Adjusting the distance between two elements, at least one of them being movable

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CPC
B81B3/0056

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0056Adjusting the distance between two elements, at least one of them being movable

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microphone assembly with disturbance compensation
- Patent number 12,156,003
- Issue date Nov 26, 2024
- Knowles Electronics, LLC
- Jakob Kenn Toft
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sculpted micromirror in a digital micromirror device
- Patent number 11,977,220
- Issue date May 7, 2024
- Texas Instruments Incorporated
- William Craig McDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,952,267
- Issue date Apr 9, 2024
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Force feedback actuator for a MEMS transducer
- Patent number 11,516,597
- Issue date Nov 29, 2022
- Knowles Electronics, LLC
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tunable MEMS etalon device
- Patent number 11,474,343
- Issue date Oct 18, 2022
- UNISPECTRAL LTD.
- Ariel Raz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS driving device, electronic apparatus, and MEMS driving method
- Patent number 11,347,049
- Issue date May 31, 2022
- Seiko Epson Corporation
- Nozomu Hirokubo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,267,699
- Issue date Mar 8, 2022
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS element
- Patent number 11,214,481
- Issue date Jan 4, 2022
- Kabushiki Kaisha Toshiba
- Fumitaka Ishibashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 11,186,478
- Issue date Nov 30, 2021
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Sergiu Langa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator plate partitioning and control devices and methods
- Patent number 11,124,410
- Issue date Sep 21, 2021
- Wispry, Inc.
- Dana DeReus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device comprising a micro-electro-mechanical system substrate with...
- Patent number 11,040,871
- Issue date Jun 22, 2021
- Invensense, Inc.
- Jongwoo Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tunable MEMS etalon
- Patent number 10,827,152
- Issue date Nov 3, 2020
- TECHNOLOGY INNOVATION MOMENTUM FUND (ISRAEL) LIMITED PARTNERSHIP
- Viacheslav Krylov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical constituent and method for adjusting an adjustable...
- Patent number 10,627,617
- Issue date Apr 21, 2020
- Robert Bosch GmbH
- Frank Schatz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive transducer and acoustic sensor
- Patent number 10,440,481
- Issue date Oct 8, 2019
- Omron Corporation
- Takashi Kasai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensitivity compensation for capacitive MEMS device
- Patent number 10,433,070
- Issue date Oct 1, 2019
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Small wafer area MEMs switch
- Patent number 10,173,888
- Issue date Jan 8, 2019
- International Business Machines Corporation
- Bucknell C. Webb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Small wafer are MEMS switch
- Patent number 10,160,634
- Issue date Dec 25, 2018
- International Business Machines Corporation
- Bucknell C. Webb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator plate partitioning and control devices and methods
- Patent number 10,125,008
- Issue date Nov 13, 2018
- Wispry, Inc.
- Dana DeReus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro normally-closed structure and method for manufacturing the same
- Patent number 10,077,185
- Issue date Sep 18, 2018
- National Tsing Hua University
- Wei-Cheng Lai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Miniaturized and ruggedized wafer level MEMs force sensors
- Patent number 9,902,611
- Issue date Feb 27, 2018
- NEXTINPUT, INC.
- Amnon Brosh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Small wafer area MEMS switch
- Patent number 9,758,366
- Issue date Sep 12, 2017
- International Business Machines Corporation
- Bucknell C. Webb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having variable gap width and method of manufacture
- Patent number 9,573,799
- Issue date Feb 21, 2017
- NXP USA, INC.
- Andrew C. McNeil
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Recovery system and methods for MEMS devices
- Patent number 9,517,930
- Issue date Dec 13, 2016
- Hanking Electronics, Ltd.
- Gabriele Cazzaniga
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and apparatus for MEMS devices with increased sensitivity
- Patent number 9,505,605
- Issue date Nov 29, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitance type sensor and method of manufacturing the same
- Patent number 9,493,338
- Issue date Nov 15, 2016
- Omron Corporation
- Yusuke Nakagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional inter-chip contact through vertical displacement...
- Patent number 9,337,173
- Issue date May 10, 2016
- International Business Machines Corporation
- Kenneth J. Goodnow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid radio frequency component
- Patent number 9,251,984
- Issue date Feb 2, 2016
- Intel Corporation
- Hao-Han Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Variable capacitor
- Patent number 9,240,282
- Issue date Jan 19, 2016
- Alps Electric Co., Ltd.
- Shinji Murata
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone system with mechanically-coupled diaphragms
- Patent number 9,143,870
- Issue date Sep 22, 2015
- Invensense, Inc.
- Fang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Display apparatus with narrow gap electrostatic actuators
- Patent number 9,134,552
- Issue date Sep 15, 2015
- Pixtronix, Inc.
- Cait Ni Chleirigh
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPEN...
- Publication number 20240231078
- Publication date Jul 11, 2024
- TEXAS INSTRUMENTS INCORPORATED
- William McDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE
- Publication number 20240217809
- Publication date Jul 4, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhuanzhuan Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240092632
- Publication date Mar 21, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LAMINATED STRUCTURE AND METHOD OF MANUFACTURING LAMINATED STRUCTURE
- Publication number 20230239632
- Publication date Jul 27, 2023
- ROHM CO., LTD.
- Tatsuya SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROPHONE ASSEMBLY WITH DISTURBANCE COMPENSATION
- Publication number 20230112042
- Publication date Apr 13, 2023
- KNOWLES ELECTRONICS, LLC
- Jakob Kenn Toft
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20220144628
- Publication date May 12, 2022
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE
- Publication number 20210354978
- Publication date Nov 18, 2021
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibration-Driven Energy Harvesting Element, Method of Manufacturing...
- Publication number 20210331913
- Publication date Oct 28, 2021
- Saginomiya Seisakusho, Inc.
- Hisayuki Ashizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE AND A METHOD FOR BONDING
- Publication number 20210255376
- Publication date Aug 19, 2021
- Unispectral Ltd.
- Eliahu Chaim ASHKENAZI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORCE FEEDBACK ACTUATOR FOR A MEMS TRANSDUCER
- Publication number 20210176569
- Publication date Jun 10, 2021
- KNOWLES ELECTRONICS, LLC
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20200270123
- Publication date Aug 27, 2020
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
- Publication number 20200102209
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
- Publication number 20200024126
- Publication date Jan 23, 2020
- NextInput, Inc.
- Amnon Brosh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND METHOD OF MANUFACTURING THE SAME
- Publication number 20190382257
- Publication date Dec 19, 2019
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TUNABLE MEMS ETALON DEVICE
- Publication number 20190361220
- Publication date Nov 28, 2019
- Ariel RAZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DRIVING DEVICE, ELECTRONIC APPARATUS, AND MEMS DRIVING METHOD
- Publication number 20190285871
- Publication date Sep 19, 2019
- SEIKO EPSON CORPORATION
- Nozomu HIROKUBO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Sensitivity Compensation for Capacitive MEMS Device
- Publication number 20190273993
- Publication date Sep 5, 2019
- INFINEON TECHNOLOGIES AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS
- Publication number 20190144263
- Publication date May 16, 2019
- wiSpry, Inc.
- Dana DeReus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL CONSTITUENT AND METHOD FOR ADJUSTING AN ADJUSTABLE...
- Publication number 20180314056
- Publication date Nov 1, 2018
- ROBERT BOSCH GmbH
- Frank Schatz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TUNABLE MEMS ETALON
- Publication number 20180205915
- Publication date Jul 19, 2018
- Technology Innovation Momentum Fund (Israel) Limited Partnership
- Viacheslav KRYLOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
- Publication number 20180179050
- Publication date Jun 28, 2018
- NextInput, Inc.
- Amnon Brosh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SMALL WAFER AREA MEMS SWITCH
- Publication number 20170341931
- Publication date Nov 30, 2017
- Bucknell C. Webb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SMALL WAFER AREA MEMS SWITCH
- Publication number 20170341930
- Publication date Nov 30, 2017
- Bucknell C. Webb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OFFSET REJECTION ELECTRODES
- Publication number 20170260039
- Publication date Sep 14, 2017
- InvenSense, Inc.
- Matthew Julian THOMPSON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SMALL WAFER AREA MEMS SWITCH
- Publication number 20170166438
- Publication date Jun 15, 2017
- International Business Machines Corporation
- Bucknell C. Webb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
- Publication number 20160332866
- Publication date Nov 17, 2016
- NextInput, Inc.
- Amnon Brosh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods and Apparatus for MEMS Devices with Increased Sensitivity
- Publication number 20150338435
- Publication date Nov 26, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Package with Air Gap
- Publication number 20150145078
- Publication date May 28, 2015
- INFINEON TECHNOLOGIES AG
- Chee Yang Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITANCE TYPE SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20140367811
- Publication date Dec 18, 2014
- Omron Corporation
- Yusuke Nakagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED STRUCTURE WITH BIDIRECTIONAL VERTICAL ACTUATION
- Publication number 20140264645
- Publication date Sep 18, 2014
- INVENSENSE, INC.
- Michael Julian Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Adjusting the distance between two elements, at least one of them being movable

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microphone assembly with disturbance compensation

Sculpted micromirror in a digital micromirror device

Modification to rough polysilicon using ion implantation and silicide

Force feedback actuator for a MEMS transducer

Tunable MEMS etalon device

MEMS driving device, electronic apparatus, and MEMS driving method

Modification to rough polysilicon using ion implantation and silicide

MEMS element

MEMS and method of manufacturing the same

Actuator plate partitioning and control devices and methods

Device comprising a micro-electro-mechanical system substrate with...

Tunable MEMS etalon

Micromechanical constituent and method for adjusting an adjustable...

Capacitive transducer and acoustic sensor

Sensitivity compensation for capacitive MEMS device

Small wafer area MEMs switch

Small wafer are MEMS switch

Actuator plate partitioning and control devices and methods

Micro normally-closed structure and method for manufacturing the same

Miniaturized and ruggedized wafer level MEMs force sensors

Small wafer area MEMS switch

MEMS device having variable gap width and method of manufacture

Recovery system and methods for MEMS devices

Methods and apparatus for MEMS devices with increased sensitivity

Capacitance type sensor and method of manufacturing the same

Three-dimensional inter-chip contact through vertical displacement...

Hybrid radio frequency component

Variable capacitor

Microphone system with mechanically-coupled diaphragms

Display apparatus with narrow gap electrostatic actuators

Patents Applicationslast 30 patents

MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPEN...

MEMS MICROPHONE

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

LAMINATED STRUCTURE AND METHOD OF MANUFACTURING LAMINATED STRUCTURE

MICROPHONE ASSEMBLY WITH DISTURBANCE COMPENSATION

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE

Vibration-Driven Energy Harvesting Element, Method of Manufacturing...

OPTICAL DEVICE AND A METHOD FOR BONDING

FORCE FEEDBACK ACTUATOR FOR A MEMS TRANSDUCER

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

SIDEWALL STOPPER FOR MEMS DEVICE

MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS

MEMS AND METHOD OF MANUFACTURING THE SAME

TUNABLE MEMS ETALON DEVICE

MEMS DRIVING DEVICE, ELECTRONIC APPARATUS, AND MEMS DRIVING METHOD

Sensitivity Compensation for Capacitive MEMS Device

ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS

MICROMECHANICAL CONSTITUENT AND METHOD FOR ADJUSTING AN ADJUSTABLE...

TUNABLE MEMS ETALON

MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS

SMALL WAFER AREA MEMS SWITCH

SMALL WAFER AREA MEMS SWITCH

OFFSET REJECTION ELECTRODES

SMALL WAFER AREA MEMS SWITCH

MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS

Methods and Apparatus for MEMS Devices with Increased Sensitivity

Semiconductor Package with Air Gap

CAPACITANCE TYPE SENSOR AND METHOD OF MANUFACTURING THE SAME

INTEGRATED STRUCTURE WITH BIDIRECTIONAL VERTICAL ACTUATION