Arrangement of electrodes

Industry

CPC
H01J2237/06375

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/06375Arrangement of electrodes

Industries

Patents Grantslast 30 patents

Information Patent Grant
Scanning electron microscope device and electron beam inspection ap...
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- Issue date Feb 20, 2024
- Zhongke Jingyuan Electron Limited
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- H01 - BASIC ELECTRIC ELEMENTS
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Electron source devices, electron source assemblies, and methods fo...
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- Teledyne FLIR Detection, Inc.
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Corona/plasma treatment machine
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- Donald J. Weyer
- H01 - BASIC ELECTRIC ELEMENTS
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Electron gun, electron gun component, electron beam applicator, and...
- Patent number 11,842,879
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- Photo electron Soul Inc.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
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Charged-particle source
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- Issue date Aug 22, 2023
- IMS Nanofabrication GmbH
- Stefan Gerhold
- H01 - BASIC ELECTRIC ELEMENTS
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Space charge insensitive electron gun designs
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- Issue date Apr 12, 2022
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
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Charged particle source
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- Issue date Jul 27, 2021
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cold cathode field-emission electron gun, adjustment method for col...
- Patent number 11,031,208
- Issue date Jun 8, 2021
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
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Ion source
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- Issue date May 25, 2021
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
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Charged-particle source and method for cleaning a charged-particle...
- Patent number 10,840,054
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- IMS Nanofabrication GmbH
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Simplified particle emitter and method of operating thereof
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- Issue date Jun 30, 2020
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
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- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source
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- Issue date Nov 5, 2019
- Hermes-Microvision, Inc.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray tube including hybrid electron emission source
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- Issue date Dec 4, 2018
- Electronics and Telecommunications Research Institute
- Jun Tae Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for impinging bulk material with accelerated electrons
- Patent number 9,949,425
- Issue date Apr 24, 2018
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Frank-Holm Rögner
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Extractor electrode for electron source
- Patent number 9,934,933
- Issue date Apr 3, 2018
- KLA-Tencor Corporation
- Laurence S. Hordon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter device with integrated multi-pole electrode structure
- Patent number 9,793,089
- Issue date Oct 17, 2017
- KLA-Tencor Corporation
- Thomas Plettner
- B82 - NANO-TECHNOLOGY
Information Patent Grant
X-ray tube
- Patent number 9,653,248
- Issue date May 16, 2017
- Toshiba Electron Tubes & Devices Co., Ltd.
- Tomonari Ishihara
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Electron gun, charged particle gun, and charged particle beam appar...
- Patent number 9,570,268
- Issue date Feb 14, 2017
- Hitachi High-Technologies Corporation
- Yuta Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indirectly heated cathode cartridge design
- Patent number 9,076,625
- Issue date Jul 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Craig Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact high-voltage electron gun
- Patent number 8,957,394
- Issue date Feb 17, 2015
- KLA-Tencor Corporation
- Alan D. Brodie
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Electron gun used in particle beam device
- Patent number 8,890,444
- Issue date Nov 18, 2014
- Carl Zeiss Microscopy Limited
- Armin Heinz Hayn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particles beam apparatus and charged particles beam apparat...
- Patent number 8,809,799
- Issue date Aug 19, 2014
- Mamoru Nakasuji
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Non-planar extractor structure for electron source
- Patent number 8,513,619
- Issue date Aug 20, 2013
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitting source and manufacturing method of electron emitt...
- Patent number 8,456,076
- Issue date Jun 4, 2013
- Denki Kagaku Kogyo Kabushiki Kaisha
- Toshiyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle radiation device
- Patent number 8,426,835
- Issue date Apr 23, 2013
- Hitachi High-Technologies Corporation
- Keigo Kasuya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam emitter with slotted gun
- Patent number 8,338,796
- Issue date Dec 25, 2012
- Hitachi Zosen Corporation
- Steven Raymond Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun minimizing sublimation of electron source and electron...
- Patent number 8,330,344
- Issue date Dec 11, 2012
- Advantest Corp.
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Device for the field emission of particles and production method
- Patent number 8,242,674
- Issue date Aug 14, 2012
- Josef Sellmair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam source and method of manufacturing the same
- Patent number 8,164,071
- Issue date Apr 24, 2012
- Carl Zeiss NTS GmbH
- Volker Drexel
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Thermal field emission cathode
- Patent number 8,022,609
- Issue date Sep 20, 2011
- Hermes-Microvision, Inc.
- Zhong-Wei Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PA...
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- H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Gun and Charged Particle Beam Apparatus
- Publication number 20240212966
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- HITACHI HIGH-TECH CORPORATION
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- H01 - BASIC ELECTRIC ELEMENTS
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Equipment and Method for Improved Edge Uniformity of Plasma Process...
- Publication number 20230402255
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Barton Lane
- H01 - BASIC ELECTRIC ELEMENTS
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REMOTE SURFACE WAVE PROPAGATION FOR SEMICONDUCTOR CHAMBERS
- Publication number 20230335376
- Publication date Oct 19, 2023
- Yang YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF NUCLEAR REPROGRAMMING
- Publication number 20230282445
- Publication date Sep 7, 2023
- KYOTO UNIVERSITY
- Shinya Yamanaka
- H01 - BASIC ELECTRIC ELEMENTS
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ELECTRON GUN, ELECTRON GUN COMPONENT, ELECTRON BEAM APPLICATION DEV...
- Publication number 20230207249
- Publication date Jun 29, 2023
- PHOTO ELECTRON SOUL INC.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Gun and Charged Particle Beam System
- Publication number 20230178325
- Publication date Jun 8, 2023
- Hitachi High-Tech Corporation
- Masahiro FUKUTA
- H01 - BASIC ELECTRIC ELEMENTS
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PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20230078095
- Publication date Mar 16, 2023
- Samsung Electronics Co., Ltd.
- Dougyong SUNG
- H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230068224
- Publication date Mar 2, 2023
- PSK INC.
- Kwang Sung YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DETECTING DISCHARGE SITE
- Publication number 20230028337
- Publication date Jan 26, 2023
- NuFlare Technology, Inc.
- Toru ARIIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
- Publication number 20230005704
- Publication date Jan 5, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
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ION PRODUCTION SYSTEM WITH EFFICIENT ION COLLECTION
- Publication number 20220363558
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- SHINE Technologies, LLC
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- C01 - INORGANIC CHEMISTRY
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Corona/Plasma Treatment Machine
- Publication number 20220310358
- Publication date Sep 29, 2022
- 3DT LLC
- Donald J. Weyer
- H01 - BASIC ELECTRIC ELEMENTS
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CHARGED PARTICLE IRRADIATING DEVICE, SYSTEM, METHOD, AND PROGRAM
- Publication number 20220301819
- Publication date Sep 22, 2022
- Shishido Electrostatic, Ltd.
- Katsuyuki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
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CHARGED PARTICLE IRRADIATING DEVICE, SYSTEM, METHOD, AND PROGRAM
- Publication number 20220301820
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- Shishido Electrostatic, Ltd.
- Katsuyuki TAKAHASHI
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220199363
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
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SUBSTRATE PROCESSING APPARATUS
- Publication number 20220115215
- Publication date Apr 14, 2022
- KELK LTD.
- Atsushi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
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SYSTEMS, DEVICES, AND METHODS FOR ION BEAM MODULATION
- Publication number 20220084774
- Publication date Mar 17, 2022
- TAE TECHNOLOGIES, INC.
- Vladislav Vekselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20220068589
- Publication date Mar 3, 2022
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20200126753
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Space Charge Insensitive Electron Gun Designs
- Publication number 20190371564
- Publication date Dec 5, 2019
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
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Charged-Particle Source and Method for Cleaning a Charged-Particle...
- Publication number 20190237288
- Publication date Aug 1, 2019
- IMS Nanofabrication GmbH
- Elmar Platzgummer
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Cold Cathode Field-Emission Electron Gun, Cold Cathode Field-Emissi...
- Publication number 20190096626
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- JEOL Ltd.
- Yuji Kohno
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Charged Particle Source
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- Publication date Feb 21, 2019
- HERMES MICROVISION, INC.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
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SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF
- Publication number 20180254165
- Publication date Sep 6, 2018
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
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Ion Implanter
- Publication number 20180138007
- Publication date May 17, 2018
- Nissin Ion Equipment Co., Ltd.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
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APPARATUS FOR IMPINGING BULK MATERIAL WITH ACCELERATED ELECTRONS
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- Publication date Dec 29, 2016
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank-Holm RÖGNER
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Application
ARC-PLASMA FILM FORMATION DEVICE
- Publication number 20160071702
- Publication date Mar 10, 2016
- Shimadzu Corporation
- Masayasu SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged practicles beam apparatus and charged particles beam appara...
- Publication number 20140097352
- Publication date Apr 10, 2014
- Mamoru Nakasuji
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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COMPACT HIGH-VOLTAGE ELECTRON GUN
- Publication number 20130134324
- Publication date May 30, 2013
- KLA-Tencor Corporation
- Alan D. BRODIE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Arrangement of electrodes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Scanning electron microscope device and electron beam inspection ap...

Electron source devices, electron source assemblies, and methods fo...

Corona/plasma treatment machine

Electron gun, electron gun component, electron beam applicator, and...

Charged-particle source

Space charge insensitive electron gun designs

Charged particle source

Cold cathode field-emission electron gun, adjustment method for col...

Ion source

Charged-particle source and method for cleaning a charged-particle...

Simplified particle emitter and method of operating thereof

Charged particle source

X-ray tube including hybrid electron emission source

Apparatus for impinging bulk material with accelerated electrons

Extractor electrode for electron source

Electron emitter device with integrated multi-pole electrode structure

X-ray tube

Electron gun, charged particle gun, and charged particle beam appar...

Indirectly heated cathode cartridge design

Compact high-voltage electron gun

Electron gun used in particle beam device

Charged particles beam apparatus and charged particles beam apparat...

Non-planar extractor structure for electron source

Electron emitting source and manufacturing method of electron emitt...

Charged particle radiation device

Electron beam emitter with slotted gun

Electron gun minimizing sublimation of electron source and electron...

Device for the field emission of particles and production method

Electron beam source and method of manufacturing the same

Thermal field emission cathode

Patents Applicationslast 30 patents

SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PA...

Charged Particle Gun and Charged Particle Beam Apparatus

Equipment and Method for Improved Edge Uniformity of Plasma Process...

REMOTE SURFACE WAVE PROPAGATION FOR SEMICONDUCTOR CHAMBERS

METHOD OF NUCLEAR REPROGRAMMING

ELECTRON GUN, ELECTRON GUN COMPONENT, ELECTRON BEAM APPLICATION DEV...

Charged Particle Gun and Charged Particle Beam System

PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD AND APPARATUS FOR DETECTING DISCHARGE SITE

SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...

ION PRODUCTION SYSTEM WITH EFFICIENT ION COLLECTION

Corona/Plasma Treatment Machine

CHARGED PARTICLE IRRADIATING DEVICE, SYSTEM, METHOD, AND PROGRAM

CHARGED PARTICLE IRRADIATING DEVICE, SYSTEM, METHOD, AND PROGRAM

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SYSTEMS, DEVICES, AND METHODS FOR ION BEAM MODULATION

CHARGED PARTICLE SOURCE

CHARGED PARTICLE SOURCE

Space Charge Insensitive Electron Gun Designs

Charged-Particle Source and Method for Cleaning a Charged-Particle...

Cold Cathode Field-Emission Electron Gun, Cold Cathode Field-Emissi...

Charged Particle Source

SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF

Ion Implanter

APPARATUS FOR IMPINGING BULK MATERIAL WITH ACCELERATED ELECTRONS

ARC-PLASMA FILM FORMATION DEVICE

Charged practicles beam apparatus and charged particles beam appara...

COMPACT HIGH-VOLTAGE ELECTRON GUN