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Bonding techniques not provided for in B81C2203/031 - B81C2203/037
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Micro-structural technology
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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2203/00
Forming micro-structural systems
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B81C2203/038
Bonding techniques not provided for in B81C2203/031 - B81C2203/037
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Patents Grants
last 30 patents
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Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
Patent number
11,993,512
Issue date
May 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yang-Che Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical structure with bonded cover
Patent number
11,685,650
Issue date
Jun 27, 2023
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Segmented pedestal for mounting device on chip
Patent number
11,542,153
Issue date
Jan 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a microelectronic device comprising a memb...
Patent number
11,511,990
Issue date
Nov 29, 2022
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Mathilde Cartier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Seal for microelectronic assembly
Patent number
11,417,576
Issue date
Aug 16, 2022
INVENSAS BONDING TECHNOLOGIES, INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vapor cells having one or more optical windows bonded to a dielectr...
Patent number
11,366,430
Issue date
Jun 21, 2022
Quantum Valley Ideas Laboratories
Jaime Ramirez-Serrano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
Patent number
11,274,037
Issue date
Mar 15, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Yang-Che Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Seal for microelectronic assembly
Patent number
11,257,727
Issue date
Feb 22, 2022
INVENSAS BONDING TECHNOLOGIES, INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming hermetic seals in MEMS devices
Patent number
11,161,737
Issue date
Nov 2, 2021
Elbit Systems of America, LLC
Arlynn W. Smith
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Segmented pedestal for mounting device on chip
Patent number
11,084,715
Issue date
Aug 10, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of making microfluidic devices
Patent number
11,065,616
Issue date
Jul 20, 2021
King Abdullah University of Science and Technology
Ulrich Buttner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device with discharge path, and method for producing...
Patent number
11,027,968
Issue date
Jun 8, 2021
Denso Corporation
Megumi Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and method for producing same
Patent number
10,974,958
Issue date
Apr 13, 2021
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Felix Schiebel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-mechanical sensor and method for manufacturing a micro-electr...
Patent number
10,961,116
Issue date
Mar 30, 2021
Infineon Technologies Dresden GmbH & Co. KG
Dirk Meinhold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
3D stack configuration for 6-axis motion sensor
Patent number
10,941,033
Issue date
Mar 9, 2021
Invensense, Inc.
Dongyang Kang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonded structures
Patent number
10,879,210
Issue date
Dec 29, 2020
INVENSAS BONDING TECHNOLOGIES, INC.
Paul M. Enquist
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vapor cells having one or more optical windows bonded to a dielectr...
Patent number
10,859,981
Issue date
Dec 8, 2020
Quantum Valley Ideas Laboratories
Jaime Ramirez-Serrano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive micromachined ultrasonic transducers (CMUTs) and related...
Patent number
10,850,306
Issue date
Dec 1, 2020
Butterfly Network, Inc.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of achieving universal interfacing using suspended and/or f...
Patent number
10,807,864
Issue date
Oct 20, 2020
The Regents of the University of Colorado, a Body Corporate
Joseph J. Brown
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Encapsulated microelectromechanical structure
Patent number
10,766,768
Issue date
Sep 8, 2020
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectro-mechanical system device and method for electrostatic...
Patent number
10,717,644
Issue date
Jul 21, 2020
United Microeletronics Corp
Linlin Zhao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thin MEMS die
Patent number
10,626,011
Issue date
Apr 21, 2020
HRL Laboratories, LLC
Randall L. Kubena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS manufacturing method and MEMS manufacturing apparatus
Patent number
10,605,824
Issue date
Mar 31, 2020
Hitachi, Ltd.
Shuntaro Machida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming hermetic seals in MEMS devices
Patent number
10,584,027
Issue date
Mar 10, 2020
Elbit Systems of America, LLC
Arlynn W. Smith
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Heater design for MEMS chamber pressure control
Patent number
10,532,925
Issue date
Jan 14, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Shyh-Wei Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonded structures
Patent number
10,522,499
Issue date
Dec 31, 2019
INVENSAS BONDING TECHNOLOGIES, INC.
Paul M. Enquist
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS actuation systems and methods
Patent number
10,523,135
Issue date
Dec 31, 2019
MEMS DRIVE, INC.
Matthew Ng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Seal for microelectronic assembly
Patent number
10,508,030
Issue date
Dec 17, 2019
INVENSAS BONDING TECHNOLOGIES, INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro devices formed by flex circuit substrates
Patent number
10,512,164
Issue date
Dec 17, 2019
Encite LLC
Stephen A. Marsh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Encapsulated microelectromechanical structure
Patent number
10,450,190
Issue date
Oct 22, 2019
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20240262681
Publication date
Aug 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yang-Che CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20240228264
Publication date
Jul 11, 2024
STMicroelectronics International N.V.
Roseanne DUCA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20240132340
Publication date
Apr 25, 2024
STMicroelectronics (Malta) Ltd.
Roseanne DUCA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH AN IMPROVED CAP AND RELATED MANUFACTURING PROCESS
Publication number
20240043265
Publication date
Feb 8, 2024
STMicroelectronics S.r.l.
Giorgio ALLEGATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND APPARATUS FOR THE OPTICAL CONTACT BONDING OF COMPONENTS
Publication number
20240036345
Publication date
Feb 1, 2024
Carl Zeiss SMT GMBH
Stefan SCHUETTER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL STRUCTURE WITH BONDED COVER
Publication number
20240002218
Publication date
Jan 4, 2024
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEAL FOR MICROELECTRONIC ASSEMBLY
Publication number
20230420313
Publication date
Dec 28, 2023
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...
Publication number
20230382713
Publication date
Nov 30, 2023
Vanguard International Semiconductor Corporation
RAMACHANDRAMURTHY PRADEEP YELEHANKA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVI...
Publication number
20230357001
Publication date
Nov 9, 2023
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVEL PROCESSING FOR MICROELECTRONIC DEVICE PACKAGE WITH CAVITY
Publication number
20230092132
Publication date
Mar 23, 2023
TEXAS INSTRUMENTS INCORPORATED
Hau Nguyen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEAL FOR MICROELECTRONIC ASSEMBLY
Publication number
20220415734
Publication date
Dec 29, 2022
INVENSAS BONDING TECHNOLOGIES, INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20220194783
Publication date
Jun 23, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Yang-Che CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONTACT LENS, METHOD FOR DETECTING A STRUCTURE-BORNE SOUND WITH THE...
Publication number
20220057656
Publication date
Feb 24, 2022
ROBERT BOSCH GmbH
Johannes Classen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MICROELECTRONIC DEVICE COMPRISING A MEMB...
Publication number
20210395079
Publication date
Dec 23, 2021
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Mathilde CARTIER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING METHOD FOR BONDED SUBSTRATE
Publication number
20210375628
Publication date
Dec 2, 2021
Murata Manufacturing Co., Ltd.
Ryunosuke Hino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP
Publication number
20210331915
Publication date
Oct 28, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
Publication number
20210221678
Publication date
Jul 22, 2021
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20210130167
Publication date
May 6, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Yang-Che CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Vapor Cells Having One or More Optical Windows Bonded to a Dielectr...
Publication number
20210132549
Publication date
May 6, 2021
Quantum Valley Ideas Laboratories
Jaime Ramirez-Serrano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP
Publication number
20200369515
Publication date
Nov 26, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE WITH DISCHARGE PATH, AND METHOD FOR PRODUCING...
Publication number
20200299128
Publication date
Sep 24, 2020
DENSO CORPORATION
Megumi SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Forming Hermetic Seals in MEMS Devices
Publication number
20200156932
Publication date
May 21, 2020
Elbit Systems of America, LLC
Arlynn W. SMITH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEAL FOR MICROELECTRONIC ASSEMBLY
Publication number
20200140268
Publication date
May 7, 2020
INVENSAS BONDING TECHNOLOGIES, INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEAL FOR MICROELECTRONIC ASSEMBLY
Publication number
20200140267
Publication date
May 7, 2020
INVENSAS BONDING TECHNOLOGIES, INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
3D STACK CONFIGURATION FOR 6-AXIS MOTION SENSOR
Publication number
20200131027
Publication date
Apr 30, 2020
InvenSense, Inc.
Dongyang KANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
Publication number
20200079646
Publication date
Mar 12, 2020
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micro Devices Formed by Flex Circuit Substrates
Publication number
20200084892
Publication date
Mar 12, 2020
ENCITE LLC
Stephen A. Marsh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-MECHANICAL SENSOR AND METHOD FOR MANUFACTURING A MICRO-ELECTR...
Publication number
20190345027
Publication date
Nov 14, 2019
Infineon Technologies Dresden GmbH & Co. KG
Dirk MEINHOLD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Forming Hermetic Seals in MEMS Devices
Publication number
20190169023
Publication date
Jun 6, 2019
Eagle Technology, LLC
Arlynn W. SMITH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
Publication number
20190055121
Publication date
Feb 21, 2019
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY