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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/005
Bulk micromachining
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Impact
Patents Grants
last 30 patents
Information
Patent Grant
Sealed force sensor with etch stop layer
Patent number
11,965,787
Issue date
Apr 23, 2024
NEXTINPUT, INC.
Julius Minglin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
Patent number
11,965,797
Issue date
Apr 23, 2024
Wuxi Sencoch Semiconductor Co., Ltd.
Tongqing Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for ablating or roughening wafer surfaces
Patent number
11,958,739
Issue date
Apr 16, 2024
University of Rhode Island Board of Trustees
Jason Rodger Dwyer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device production method
Patent number
11,953,675
Issue date
Apr 9, 2024
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-device structures with etch holes
Patent number
11,952,266
Issue date
Apr 9, 2024
X-CELEPRINT LIMITED
Pierluigi Rubino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
Patent number
11,946,822
Issue date
Apr 2, 2024
Sciosense B.V.
Alessandro Faes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
Patent number
11,945,712
Issue date
Apr 2, 2024
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
Patent number
11,939,212
Issue date
Mar 26, 2024
Industrial Technology Research Institute
Heng-chung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device production method
Patent number
11,906,727
Issue date
Feb 20, 2024
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for processing glass by alkaline etching
Patent number
11,891,326
Issue date
Feb 6, 2024
Schott AG
Andreas Ortner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
Patent number
11,878,906
Issue date
Jan 23, 2024
Sciosense B.V.
Kailash Vijayakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mirror assembly for light steering with reduced finger thickness
Patent number
11,815,627
Issue date
Nov 14, 2023
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Package structure of micro speaker and method for forming the same
Patent number
11,818,563
Issue date
Nov 14, 2023
FORTEMEDIA, INC.
Li-Jen Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support structure for MEMS device with particle filter
Patent number
11,807,521
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Etching composition, a method of etching a metal barrier layer and...
Patent number
11,795,550
Issue date
Oct 24, 2023
Samsung Electronics Co., Ltd.
Jungah Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for processing a layer structure and microelectromechanical...
Patent number
11,787,686
Issue date
Oct 17, 2023
Infineon Technologies AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Calcite channel structures with heterogeneous wettability
Patent number
11,774,437
Issue date
Oct 3, 2023
Saudi Arabian Oil Company
Dong Kyu Cha
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating a microscale canopy wick structure having enh...
Patent number
11,712,766
Issue date
Aug 1, 2023
Toyota Motor Engineering & Manufacturing North America, Inc.
Gaohua Zhu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Fabrication of a nanochannel for DNA sequencing using electrical pl...
Patent number
11,714,061
Issue date
Aug 1, 2023
Seagate Technology LLC
David S. Kuo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device
Patent number
11,693,230
Issue date
Jul 4, 2023
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure forming method and device
Patent number
11,679,976
Issue date
Jun 20, 2023
Seiko Epson Corporation
Shogo Inaba
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Hermetically sealed MEMS mirror and method of manufacture
Patent number
11,675,186
Issue date
Jun 13, 2023
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical electronics device
Patent number
11,667,523
Issue date
Jun 6, 2023
Texas Instruments Incorporated
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for preparing micro-cavity array surface product with inclin...
Patent number
11,655,144
Issue date
May 23, 2023
JIANGSU UNIVERSITY
Jian Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device
Patent number
11,650,411
Issue date
May 16, 2023
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Silicon carbide structure, device, and method
Patent number
11,649,159
Issue date
May 16, 2023
Francis J. Kub
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Copper-alloy capping layers for metallization in touch-panel displays
Patent number
11,640,222
Issue date
May 2, 2023
Materion Newton, Inc.
Shuwei Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electromechanical system device including a precision proof m...
Patent number
11,634,320
Issue date
Apr 25, 2023
Taiwan Semiconductor Manufacturing Company Limited
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for fabricating pressure sensors with non-silicon diaphragms
Patent number
11,624,668
Issue date
Apr 11, 2023
ZHEJIANG DUNAN ARTIFICIAL ENVIRONMENT CO., LTD.
Tom Kwa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Interposer substrate, MEMS device and corresponding manufacturing m...
Patent number
11,623,860
Issue date
Apr 11, 2023
Robert Bosch GmbH
Corinna Koepernik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PROCESSING GLASS BY ALKALINE ETCHING
Publication number
20240116805
Publication date
Apr 11, 2024
SCHOTT AG
Andreas Ortner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES
Publication number
20240101413
Publication date
Mar 28, 2024
Intel Corporation
Jeremy D. Ecton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Systems, Devices, and/or Methods for Images
Publication number
20240034668
Publication date
Feb 1, 2024
Dylan Kelley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHIP ASSEMBLY AND METHOD OF MAKING A CHIP ASSEMBLY
Publication number
20230400788
Publication date
Dec 14, 2023
NPL Management Limited
Alastair SINCLAIR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR
Publication number
20230339745
Publication date
Oct 26, 2023
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HERMETICALLY SEALED MEMS MIRROR AND METHOD OF MANUFACTURE
Publication number
20230324678
Publication date
Oct 12, 2023
STMicroelectronics S.r.l
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...
Publication number
20230294980
Publication date
Sep 21, 2023
Vanguard International Semiconductor Corporation
RAKESH CHAND
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF...
Publication number
20230249963
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Company Limited
Ting-Jung CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESSES AND APPLICATIONS FOR CATALYST INFLUENCED CHEMICAL ETCHING
Publication number
20230245996
Publication date
Aug 3, 2023
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE OF MICRO SPEAKER AND METHOD FOR FORMING THE SAME
Publication number
20230239628
Publication date
Jul 27, 2023
Fortemedia, Inc.
Li-Jen CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A BONDING PAD FOR A MICROMECHANICAL SENSOR ELE...
Publication number
20230219808
Publication date
Jul 13, 2023
ROBERT BOSCH GmbH
Andreas Prinzen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OPTICAL DEVICE PRODUCTION METHOD
Publication number
20230138044
Publication date
May 4, 2023
HAMAMATSU PHOTONICS K. K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMEN...
Publication number
20230136105
Publication date
May 4, 2023
Calient Technologies, Inc.
Scott A. MILLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
Publication number
20230127477
Publication date
Apr 27, 2023
TEXAS INSTRUMENTS INCORPORATED
Christopher Murray BEARD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIGH-ASPECT RATIO METALLIZED STRUCTURES
Publication number
20230058578
Publication date
Feb 23, 2023
GE Precision Healthcare LLC
Shubhodeep Goswami
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Manufacturing an Integrated MEMS Transducer Device and I...
Publication number
20230036935
Publication date
Feb 2, 2023
Sciosense B.V.
Kailash Vijayakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
Publication number
20230016416
Publication date
Jan 19, 2023
Rohm Co., Ltd.
Toru HIGUCHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEALED FORCE SENSOR WITH ETCH STOP LAYER
Publication number
20230016531
Publication date
Jan 19, 2023
NextInput, Inc.
Julius Minglin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FLUID SENSOR SYSTEM
Publication number
20220365019
Publication date
Nov 17, 2022
Taiwan Semiconductor Manufacturing company Ltd.
CHWEN YU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THREE-DIMENSIONAL SEMICONDUCTOR FABRICATION
Publication number
20220349084
Publication date
Nov 3, 2022
Nielson Scientific, LLC
Gregory Nolan Nielson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ETCHING METHOD
Publication number
20220344167
Publication date
Oct 27, 2022
Ulvac, Inc.
Taichi SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR TRANSFERRING MICROSTRUCTURES, AND METHOD FOR MOUNTING MI...
Publication number
20220315418
Publication date
Oct 6, 2022
Shin-Etsu Chemical Co., Ltd.
Yoshinori OGAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS
Publication number
20220308705
Publication date
Sep 29, 2022
Shuwei Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE HAVING DECREASED CONTACT RESISTANCE
Publication number
20220289565
Publication date
Sep 15, 2022
Qorvo US, Inc.
Shibajyoti Ghosh Dastider
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...
Publication number
20220267144
Publication date
Aug 25, 2022
JIANGSU UNIVERSITY
Jian LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF M...
Publication number
20220267145
Publication date
Aug 25, 2022
Taiwan Semiconductor Manufacturing Company Limited
Ting-Jung CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
Publication number
20220259038
Publication date
Aug 18, 2022
Vibrant Composites Inc.
Pratheev S. SREETHARAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRETCHABLE SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
Publication number
20220162060
Publication date
May 26, 2022
Korea Institute of Science and Technology
Seungjun CHUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
Publication number
20220112078
Publication date
Apr 14, 2022
X-CELEPRINT LIMITED
Pierluigi Rubino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY
Publication number
20220107302
Publication date
Apr 7, 2022
Saudi Arabian Oil Company
Dong Kyu CHA
B81 - MICRO-STRUCTURAL TECHNOLOGY