Arrangements of deformable or non-deformable structures

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B81C1/00182

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00182Arrangements of deformable or non-deformable structures

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing an electroacoustic transducer
- Patent number 12,168,602
- Issue date Dec 17, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Loïc Joet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built on substrate with ruthenium based contact surface...
- Patent number 12,148,580
- Issue date Nov 19, 2024
- Menlo Microsystems, Inc.
- Andrew Minnick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for micro-vibrator and method of manufacturing in...
- Patent number 12,104,904
- Issue date Oct 1, 2024
- Denso Corporation
- Teruhisa Akashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having an improved stress distribution and manufacturin...
- Patent number 12,084,341
- Issue date Sep 10, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 12,081,192
- Issue date Sep 3, 2024
- Stathera IP Holdings, Inc.
- Vamsy P. Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 12,071,342
- Issue date Aug 27, 2024
- Stathera IP Holding, Inc.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process of fabricating lateral mode capacitive microphone including...
- Patent number 12,069,455
- Issue date Aug 20, 2024
- GMEMS TECH SHENZHEN LIMITED
- Guanghua Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a polysilicon SOI substrate including a ca...
- Patent number 11,978,658
- Issue date May 7, 2024
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 11,932,533
- Issue date Mar 19, 2024
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of miniature fluid actuator
- Patent number 11,905,168
- Issue date Feb 20, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acoustic transduction unit, manufacturing method thereof and acoust...
- Patent number 11,905,169
- Issue date Feb 20, 2024
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Jingwen Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of manufacturing semiconductor device
- Patent number 11,897,761
- Issue date Feb 13, 2024
- Amkor Technology Singapore Holding Pte Ltd.
- Ki Yeul Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Packaged device with die wrapped by a substrate
- Patent number 11,887,906
- Issue date Jan 30, 2024
- Texas Instruments Incorporated
- Sreenivasan K. Koduri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic-type transducer and manufacturing method thereof
- Patent number 11,873,213
- Issue date Jan 16, 2024
- Sumitomo Riko Company Limited
- Koichi Hasegawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing at least one membrane system, membrane sys...
- Patent number 11,866,323
- Issue date Jan 9, 2024
- Robert Bosch GmbH
- Renate Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical pressure sensor device including a diaphragm system...
- Patent number 11,788,912
- Issue date Oct 17, 2023
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dimensional consistency of miniature loudspeakers
- Patent number 11,729,569
- Issue date Aug 15, 2023
- Bose Corporation
- Mark A. Hayner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fused quartz dual shell resonator and method of fabrication
- Patent number 11,703,330
- Issue date Jul 18, 2023
- The Regents of the University of California
- Andrei M. Shkel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical microsystem and associated manufacturing method
- Patent number 11,679,974
- Issue date Jun 20, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Thierry Hilt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 11,664,781
- Issue date May 30, 2023
- STATHERA IP HOLDINGS INC.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor device, method for manufacturing a sensor device and sensor...
- Patent number 11,635,401
- Issue date Apr 25, 2023
- TDK Corporation
- Matthias König
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS pressure sensor
- Patent number 11,579,033
- Issue date Feb 14, 2023
- MEI Micro, Inc.
- Robert Mark Boysel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual back-plate and diaphragm microphone
- Patent number 11,533,565
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built on substrate with ruthenium based contact surface...
- Patent number 11,501,928
- Issue date Nov 15, 2022
- Menlo Microsystems, Inc.
- Andrew Minnick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 11,479,460
- Issue date Oct 25, 2022
- STATHERA IP HOLDINGS INC.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-purpose MEMS thermopile sensors
- Patent number 11,454,553
- Issue date Sep 27, 2022
- Xiang Zheng Tu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectromechanical device with a mo...
- Patent number 11,440,794
- Issue date Sep 13, 2022
- STMicroelectronics S.r.l.
- Sonia Costantini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for producing thin-film layers and microsystems having thin...
- Patent number 11,414,320
- Issue date Aug 16, 2022
- Infineon Technologies AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for multiple MEMS sound transducers
- Patent number 11,375,317
- Issue date Jun 28, 2022
- USOUND GMBH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device having two buried cavities and manu...
- Patent number 11,358,862
- Issue date Jun 14, 2022
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE
- Publication number 20250019226
- Publication date Jan 16, 2025
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
- Publication number 20240425359
- Publication date Dec 26, 2024
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR
- Publication number 20240417240
- Publication date Dec 19, 2024
- CENTER FOR ADVANCED SOFT ELECTRONICS
- Kilwon CHO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
- Publication number 20240391760
- Publication date Nov 28, 2024
- STMicroelectronics International N.V.
- Silvia NICOLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AN IMPROVED CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCER
- Publication number 20240359968
- Publication date Oct 31, 2024
- ATOA Scientific Technologies Pvt. Ltd
- Raj CN Thiagarajan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSING MODULE AND MANUFACTURING METHOD THEREOF
- Publication number 20240327205
- Publication date Oct 3, 2024
- Coretronic MEMS Corporation
- Mei-Ling Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...
- Publication number 20240253977
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...
- Publication number 20240208801
- Publication date Jun 27, 2024
- UPBEAT TECHNOLOGY Co., Ltd
- Hsi-Wen TUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING CURVED SURFACE SUPPORT STRUCTURE, AND HEMI...
- Publication number 20240199414
- Publication date Jun 20, 2024
- TOKYO KEIKI INC.
- Takayoshi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240190700
- Publication date Jun 13, 2024
- Amkor Technology Singapore Holding Pte. Ltd.
- Ki Yeul YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE
- Publication number 20240174514
- Publication date May 30, 2024
- INFINEON TECHNOLOGIES AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
- Publication number 20240125599
- Publication date Apr 18, 2024
- The Regents of the University of California
- Andrei M. SHKEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A STRUCTURE COMPRISING A PLURALITY OF MEMB...
- Publication number 20240010491
- Publication date Jan 11, 2024
- SOITEC
- Bruno Ghyselen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PRESSURE SENSOR
- Publication number 20230417614
- Publication date Dec 28, 2023
- MEI Micro, Inc.
- Robert Mark Boysel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20230308076
- Publication date Sep 28, 2023
- Stathera IP Holdings Inc.
- Vamsy P. Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICES HAVING A MEMBRANE LAYER WITH SMOOTH STRESS-RE...
- Publication number 20230224657
- Publication date Jul 13, 2023
- INFINEON TECHNOLOGIES AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION
- Publication number 20230105699
- Publication date Apr 6, 2023
- Skyworks Solutions, Inc.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...
- Publication number 20230107094
- Publication date Apr 6, 2023
- STMicroelectronics S.r.l.
- Gianluca LONGONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20230051438
- Publication date Feb 16, 2023
- Stathera IP Holdings Inc.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20220417632
- Publication date Dec 29, 2022
- DB HITEK CO., LTD.
- Myeong Hwan LIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220298008
- Publication date Sep 22, 2022
- Amkor Technology Singapore Holding Pte. Ltd.
- Ki Yeul YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR SEALING CAVITIES USING MEMBRANES
- Publication number 20220298007
- Publication date Sep 22, 2022
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Thierry SALVETAT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTIC TRANSDUCTION UNIT, MANUFACTURING METHOD THEREOF AND ACOUST...
- Publication number 20220289563
- Publication date Sep 15, 2022
- Beijing BOE Technology Development Co., Ltd.
- Jingwen GUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUPPORT STRUCTURE FOR MICRO-VIBRATOR AND METHOD OF MANUFACTURING IN...
- Publication number 20220187072
- Publication date Jun 16, 2022
- DENSO CORPORATION
- TERUHISA AKASHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A POLYSILICON SOI SUBSTRATE INCLUDING A CA...
- Publication number 20220172981
- Publication date Jun 2, 2022
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
- Publication number 20220119245
- Publication date Apr 21, 2022
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING AN ELECTROACOUSTIC TRANSDUCER
- Publication number 20220098032
- Publication date Mar 31, 2022
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Loïc JOET
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGED DEVICE WITH DIE WRAPPED BY A SUBSTRATE
- Publication number 20220077014
- Publication date Mar 10, 2022
- TEXAS INSTRUMENTS INCORPORATED
- Sreenivasan K. Koduri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Electromechanical Systems Including Printed Circuit Boards an...
- Publication number 20210380400
- Publication date Dec 9, 2021
- University of Utah Research Foundation
- Moritz Leber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS OF FABRICATING LATERAL MODE CAPACITIVE MICROPHONE INCLUDING...
- Publication number 20210314718
- Publication date Oct 7, 2021
- GMEMS TECH SHENZHEN LIMITED
- Guanghua Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Arrangements of deformable or non-deformable structures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing an electroacoustic transducer

MEMS device built on substrate with ruthenium based contact surface...

Support structure for micro-vibrator and method of manufacturing in...

MEMS device having an improved stress distribution and manufacturin...

Methods and devices for microelectromechanical resonators

Methods and devices for microelectromechanical resonators

Process of fabricating lateral mode capacitive microphone including...

Method for manufacturing a polysilicon SOI substrate including a ca...

Signal processing circuit for triple-membrane MEMS device

Manufacturing method of miniature fluid actuator

Acoustic transduction unit, manufacturing method thereof and acoust...

Semiconductor device and method of manufacturing semiconductor device

Packaged device with die wrapped by a substrate

Electrostatic-type transducer and manufacturing method thereof

Method for manufacturing at least one membrane system, membrane sys...

Micromechanical pressure sensor device including a diaphragm system...

Dimensional consistency of miniature loudspeakers

Fused quartz dual shell resonator and method of fabrication

Mechanical microsystem and associated manufacturing method

Methods and devices for microelectromechanical resonators

Sensor device, method for manufacturing a sensor device and sensor...

MEMS pressure sensor

Dual back-plate and diaphragm microphone

MEMS device built on substrate with ruthenium based contact surface...

Methods and devices for microelectromechanical resonators

Multi-purpose MEMS thermopile sensors

Process for manufacturing a microelectromechanical device with a mo...

Methods for producing thin-film layers and microsystems having thin...

Manufacturing method for multiple MEMS sound transducers

Micro-electro-mechanical device having two buried cavities and manu...

Patents Applicationslast 30 patents

MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...

ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR

CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS

AN IMPROVED CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCER

PRESSURE SENSING MODULE AND MANUFACTURING METHOD THEREOF

MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...

METHOD FOR MANUFACTURING CURVED SURFACE SUPPORT STRUCTURE, AND HEMI...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE

FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION

METHOD FOR MANUFACTURING A STRUCTURE COMPRISING A PLURALITY OF MEMB...

MEMS PRESSURE SENSOR

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

SEMICONDUCTOR DEVICES HAVING A MEMBRANE LAYER WITH SMOOTH STRESS-RE...

PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR SEALING CAVITIES USING MEMBRANES

ACOUSTIC TRANSDUCTION UNIT, MANUFACTURING METHOD THEREOF AND ACOUST...

SUPPORT STRUCTURE FOR MICRO-VIBRATOR AND METHOD OF MANUFACTURING IN...

METHOD FOR MANUFACTURING A POLYSILICON SOI SUBSTRATE INCLUDING A CA...

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...

METHOD FOR MANUFACTURING AN ELECTROACOUSTIC TRANSDUCER

PACKAGED DEVICE WITH DIE WRAPPED BY A SUBSTRATE

Micro-Electromechanical Systems Including Printed Circuit Boards an...

PROCESS OF FABRICATING LATERAL MODE CAPACITIVE MICROPHONE INCLUDING...