Electrodes

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B81B2203/04

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/04Electrodes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Anti-stiction enhancement of ruthenium contact
- Patent number 12,172,888
- Issue date Dec 24, 2024
- Qorvo US, Inc.
- James D. Huffman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) vibration sensor and fabrica...
- Patent number 12,172,886
- Issue date Dec 24, 2024
- UPBEAT TECHNOLOGY CO., LTD
- Hsien-Lung Ho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Interconnection scheme for dielectric element sensor
- Patent number 12,168,601
- Issue date Dec 17, 2024
- Knowles Electronics, LLC
- Michael Pedersen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor device having a capacitor se...
- Patent number 12,163,851
- Issue date Dec 10, 2024
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sharp, vertically aligned nanowire electrode arrays, high-yield fab...
- Patent number 12,157,666
- Issue date Dec 3, 2024
- The Regents of the University of California
- Shadi Dayeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone assembly with disturbance compensation
- Patent number 12,156,003
- Issue date Nov 26, 2024
- Knowles Electronics, LLC
- Jakob Kenn Toft
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor device or microphone device
- Patent number 12,151,936
- Issue date Nov 26, 2024
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device having a mechanically robust...
- Patent number 12,151,932
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
- Patent number 12,145,838
- Issue date Nov 19, 2024
- Vermon S.A.
- Cyril Meynier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Drop resistant MEMS actuator-imager assembly package
- Patent number 12,145,839
- Issue date Nov 19, 2024
- Faez Ba-Tis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical sensor device with improved stability to stress
- Patent number 12,139,396
- Issue date Nov 12, 2024
- STMicroelectronics S.r.l.
- Francesco Rizzini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor with high stability
- Patent number 12,139,398
- Issue date Nov 12, 2024
- Invensense, Inc.
- Weng Shen Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Triple-membrane MEMS device
- Patent number 12,133,060
- Issue date Oct 29, 2024
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device using a metallic movable part...
- Patent number 12,122,665
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing implantable electrodes and electrodes made...
- Patent number 12,098,069
- Issue date Sep 24, 2024
- Sangwoo Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
- Patent number 12,092,460
- Issue date Sep 17, 2024
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical-system structures and applications thereof
- Patent number 12,084,340
- Issue date Sep 10, 2024
- Mekonos, Inc.
- Mark A. Webb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor device and corresponding production method
- Patent number 12,077,429
- Issue date Sep 3, 2024
- Robert Bosch GmbH
- Lars Tebje
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Adaptive cavity thickness control for micromachined ultrasonic tran...
- Patent number 12,070,773
- Issue date Aug 27, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for lithography process
- Patent number 12,066,756
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a TMD structure
- Patent number 12,063,469
- Issue date Aug 13, 2024
- Infineon Technologies AG
- Abidin Güçlü Onaran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric MEMS microphone
- Patent number 12,058,939
- Issue date Aug 6, 2024
- The Regents of the University of Michigan
- Karl Grosh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically driven comb structure of MEMS, micro-mirror using...
- Patent number 12,054,387
- Issue date Aug 6, 2024
- Tao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
- Patent number 12,050,102
- Issue date Jul 30, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitance gap measurement
- Patent number 12,017,907
- Issue date Jun 25, 2024
- Invensense, Inc.
- Edoardo Belloni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and method for forming the same
- Patent number 12,017,908
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device
- Patent number 12,022,272
- Issue date Jun 25, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL PRESSURE SENS...
- Publication number 20240425351
- Publication date Dec 26, 2024
- ROBERT BOSCH GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three-axis Gyroscope
- Publication number 20240425355
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Hsiung TSENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR OPERATING A MEMS DEVICE
- Publication number 20240425361
- Publication date Dec 26, 2024
- INFINEON TECHNOLOGIES AG
- Björn Oliver Eversmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL MEMS DEVICE INTEGRATING A WAKE-UP ELEMENT, INERTIAL MEMS S...
- Publication number 20240425352
- Publication date Dec 26, 2024
- STMicroelectronics International N.V.
- Luca SEGHIZZI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEFORMATION MAPPING FOR OUT-OF-PLANE ACCELEROMETER OFFSET/SENSITIVI...
- Publication number 20240425354
- Publication date Dec 26, 2024
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
- Publication number 20240425360
- Publication date Dec 26, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor
- Publication number 20240425357
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Yuan LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR
- Publication number 20240417240
- Publication date Dec 19, 2024
- CENTER FOR ADVANCED SOFT ELECTRONICS
- Kilwon CHO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
- Publication number 20240416385
- Publication date Dec 19, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
- Publication number 20240418510
- Publication date Dec 19, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System And Method For Generating Fluid Flow
- Publication number 20240409399
- Publication date Dec 12, 2024
- Sonicedge Ltd.
- Mordehai Margalit
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL CIRCUIT SWITCH
- Publication number 20240409393
- Publication date Dec 12, 2024
- nEYE Systems, Inc.
- Xiaosheng ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE
- Publication number 20240400377
- Publication date Dec 5, 2024
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER, IN PARTICULAR FOR INTERACTING WITH A FLUID
- Publication number 20240400378
- Publication date Dec 5, 2024
- ROBERT BOSCH GmbH
- Peter Engelhart
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device and Method for Adapting Measuring Range and Sensitivity of M...
- Publication number 20240400379
- Publication date Dec 5, 2024
- RUHR-UNIVERSITÄT BOCHUM
- Philip SCHMITT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20240400376
- Publication date Dec 5, 2024
- AAC TECHNOLOGIES PTE. LTD
- Colin Robert Jenkins
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE
- Publication number 20240400374
- Publication date Dec 5, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
- Publication number 20240400380
- Publication date Dec 5, 2024
- STMicroelectronics International N.V.
- Patrick FEDELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Packaging of microelectromechanical system devices
- Publication number 20240391762
- Publication date Nov 28, 2024
- Teknologian Tutkimuskeskus VTT Oy
- Jae-Wung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AND METHOD FOR FORMING THE SAME
- Publication number 20240391756
- Publication date Nov 28, 2024
- AAC TECHNOLOGIES PTE. LTD
- ZaiXiang Pua
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP
- Publication number 20240391757
- Publication date Nov 28, 2024
- STMicroelectronics International N.V.
- Marco GARBARINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
- Publication number 20240391760
- Publication date Nov 28, 2024
- STMicroelectronics International N.V.
- Silvia NICOLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20240383742
- Publication date Nov 21, 2024
- Zhunmao (Hangzhou) Technology Co.
- Haitao Ding
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
- Publication number 20240383005
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kang-Yi Lien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT
- Publication number 20240383745
- Publication date Nov 21, 2024
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
- Publication number 20240375940
- Publication date Nov 14, 2024
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Fabrication Process with Reduced Z-Axis Stiction
- Publication number 20240375937
- Publication date Nov 14, 2024
- NXP USA, Inc.
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20240359969
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION DEVICE, SPEAKER UNIT, AND METHOD FOR MANUFACTURING VIBRAT...
- Publication number 20240359970
- Publication date Oct 31, 2024
- MITSUMI ELECTRIC CO., LTD.
- Hisanori AGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIFFERENTIAL DRIVE OF A SOUND TRANSDUCER SYSTEM
- Publication number 20240359971
- Publication date Oct 31, 2024
- ROBERT BOSCH GmbH
- Raik Fiedler
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Anti-stiction enhancement of ruthenium contact

Micro-electro-mechanical system (MEMS) vibration sensor and fabrica...

Interconnection scheme for dielectric element sensor

Micromechanical component for a sensor device having a capacitor se...

Sharp, vertically aligned nanowire electrode arrays, high-yield fab...

Microphone assembly with disturbance compensation

Micromechanical component for a sensor device or microphone device

Microelectromechanical systems device having a mechanically robust...

Micromechanical structure, micromechanical system and method of pro...

CMUT transducer with motion-stopping structure and CMUT transducer...

Drop resistant MEMS actuator-imager assembly package

Multiple layer electrode transducers

Microelectromechanical sensor device with improved stability to stress

Pressure sensor with high stability

Triple-membrane MEMS device

Micro-electromechanical system device using a metallic movable part...

Method for manufacturing implantable electrodes and electrodes made...

Silicon MEMS gyroscopes with upper and lower sense plates

Micro-electro-mechanical-system structures and applications thereof

Micromechanical sensor device and corresponding production method

Micromechanical structure and method of providing the same

Adaptive cavity thickness control for micromachined ultrasonic tran...

Method for lithography process

MEMS device with a TMD structure

Piezoelectric MEMS microphone

Electrostatically driven comb structure of MEMS, micro-mirror using...

Waterproof MEMS button device, input device comprising the MEMS but...

Capacitance gap measurement

Semiconductor structure and method for forming the same

MEMS device

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL PRESSURE SENS...

Three-axis Gyroscope

MEMS DEVICE AND METHOD FOR OPERATING A MEMS DEVICE

INERTIAL MEMS DEVICE INTEGRATING A WAKE-UP ELEMENT, INERTIAL MEMS S...

DEFORMATION MAPPING FOR OUT-OF-PLANE ACCELEROMETER OFFSET/SENSITIVI...

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

Inertial Sensor

ATTACHABLE MICROPHONE AND MANUFACTURING METHOD THEREFOR

ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...

INERTIAL SENSOR AND METHOD FOR FORMING THE SAME

System And Method For Generating Fluid Flow

MEMS OPTICAL CIRCUIT SWITCH

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

MEMS TRANSDUCER, IN PARTICULAR FOR INTERACTING WITH A FLUID

Device and Method for Adapting Measuring Range and Sensitivity of M...

MEMS DEVICE

MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE

MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION

Packaging of microelectromechanical system devices

MEMS SENSOR AND METHOD FOR FORMING THE SAME

MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP

CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS

MEMS DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME

MICROMECHANICAL COMPONENT

RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD

MEMS Device and Fabrication Process with Reduced Z-Axis Stiction

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

VIBRATION DEVICE, SPEAKER UNIT, AND METHOD FOR MANUFACTURING VIBRAT...

DIFFERENTIAL DRIVE OF A SOUND TRANSDUCER SYSTEM