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Adjusting the distance between two elements, at least one of them being movable
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B81B3/0056
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B3/00
Devices comprising flexible or deformable elements
Current Industry
B81B3/0056
Adjusting the distance between two elements, at least one of them being movable
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Patents Grants
last 30 patents
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Patent Grant
Sculpted micromirror in a digital micromirror device
Patent number
11,977,220
Issue date
May 7, 2024
Texas Instruments Incorporated
William Craig McDonald
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Modification to rough polysilicon using ion implantation and silicide
Patent number
11,952,267
Issue date
Apr 9, 2024
Invensense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Force feedback actuator for a MEMS transducer
Patent number
11,516,597
Issue date
Nov 29, 2022
Knowles Electronics, LLC
Mohsin Nawaz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tunable MEMS etalon device
Patent number
11,474,343
Issue date
Oct 18, 2022
UNISPECTRAL LTD.
Ariel Raz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS driving device, electronic apparatus, and MEMS driving method
Patent number
11,347,049
Issue date
May 31, 2022
Seiko Epson Corporation
Nozomu Hirokubo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Modification to rough polysilicon using ion implantation and silicide
Patent number
11,267,699
Issue date
Mar 8, 2022
Invensense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS element
Patent number
11,214,481
Issue date
Jan 4, 2022
Kabushiki Kaisha Toshiba
Fumitaka Ishibashi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS and method of manufacturing the same
Patent number
11,186,478
Issue date
Nov 30, 2021
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Sergiu Langa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator plate partitioning and control devices and methods
Patent number
11,124,410
Issue date
Sep 21, 2021
Wispry, Inc.
Dana DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device comprising a micro-electro-mechanical system substrate with...
Patent number
11,040,871
Issue date
Jun 22, 2021
Invensense, Inc.
Jongwoo Shin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tunable MEMS etalon
Patent number
10,827,152
Issue date
Nov 3, 2020
TECHNOLOGY INNOVATION MOMENTUM FUND (ISRAEL) LIMITED PARTNERSHIP
Viacheslav Krylov
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical constituent and method for adjusting an adjustable...
Patent number
10,627,617
Issue date
Apr 21, 2020
Robert Bosch GmbH
Frank Schatz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive transducer and acoustic sensor
Patent number
10,440,481
Issue date
Oct 8, 2019
Omron Corporation
Takashi Kasai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensitivity compensation for capacitive MEMS device
Patent number
10,433,070
Issue date
Oct 1, 2019
Infineon Technologies AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Small wafer area MEMs switch
Patent number
10,173,888
Issue date
Jan 8, 2019
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Small wafer are MEMS switch
Patent number
10,160,634
Issue date
Dec 25, 2018
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator plate partitioning and control devices and methods
Patent number
10,125,008
Issue date
Nov 13, 2018
Wispry, Inc.
Dana DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro normally-closed structure and method for manufacturing the same
Patent number
10,077,185
Issue date
Sep 18, 2018
National Tsing Hua University
Wei-Cheng Lai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Miniaturized and ruggedized wafer level MEMs force sensors
Patent number
9,902,611
Issue date
Feb 27, 2018
NEXTINPUT, INC.
Amnon Brosh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Small wafer area MEMS switch
Patent number
9,758,366
Issue date
Sep 12, 2017
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having variable gap width and method of manufacture
Patent number
9,573,799
Issue date
Feb 21, 2017
NXP USA, INC.
Andrew C. McNeil
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Recovery system and methods for MEMS devices
Patent number
9,517,930
Issue date
Dec 13, 2016
Hanking Electronics, Ltd.
Gabriele Cazzaniga
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and apparatus for MEMS devices with increased sensitivity
Patent number
9,505,605
Issue date
Nov 29, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitance type sensor and method of manufacturing the same
Patent number
9,493,338
Issue date
Nov 15, 2016
Omron Corporation
Yusuke Nakagawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-dimensional inter-chip contact through vertical displacement...
Patent number
9,337,173
Issue date
May 10, 2016
International Business Machines Corporation
Kenneth J. Goodnow
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Hybrid radio frequency component
Patent number
9,251,984
Issue date
Feb 2, 2016
Intel Corporation
Hao-Han Hsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Variable capacitor
Patent number
9,240,282
Issue date
Jan 19, 2016
Alps Electric Co., Ltd.
Shinji Murata
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microphone system with mechanically-coupled diaphragms
Patent number
9,143,870
Issue date
Sep 22, 2015
Invensense, Inc.
Fang Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Display apparatus with narrow gap electrostatic actuators
Patent number
9,134,552
Issue date
Sep 15, 2015
Pixtronix, Inc.
Cait Ni Chleirigh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-dimensional inter-chip contact through vertical displacement...
Patent number
9,123,492
Issue date
Sep 1, 2015
International Business Machines Corporation
Kenneth J. Goodnow
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240092632
Publication date
Mar 21, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LAMINATED STRUCTURE AND METHOD OF MANUFACTURING LAMINATED STRUCTURE
Publication number
20230239632
Publication date
Jul 27, 2023
ROHM CO., LTD.
Tatsuya SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROPHONE ASSEMBLY WITH DISTURBANCE COMPENSATION
Publication number
20230112042
Publication date
Apr 13, 2023
KNOWLES ELECTRONICS, LLC
Jakob Kenn Toft
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
Publication number
20220144628
Publication date
May 12, 2022
InvenSense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE
Publication number
20210354978
Publication date
Nov 18, 2021
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Vibration-Driven Energy Harvesting Element, Method of Manufacturing...
Publication number
20210331913
Publication date
Oct 28, 2021
Saginomiya Seisakusho, Inc.
Hisayuki Ashizawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OPTICAL DEVICE AND A METHOD FOR BONDING
Publication number
20210255376
Publication date
Aug 19, 2021
Unispectral Ltd.
Eliahu Chaim ASHKENAZI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FORCE FEEDBACK ACTUATOR FOR A MEMS TRANSDUCER
Publication number
20210176569
Publication date
Jun 10, 2021
KNOWLES ELECTRONICS, LLC
Mohsin Nawaz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
Publication number
20200270123
Publication date
Aug 27, 2020
InvenSense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
Publication number
20200102209
Publication date
Apr 2, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Shih-Wei Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
Publication number
20200024126
Publication date
Jan 23, 2020
NextInput, Inc.
Amnon Brosh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS AND METHOD OF MANUFACTURING THE SAME
Publication number
20190382257
Publication date
Dec 19, 2019
Sergiu LANGA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TUNABLE MEMS ETALON DEVICE
Publication number
20190361220
Publication date
Nov 28, 2019
Ariel RAZ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DRIVING DEVICE, ELECTRONIC APPARATUS, AND MEMS DRIVING METHOD
Publication number
20190285871
Publication date
Sep 19, 2019
SEIKO EPSON CORPORATION
Nozomu HIROKUBO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Sensitivity Compensation for Capacitive MEMS Device
Publication number
20190273993
Publication date
Sep 5, 2019
INFINEON TECHNOLOGIES AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS
Publication number
20190144263
Publication date
May 16, 2019
wiSpry, Inc.
Dana DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL CONSTITUENT AND METHOD FOR ADJUSTING AN ADJUSTABLE...
Publication number
20180314056
Publication date
Nov 1, 2018
ROBERT BOSCH GmbH
Frank Schatz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TUNABLE MEMS ETALON
Publication number
20180205915
Publication date
Jul 19, 2018
Technology Innovation Momentum Fund (Israel) Limited Partnership
Viacheslav KRYLOV
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
Publication number
20180179050
Publication date
Jun 28, 2018
NextInput, Inc.
Amnon Brosh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SMALL WAFER AREA MEMS SWITCH
Publication number
20170341931
Publication date
Nov 30, 2017
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SMALL WAFER AREA MEMS SWITCH
Publication number
20170341930
Publication date
Nov 30, 2017
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OFFSET REJECTION ELECTRODES
Publication number
20170260039
Publication date
Sep 14, 2017
InvenSense, Inc.
Matthew Julian THOMPSON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SMALL WAFER AREA MEMS SWITCH
Publication number
20170166438
Publication date
Jun 15, 2017
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS
Publication number
20160332866
Publication date
Nov 17, 2016
NextInput, Inc.
Amnon Brosh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods and Apparatus for MEMS Devices with Increased Sensitivity
Publication number
20150338435
Publication date
Nov 26, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor Package with Air Gap
Publication number
20150145078
Publication date
May 28, 2015
INFINEON TECHNOLOGIES AG
Chee Yang Ng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITANCE TYPE SENSOR AND METHOD OF MANUFACTURING THE SAME
Publication number
20140367811
Publication date
Dec 18, 2014
Omron Corporation
Yusuke Nakagawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED STRUCTURE WITH BIDIRECTIONAL VERTICAL ACTUATION
Publication number
20140264645
Publication date
Sep 18, 2014
INVENSENSE, INC.
Michael Julian Daneman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE HAVING VARIABLE GAP WIDTH AND METHOD OF MANUFACTURE
Publication number
20140260616
Publication date
Sep 18, 2014
FREESCALE SEMICONDUCTOR, INC.
Andrew C. McNeil
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS
Publication number
20140268482
Publication date
Sep 18, 2014
Dana DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY