Avoid charge built-up

Industry

CPC
B81C1/00579

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00579Avoid charge built-up

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of production of semiconductor device having semiconductor l...
- Patent number 10,479,675
- Issue date Nov 19, 2019
- Denso Corporation
- Akira Ogawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level packaging for MEMS device
- Patent number 10,301,171
- Issue date May 28, 2019
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Siddharth Chakravarty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor devices with moving members and methods for making th...
- Patent number 10,087,069
- Issue date Oct 2, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor devices with moving members and methods for making th...
- Patent number 9,586,811
- Issue date Mar 7, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical bypass structure for MEMS device
- Patent number 8,878,312
- Issue date Nov 4, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Ming Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching structures into an etching body using a plasma
- Patent number 7,785,486
- Issue date Aug 31, 2010
- Robert Bosch GmbH
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for reducing surface charges during the manufacture of micr...
- Patent number 7,763,546
- Issue date Jul 27, 2010
- QUALCOMM MEMS Technologies, Inc.
- Manish Kothari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacture for microelectromechanical devices
- Patent number 7,704,772
- Issue date Apr 27, 2010
- QUALCOMM MEMS Technologies, Inc.
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabrication MEMS-resonator
- Patent number 7,666,700
- Issue date Feb 23, 2010
- Oki Semiconductor Co., Ltd.
- Yasushi Igarashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Switches for shorting during MEMS etch release
- Patent number 7,556,981
- Issue date Jul 7, 2009
- QUALCOMM MEMS Technologies, Inc.
- William J. Cummings
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacture for microelectromechanical devices
- Patent number 7,476,327
- Issue date Jan 13, 2009
- IDC, LLC
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing external force detection sensor
- Patent number 7,393,714
- Issue date Jul 1, 2008
- Murata Manufacturing Co., Ltd.
- Takahiro Oguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for microfabricating structures using silicon-on-insulator m...
- Patent number 7,335,527
- Issue date Feb 26, 2008
- William D. Sawyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a gyroscope
- Patent number 7,225,524
- Issue date Jun 5, 2007
- Samsung Electronics Co., Ltd.
- Moon-chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon-on-insulator substrate, fabricating method thereof, and met...
- Patent number 7,208,800
- Issue date Apr 24, 2007
- Samsung Electronics Co., Ltd.
- Seok-whan Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing an external force detection sensor
- Patent number 7,067,344
- Issue date Jun 27, 2006
- Murata Manufacturing Co., Ltd.
- Takahiro Oguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing an external force detection sensor
- Patent number 7,049,165
- Issue date May 23, 2006
- Murata Manufacturing Co., Ltd.
- Takahiro Oguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dissipation of a charge buildup on a wafer portion
- Patent number 7,038,293
- Issue date May 2, 2006
- Northrop Grumman Corp.
- Youngmin A. Choi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 6,953,753
- Issue date Oct 11, 2005
- Denso Corporation
- Junji Oohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for microfabricating structures using silicon-on-insulator m...
- Patent number 6,946,314
- Issue date Sep 20, 2005
- The Charles Stark Draper Laboratory, Inc.
- William D. Sawyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Notch-free etching of high aspect SOI structures using alternating...
- Patent number 6,905,626
- Issue date Jun 14, 2005
- Unaxis USA Inc.
- Russell Westerman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 6,713,403
- Issue date Mar 30, 2004
- Denso Corporation
- Junji Oohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microdevice and its production method
- Patent number 6,528,724
- Issue date Mar 4, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Yukihisa Yoshida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deep reactive ion etching process and microelectromechanical device...
- Patent number 6,500,348
- Issue date Dec 31, 2002
- Delphi Technologies, Inc.
- Troy A. Chase
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE PRODUCTION METHOD
- Publication number 20190023563
- Publication date Jan 24, 2019
- DENSO CORPORATION
- Akira OGAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Devices with Moving Members and Methods for Making th...
- Publication number 20170166435
- Publication date Jun 15, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Devices With Moving Members and Methods for Making th...
- Publication number 20120313235
- Publication date Dec 13, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL BYPASS STRUCTURE FOR MEMS DEVICE
- Publication number 20120223613
- Publication date Sep 6, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Ming Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES
- Publication number 20090068781
- Publication date Mar 12, 2009
- IDC, LLC
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING MEMS-RESONATOR
- Publication number 20080233673
- Publication date Sep 25, 2008
- Oki Electric Industry Co., Ltd.
- Yasushi Igarashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Switches for shorting during MEMS etch release
- Publication number 20080160251
- Publication date Jul 3, 2008
- William J. Cummings
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON ON METAL FOR MEMS DEVICES
- Publication number 20080032501
- Publication date Feb 7, 2008
- Honeywell International Inc.
- Jonathan L. Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR REDUCING SURFACE CHARGES DURING THE MANUFACTURE OF MICR...
- Publication number 20080029481
- Publication date Feb 7, 2008
- Manish Kothari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing an external force detection sensor
- Publication number 20060110843
- Publication date May 25, 2006
- Takahiro Oguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Silicon-on-insulator substrate, fabricating method thereof, and met...
- Publication number 20060081929
- Publication date Apr 20, 2006
- SAMSUNG ELECTRONICS CO., LTD.
- Seok-whan Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for microfabricating structures using silicon-on-insulator m...
- Publication number 20060014358
- Publication date Jan 19, 2006
- William D. Sawyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Selection of wavelengths for end point in a time division multiplex...
- Publication number 20060006139
- Publication date Jan 12, 2006
- David Johnson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacture for microelectromechanical devices
- Publication number 20050249966
- Publication date Nov 10, 2005
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dissipation of a charge buildup on a wafer portion
- Publication number 20050212077
- Publication date Sep 29, 2005
- Youngmin A. Choi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for gyroscope using SMS wafer and gyroscope fabricated by th...
- Publication number 20050132798
- Publication date Jun 23, 2005
- SAMSUNG ELECTRONICS CO., LTD.
- Moon-chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of etching structures into an etching body using a plasma
- Publication number 20040124177
- Publication date Jul 1, 2004
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing an external force detection sensor
- Publication number 20040110318
- Publication date Jun 10, 2004
- Murata Manufacturing Co., Ltd.
- Takahiro Oguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for microfabricating structures using silicon-on-insulator m...
- Publication number 20040102021
- Publication date May 27, 2004
- William D. Sawyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Notch-free etching of high aspect SOI structures using alternating...
- Publication number 20040055995
- Publication date Mar 25, 2004
- Russell Westerman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20030176006
- Publication date Sep 18, 2003
- Junji Oohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20030176071
- Publication date Sep 18, 2003
- Junji Oohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and method of manufacturing a micromechan...
- Publication number 20030104648
- Publication date Jun 5, 2003
- Joachim Rudhard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Deep reactive ion etching process and microelectromechanical device...
- Publication number 20020111031
- Publication date Aug 15, 2002
- Troy A. Chase
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Avoid charge built-up

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of production of semiconductor device having semiconductor l...

Wafer level packaging for MEMS device

Semiconductor devices with moving members and methods for making th...

Semiconductor devices with moving members and methods for making th...

Electrical bypass structure for MEMS device

Method of etching structures into an etching body using a plasma

Methods for reducing surface charges during the manufacture of micr...

Method of manufacture for microelectromechanical devices

Method for fabrication MEMS-resonator

Switches for shorting during MEMS etch release

Method of manufacture for microelectromechanical devices

Method of manufacturing external force detection sensor

Method for microfabricating structures using silicon-on-insulator m...

Method for fabricating a gyroscope

Silicon-on-insulator substrate, fabricating method thereof, and met...

Method of manufacturing an external force detection sensor

Method of manufacturing an external force detection sensor

Dissipation of a charge buildup on a wafer portion

Method for manufacturing semiconductor device

Method for microfabricating structures using silicon-on-insulator m...

Notch-free etching of high aspect SOI structures using alternating...

Method for manufacturing semiconductor device

Microdevice and its production method

Deep reactive ion etching process and microelectromechanical device...

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE PRODUCTION METHOD

Semiconductor Devices with Moving Members and Methods for Making th...

Semiconductor Devices With Moving Members and Methods for Making th...

ELECTRICAL BYPASS STRUCTURE FOR MEMS DEVICE

METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES

METHOD FOR FABRICATING MEMS-RESONATOR

Switches for shorting during MEMS etch release

SILICON ON METAL FOR MEMS DEVICES

METHODS FOR REDUCING SURFACE CHARGES DURING THE MANUFACTURE OF MICR...

Method of manufacturing an external force detection sensor

Silicon-on-insulator substrate, fabricating method thereof, and met...

Method for microfabricating structures using silicon-on-insulator m...

Selection of wavelengths for end point in a time division multiplex...

Method of manufacture for microelectromechanical devices

Dissipation of a charge buildup on a wafer portion

Method for gyroscope using SMS wafer and gyroscope fabricated by th...

Method of etching structures into an etching body using a plasma

Method of manufacturing an external force detection sensor

Method for microfabricating structures using silicon-on-insulator m...

Notch-free etching of high aspect SOI structures using alternating...

Method for manufacturing semiconductor device

Method for manufacturing semiconductor device

Micromechanical component and method of manufacturing a micromechan...

Deep reactive ion etching process and microelectromechanical device...