Controlling etch progression

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B81C2201/0135

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/0135Controlling etch progression

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of fabricating a microscale canopy wick structure having enh...
- Patent number 11,712,766
- Issue date Aug 1, 2023
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Gaohua Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High-volume millimeter scale manufacturing
- Patent number 11,325,828
- Issue date May 10, 2022
- Vibrant Composites Inc.
- Pratheev S. Sreetharan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,941,036
- Issue date Mar 9, 2021
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,836,632
- Issue date Nov 17, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,784,115
- Issue date Sep 22, 2020
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic layer etching using a combination of plasma and vapor treatm...
- Patent number 10,784,118
- Issue date Sep 22, 2020
- Lam Research Corporation
- Andreas Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Field emission devices and methods of making thereof
- Patent number 10,504,772
- Issue date Dec 10, 2019
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,395,940
- Issue date Aug 27, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic layer etching of AL2O3 using a combination of plasma and vap...
- Patent number 10,256,108
- Issue date Apr 9, 2019
- Lam Research Corporation
- Andreas Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS grid for manipulating structural parameters of MEMS devices
- Patent number 10,199,262
- Issue date Feb 5, 2019
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Island etched filter passages
- Patent number 10,086,317
- Issue date Oct 2, 2018
- Hewlett-Packard Development Company, L.P.
- Roger A. McKay
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching apparatus and methods
- Patent number 9,640,370
- Issue date May 2, 2017
- SPTS Technologies Limited
- Oliver James Ansell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS grid for manipulating structural parameters of MEMS devices
- Patent number 9,617,142
- Issue date Apr 11, 2017
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 8,624,336
- Issue date Jan 7, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 8,043,950
- Issue date Oct 25, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Technique for manufacturing micro-electro mechanical structures
- Patent number 7,214,324
- Issue date May 8, 2007
- Delphi Technologies, Inc.
- Dan W. Chilcott
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES
- Publication number 20230061174
- Publication date Mar 2, 2023
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
- Publication number 20220259038
- Publication date Aug 18, 2022
- Vibrant Composites Inc.
- Pratheev S. SREETHARAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING A MICROSCALE CANOPY WICK STRUCTURE HAVING ENH...
- Publication number 20210370449
- Publication date Dec 2, 2021
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Gaohua Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...
- Publication number 20190333773
- Publication date Oct 31, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATOMIC LAYER ETCHING USING A COMBINATION OF PLASMA AND VAPOR TREATM...
- Publication number 20190198345
- Publication date Jun 27, 2019
- LAM RESEARCH CORPORATION
- Andreas Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES
- Publication number 20170320724
- Publication date Nov 9, 2017
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES
- Publication number 20170088415
- Publication date Mar 30, 2017
- MEMS DRIVE, INC.
- ROMAN GUTIERREZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Mechanically Isolated MEMS Device
- Publication number 20170073218
- Publication date Mar 16, 2017
- Analog Devices Inc.
- Bradley C. Kaanta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20120032304
- Publication date Feb 9, 2012
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Mayumi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Accelerated Etching of Silicon
- Publication number 20080254635
- Publication date Oct 16, 2008
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20070093045
- Publication date Apr 26, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Mayumi YAMAGUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Technique for manufacturing micro-electro mechanical structures
- Publication number 20060231521
- Publication date Oct 19, 2006
- Dan W. Chilcott
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Controlling etch progression

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of fabricating a microscale canopy wick structure having enh...

High-volume millimeter scale manufacturing

Method of manufacturing MEMS switches with reduced switching voltage

Method of manufacturing MEMS switches with reduced switching voltage

Method of etching microelectronic mechanical system features in a s...

Atomic layer etching using a combination of plasma and vapor treatm...

Field emission devices and methods of making thereof

Method of etching microelectronic mechanical system features in a s...

Atomic layer etching of AL2O3 using a combination of plasma and vap...

MEMS grid for manipulating structural parameters of MEMS devices

Island etched filter passages

Etching apparatus and methods

MEMS grid for manipulating structural parameters of MEMS devices

Semiconductor device and manufacturing method thereof

Semiconductor device and manufacturing method thereof

Technique for manufacturing micro-electro mechanical structures

Patents Applicationslast 30 patents

CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES

HIGH-VOLUME MILLIMETER SCALE MANUFACTURING

METHOD OF FABRICATING A MICROSCALE CANOPY WICK STRUCTURE HAVING ENH...

METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...

ATOMIC LAYER ETCHING USING A COMBINATION OF PLASMA AND VAPOR TREATM...

MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES

MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES

Mechanically Isolated MEMS Device

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

Method for Accelerated Etching of Silicon

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

Technique for manufacturing micro-electro mechanical structures