Design; Simulation

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B81C99/006

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C99/00Subject matter not provided for in other groups of this subclass

Current Industry

B81C99/006Design; Simulation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Atomic-scale e-beam sculptor
- Patent number 11,518,674
- Issue date Dec 6, 2022
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sizing of a microfluidic device for confining a sample
- Patent number 11,266,986
- Issue date Mar 8, 2022
- Centre National de la Recherche Scientifique (Cnrs)
- Thibault Honegger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma health determination in semiconductor substrate processing r...
- Patent number 10,920,320
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Junghoon Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical spring device and method for manufacturing a microm...
- Patent number 10,737,930
- Issue date Aug 11, 2020
- Robert Bosch GmbH
- Helmut Grutzeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical-systems processing method, and micro-elect...
- Patent number 10,662,059
- Issue date May 26, 2020
- Hitachi, Ltd.
- Keiji Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS manufacturing method and MEMS manufacturing apparatus
- Patent number 10,605,824
- Issue date Mar 31, 2020
- Hitachi, Ltd.
- Shuntaro Machida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic device with multi-level, programmable microfluidic node
- Patent number 10,556,233
- Issue date Feb 11, 2020
- International Business Machines Corporation
- Emmanuel Delamarche
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS manufacturing system and MEMS manufacturing method
- Patent number 10,538,429
- Issue date Jan 21, 2020
- Hitachi, Ltd.
- Misuzu Sagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidics planar placement and routing algorithm
- Patent number 10,360,336
- Issue date Jul 23, 2019
- The Regents of the University of California
- Philip Brisk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for extracting relevant computational data for de...
- Patent number 10,296,682
- Issue date May 21, 2019
- AIRBUS GROUP INDIA PRIVATE LIMITED
- Punit Tiwari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device manufacturing method and device manufacturing apparatus
- Patent number 10,002,801
- Issue date Jun 19, 2018
- Hitachi, Ltd.
- Misuzu Sagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 9,714,473
- Issue date Jul 25, 2017
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching apparatus and methods
- Patent number 9,640,370
- Issue date May 2, 2017
- SPTS Technologies Limited
- Oliver James Ansell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nano-electromechanical switch
- Patent number 9,611,134
- Issue date Apr 4, 2017
- International Business Machines Corporation
- Michel Despont
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for adaptive feedback controlled polishing
- Patent number 9,573,243
- Issue date Feb 21, 2017
- Headway Technologies, Inc.
- Terry Moore
- B24 - GRINDING POLISHING
Information Patent Grant
Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabrica...
- Patent number 8,895,338
- Issue date Nov 25, 2014
- Corporation for National Research Initiatives
- Michael A. Huff
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical structure (MEMS) capacitor devices, capaci...
- Patent number 8,739,096
- Issue date May 27, 2014
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 8,702,956
- Issue date Apr 22, 2014
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cavity process etch undercut monitor
- Patent number 8,652,971
- Issue date Feb 18, 2014
- Texas Instruments Incorporated
- Ricky Alan Jackson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System for measuring a shape, method for measuring a shape, and com...
- Patent number 8,543,352
- Issue date Sep 24, 2013
- Dai Nippon Printing Co., Ltd.
- Yuki Aritsuka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Differential critical dimension and overlay metrology apparatus and...
- Patent number 8,035,824
- Issue date Oct 11, 2011
- International Business Machines Corporation
- Christopher Ausschnitt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal bend actuator material selection
- Patent number 7,887,233
- Issue date Feb 15, 2011
- Silverbrook Research Pty Ltd
- Gregory John McAvoy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trench depth monitor for semiconductor manufacturing
- Patent number 7,795,045
- Issue date Sep 14, 2010
- Icemos Technology Ltd.
- Hugh J. Griffin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Differential critical dimension and overlay metrology apparatus and...
- Patent number 7,700,247
- Issue date Apr 20, 2010
- International Business Machines Corporation
- Christopher Ausschnitt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive measurement method and system for nanoimprint process mo...
- Patent number 7,682,552
- Issue date Mar 23, 2010
- Industrial Technology Research Institute
- Chin-Chung Nien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metrology structure and methods
- Patent number 7,678,289
- Issue date Mar 16, 2010
- Hewlett-Packard Development Company, L.P.
- Stephen Jalrus Potochnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for monitoring a microstructure etching process
- Patent number 7,672,750
- Issue date Mar 2, 2010
- Point 35 Microstructures Ltd.
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wet etch processing
- Patent number 7,651,946
- Issue date Jan 26, 2010
- University College Cork—National University of Ireland, Cork
- Nicolle Wilke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermoelastic device with preselected resistivity, inertness and de...
- Patent number 7,607,826
- Issue date Oct 27, 2009
- Silverbrook Research Pty Ltd
- Gregory John McAvoy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 7,588,674
- Issue date Sep 15, 2009
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Ultra-High Frequency MEMS Resonators with First and Second Order Te...
- Publication number 20230264946
- Publication date Aug 24, 2023
- Stathera IP Holdings Inc.
- Anosh Daruwalla
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR DESIGNING A SCANNING MIRROR ASSEMBLY WITH AN...
- Publication number 20220324704
- Publication date Oct 13, 2022
- Beijing Voyager Technology Co., Ltd.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATOMIC-SCALE E-BEAM SCULPTOR
- Publication number 20200247667
- Publication date Aug 6, 2020
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Mems Manufacturing System and Mems Manufacturing Method
- Publication number 20190084830
- Publication date Mar 21, 2019
- Hitachi, Ltd
- Misuzu SAGAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICE WITH MULTI-LEVEL, PROGRAMMABLE MICROFLUIDIC NODE
- Publication number 20180369809
- Publication date Dec 27, 2018
- International Business Machines Corporation
- Emmanuel Delamarche
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device Designing Method and Device Designing Apparatus
- Publication number 20180273378
- Publication date Sep 27, 2018
- Hitachi, Ltd
- Tetsufumi KAWAMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SPRING DEVICE AND METHOD FOR MANUFACTURING A MICROM...
- Publication number 20180155185
- Publication date Jun 7, 2018
- ROBERT BOSCH GmbH
- Helmut GRUTZECK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR CHARACTERIZING CRITICAL PARAMETERS RESULTING...
- Publication number 20180053698
- Publication date Feb 22, 2018
- FREESCALE SEMICONDUCTOR, INC.
- Paige M. Holm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANO-ELECTROMECHANICAL SWITCH
- Publication number 20150232324
- Publication date Aug 20, 2015
- International Business Machines Corporation
- Michel Despont
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20140231263
- Publication date Aug 21, 2014
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL STRUCTURE (MEMS) CAPACITOR DEVICES, CAPACI...
- Publication number 20130154054
- Publication date Jun 20, 2013
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAVITY PROCESS ETCH UNDERCUT MONITOR
- Publication number 20120223401
- Publication date Sep 6, 2012
- TEXAS INSTRUMENTS INCORPORATED
- Ricky Alan Jackson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20120181180
- Publication date Jul 19, 2012
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrochemical Fabrication Methods for Producing Multilayer Struct...
- Publication number 20120114861
- Publication date May 10, 2012
- Microfabrica Inc.
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING MEMS, NEMS, PHOTONIC, MICRO- AND NANO-FABRICA...
- Publication number 20110250706
- Publication date Oct 13, 2011
- Michael A. HUFF
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM FOR MEASURING A SHAPE, METHOD FOR MEASURING A SHAPE, AND COM...
- Publication number 20100169042
- Publication date Jul 1, 2010
- Dai Nippon Printing Co., Ltd.
- Yuki Aritsuka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIFFERENTIAL CRITICAL DIMENSION AND OVERLAY METROLOGY APPARATUS AND...
- Publication number 20100103433
- Publication date Apr 29, 2010
- International Business Machines Corporation
- Christopher Ausschnitt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20100038253
- Publication date Feb 18, 2010
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thermal Bend Actuator Material Selection
- Publication number 20100020843
- Publication date Jan 28, 2010
- SILVERBROOK RESEARCH PTY LTD
- Gregory John McAvoy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO--ELECTROMECHANICAL ACTUATOR WITH SPACER SEPARATED LAYERS
- Publication number 20090212658
- Publication date Aug 27, 2009
- SILVERBROOK RESEARCH PTY LTD
- Gregory John McAvoy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRENCH DEPTH MONITOR FOR SEMICONDUCTOR MANUFACTURING
- Publication number 20090200547
- Publication date Aug 13, 2009
- ICEMOS TECHNOLOGY LTD.
- Hugh J. Griffin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIGITAL LITHOGRAPHY USING REAL TIME QUALITY CONTROL
- Publication number 20090185018
- Publication date Jul 23, 2009
- Palo Alto Research Center Incorporated
- Steven E. Ready
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrochemical Fabrication Methods for Producing Multilayer Struct...
- Publication number 20090020433
- Publication date Jan 22, 2009
- Microfabrica Inc.
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM
- Publication number 20080318344
- Publication date Dec 25, 2008
- QUALCOMM Incorporated
- Marjorio Rafanan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR WAFER BACKSIDE ALIGNMENT OVERLAY ACCURACY
- Publication number 20080248600
- Publication date Oct 9, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sheng-Chieh Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Metrology Structure And Methods
- Publication number 20080157078
- Publication date Jul 3, 2008
- Stephen Jalrus Potochnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method And Apparatus For Monitoring A Microstructure Etching Process
- Publication number 20080147229
- Publication date Jun 19, 2008
- POINT 35 MICROSTRUCTURES LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method And Apparatus For Monitoring Plasma Conditions In An Etching...
- Publication number 20080134757
- Publication date Jun 12, 2008
- Advanced Technology Materials, Inc.
- Ing-Shin Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR QUANTIFYING OVER-ETCH OF A CONDUCTIVE FEATURE
- Publication number 20080113087
- Publication date May 15, 2008
- TEXAS INSTRUMENTS INCORPORATED
- Rabah Mezenner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thermoelastic Device With Preselected Resistivity, Inertness And De...
- Publication number 20070243413
- Publication date Oct 18, 2007
- SILVERBROOK RESEARCH PTY LTD
- Gregory John McAvoy
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Design; Simulation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Atomic-scale e-beam sculptor

Sizing of a microfluidic device for confining a sample

Plasma health determination in semiconductor substrate processing r...

Micromechanical spring device and method for manufacturing a microm...

Micro-electro-mechanical-systems processing method, and micro-elect...

MEMS manufacturing method and MEMS manufacturing apparatus

Microfluidic device with multi-level, programmable microfluidic node

MEMS manufacturing system and MEMS manufacturing method

Microfluidics planar placement and routing algorithm

System and method for extracting relevant computational data for de...

Device manufacturing method and device manufacturing apparatus

Method and apparatus for maintaining parallelism of layers and/or a...

Etching apparatus and methods

Nano-electromechanical switch

Method for adaptive feedback controlled polishing

Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabrica...

Micro-electro-mechanical structure (MEMS) capacitor devices, capaci...

Method and apparatus for maintaining parallelism of layers and/or a...

Cavity process etch undercut monitor

System for measuring a shape, method for measuring a shape, and com...

Differential critical dimension and overlay metrology apparatus and...

Thermal bend actuator material selection

Trench depth monitor for semiconductor manufacturing

Differential critical dimension and overlay metrology apparatus and...

Capacitive measurement method and system for nanoimprint process mo...

Metrology structure and methods

Method and apparatus for monitoring a microstructure etching process

Wet etch processing

Thermoelastic device with preselected resistivity, inertness and de...

Method and apparatus for maintaining parallelism of layers and/or a...

Patents Applicationslast 30 patents

Ultra-High Frequency MEMS Resonators with First and Second Order Te...

SYSTEM AND METHOD FOR DESIGNING A SCANNING MIRROR ASSEMBLY WITH AN...

ATOMIC-SCALE E-BEAM SCULPTOR

Mems Manufacturing System and Mems Manufacturing Method

MICROFLUIDIC DEVICE WITH MULTI-LEVEL, PROGRAMMABLE MICROFLUIDIC NODE

Device Designing Method and Device Designing Apparatus

MICROMECHANICAL SPRING DEVICE AND METHOD FOR MANUFACTURING A MICROM...

SYSTEM AND METHOD FOR CHARACTERIZING CRITICAL PARAMETERS RESULTING...

NANO-ELECTROMECHANICAL SWITCH

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

MICRO-ELECTRO-MECHANICAL STRUCTURE (MEMS) CAPACITOR DEVICES, CAPACI...

CAVITY PROCESS ETCH UNDERCUT MONITOR

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

Electrochemical Fabrication Methods for Producing Multilayer Struct...

METHOD OF FABRICATING MEMS, NEMS, PHOTONIC, MICRO- AND NANO-FABRICA...

SYSTEM FOR MEASURING A SHAPE, METHOD FOR MEASURING A SHAPE, AND COM...

DIFFERENTIAL CRITICAL DIMENSION AND OVERLAY METROLOGY APPARATUS AND...

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

Thermal Bend Actuator Material Selection

MICRO--ELECTROMECHANICAL ACTUATOR WITH SPACER SEPARATED LAYERS

TRENCH DEPTH MONITOR FOR SEMICONDUCTOR MANUFACTURING

DIGITAL LITHOGRAPHY USING REAL TIME QUALITY CONTROL

Electrochemical Fabrication Methods for Producing Multilayer Struct...

INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM

METHOD AND DEVICE FOR WAFER BACKSIDE ALIGNMENT OVERLAY ACCURACY

Metrology Structure And Methods

Method And Apparatus For Monitoring A Microstructure Etching Process

Method And Apparatus For Monitoring Plasma Conditions In An Etching...

METHOD FOR QUANTIFYING OVER-ETCH OF A CONDUCTIVE FEATURE

Thermoelastic Device With Preselected Resistivity, Inertness And De...