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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B7/00Micro-structural systems; Auxiliary parts of micro-structural devices or systems

Current Industry

B81B7/02containing distinct electrical or optical devices of particular relevance for their function

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a microstructure
- Patent number 12,358,784
- Issue date Jul 15, 2025
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-operating accelerometer
- Patent number 12,345,732
- Issue date Jul 1, 2025
- STMicroelectronics S.r.l.
- Francesco Rizzini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated MEMS electrostatic micro-speaker device and method
- Patent number 12,325,625
- Issue date Jun 10, 2025
- Vibrant Microsystems Inc.
- Steven Nasiri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device with out-of-plane stopper structure
- Patent number 12,325,628
- Issue date Jun 10, 2025
- STMicroelectronics S.r.l.
- Luca Guerinoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for providing getters in microelectromechanical...
- Patent number 12,319,562
- Issue date Jun 3, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spring-mass microelectromechanical resonator
- Patent number 12,323,131
- Issue date Jun 3, 2025
- KYOCERA Technologies Oy
- Ville Saarela
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS environmental sensor and preparation method therefor
- Patent number 12,319,565
- Issue date Jun 3, 2025
- MultiDimension Technology Co., Ltd.
- Insik Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device comprising different types of microelectromech...
- Patent number 12,304,807
- Issue date May 20, 2025
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Hsiang-Fu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 12,304,808
- Issue date May 20, 2025
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a combined microelectromechanical device...
- Patent number 12,297,099
- Issue date May 13, 2025
- STMicroelectronics S.r.l.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic acoustic devices, MEMS microphones, and equalization met...
- Patent number 12,297,100
- Issue date May 13, 2025
- Skyworks Solutions, Inc.
- Humberto Campanella-Pineda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer
- Patent number 12,297,096
- Issue date May 13, 2025
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane support for dual backplate transducers
- Patent number 12,297,102
- Issue date May 13, 2025
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS display device with an etch-stop-layer
- Patent number 12,298,493
- Issue date May 13, 2025
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Constant charge or capacitance for capacitive micro-electrical-mech...
- Patent number 12,286,342
- Issue date Apr 29, 2025
- Invensense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Photoacoustic gas sensors with improved signal-to-noise ratio
- Patent number 12,287,280
- Issue date Apr 29, 2025
- Invensense, Inc.
- Jeremy Parker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transducer component, manufacturing method thereof, and transducer
- Patent number 12,281,006
- Issue date Apr 22, 2025
- BOE Technology Group Co., Ltd.
- Yongchun Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for fast mode change of a digital microphone usin...
- Patent number 12,275,635
- Issue date Apr 15, 2025
- Infineon Technologies AG
- Dietmar Straeussnigg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for determining a torsion angle of a mirror body of an MEMS...
- Patent number 12,275,636
- Issue date Apr 15, 2025
- Infineon Technologies AG
- Franz Michael Darrer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical contacts using an array of micromachined flexures
- Patent number 12,272,912
- Issue date Apr 8, 2025
- Atomic Machines, Inc.
- Fabian Goericke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, liquid ejecting head, and liquid ejecting apparatus
- Patent number 12,251,936
- Issue date Mar 18, 2025
- Seiko Epson Corporation
- Motoki Takabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature dependent calibration of movement detection devices
- Patent number 12,247,846
- Issue date Mar 11, 2025
- Magic Leap, Inc.
- Cuthbert Martindale Allen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a thin-film piezoelectric microelectromec...
- Patent number 12,225,824
- Issue date Feb 11, 2025
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for MEMS microphone performance via back volume
- Patent number 12,219,312
- Issue date Feb 4, 2025
- Harman International Industries, Incorporated
- Sullivan Do
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Phase shifter in which at least some of first sub-electrodes are sh...
- Patent number 12,218,395
- Issue date Feb 4, 2025
- BOE Technology Group Co., Ltd.
- Jingwen Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with reduced overall size
- Patent number 12,215,022
- Issue date Feb 4, 2025
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Samer Dagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trim circuit and method of oscillator drive circuit phase calibration
- Patent number 12,203,774
- Issue date Jan 21, 2025
- NXP USA, INC.
- Raghavendra N Sridhar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated microfluidic system and method of fabrication
- Patent number 12,194,464
- Issue date Jan 14, 2025
- Corporation for National Research Initiatives
- Michael A. Huff
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical transducer with reduced size
- Patent number 12,195,329
- Issue date Jan 14, 2025
- Sonion Nederland B.V.
- Adrianus Maria Lafort
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTROMECHANICAL MICROPHONES AND METHODS OF FORMING THE SAME
- Publication number 20250240578
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250230038
- Publication date Jul 17, 2025
- Vanguard International Semiconductor Corporation
- ROHIT PULIKKAL KIZHAKKEYIL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
- Publication number 20250233327
- Publication date Jul 17, 2025
- Atomic Machines, Inc.
- Fabian Goericke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECH...
- Publication number 20250223156
- Publication date Jul 10, 2025
- InvenSense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR FAST MODE CHANGE OF A DIGITAL MICROPHONE USIN...
- Publication number 20250214831
- Publication date Jul 3, 2025
- INFINEON TECHNOLOGIES AG
- Dietmar Straeussnigg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE SENSOR AND METHOD FOR OPERATING A CAPACITIVE SENSOR
- Publication number 20250199041
- Publication date Jun 19, 2025
- ROBERT BOSCH GmbH
- David Slogsnat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TEMPERATURE DEPENDENT CALIBRATION OF MOVEMENT DETECTION DEVICES
- Publication number 20250172409
- Publication date May 29, 2025
- Magic Leap, Inc.
- Cuthbert Martindale ALLEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCOMMODATING VARIOUS LASER DIODE EMITTER AND IMAGING SPOT SIZES FO...
- Publication number 20250167510
- Publication date May 22, 2025
- Prysm Systems, Inc.
- Roger A. HAJJAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250145456
- Publication date May 8, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE TRANSDUCERS HAVING IMPROVED RESISTANCE TO TEMPERATURE ERROR
- Publication number 20250146896
- Publication date May 8, 2025
- Illinois Tool Works Inc.
- Chris Fontana
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR MODULE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20250146965
- Publication date May 8, 2025
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Seungeon MOON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSING SYSTEM HAVING A MEMS NITROGEN VACANCY SENSING DEVICE AND RE...
- Publication number 20250138111
- Publication date May 1, 2025
- Eagle Technology, LLC
- SCOTT RAUSCHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CIRCUIT FOR OPERATING A CAPACITIVE SENSOR AND SENSOR APPARATUS
- Publication number 20250130260
- Publication date Apr 24, 2025
- ROBERT BOSCH GmbH
- Alice Lanniel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THERMAL EMITTER, METHOD FOR OPERATING A THERMAL EMITTER AND MEMS GA...
- Publication number 20250133634
- Publication date Apr 24, 2025
- INFINEON TECHNOLOGIES AG
- Tobias Mittereder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THIN-FILM PIEZOELECTRIC MICROELECTROMECHANICAL STRUCTURE HAVING IMP...
- Publication number 20250120319
- Publication date Apr 10, 2025
- STMicroelectronics S.r.l
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRIM CIRCUIT AND METHOD OF OSCILLATOR DRIVE CIRCUIT PHASE CALIBRATION
- Publication number 20250109967
- Publication date Apr 3, 2025
- NXP USA, Inc.
- Raghavendra N. Sridhar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR
- Publication number 20250083950
- Publication date Mar 13, 2025
- Kabushiki Kaisha Toshiba
- Hiroaki YAMAZAKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250074766
- Publication date Mar 6, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-FOLDING 3D FILM ASSEMBLIES
- Publication number 20250059026
- Publication date Feb 20, 2025
- 3M Innovative Properties Company
- Jia Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR ULTRASONIC TRANSDUCER DEVICE AND METHODS OF FORMATION
- Publication number 20250058353
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Ming HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVE TRANSISTOR PHYSICAL UNCLONABLE FUNCTION (PUF) CIRCUIT WITH M...
- Publication number 20250047511
- Publication date Feb 6, 2025
- Honeywell International Inc.
- James L. Tucker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
- Publication number 20250026633
- Publication date Jan 23, 2025
- SILICON LIGHT MACHINES CORPORATION
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES
- Publication number 20250002331
- Publication date Jan 2, 2025
- NXP USA, Inc.
- Mostafa Soliman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SENSOR DEVICE WITH WAFER-LEVEL INTEGRATION O...
- Publication number 20250002332
- Publication date Jan 2, 2025
- STMicroelectronics International N.V.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL PROXIMITY SENSOR AND METHOD OF MAKING SAME
- Publication number 20250002333
- Publication date Jan 2, 2025
- STMicroelectronics International N.V.
- Eric SAUGIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMORY DEVICES AND ELECTRONIC SYSTEMS
- Publication number 20250008727
- Publication date Jan 2, 2025
- Micron Technology, Inc.
- Erwin E. Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMBINED SOUND TRANSDUCER AND PRESSURE SENSOR PACKAGE
- Publication number 20240425363
- Publication date Dec 26, 2024
- INFINEON TECHNOLOGIES AG
- Bernhard Rieder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Capacitive MEMS Sensing Diagnostic Mode
- Publication number 20240426689
- Publication date Dec 26, 2024
- INFINEON TECHNOLOGIES AG
- Philipp Greiner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
- Publication number 20240405454
- Publication date Dec 5, 2024
- Atomic Machines, Inc.
- Fabian Goericke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AUTOSTEREOSCOPIC CAMPFIRE DISPLAY
- Publication number 20240402483
- Publication date Dec 5, 2024
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Thomas A. Seder
- B81 - MICRO-STRUCTURAL TECHNOLOGY

containing distinct electrical or optical devices of particular relevance for their function

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing a microstructure

Dual-operating accelerometer

Integrated MEMS electrostatic micro-speaker device and method

Microelectromechanical device with out-of-plane stopper structure

Systems and methods for providing getters in microelectromechanical...

Spring-mass microelectromechanical resonator

MEMS environmental sensor and preparation method therefor

Semiconductor device comprising different types of microelectromech...

Signal processing circuit for triple-membrane MEMS device

Process for manufacturing a combined microelectromechanical device...

Electronic acoustic devices, MEMS microphones, and equalization met...

MEMS transducer

Membrane support for dual backplate transducers

MEMS display device with an etch-stop-layer

Constant charge or capacitance for capacitive micro-electrical-mech...

Photoacoustic gas sensors with improved signal-to-noise ratio

Transducer component, manufacturing method thereof, and transducer

System and method for fast mode change of a digital microphone usin...

Method for determining a torsion angle of a mirror body of an MEMS...

Electrical contacts using an array of micromachined flexures

Method and system for fabricating a MEMS device

MEMS device, liquid ejecting head, and liquid ejecting apparatus

Temperature dependent calibration of movement detection devices

Process for manufacturing a thin-film piezoelectric microelectromec...

Apparatus and method for MEMS microphone performance via back volume

Phase shifter in which at least some of first sub-electrodes are sh...

Microelectromechanical microphone with reduced overall size

Trim circuit and method of oscillator drive circuit phase calibration

Integrated microfluidic system and method of fabrication

Micro-electromechanical transducer with reduced size

Patents Applicationslast 30 patents

MICRO-ELECTROMECHANICAL MICROPHONES AND METHODS OF FORMING THE SAME

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES

CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECH...

SYSTEM AND METHOD FOR FAST MODE CHANGE OF A DIGITAL MICROPHONE USIN...

CAPACITIVE SENSOR AND METHOD FOR OPERATING A CAPACITIVE SENSOR

TEMPERATURE DEPENDENT CALIBRATION OF MOVEMENT DETECTION DEVICES

ACCOMMODATING VARIOUS LASER DIODE EMITTER AND IMAGING SPOT SIZES FO...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

PRESSURE TRANSDUCERS HAVING IMPROVED RESISTANCE TO TEMPERATURE ERROR

SENSOR MODULE AND MANUFACTURING METHOD OF THE SAME

SENSING SYSTEM HAVING A MEMS NITROGEN VACANCY SENSING DEVICE AND RE...

CIRCUIT FOR OPERATING A CAPACITIVE SENSOR AND SENSOR APPARATUS

THERMAL EMITTER, METHOD FOR OPERATING A THERMAL EMITTER AND MEMS GA...

THIN-FILM PIEZOELECTRIC MICROELECTROMECHANICAL STRUCTURE HAVING IMP...

TRIM CIRCUIT AND METHOD OF OSCILLATOR DRIVE CIRCUIT PHASE CALIBRATION

SENSOR

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

SELF-FOLDING 3D FILM ASSEMBLIES

SEMICONDUCTOR ULTRASONIC TRANSDUCER DEVICE AND METHODS OF FORMATION

ACTIVE TRANSISTOR PHYSICAL UNCLONABLE FUNCTION (PUF) CIRCUIT WITH M...

Dual-Layer Micro-ribbon MEMS Light Modulator

COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES

MICROELECTROMECHANICAL SENSOR DEVICE WITH WAFER-LEVEL INTEGRATION O...

WAFER LEVEL PROXIMITY SENSOR AND METHOD OF MAKING SAME

MEMORY DEVICES AND ELECTRONIC SYSTEMS

COMBINED SOUND TRANSDUCER AND PRESSURE SENSOR PACKAGE

Capacitive MEMS Sensing Diagnostic Mode

ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES

AUTOSTEREOSCOPIC CAMPFIRE DISPLAY