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containing distinct electrical or optical devices of particular relevance for their function
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B81B7/02
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B7/00
Micro-structural systems; Auxiliary parts of micro-structural devices or systems
Current Industry
B81B7/02
containing distinct electrical or optical devices of particular relevance for their function
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing a microstructure
Patent number
12,358,784
Issue date
Jul 15, 2025
MEMSSTAR LIMITED
Anthony O'Hara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual-operating accelerometer
Patent number
12,345,732
Issue date
Jul 1, 2025
STMicroelectronics S.r.l.
Francesco Rizzini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated MEMS electrostatic micro-speaker device and method
Patent number
12,325,625
Issue date
Jun 10, 2025
Vibrant Microsystems Inc.
Steven Nasiri
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device with out-of-plane stopper structure
Patent number
12,325,628
Issue date
Jun 10, 2025
STMicroelectronics S.r.l.
Luca Guerinoni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for providing getters in microelectromechanical...
Patent number
12,319,562
Issue date
Jun 3, 2025
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Spring-mass microelectromechanical resonator
Patent number
12,323,131
Issue date
Jun 3, 2025
KYOCERA Technologies Oy
Ville Saarela
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS environmental sensor and preparation method therefor
Patent number
12,319,565
Issue date
Jun 3, 2025
MultiDimension Technology Co., Ltd.
Insik Jin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device comprising different types of microelectromech...
Patent number
12,304,807
Issue date
May 20, 2025
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Hsiang-Fu Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Signal processing circuit for triple-membrane MEMS device
Patent number
12,304,808
Issue date
May 20, 2025
Infineon Technologies AG
Marc Fueldner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a combined microelectromechanical device...
Patent number
12,297,099
Issue date
May 13, 2025
STMicroelectronics S.r.l.
Federico Vercesi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic acoustic devices, MEMS microphones, and equalization met...
Patent number
12,297,100
Issue date
May 13, 2025
Skyworks Solutions, Inc.
Humberto Campanella-Pineda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS transducer
Patent number
12,297,096
Issue date
May 13, 2025
Soundskrit Inc.
Stephane Leahy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Membrane support for dual backplate transducers
Patent number
12,297,102
Issue date
May 13, 2025
Infineon Technologies AG
Wolfgang Klein
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS display device with an etch-stop-layer
Patent number
12,298,493
Issue date
May 13, 2025
IGNITE, Inc.
Fusao Ishii
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Constant charge or capacitance for capacitive micro-electrical-mech...
Patent number
12,286,342
Issue date
Apr 29, 2025
Invensense, Inc.
Joseph Seeger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Photoacoustic gas sensors with improved signal-to-noise ratio
Patent number
12,287,280
Issue date
Apr 29, 2025
Invensense, Inc.
Jeremy Parker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Transducer component, manufacturing method thereof, and transducer
Patent number
12,281,006
Issue date
Apr 22, 2025
BOE Technology Group Co., Ltd.
Yongchun Tao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for fast mode change of a digital microphone usin...
Patent number
12,275,635
Issue date
Apr 15, 2025
Infineon Technologies AG
Dietmar Straeussnigg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for determining a torsion angle of a mirror body of an MEMS...
Patent number
12,275,636
Issue date
Apr 15, 2025
Infineon Technologies AG
Franz Michael Darrer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrical contacts using an array of micromachined flexures
Patent number
12,272,912
Issue date
Apr 8, 2025
Atomic Machines, Inc.
Fabian Goericke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for fabricating a MEMS device
Patent number
12,258,266
Issue date
Mar 25, 2025
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device, liquid ejecting head, and liquid ejecting apparatus
Patent number
12,251,936
Issue date
Mar 18, 2025
Seiko Epson Corporation
Motoki Takabe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Temperature dependent calibration of movement detection devices
Patent number
12,247,846
Issue date
Mar 11, 2025
Magic Leap, Inc.
Cuthbert Martindale Allen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a thin-film piezoelectric microelectromec...
Patent number
12,225,824
Issue date
Feb 11, 2025
STMicroelectronics S.r.l.
Domenico Giusti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for MEMS microphone performance via back volume
Patent number
12,219,312
Issue date
Feb 4, 2025
Harman International Industries, Incorporated
Sullivan Do
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Phase shifter in which at least some of first sub-electrodes are sh...
Patent number
12,218,395
Issue date
Feb 4, 2025
BOE Technology Group Co., Ltd.
Jingwen Guo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical microphone with reduced overall size
Patent number
12,215,022
Issue date
Feb 4, 2025
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Samer Dagher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Trim circuit and method of oscillator drive circuit phase calibration
Patent number
12,203,774
Issue date
Jan 21, 2025
NXP USA, INC.
Raghavendra N Sridhar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated microfluidic system and method of fabrication
Patent number
12,194,464
Issue date
Jan 14, 2025
Corporation for National Research Initiatives
Michael A. Huff
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electromechanical transducer with reduced size
Patent number
12,195,329
Issue date
Jan 14, 2025
Sonion Nederland B.V.
Adrianus Maria Lafort
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICRO-ELECTROMECHANICAL MICROPHONES AND METHODS OF FORMING THE SAME
Publication number
20250240578
Publication date
Jul 24, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
Publication number
20250233327
Publication date
Jul 17, 2025
Atomic Machines, Inc.
Fabian Goericke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
Publication number
20250230038
Publication date
Jul 17, 2025
Vanguard International Semiconductor Corporation
ROHIT PULIKKAL KIZHAKKEYIL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECH...
Publication number
20250223156
Publication date
Jul 10, 2025
InvenSense, Inc.
Joseph Seeger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR FAST MODE CHANGE OF A DIGITAL MICROPHONE USIN...
Publication number
20250214831
Publication date
Jul 3, 2025
INFINEON TECHNOLOGIES AG
Dietmar Straeussnigg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE SENSOR AND METHOD FOR OPERATING A CAPACITIVE SENSOR
Publication number
20250199041
Publication date
Jun 19, 2025
ROBERT BOSCH GmbH
David Slogsnat
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TEMPERATURE DEPENDENT CALIBRATION OF MOVEMENT DETECTION DEVICES
Publication number
20250172409
Publication date
May 29, 2025
Magic Leap, Inc.
Cuthbert Martindale ALLEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACCOMMODATING VARIOUS LASER DIODE EMITTER AND IMAGING SPOT SIZES FO...
Publication number
20250167510
Publication date
May 22, 2025
Prysm Systems, Inc.
Roger A. HAJJAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
Publication number
20250145456
Publication date
May 8, 2025
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE TRANSDUCERS HAVING IMPROVED RESISTANCE TO TEMPERATURE ERROR
Publication number
20250146896
Publication date
May 8, 2025
Illinois Tool Works Inc.
Chris Fontana
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR MODULE AND MANUFACTURING METHOD OF THE SAME
Publication number
20250146965
Publication date
May 8, 2025
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
Seungeon MOON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSING SYSTEM HAVING A MEMS NITROGEN VACANCY SENSING DEVICE AND RE...
Publication number
20250138111
Publication date
May 1, 2025
Eagle Technology, LLC
SCOTT RAUSCHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CIRCUIT FOR OPERATING A CAPACITIVE SENSOR AND SENSOR APPARATUS
Publication number
20250130260
Publication date
Apr 24, 2025
ROBERT BOSCH GmbH
Alice Lanniel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THERMAL EMITTER, METHOD FOR OPERATING A THERMAL EMITTER AND MEMS GA...
Publication number
20250133634
Publication date
Apr 24, 2025
INFINEON TECHNOLOGIES AG
Tobias Mittereder
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THIN-FILM PIEZOELECTRIC MICROELECTROMECHANICAL STRUCTURE HAVING IMP...
Publication number
20250120319
Publication date
Apr 10, 2025
STMicroelectronics S.r.l
Domenico GIUSTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRIM CIRCUIT AND METHOD OF OSCILLATOR DRIVE CIRCUIT PHASE CALIBRATION
Publication number
20250109967
Publication date
Apr 3, 2025
NXP USA, Inc.
Raghavendra N. Sridhar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR
Publication number
20250083950
Publication date
Mar 13, 2025
Kabushiki Kaisha Toshiba
Hiroaki YAMAZAKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
Publication number
20250074766
Publication date
Mar 6, 2025
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELF-FOLDING 3D FILM ASSEMBLIES
Publication number
20250059026
Publication date
Feb 20, 2025
3M Innovative Properties Company
Jia Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR ULTRASONIC TRANSDUCER DEVICE AND METHODS OF FORMATION
Publication number
20250058353
Publication date
Feb 20, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Ming HUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTIVE TRANSISTOR PHYSICAL UNCLONABLE FUNCTION (PUF) CIRCUIT WITH M...
Publication number
20250047511
Publication date
Feb 6, 2025
Honeywell International Inc.
James L. Tucker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
Publication number
20250026633
Publication date
Jan 23, 2025
SILICON LIGHT MACHINES CORPORATION
Olav Solgaard
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES
Publication number
20250002331
Publication date
Jan 2, 2025
NXP USA, Inc.
Mostafa Soliman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SENSOR DEVICE WITH WAFER-LEVEL INTEGRATION O...
Publication number
20250002332
Publication date
Jan 2, 2025
STMicroelectronics International N.V.
Giorgio ALLEGATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVEL PROXIMITY SENSOR AND METHOD OF MAKING SAME
Publication number
20250002333
Publication date
Jan 2, 2025
STMicroelectronics International N.V.
Eric SAUGIER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMORY DEVICES AND ELECTRONIC SYSTEMS
Publication number
20250008727
Publication date
Jan 2, 2025
Micron Technology, Inc.
Erwin E. Yu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMBINED SOUND TRANSDUCER AND PRESSURE SENSOR PACKAGE
Publication number
20240425363
Publication date
Dec 26, 2024
INFINEON TECHNOLOGIES AG
Bernhard Rieder
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Capacitive MEMS Sensing Diagnostic Mode
Publication number
20240426689
Publication date
Dec 26, 2024
INFINEON TECHNOLOGIES AG
Philipp Greiner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
Publication number
20240405454
Publication date
Dec 5, 2024
Atomic Machines, Inc.
Fabian Goericke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
AUTOSTEREOSCOPIC CAMPFIRE DISPLAY
Publication number
20240402483
Publication date
Dec 5, 2024
GM GLOBAL TECHNOLOGY OPERATIONS LLC
Thomas A. Seder
B81 - MICRO-STRUCTURAL TECHNOLOGY