Catalyst aided deposition

Industry

CPC
Y10S438/903

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Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S438/00Semiconductor device manufacturing: process

Current Industry

Y10S438/903Catalyst aided deposition

Industries

Patents Grantslast 30 patents

Information Patent Grant
Insitu post atomic layer deposition destruction of active species
- Patent number 8,257,497
- Issue date Sep 4, 2012
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Resistive memory device and method of fabricating the same
- Patent number 8,148,708
- Issue date Apr 3, 2012
- Hynix Semiconductor Inc.
- Yun-Taek Hwang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of manufacturing silicon carbide self-aligned epitaxial MOSF...
- Patent number 7,994,017
- Issue date Aug 9, 2011
- Cree, Inc.
- Christopher Harris
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of manufacturing silicon nano-structure
- Patent number 7,888,271
- Issue date Feb 15, 2011
- Tsinghua University
- Hai-Lin Sun
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Silicon carbide self-aligned epitaxial MOSFET for high powered devi...
- Patent number 7,629,616
- Issue date Dec 8, 2009
- Cree, Inc.
- Christopher Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for conditioning a microelectronics device deposition chamber
- Patent number 7,601,639
- Issue date Oct 13, 2009
- Texas Instruments Incorporated
- Salvator F. Pavone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing wiring substrate
- Patent number 7,521,361
- Issue date Apr 21, 2009
- Seiko Epson Corporation
- Satoshi Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for integration of barrier layer and seed layer
- Patent number 7,494,908
- Issue date Feb 24, 2009
- Applied Materials, Inc.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for stabilizing high pressure oxidation of a semiconductor d...
- Patent number 7,410,911
- Issue date Aug 12, 2008
- Micron Technology, Inc.
- Daniel Gealy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integration of barrier layer and seed layer
- Patent number 7,352,048
- Issue date Apr 1, 2008
- Applied Materials, Inc.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for stabilizing high pressure oxidation of a semiconducto...
- Patent number 7,282,457
- Issue date Oct 16, 2007
- Micron Technology, Inc.
- Daniel Gealy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for stabilizing high pressure oxidation of a semiconducto...
- Patent number 7,279,435
- Issue date Oct 9, 2007
- Micron Technology, Inc.
- Daniel F Gealy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for conditioning a microelectronics device deposition chamber
- Patent number 7,241,690
- Issue date Jul 10, 2007
- Texas Instruments Incorporated
- Salvator F. Pavone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing a nanoelement arrangement, and nanoelement ar...
- Patent number 7,183,131
- Issue date Feb 27, 2007
- Infineon Technologies AG
- Eugen Unger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a plasma display panel by decomposing impur...
- Patent number 7,044,821
- Issue date May 16, 2006
- Pioneer Corporation
- Junji Kogure
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plating nonconductor product
- Patent number 6,992,000
- Issue date Jan 31, 2006
- Kanto Kasei Co., Ltd.
- Hideo Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for stabilizing high pressure oxidation of a semiconductor d...
- Patent number 6,955,996
- Issue date Oct 18, 2005
- Micron Technology, Inc.
- Daniel F Gealy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide film forming method
- Patent number 6,949,478
- Issue date Sep 27, 2005
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integration of barrier layer and seed layer
- Patent number 6,936,906
- Issue date Aug 30, 2005
- Applied Materials, Inc.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insitu post atomic layer deposition destruction of active species
- Patent number 6,844,260
- Issue date Jan 18, 2005
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanotube tip for atomic force microscope
- Patent number 6,780,664
- Issue date Aug 24, 2004
- Advanced Micro Devices, Inc.
- Rama R. Goruganthu
- G01 - MEASURING TESTING
Information Patent Grant
Method of making nanotube permeable base transistor
- Patent number 6,774,052
- Issue date Aug 10, 2004
- Nantero, Inc.
- Bernhard Vögeli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for thin-film deposition, and method of manufa...
- Patent number 6,653,212
- Issue date Nov 25, 2003
- Sony Corporation
- Hideo Yamanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for stabilizing high pressure oxidation of a semiconductor d...
- Patent number 6,596,651
- Issue date Jul 22, 2003
- Micron Technology, Inc.
- F. Daniel Gealy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing low carbon/oxygen conductive layers
- Patent number 6,495,458
- Issue date Dec 17, 2002
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of abnormal growth in dichloro silane (DCS) based CVD polyc...
- Patent number 6,451,694
- Issue date Sep 17, 2002
- Samsung Electronics Co., Ltd.
- Jeon-Sig Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for stabilizing high pressure oxidation of a s...
- Patent number 6,423,649
- Issue date Jul 23, 2002
- Micron Technology, Inc.
- Daniel Gealy
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for producing low carbon/oxygen conductive layers
- Patent number 6,403,414
- Issue date Jun 11, 2002
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Copper electroless deposition on a titanium-containing surface
- Patent number 6,326,303
- Issue date Dec 4, 2001
- Micron Technology, Inc.
- Karl Robinson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structures including low carbon/oxygen conductive layers
- Patent number 6,323,511
- Issue date Nov 27, 2001
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
RESISTIVE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
- Publication number 20100117041
- Publication date May 13, 2010
- Hynix Semiconductor Inc.
- Yun-Taek HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SILICON CARBIDE SELF-ALIGNED EPITAXIAL MOSF...
- Publication number 20100041195
- Publication date Feb 18, 2010
- Cree, Inc.
- Christopher Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing silicon nano-structure
- Publication number 20090253248
- Publication date Oct 8, 2009
- TSINGHUA UNIVERSITY
- Hai-Lin Sun
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon carbide self-aligned epitaxial MOSFET and method of manufac...
- Publication number 20080203398
- Publication date Aug 28, 2008
- Christopher Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR INTEGRATION OF BARRIER LAYER AND SEED LAYER
- Publication number 20070283886
- Publication date Dec 13, 2007
- HUA CHUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Conditioning a Microelectronics Device Deposition Chamber
- Publication number 20070243316
- Publication date Oct 18, 2007
- TEXAS INSTRUMENTS INCORPORATED
- Salvator F Pavone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING WIRING SUBSTRATE
- Publication number 20070212876
- Publication date Sep 13, 2007
- SEIKO EPSON CORPORATION
- Satoshi KIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for conditioning a microelectronics device deposition chamber
- Publication number 20060228905
- Publication date Oct 12, 2006
- Texas Instruments, Incorporated
- Salvator F. Pavone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for stabilizing high pressure oxidation of a semiconductor d...
- Publication number 20060035473
- Publication date Feb 16, 2006
- F. Daniel Gealy
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for stabilizing high pressure oxidation of a semiconductor d...
- Publication number 20050279283
- Publication date Dec 22, 2005
- F. Daniel Gealy
- C30 - CRYSTAL GROWTH
Information Patent Application
Oxide film forming method
- Publication number 20050206018
- Publication date Sep 22, 2005
- Tadahiro Ohmi
- C30 - CRYSTAL GROWTH
Information Patent Application
Insitu post atomic layer deposition destruction of active species
- Publication number 20050150460
- Publication date Jul 14, 2005
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integration of barrier layer and seed layer
- Publication number 20050139948
- Publication date Jun 30, 2005
- APPLIED MATERIALS, INC.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for producing a nanoelement arrangement, and nanoelement ar...
- Publication number 20050040847
- Publication date Feb 24, 2005
- Infineon Technologies AG
- Eugen Unger
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus for stabilizing high pressure oxidation of a semiconducto...
- Publication number 20050028936
- Publication date Feb 10, 2005
- F. Daniel Gealy
- C30 - CRYSTAL GROWTH
Information Patent Application
Method of plating nonconductor product
- Publication number 20040219374
- Publication date Nov 4, 2004
- Hideo Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for stabilizing high pressure oxidation of a semiconductor d...
- Publication number 20040185677
- Publication date Sep 23, 2004
- F. Daniel Gealy
- C30 - CRYSTAL GROWTH
Information Patent Application
Plasma display panel manufacturing method and heat treatment apparatus
- Publication number 20040180601
- Publication date Sep 16, 2004
- PIONEER CORPORATION
- Junji Kogure
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Insitu post atomic layer deposition destruction of active species
- Publication number 20040152304
- Publication date Aug 5, 2004
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING NANOTUBE PERMEABLE BASE TRANSISTOR
- Publication number 20030236000
- Publication date Dec 25, 2003
- Nantero, Inc.
- Bernhard Vogeli
- B82 - NANO-TECHNOLOGY
Information Patent Application
Oxide film forming method
- Publication number 20030073278
- Publication date Apr 17, 2003
- Tadahiro Ohmi
- C30 - CRYSTAL GROWTH
Information Patent Application
Integration of barrier layer and seed layer
- Publication number 20030057527
- Publication date Mar 27, 2003
- APPLIED MATERIALS, INC.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for stabilizing high pressure oxidation of a s...
- Publication number 20020192978
- Publication date Dec 19, 2002
- F. Daniel Gealy
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for producing low carbon/oxygen conductive layers
- Publication number 20010055869
- Publication date Dec 27, 2001
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for producing low carbon/oxygen conductive layers
- Publication number 20010053558
- Publication date Dec 20, 2001
- Micron Technology, Inc.
- Eugene P. Marsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for stabilizing high pressure oxidation of a s...
- Publication number 20010044219
- Publication date Nov 22, 2001
- F. Daniel Gealy
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and apparatus for stabilizing high pressure oxidation of a s...
- Publication number 20010008750
- Publication date Jul 19, 2001
- Daniel Gealy
- C30 - CRYSTAL GROWTH

Catalyst aided deposition

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Insitu post atomic layer deposition destruction of active species

Resistive memory device and method of fabricating the same

Method of manufacturing silicon carbide self-aligned epitaxial MOSF...

Method of manufacturing silicon nano-structure

Silicon carbide self-aligned epitaxial MOSFET for high powered devi...

Method for conditioning a microelectronics device deposition chamber

Method for manufacturing wiring substrate

Apparatus for integration of barrier layer and seed layer

Method for stabilizing high pressure oxidation of a semiconductor d...

Integration of barrier layer and seed layer

Apparatus for stabilizing high pressure oxidation of a semiconducto...

Apparatus for stabilizing high pressure oxidation of a semiconducto...

Method for conditioning a microelectronics device deposition chamber

Process for producing a nanoelement arrangement, and nanoelement ar...

Method of manufacturing a plasma display panel by decomposing impur...

Method of plating nonconductor product

Method for stabilizing high pressure oxidation of a semiconductor d...

Oxide film forming method

Integration of barrier layer and seed layer

Insitu post atomic layer deposition destruction of active species

Nanotube tip for atomic force microscope

Method of making nanotube permeable base transistor

Method and apparatus for thin-film deposition, and method of manufa...

Method for stabilizing high pressure oxidation of a semiconductor d...

Method for producing low carbon/oxygen conductive layers

Control of abnormal growth in dichloro silane (DCS) based CVD polyc...

Method and apparatus for stabilizing high pressure oxidation of a s...

Method for producing low carbon/oxygen conductive layers

Copper electroless deposition on a titanium-containing surface

Structures including low carbon/oxygen conductive layers

Patents Applicationslast 30 patents

RESISTIVE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME

METHOD OF MANUFACTURING SILICON CARBIDE SELF-ALIGNED EPITAXIAL MOSF...

Method of manufacturing silicon nano-structure

Silicon carbide self-aligned epitaxial MOSFET and method of manufac...

APPARATUS FOR INTEGRATION OF BARRIER LAYER AND SEED LAYER

Method for Conditioning a Microelectronics Device Deposition Chamber

METHOD FOR MANUFACTURING WIRING SUBSTRATE

Method for conditioning a microelectronics device deposition chamber

Method for stabilizing high pressure oxidation of a semiconductor d...

Method for stabilizing high pressure oxidation of a semiconductor d...

Oxide film forming method

Insitu post atomic layer deposition destruction of active species

Integration of barrier layer and seed layer

Process for producing a nanoelement arrangement, and nanoelement ar...

Apparatus for stabilizing high pressure oxidation of a semiconducto...

Method of plating nonconductor product

Method for stabilizing high pressure oxidation of a semiconductor d...

Plasma display panel manufacturing method and heat treatment apparatus

Insitu post atomic layer deposition destruction of active species

METHOD OF MAKING NANOTUBE PERMEABLE BASE TRANSISTOR

Oxide film forming method

Integration of barrier layer and seed layer

Method and apparatus for stabilizing high pressure oxidation of a s...

Method for producing low carbon/oxygen conductive layers

Method for producing low carbon/oxygen conductive layers

Method and apparatus for stabilizing high pressure oxidation of a s...

Method and apparatus for stabilizing high pressure oxidation of a s...