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Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
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CPC
B81C1/00333
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/00333
Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
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