Electrodes

Industry

CPC
B81B2203/04

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/04Electrodes

Industries

Patents Grantslast 30 patents

Information Patent Grant
Piezoelectric sensor with increased sensitivity and devices having...
- Patent number 12,329,033
- Issue date Jun 10, 2025
- Skyworks Solutions, Inc.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrode arrangement for a micro-electro-mechanical system includi...
- Patent number 12,312,236
- Issue date May 27, 2025
- Robert Bosch GmbH
- Martin Putnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas sensor and manufacturing method thereof
- Patent number 12,313,611
- Issue date May 27, 2025
- Electronics and Telecommunications Research Institute
- Seungeon Moon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Channel for decreasing damping asymmetry
- Patent number 12,312,235
- Issue date May 27, 2025
- Murata Manufacturing Co., Ltd.
- Akira Konno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic acoustic devices, MEMS microphones, and equalization met...
- Patent number 12,297,100
- Issue date May 13, 2025
- Skyworks Solutions, Inc.
- Humberto Campanella-Pineda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS display device with an etch-stop-layer
- Patent number 12,298,493
- Issue date May 13, 2025
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device
- Patent number 12,294,832
- Issue date May 6, 2025
- DENSO CORPORATION
- Yuki Ohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Artificial intelligence-based analog sensors and wearable devices i...
- Patent number 12,291,446
- Issue date May 6, 2025
- Nutech Ventures
- Fadi Alsaleem
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Constant charge or capacitance for capacitive micro-electrical-mech...
- Patent number 12,286,342
- Issue date Apr 29, 2025
- Invensense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer with contoured elect...
- Patent number 12,285,780
- Issue date Apr 29, 2025
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating-type gyroscope element and angular velocity sensor compri...
- Patent number 12,287,202
- Issue date Apr 29, 2025
- Sumitomo Precision Products Co., Ltd.
- Ryohei Uchino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transducer component, manufacturing method thereof, and transducer
- Patent number 12,281,006
- Issue date Apr 22, 2025
- BOE Technology Group Co., Ltd.
- Yongchun Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonant sensor using MEMS resonator, and detection method by reson...
- Patent number 12,275,634
- Issue date Apr 15, 2025
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Kunihiko Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
- Patent number 12,269,061
- Issue date Apr 8, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,269,734
- Issue date Apr 8, 2025
- TDK Corporation
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low hysteresis and flexible pressure sensitive composite
- Patent number 12,259,287
- Issue date Mar 25, 2025
- National University of Singapore
- Chee Keong Tee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor device
- Patent number 12,252,394
- Issue date Mar 18, 2025
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS capacitance microphone and manufacturing method thereof
- Patent number 12,250,519
- Issue date Mar 11, 2025
- Qsensing Microelectronics Co., Ltd
- Chien-Hsing Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS die and MEMS-based sensor
- Patent number 12,240,748
- Issue date Mar 4, 2025
- Knowles Electronics, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor MEMS structure
- Patent number 12,221,337
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic device, electrostatic device intermediate body and pr...
- Patent number 12,215,019
- Issue date Feb 4, 2025
- The University of Tokyo
- Hiroshi Toshiyoshi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Phase shifter in which at least some of first sub-electrodes are sh...
- Patent number 12,218,395
- Issue date Feb 4, 2025
- BOE Technology Group Co., Ltd.
- Jingwen Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with enhanced membrane structure and method of forming...
- Patent number 12,219,320
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric anti-stiction structure for microelectromechanical sy...
- Patent number 12,215,016
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT-on-CMOS ultrasonic transducer by bonding active wafers and man...
- Patent number 12,208,416
- Issue date Jan 28, 2025
- Zhejiang Xiansheng Technology Co., Ltd.
- Feng Yin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 12,187,597
- Issue date Jan 7, 2025
- AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD
- Kaijie Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor with integrated heater
- Patent number 12,180,067
- Issue date Dec 31, 2024
- Invensense, Inc.
- Pei-Wen Yen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system and process of making it
- Patent number 12,180,065
- Issue date Dec 31, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS
- Publication number 20250178885
- Publication date Jun 5, 2025
- STMicroelectronics International N.V.
- Massimiliano PESATURO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS COMPONENT
- Publication number 20250171297
- Publication date May 29, 2025
- ROBERT BOSCH GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...
- Publication number 20250171296
- Publication date May 29, 2025
- Industry-Academic Cooperation Foundation, Yonsei University
- Jongbaeg KIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES
- Publication number 20250162860
- Publication date May 22, 2025
- The University of British Columbia
- Chang Ge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT
- Publication number 20250145450
- Publication date May 8, 2025
- Nisshinbo Micro Devices Inc.
- Yoshimitsu Kuromaru
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250145456
- Publication date May 8, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT
- Publication number 20250145449
- Publication date May 8, 2025
- Nisshinbo Micro Devices Inc.
- Takao Fukutome
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...
- Publication number 20250145453
- Publication date May 8, 2025
- STMicroelectronics International N.V.
- Lorenzo CORSO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB STRUCTURE FOR MEMS ACCELEROMETER
- Publication number 20250138044
- Publication date May 1, 2025
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH AND ELECTRONIC DEVICE
- Publication number 20250136434
- Publication date May 1, 2025
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRETCHABLE ELECTRICAL INTERCONNECT, FLEXIBLE ELECTRONIC SYSTEM, AN...
- Publication number 20250136435
- Publication date May 1, 2025
- THE HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Hongyu YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATING-TYPE GYROSCOPE ELEMENT AND ANGULAR VELOCITY SENSOR INCLUD...
- Publication number 20250137786
- Publication date May 1, 2025
- SUMITOMO PRECISION PRODUCTS CO., LTD.
- Ryohei UCHINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
- Publication number 20250122071
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCALE FLEXIBLE STRAIN SENSOR
- Publication number 20250122073
- Publication date Apr 17, 2025
- Carnegie Mellon University
- Jay Reddy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...
- Publication number 20250126415
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-WEN CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
- Publication number 20250115472
- Publication date Apr 10, 2025
- Rohm Co., Ltd.
- Andrew Scott HOCKING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
- Publication number 20250100869
- Publication date Mar 27, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES
- Publication number 20250100871
- Publication date Mar 27, 2025
- InvenSense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE
- Publication number 20250100872
- Publication date Mar 27, 2025
- MEMSensing Microsystems (Suzhou, China) Co., Ltd.
- Yanzi MENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM MEMBRANE
- Publication number 20250106561
- Publication date Mar 27, 2025
- AAC TECHNOLOGIES PTE. LTD
- Yannick Pierre Kervran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC D...
- Publication number 20250085175
- Publication date Mar 13, 2025
- Beijing BOE Technology Development Co., Ltd.
- Kui LIANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD
- Publication number 20250083948
- Publication date Mar 13, 2025
- ROBERT BOSCH GmbH
- Andreas Winden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE
- Publication number 20250083947
- Publication date Mar 13, 2025
- ROBERT BOSCH GmbH
- Jochen REINMUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250074766
- Publication date Mar 6, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Humidity Sensor, Manufacturing Method Therefor and Electronic Device
- Publication number 20250076241
- Publication date Mar 6, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Jianxing LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME
- Publication number 20250074762
- Publication date Mar 6, 2025
- USound GmbH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FOUNDRY-COMPATIBLE THROUGH SILICON VIA PROCESS FOR INTEGRATED MICRO...
- Publication number 20250059023
- Publication date Feb 20, 2025
- Vibrant Microsystems Inc.
- Joseph Doll
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS
- Publication number 20250042718
- Publication date Feb 6, 2025
- STMicroelectronics International N.V.
- Manuel RIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACOUSTIC ELEMENT
- Publication number 20250039611
- Publication date Jan 30, 2025
- Murata Manufacturing Co., Ltd.
- Ryosuke NIWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Piezoelectric sensor with increased sensitivity and devices having...

Electrode arrangement for a micro-electro-mechanical system includi...

Gas sensor and manufacturing method thereof

Channel for decreasing damping asymmetry

Electronic acoustic devices, MEMS microphones, and equalization met...

MEMS display device with an etch-stop-layer

Microelectromechanical systems device

Artificial intelligence-based analog sensors and wearable devices i...

Constant charge or capacitance for capacitive micro-electrical-mech...

Capacitive micromachined ultrasonic transducer with contoured elect...

Vibrating-type gyroscope element and angular velocity sensor compri...

Transducer component, manufacturing method thereof, and transducer

Resonant sensor using MEMS resonator, and detection method by reson...

Bottom electrode via structures for micromachined ultrasonic transd...

Microelectromechanical microphone with membrane trench reinforcemen...

Low hysteresis and flexible pressure sensitive composite

Method and system for fabricating a MEMS device

Micromechanical component for a sensor device

MEMS capacitance microphone and manufacturing method thereof

MEMS die and MEMS-based sensor

Semiconductor MEMS structure

Electrostatic device, electrostatic device intermediate body and pr...

Phase shifter in which at least some of first sub-electrodes are sh...

MEMS device with enhanced membrane structure and method of forming...

Piezoelectric anti-stiction structure for microelectromechanical sy...

CMUT-on-CMOS ultrasonic transducer by bonding active wafers and man...

MEMS microphone

Sensor with integrated heater

Microelectromechanical system and process of making it

Method and system for fabricating a MEMS device

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL MOTION SENSOR DEVICE HAVING A SINGLE PROOF MASS

MEMS COMPONENT

MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...

METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES

MEMS ELEMENT

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MEMS ELEMENT

MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...

COMB STRUCTURE FOR MEMS ACCELEROMETER

MEMS SWITCH AND ELECTRONIC DEVICE

STRETCHABLE ELECTRICAL INTERCONNECT, FLEXIBLE ELECTRONIC SYSTEM, AN...

VIBRATING-TYPE GYROSCOPE ELEMENT AND ANGULAR VELOCITY SENSOR INCLUD...

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...

MICROSCALE FLEXIBLE STRAIN SENSOR

MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...

MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS

PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT

ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES

AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE

MICROELECTROMECHANICAL SYSTEM MEMBRANE

PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC D...

MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD

MEMS MICROPHONE

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

Humidity Sensor, Manufacturing Method Therefor and Electronic Device

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME

FOUNDRY-COMPATIBLE THROUGH SILICON VIA PROCESS FOR INTEGRATED MICRO...

MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS

MEMS ACOUSTIC ELEMENT