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Arrangements of deformable or non-deformable structures
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
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B81C1/00182
Arrangements of deformable or non-deformable structures
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Patents Grants
last 30 patents
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Patent Grant
Method for manufacturing a polysilicon SOI substrate including a ca...
Patent number
11,978,658
Issue date
May 7, 2024
Robert Bosch GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Signal processing circuit for triple-membrane MEMS device
Patent number
11,932,533
Issue date
Mar 19, 2024
Infineon Technologies AG
Marc Fueldner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing method of miniature fluid actuator
Patent number
11,905,168
Issue date
Feb 20, 2024
Microjet Technology Co., Ltd.
Hao-Jan Mou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acoustic transduction unit, manufacturing method thereof and acoust...
Patent number
11,905,169
Issue date
Feb 20, 2024
BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
Jingwen Guo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method of manufacturing semiconductor device
Patent number
11,897,761
Issue date
Feb 13, 2024
Amkor Technology Singapore Holding Pte Ltd.
Ki Yeul Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaged device with die wrapped by a substrate
Patent number
11,887,906
Issue date
Jan 30, 2024
Texas Instruments Incorporated
Sreenivasan K. Koduri
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrostatic-type transducer and manufacturing method thereof
Patent number
11,873,213
Issue date
Jan 16, 2024
Sumitomo Riko Company Limited
Koichi Hasegawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing at least one membrane system, membrane sys...
Patent number
11,866,323
Issue date
Jan 9, 2024
Robert Bosch GmbH
Renate Mueller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical pressure sensor device including a diaphragm system...
Patent number
11,788,912
Issue date
Oct 17, 2023
Robert Bosch GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dimensional consistency of miniature loudspeakers
Patent number
11,729,569
Issue date
Aug 15, 2023
Bose Corporation
Mark A. Hayner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fused quartz dual shell resonator and method of fabrication
Patent number
11,703,330
Issue date
Jul 18, 2023
The Regents of the University of California
Andrei M. Shkel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mechanical microsystem and associated manufacturing method
Patent number
11,679,974
Issue date
Jun 20, 2023
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Thierry Hilt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and devices for microelectromechanical resonators
Patent number
11,664,781
Issue date
May 30, 2023
STATHERA IP HOLDINGS INC.
Vamsy Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor device, method for manufacturing a sensor device and sensor...
Patent number
11,635,401
Issue date
Apr 25, 2023
TDK Corporation
Matthias König
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS pressure sensor
Patent number
11,579,033
Issue date
Feb 14, 2023
MEI Micro, Inc.
Robert Mark Boysel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual back-plate and diaphragm microphone
Patent number
11,533,565
Issue date
Dec 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device built on substrate with ruthenium based contact surface...
Patent number
11,501,928
Issue date
Nov 15, 2022
Menlo Microsystems, Inc.
Andrew Minnick
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and devices for microelectromechanical resonators
Patent number
11,479,460
Issue date
Oct 25, 2022
STATHERA IP HOLDINGS INC.
Vamsy Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-purpose MEMS thermopile sensors
Patent number
11,454,553
Issue date
Sep 27, 2022
Xiang Zheng Tu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a microelectromechanical device with a mo...
Patent number
11,440,794
Issue date
Sep 13, 2022
STMicroelectronics S.r.l.
Sonia Costantini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for producing thin-film layers and microsystems having thin...
Patent number
11,414,320
Issue date
Aug 16, 2022
Infineon Technologies AG
Alfred Sigl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing method for multiple MEMS sound transducers
Patent number
11,375,317
Issue date
Jun 28, 2022
USOUND GMBH
Andrea Rusconi Clerici Beltrami
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical device having two buried cavities and manu...
Patent number
11,358,862
Issue date
Jun 14, 2022
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method of manufacturing semiconductor device
Patent number
11,352,252
Issue date
Jun 7, 2022
Amkor Technology Singapore Holding Pte Ltd.
Ki Yeul Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric microelectromechanical acoustic transducer having imp...
Patent number
11,350,218
Issue date
May 31, 2022
STMicroelectronics S.r.l.
Fabrizio Cerini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with suspension structure and method of making a MEMS d...
Patent number
11,300,778
Issue date
Apr 12, 2022
Infineon Technologies AG
Stephan Gerhard Albert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a MEMS micromirror device, and associated...
Patent number
11,294,168
Issue date
Apr 5, 2022
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Small-array MEMS microphone apparatus and noise suppression method...
Patent number
11,284,187
Issue date
Mar 22, 2022
Fortemedia, Inc.
Yen-Son Paul Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of producing a cavity having a porous structure
Patent number
11,268,122
Issue date
Mar 8, 2022
Fraunhofer-Gesellschaft zur Foerderung der anaewandten Forschunq e.V.
Thomas Lisec
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor manufacturing method and structure thereof
Patent number
11,254,564
Issue date
Feb 22, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
Publication number
20240125599
Publication date
Apr 18, 2024
The Regents of the University of California
Andrei M. SHKEL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A STRUCTURE COMPRISING A PLURALITY OF MEMB...
Publication number
20240010491
Publication date
Jan 11, 2024
SOITEC
Bruno Ghyselen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PRESSURE SENSOR
Publication number
20230417614
Publication date
Dec 28, 2023
MEI Micro, Inc.
Robert Mark Boysel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
Publication number
20230308076
Publication date
Sep 28, 2023
Stathera IP Holdings Inc.
Vamsy P. Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICES HAVING A MEMBRANE LAYER WITH SMOOTH STRESS-RE...
Publication number
20230224657
Publication date
Jul 13, 2023
INFINEON TECHNOLOGIES AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION
Publication number
20230105699
Publication date
Apr 6, 2023
Skyworks Solutions, Inc.
Guofeng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...
Publication number
20230107094
Publication date
Apr 6, 2023
STMicroelectronics S.r.l.
Gianluca LONGONI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
Publication number
20230051438
Publication date
Feb 16, 2023
Stathera IP Holdings Inc.
Vamsy Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20220417632
Publication date
Dec 29, 2022
DB HITEK CO., LTD.
Myeong Hwan LIM
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20220298008
Publication date
Sep 22, 2022
Amkor Technology Singapore Holding Pte. Ltd.
Ki Yeul YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR SEALING CAVITIES USING MEMBRANES
Publication number
20220298007
Publication date
Sep 22, 2022
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Thierry SALVETAT
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACOUSTIC TRANSDUCTION UNIT, MANUFACTURING METHOD THEREOF AND ACOUST...
Publication number
20220289563
Publication date
Sep 15, 2022
Beijing BOE Technology Development Co., Ltd.
Jingwen GUO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT STRUCTURE FOR MICRO-VIBRATOR AND METHOD OF MANUFACTURING IN...
Publication number
20220187072
Publication date
Jun 16, 2022
DENSO CORPORATION
TERUHISA AKASHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A POLYSILICON SOI SUBSTRATE INCLUDING A CA...
Publication number
20220172981
Publication date
Jun 2, 2022
ROBERT BOSCH GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
Publication number
20220119245
Publication date
Apr 21, 2022
STMicroelectronics S.r.l
Nicolo' BONI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING AN ELECTROACOUSTIC TRANSDUCER
Publication number
20220098032
Publication date
Mar 31, 2022
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Loïc JOET
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGED DEVICE WITH DIE WRAPPED BY A SUBSTRATE
Publication number
20220077014
Publication date
Mar 10, 2022
TEXAS INSTRUMENTS INCORPORATED
Sreenivasan K. Koduri
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micro-Electromechanical Systems Including Printed Circuit Boards an...
Publication number
20210380400
Publication date
Dec 9, 2021
University of Utah Research Foundation
Moritz Leber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS OF FABRICATING LATERAL MODE CAPACITIVE MICROPHONE INCLUDING...
Publication number
20210314718
Publication date
Oct 7, 2021
GMEMS TECH SHENZHEN LIMITED
Guanghua Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE
Publication number
20210314707
Publication date
Oct 7, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING AT LEAST ONE MEMBRANE SYSTEM, MEMBRANE SYS...
Publication number
20210238031
Publication date
Aug 5, 2021
ROBERT BOSCH GmbH
Renate Mueller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL PRESSURE SENSOR DEVICE AND CORRESPONDING MANUFACTUR...
Publication number
20210215559
Publication date
Jul 15, 2021
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MECHANICAL MICROSYSTEM AND ASSOCIATED MANUFACTURING METHOD
Publication number
20210163279
Publication date
Jun 3, 2021
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Thierry HILT
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PRESSURE SENSOR
Publication number
20210156756
Publication date
May 27, 2021
MEI Micro, Inc.
Robert Mark Boysel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING METHOD OF MINIATURE FLUID ACTUATOR
Publication number
20210147221
Publication date
May 20, 2021
Microjet Technology Co., Ltd.
Hao-Jan Mou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Sensor Device, Method for Manufacturing a Sensor Device and Sensor...
Publication number
20210148845
Publication date
May 20, 2021
TKD CORPORATION
Matthias König
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Multi-Purpose MEMS Thermopile Sensors
Publication number
20210063248
Publication date
Mar 4, 2021
Xiang Zheng Tu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods for Producing Thin-Film Layers and Microsystems Having Thin...
Publication number
20210017019
Publication date
Jan 21, 2021
INFINEON TECHNOLOGIES AG
Alfred Sigl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGED DEVICE WITH DIE WRAPPED BY A SUBSTRATE
Publication number
20210013116
Publication date
Jan 14, 2021
TEXAS INSTRUMENTS INCORPORATED
Sreenivasan K. Koduri
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE SENSOR
Publication number
20210000383
Publication date
Jan 7, 2021
King Abdullah University of Science and Technology
Muhammad Mustafa HUSSAIN
B81 - MICRO-STRUCTURAL TECHNOLOGY