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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C99/00
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B81C99/006
Design; Simulation
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Patents Grants
last 30 patents
Information
Patent Grant
Atomic-scale e-beam sculptor
Patent number
11,518,674
Issue date
Dec 6, 2022
UT-Battelle, LLC
Sergei V. Kalinin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sizing of a microfluidic device for confining a sample
Patent number
11,266,986
Issue date
Mar 8, 2022
Centre National de la Recherche Scientifique (Cnrs)
Thibault Honegger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Plasma health determination in semiconductor substrate processing r...
Patent number
10,920,320
Issue date
Feb 16, 2021
Applied Materials, Inc.
Junghoon Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical spring device and method for manufacturing a microm...
Patent number
10,737,930
Issue date
Aug 11, 2020
Robert Bosch GmbH
Helmut Grutzeck
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical-systems processing method, and micro-elect...
Patent number
10,662,059
Issue date
May 26, 2020
Hitachi, Ltd.
Keiji Watanabe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS manufacturing method and MEMS manufacturing apparatus
Patent number
10,605,824
Issue date
Mar 31, 2020
Hitachi, Ltd.
Shuntaro Machida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic device with multi-level, programmable microfluidic node
Patent number
10,556,233
Issue date
Feb 11, 2020
International Business Machines Corporation
Emmanuel Delamarche
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS manufacturing system and MEMS manufacturing method
Patent number
10,538,429
Issue date
Jan 21, 2020
Hitachi, Ltd.
Misuzu Sagawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidics planar placement and routing algorithm
Patent number
10,360,336
Issue date
Jul 23, 2019
The Regents of the University of California
Philip Brisk
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for extracting relevant computational data for de...
Patent number
10,296,682
Issue date
May 21, 2019
AIRBUS GROUP INDIA PRIVATE LIMITED
Punit Tiwari
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device manufacturing method and device manufacturing apparatus
Patent number
10,002,801
Issue date
Jun 19, 2018
Hitachi, Ltd.
Misuzu Sagawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
Patent number
9,714,473
Issue date
Jul 25, 2017
Microfabrica Inc.
Uri Frodis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Etching apparatus and methods
Patent number
9,640,370
Issue date
May 2, 2017
SPTS Technologies Limited
Oliver James Ansell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nano-electromechanical switch
Patent number
9,611,134
Issue date
Apr 4, 2017
International Business Machines Corporation
Michel Despont
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for adaptive feedback controlled polishing
Patent number
9,573,243
Issue date
Feb 21, 2017
Headway Technologies, Inc.
Terry Moore
B24 - GRINDING POLISHING
Information
Patent Grant
Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabrica...
Patent number
8,895,338
Issue date
Nov 25, 2014
Corporation for National Research Initiatives
Michael A. Huff
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical structure (MEMS) capacitor devices, capaci...
Patent number
8,739,096
Issue date
May 27, 2014
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
Patent number
8,702,956
Issue date
Apr 22, 2014
Microfabrica Inc.
Uri Frodis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Cavity process etch undercut monitor
Patent number
8,652,971
Issue date
Feb 18, 2014
Texas Instruments Incorporated
Ricky Alan Jackson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System for measuring a shape, method for measuring a shape, and com...
Patent number
8,543,352
Issue date
Sep 24, 2013
Dai Nippon Printing Co., Ltd.
Yuki Aritsuka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Differential critical dimension and overlay metrology apparatus and...
Patent number
8,035,824
Issue date
Oct 11, 2011
International Business Machines Corporation
Christopher Ausschnitt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thermal bend actuator material selection
Patent number
7,887,233
Issue date
Feb 15, 2011
Silverbrook Research Pty Ltd
Gregory John McAvoy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Trench depth monitor for semiconductor manufacturing
Patent number
7,795,045
Issue date
Sep 14, 2010
Icemos Technology Ltd.
Hugh J. Griffin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Differential critical dimension and overlay metrology apparatus and...
Patent number
7,700,247
Issue date
Apr 20, 2010
International Business Machines Corporation
Christopher Ausschnitt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive measurement method and system for nanoimprint process mo...
Patent number
7,682,552
Issue date
Mar 23, 2010
Industrial Technology Research Institute
Chin-Chung Nien
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Metrology structure and methods
Patent number
7,678,289
Issue date
Mar 16, 2010
Hewlett-Packard Development Company, L.P.
Stephen Jalrus Potochnik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for monitoring a microstructure etching process
Patent number
7,672,750
Issue date
Mar 2, 2010
Point 35 Microstructures Ltd.
Anthony O'Hara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wet etch processing
Patent number
7,651,946
Issue date
Jan 26, 2010
University College Cork—National University of Ireland, Cork
Nicolle Wilke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thermoelastic device with preselected resistivity, inertness and de...
Patent number
7,607,826
Issue date
Oct 27, 2009
Silverbrook Research Pty Ltd
Gregory John McAvoy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
Patent number
7,588,674
Issue date
Sep 15, 2009
Microfabrica Inc.
Uri Frodis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Ultra-High Frequency MEMS Resonators with First and Second Order Te...
Publication number
20230264946
Publication date
Aug 24, 2023
Stathera IP Holdings Inc.
Anosh Daruwalla
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR DESIGNING A SCANNING MIRROR ASSEMBLY WITH AN...
Publication number
20220324704
Publication date
Oct 13, 2022
Beijing Voyager Technology Co., Ltd.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ATOMIC-SCALE E-BEAM SCULPTOR
Publication number
20200247667
Publication date
Aug 6, 2020
UT-Battelle, LLC
Sergei V. Kalinin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Mems Manufacturing System and Mems Manufacturing Method
Publication number
20190084830
Publication date
Mar 21, 2019
Hitachi, Ltd
Misuzu SAGAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFLUIDIC DEVICE WITH MULTI-LEVEL, PROGRAMMABLE MICROFLUIDIC NODE
Publication number
20180369809
Publication date
Dec 27, 2018
International Business Machines Corporation
Emmanuel Delamarche
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Device Designing Method and Device Designing Apparatus
Publication number
20180273378
Publication date
Sep 27, 2018
Hitachi, Ltd
Tetsufumi KAWAMURA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL SPRING DEVICE AND METHOD FOR MANUFACTURING A MICROM...
Publication number
20180155185
Publication date
Jun 7, 2018
ROBERT BOSCH GmbH
Helmut GRUTZECK
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR CHARACTERIZING CRITICAL PARAMETERS RESULTING...
Publication number
20180053698
Publication date
Feb 22, 2018
FREESCALE SEMICONDUCTOR, INC.
Paige M. Holm
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NANO-ELECTROMECHANICAL SWITCH
Publication number
20150232324
Publication date
Aug 20, 2015
International Business Machines Corporation
Michel Despont
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
Publication number
20140231263
Publication date
Aug 21, 2014
Uri Frodis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL STRUCTURE (MEMS) CAPACITOR DEVICES, CAPACI...
Publication number
20130154054
Publication date
Jun 20, 2013
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAVITY PROCESS ETCH UNDERCUT MONITOR
Publication number
20120223401
Publication date
Sep 6, 2012
TEXAS INSTRUMENTS INCORPORATED
Ricky Alan Jackson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
Publication number
20120181180
Publication date
Jul 19, 2012
Microfabrica Inc.
Uri Frodis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrochemical Fabrication Methods for Producing Multilayer Struct...
Publication number
20120114861
Publication date
May 10, 2012
Microfabrica Inc.
Adam L. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FABRICATING MEMS, NEMS, PHOTONIC, MICRO- AND NANO-FABRICA...
Publication number
20110250706
Publication date
Oct 13, 2011
Michael A. HUFF
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM FOR MEASURING A SHAPE, METHOD FOR MEASURING A SHAPE, AND COM...
Publication number
20100169042
Publication date
Jul 1, 2010
Dai Nippon Printing Co., Ltd.
Yuki Aritsuka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIFFERENTIAL CRITICAL DIMENSION AND OVERLAY METROLOGY APPARATUS AND...
Publication number
20100103433
Publication date
Apr 29, 2010
International Business Machines Corporation
Christopher Ausschnitt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
Publication number
20100038253
Publication date
Feb 18, 2010
Microfabrica Inc.
Uri Frodis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Thermal Bend Actuator Material Selection
Publication number
20100020843
Publication date
Jan 28, 2010
SILVERBROOK RESEARCH PTY LTD
Gregory John McAvoy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO--ELECTROMECHANICAL ACTUATOR WITH SPACER SEPARATED LAYERS
Publication number
20090212658
Publication date
Aug 27, 2009
SILVERBROOK RESEARCH PTY LTD
Gregory John McAvoy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRENCH DEPTH MONITOR FOR SEMICONDUCTOR MANUFACTURING
Publication number
20090200547
Publication date
Aug 13, 2009
ICEMOS TECHNOLOGY LTD.
Hugh J. Griffin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIGITAL LITHOGRAPHY USING REAL TIME QUALITY CONTROL
Publication number
20090185018
Publication date
Jul 23, 2009
Palo Alto Research Center Incorporated
Steven E. Ready
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrochemical Fabrication Methods for Producing Multilayer Struct...
Publication number
20090020433
Publication date
Jan 22, 2009
Microfabrica Inc.
Adam L. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM
Publication number
20080318344
Publication date
Dec 25, 2008
QUALCOMM Incorporated
Marjorio Rafanan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND DEVICE FOR WAFER BACKSIDE ALIGNMENT OVERLAY ACCURACY
Publication number
20080248600
Publication date
Oct 9, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Sheng-Chieh Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Metrology Structure And Methods
Publication number
20080157078
Publication date
Jul 3, 2008
Stephen Jalrus Potochnik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method And Apparatus For Monitoring A Microstructure Etching Process
Publication number
20080147229
Publication date
Jun 19, 2008
POINT 35 MICROSTRUCTURES LIMITED
Anthony O'Hara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method And Apparatus For Monitoring Plasma Conditions In An Etching...
Publication number
20080134757
Publication date
Jun 12, 2008
Advanced Technology Materials, Inc.
Ing-Shin Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR QUANTIFYING OVER-ETCH OF A CONDUCTIVE FEATURE
Publication number
20080113087
Publication date
May 15, 2008
TEXAS INSTRUMENTS INCORPORATED
Rabah Mezenner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Thermoelastic Device With Preselected Resistivity, Inertness And De...
Publication number
20070243413
Publication date
Oct 18, 2007
SILVERBROOK RESEARCH PTY LTD
Gregory John McAvoy
B81 - MICRO-STRUCTURAL TECHNOLOGY