Bulk micromachining

Industry

CPC
B81C1/005

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/005Bulk micromachining

Industries

Patents Grantslast 30 patents

Information Patent Grant
Wafer level packaging of MEMS
- Patent number 12,091,311
- Issue date Sep 17, 2024
- Texas Instruments Incorporated
- Stuart M. Jacobsen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having decreased contact resistance
- Patent number 12,077,431
- Issue date Sep 3, 2024
- Qorvo US, Inc.
- Shibajyoti Ghosh Dastider
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetically sealed MEMS mirror and method of manufacture
- Patent number 12,078,799
- Issue date Sep 3, 2024
- STMicroelectron S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Laser-assisted material phase-change and expulsion micro-machining...
- Patent number 12,077,432
- Issue date Sep 3, 2024
- Massachusetts Institute of Technology
- Prashant Patil
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing a microelectromechanical systems (MEMS) device
- Patent number 12,043,537
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fluid sensor system
- Patent number 12,044,646
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chwen Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional semiconductor fabrication
- Patent number 12,031,227
- Issue date Jul 9, 2024
- NIELSON SCIENTIFIC, LLC
- Gregory Nolan Nielson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching method
- Patent number 12,020,942
- Issue date Jun 25, 2024
- ULVAC, Inc.
- Taichi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for direct printing of microfluidic chip based on...
- Patent number 12,017,213
- Issue date Jun 25, 2024
- CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY
- Heping Zeng
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Compositions and methods for selectively etching silicon nitride films
- Patent number 12,012,540
- Issue date Jun 18, 2024
- Entegris, Inc.
- Steven M. Bilodeau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and NEMS structures
- Patent number 12,006,209
- Issue date Jun 11, 2024
- OBSIDIAN SENSORS, INC.
- John Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device including a precision proof m...
- Patent number 12,006,208
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sealed force sensor with etch stop layer
- Patent number 11,965,787
- Issue date Apr 23, 2024
- NEXTINPUT, INC.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
- Patent number 11,965,797
- Issue date Apr 23, 2024
- Wuxi Sencoch Semiconductor Co., Ltd.
- Tongqing Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for ablating or roughening wafer surfaces
- Patent number 11,958,739
- Issue date Apr 16, 2024
- University of Rhode Island Board of Trustees
- Jason Rodger Dwyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,953,675
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-device structures with etch holes
- Patent number 11,952,266
- Issue date Apr 9, 2024
- X-CELEPRINT LIMITED
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
- Patent number 11,946,822
- Issue date Apr 2, 2024
- Sciosense B.V.
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
- Patent number 11,945,712
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
- Patent number 11,939,212
- Issue date Mar 26, 2024
- Industrial Technology Research Institute
- Heng-chung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,906,727
- Issue date Feb 20, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing glass by alkaline etching
- Patent number 11,891,326
- Issue date Feb 6, 2024
- Schott AG
- Andreas Ortner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
- Patent number 11,878,906
- Issue date Jan 23, 2024
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror assembly for light steering with reduced finger thickness
- Patent number 11,815,627
- Issue date Nov 14, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Package structure of micro speaker and method for forming the same
- Patent number 11,818,563
- Issue date Nov 14, 2023
- FORTEMEDIA, INC.
- Li-Jen Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device with particle filter
- Patent number 11,807,521
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching composition, a method of etching a metal barrier layer and...
- Patent number 11,795,550
- Issue date Oct 24, 2023
- Samsung Electronics Co., Ltd.
- Jungah Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a layer structure and microelectromechanical...
- Patent number 11,787,686
- Issue date Oct 17, 2023
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Calcite channel structures with heterogeneous wettability
- Patent number 11,774,437
- Issue date Oct 3, 2023
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a microscale canopy wick structure having enh...
- Patent number 11,712,766
- Issue date Aug 1, 2023
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Gaohua Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
PROCESS FOR MANUFACTURING A THREE-DIMENSIONAL STRUCTURE IN BENDING
- Publication number 20240411057
- Publication date Dec 12, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Raphaël FEOUGIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...
- Publication number 20240375942
- Publication date Nov 14, 2024
- Calient Technologies, Inc.
- Paul WALDROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLUID SENSOR SYSTEM
- Publication number 20240337618
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHWEN YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ETCHING METHOD
- Publication number 20240304453
- Publication date Sep 12, 2024
- Ulvac, Inc.
- Taichi SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-ASPECT RATIO METALLIZED STRUCTURES
- Publication number 20240297048
- Publication date Sep 5, 2024
- GE Precision Healthcare LLC
- Shubhodeep Goswami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEALED FORCE SENSOR WITH ETCH STOP LAYER
- Publication number 20240247986
- Publication date Jul 25, 2024
- NextInput, Inc.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
- Publication number 20240239649
- Publication date Jul 18, 2024
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR CHIP WITH EMBEDDED MICROFLUIDIC CHANNELS AND METHOD O...
- Publication number 20240208806
- Publication date Jun 27, 2024
- National Taiwan University
- Jun-Chau Chien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...
- Publication number 20240199408
- Publication date Jun 20, 2024
- STMicroelectronics S.r.l.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
- Publication number 20240199413
- Publication date Jun 20, 2024
- X-Celprint Limited
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20240190694
- Publication date Jun 13, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20240192483
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONOLITHIC SOUND TRANSDUCER AND ENVIRONMENTAL BARRIER
- Publication number 20240187770
- Publication date Jun 6, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING GLASS BY ALKALINE ETCHING
- Publication number 20240116805
- Publication date Apr 11, 2024
- SCHOTT AG
- Andreas Ortner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES
- Publication number 20240101413
- Publication date Mar 28, 2024
- Intel Corporation
- Jeremy D. Ecton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Systems, Devices, and/or Methods for Images
- Publication number 20240034668
- Publication date Feb 1, 2024
- Dylan Kelley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHIP ASSEMBLY AND METHOD OF MAKING A CHIP ASSEMBLY
- Publication number 20230400788
- Publication date Dec 14, 2023
- NPL Management Limited
- Alastair SINCLAIR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR
- Publication number 20230339745
- Publication date Oct 26, 2023
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HERMETICALLY SEALED MEMS MIRROR AND METHOD OF MANUFACTURE
- Publication number 20230324678
- Publication date Oct 12, 2023
- STMicroelectronics S.r.l
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...
- Publication number 20230294980
- Publication date Sep 21, 2023
- Vanguard International Semiconductor Corporation
- RAKESH CHAND
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF...
- Publication number 20230249963
- Publication date Aug 10, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Jung CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESSES AND APPLICATIONS FOR CATALYST INFLUENCED CHEMICAL ETCHING
- Publication number 20230245996
- Publication date Aug 3, 2023
- Board of Regents, The University of Texas System
- Sidlgata V. Sreenivasan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE STRUCTURE OF MICRO SPEAKER AND METHOD FOR FORMING THE SAME
- Publication number 20230239628
- Publication date Jul 27, 2023
- Fortemedia, Inc.
- Li-Jen CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A BONDING PAD FOR A MICROMECHANICAL SENSOR ELE...
- Publication number 20230219808
- Publication date Jul 13, 2023
- ROBERT BOSCH GmbH
- Andreas Prinzen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20230138044
- Publication date May 4, 2023
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMEN...
- Publication number 20230136105
- Publication date May 4, 2023
- Calient Technologies, Inc.
- Scott A. MILLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
- Publication number 20230127477
- Publication date Apr 27, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Murray BEARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-ASPECT RATIO METALLIZED STRUCTURES
- Publication number 20230058578
- Publication date Feb 23, 2023
- GE Precision Healthcare LLC
- Shubhodeep Goswami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing an Integrated MEMS Transducer Device and I...
- Publication number 20230036935
- Publication date Feb 2, 2023
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
- Publication number 20230016416
- Publication date Jan 19, 2023
- Rohm Co., Ltd.
- Toru HIGUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Bulk micromachining

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer level packaging of MEMS

MEMS device having decreased contact resistance

Hermetically sealed MEMS mirror and method of manufacture

Laser-assisted material phase-change and expulsion micro-machining...

Method of manufacturing a microelectromechanical systems (MEMS) device

Fluid sensor system

Three-dimensional semiconductor fabrication

Etching method

Device and method for direct printing of microfluidic chip based on...

Compositions and methods for selectively etching silicon nitride films

MEMS and NEMS structures

Micro-electromechanical system device including a precision proof m...

Sealed force sensor with etch stop layer

Bipolar transistor type MEMS pressure sensor and preparation method...

Method for ablating or roughening wafer surfaces

Optical device production method

Micro-device structures with etch holes

Semiconductor transducer device with multilayer diaphragm and metho...

Process for manufacturing a micro-electro-mechanical device, and ME...

MEMS device, manufacturing method of the same, and integrated MEMS...

Optical device production method

Method for processing glass by alkaline etching

Method for manufacturing an integrated MEMS transducer device and i...

Mirror assembly for light steering with reduced finger thickness

Package structure of micro speaker and method for forming the same

Support structure for MEMS device with particle filter

Etching composition, a method of etching a metal barrier layer and...

Method for processing a layer structure and microelectromechanical...

Calcite channel structures with heterogeneous wettability

Method of fabricating a microscale canopy wick structure having enh...

Patents Applicationslast 30 patents

PROCESS FOR MANUFACTURING A THREE-DIMENSIONAL STRUCTURE IN BENDING

DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...

FLUID SENSOR SYSTEM

ETCHING METHOD

HIGH-ASPECT RATIO METALLIZED STRUCTURES

SEALED FORCE SENSOR WITH ETCH STOP LAYER

METHOD OF MANUFACTURING A MICROSTRUCTURE

SEMICONDUCTOR CHIP WITH EMBEDDED MICROFLUIDIC CHANNELS AND METHOD O...

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

OPTICAL DEVICE PRODUCTION METHOD

MONOLITHIC SOUND TRANSDUCER AND ENVIRONMENTAL BARRIER

METHOD FOR PROCESSING GLASS BY ALKALINE ETCHING

SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES

Systems, Devices, and/or Methods for Images

CHIP ASSEMBLY AND METHOD OF MAKING A CHIP ASSEMBLY

METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR

HERMETICALLY SEALED MEMS MIRROR AND METHOD OF MANUFACTURE

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...

MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF...

PROCESSES AND APPLICATIONS FOR CATALYST INFLUENCED CHEMICAL ETCHING

PACKAGE STRUCTURE OF MICRO SPEAKER AND METHOD FOR FORMING THE SAME

METHOD FOR PRODUCING A BONDING PAD FOR A MICROMECHANICAL SENSOR ELE...

OPTICAL DEVICE PRODUCTION METHOD

VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMEN...

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...

HIGH-ASPECT RATIO METALLIZED STRUCTURES

Method for Manufacturing an Integrated MEMS Transducer Device and I...

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE