APPLIED MATERIALS, INC.
- Vincent W. Ku
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Sequential deposition of tantalum nitride using a tantalum-containi...
- Publication number 20060019494
- Publication date Jan 26, 2006
- Wei Cao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus of generating PDMAT precursor
- Publication number 20050189072
- Publication date Sep 1, 2005
- APPLIED MATERIALS, INC.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas delivery apparatus and method for atomic layer deposition
- Publication number 20050173068
- Publication date Aug 11, 2005
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for hybrid chemical processing
- Publication number 20040144311
- Publication date Jul 29, 2004
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing chamber configured for uniform gas flow
- Publication number 20040069227
- Publication date Apr 15, 2004
- APPLIED MATERIALS, INC.
- Vincent Ku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of film deposition using activated precursor gases
- Publication number 20040018304
- Publication date Jan 29, 2004
- APPLIED MATERIALS, INC.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for monitoring solid precursor delivery
- Publication number 20040015300
- Publication date Jan 22, 2004
- Seshadri Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus of generating PDMAT precursor
- Publication number 20040014320
- Publication date Jan 22, 2004
- APPLIED MATERIALS, INC.
- Ling Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for gas temperature control in a semiconductor...
- Publication number 20040011504
- Publication date Jan 22, 2004
- Vincent W. Ku
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Valve design and configuration for fast delivery system
- Publication number 20040011404
- Publication date Jan 22, 2004
- Vincent W. Ku
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Person

Patents Grantslast 30 patents

Gas delivery apparatus and method for atomic layer deposition

Apparatus and method for hybrid chemical processing

Method and apparatus for generating a precursor for a semiconductor...

Sequential deposition of tantalum nitride using a tantalum-containi...

Gas delivery apparatus for atomic layer deposition

Gas delivery apparatus for atomic layer deposition

Gas delivery apparatus for atomic layer deposition

Method for providing gas to a processing chamber

Chemical precursor ampoule for vapor deposition processes

Apparatus for hybrid chemical processing

Apparatus and method for generating a chemical precursor

Method and apparatus for providing precursor gas to a processing ch...

Method and apparatus for generating a precursor for a semiconductor...

Sequential deposition of tantalum nitride using a tantalum-containi...

Method and apparatus for providing precursor gas to a processing ch...

Processing chamber configured for uniform gas flow

Apparatus and method for hybrid chemical processing

Method and apparatus of generating PDMAT precursor

Valve design and configuration for fast delivery system

Apparatus and method for hybrid chemical processing

Apparatus for providing gas to a processing chamber

Valve design and configuration for fast delivery system

Sequential deposition of tantalum nitride using a tantalum-containi...

Method and apparatus for gas temperature control in a semiconductor...

Selective deposition of a barrier layer on a dielectric material

Gas delivery apparatus and method for atomic layer deposition

Method and apparatus of generating PDMAT precursor

Method of film deposition using activated precursor gases

Method and apparatus for monitoring solid precursor delivery

Temperature controlled gas feedthrough

Patents Applicationslast 30 patents

HEARING AID CONNECTOR

SEQUENTIAL DEPOSITION OF TANTALUM NITRIDE USING A TANTALUM-CONTAINI...

GAS DELIVERY APPARATUS AND METHOD FOR ATOMIC LAYER DEPOSITION

APPARATUS AND METHOD FOR HYBRID CHEMICAL PROCESSING

SEQUENTIAL DEPOSITION OF TANTALUM NITRIDE USING A TANTALUM-CONTAINI...

METHOD AND APPARATUS FOR GENERATING A PRECURSOR FOR A SEMICONDUCTOR...

METHOD AND APPARATUS FOR PROVIDING PRECURSOR GAS TO A PROCESSING CH...

APPARATUS AND METHOD FOR HYBRID CHEMICAL PROCESSING

CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES

GAS DELIVERY APPARATUS FOR ATOMIC LAYER DEPOSITION

ATOMIC LAYER DEPOSITION PROCESS

APPARATUS AND METHOD FOR HYBRID CHEMICAL PROCESSING

METHOD AND APPARATUS FOR PROVIDING PRECURSOR GAS TO A PROCESSING CH...

INTEGRATION PROCESS OF TUNGSTEN ATOMIC LAYER DEPOSITION FOR METALLI...

METHOD FOR PROVIDING GAS TO A PROCESSING CHAMBER

Method and apparatus for generating a precursor for a semiconductor...

PROCESSING CHAMBER CONFIGURED FOR UNIFORM GAS FLOW

APPARATUS AND METHOD FOR GENERATING A CHEMICAL PRECURSOR

Valve design and configuration for fast delivery system

Valve design and configuration for fast delivery system

Sequential deposition of tantalum nitride using a tantalum-containi...

Method and apparatus of generating PDMAT precursor

Gas delivery apparatus and method for atomic layer deposition

Apparatus and method for hybrid chemical processing

Processing chamber configured for uniform gas flow

Method of film deposition using activated precursor gases

Method and apparatus for monitoring solid precursor delivery

Method and apparatus of generating PDMAT precursor

Method and apparatus for gas temperature control in a semiconductor...

Valve design and configuration for fast delivery system