Electron sources

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CPC
H01J2237/063

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/063Electron sources

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electrode for plasma processing apparatus and plasma processing app...
- Patent number 12,165,850
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Takaki Kobune
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for Schottky TFE inspection
- Patent number 12,165,834
- Issue date Dec 10, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun and electron beam application apparatus
- Patent number 12,165,828
- Issue date Dec 10, 2024
- HITACHI HIGH-TECH CORPORATION
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device to control uniformity of extracted ion beam
- Patent number 12,154,753
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Jay T. Scheuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for ion beam modulation
- Patent number 12,154,750
- Issue date Nov 26, 2024
- TAE TECHNOLOGIES, INC.
- Vladislav Vekselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle emission device, system, method, and program
- Patent number 12,154,762
- Issue date Nov 26, 2024
- Shishido Electrostatic, Ltd.
- Katsuyuki Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun, electron beam applicator, emission axis verification...
- Patent number 12,080,507
- Issue date Sep 3, 2024
- Photo electron Soul Inc.
- Hokuto Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid ion source for aluminum ion generation using organoaluminium...
- Patent number 12,040,154
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam irradiation apparatus and maintenance method for elec...
- Patent number 12,033,828
- Issue date Jul 9, 2024
- NHV CORPORATION
- Masahiro Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing same, and device provided...
- Patent number 12,014,894
- Issue date Jun 18, 2024
- DENKA COMPANY LIMITED
- Hiromitsu Chatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter, electron gun in which same is used, electronic device in w...
- Patent number 11,984,294
- Issue date May 14, 2024
- National Institute for Materials Science
- Jie Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam irradiation apparatus and maintenance method for elec...
- Patent number 11,984,293
- Issue date May 14, 2024
- NHV CORPORATION
- Masahiro Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing same, and device provided...
- Patent number 11,984,291
- Issue date May 14, 2024
- DENKA COMPANY LIMITED
- Hiromitsu Chatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun and charged particle beam device equipped with electro...
- Patent number 11,978,609
- Issue date May 7, 2024
- HITACHI HIGH-TECH CORPORATION
- Minoru Kaneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for examining a beam of charged particles
- Patent number 11,961,705
- Issue date Apr 16, 2024
- Carl Zeiss SMT GmbH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-contact angle measuring apparatus
- Patent number 11,903,755
- Issue date Feb 20, 2024
- Weng-Dah Ken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope device and electron beam inspection ap...
- Patent number 11,908,657
- Issue date Feb 20, 2024
- Zhongke Jingyuan Electron Limited
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filament-less electron source
- Patent number 11,887,805
- Issue date Jan 30, 2024
- FEI Company
- John Stiller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source devices, electron source assemblies, and methods fo...
- Patent number 11,862,426
- Issue date Jan 2, 2024
- Teledyne FLIR Detection, Inc.
- James Mitchell Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corona/plasma treatment machine
- Patent number 11,848,175
- Issue date Dec 19, 2023
- 3DT LLC
- Donald J. Weyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun, electron gun component, electron beam applicator, and...
- Patent number 11,842,879
- Issue date Dec 12, 2023
- Photo electron Soul Inc.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Height measuring device, charged particle beam apparatus, and heigh...
- Patent number 11,754,388
- Issue date Sep 12, 2023
- Jeol Ltd.
- Yukinori Aida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanically-stable electron source
- Patent number 11,749,492
- Issue date Sep 5, 2023
- FEI Company
- Kun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam writing apparatus and cathode life span prediction me...
- Patent number 11,749,491
- Issue date Sep 5, 2023
- NuFlare Technology, Inc.
- Satoshi Nakahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle source
- Patent number 11,735,391
- Issue date Aug 22, 2023
- IMS Nanofabrication GmbH
- Stefan Gerhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of recording an image using a particle microscope
- Patent number 11,728,130
- Issue date Aug 15, 2023
- Carl Zeiss SMT GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for plasma processing
- Patent number 11,688,586
- Issue date Jun 27, 2023
- Tokyo Electron Limited
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 11,688,579
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing microrods for electron emitters, and associated...
- Patent number 11,651,924
- Issue date May 16, 2023
- FEI Company
- Kun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for Schottky TFE inspection
- Patent number 11,640,896
- Issue date May 2, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTING COLD PHOTOCATHODE DEVICE USING ELECTRIC FIELD TO CON...
- Publication number 20240412938
- Publication date Dec 12, 2024
- ATTOLIGHT AG
- Nicolas Tappy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION...
- Publication number 20240412939
- Publication date Dec 12, 2024
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAMINATE, ELECTRON SOURCE AND ELECTRONIC DEVICE CONTAINING LAMINATE...
- Publication number 20240395494
- Publication date Nov 28, 2024
- NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Katsumi NAGAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE ELECTRON BEAM OPTICS
- Publication number 20240387140
- Publication date Nov 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Alon Litman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240379318
- Publication date Nov 14, 2024
- HITACHI HIGH-TECH CORPORATION
- Keigo KASUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PA...
- Publication number 20240347311
- Publication date Oct 17, 2024
- ASML NETHERLANDS B.V.
- Bruno LA FONTAINE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
- Publication number 20240249911
- Publication date Jul 25, 2024
- HITACHI HIGH-TECH CORPORATION
- Teruo KOHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Gun and Charged Particle Beam Apparatus
- Publication number 20240212966
- Publication date Jun 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Tomoya IGARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELEC...
- Publication number 20240212967
- Publication date Jun 27, 2024
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA-PRECISION TIMING CLOCK METHOD AND APPARATUS
- Publication number 20240115222
- Publication date Apr 11, 2024
- Weng-Dah Ken
- G04 - HOROLOGY
Information Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS
- Publication number 20240120168
- Publication date Apr 11, 2024
- Hitachi High-Tech Corporation
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON-BEAM IRRADIATION APPARATUS AND MAINTENANCE METHOD FOR ELEC...
- Publication number 20240087836
- Publication date Mar 14, 2024
- NHV CORPORATION
- Masahiro NAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMITTER, ELECTRON GUN IN WHICH SAME IS USED, ELECTRONIC DEVICE IN W...
- Publication number 20240079198
- Publication date Mar 7, 2024
- NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Jie TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND DEVICE PROVIDED...
- Publication number 20240029989
- Publication date Jan 25, 2024
- Denka Company Limited
- Hiromitsu CHATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE
- Publication number 20230402246
- Publication date Dec 14, 2023
- HITACHI HIGH-TECH CORPORATION
- Hideo MORISHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Equipment and Method for Improved Edge Uniformity of Plasma Process...
- Publication number 20230402255
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Barton Lane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Creating Multiple Electron Beams with a Photocathode Film
- Publication number 20230395349
- Publication date Dec 7, 2023
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, PLASMA SOURCE AND SWITCH DEVICE
- Publication number 20230377828
- Publication date Nov 23, 2023
- Kabushiki Kaisha Toshiba
- Hisao MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING ORGANOALUMINIUM...
- Publication number 20230369007
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE SURFACE WAVE PROPAGATION FOR SEMICONDUCTOR CHAMBERS
- Publication number 20230335376
- Publication date Oct 19, 2023
- Yang YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Source, Method of Manufacturing the Same, And Electron Bea...
- Publication number 20230317401
- Publication date Oct 5, 2023
- Hitachi High-Tech Corporation
- Toshiaki KUSUNOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE AND METHOD FOR MANUFACTURING SAME, AND EMITTER AND...
- Publication number 20230317395
- Publication date Oct 5, 2023
- Denka Company Limited
- Daisuke ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMITTER AND DEVICE PROVIDED WITH SAME
- Publication number 20230298846
- Publication date Sep 21, 2023
- Denka Company Limited
- Daisuke ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF NUCLEAR REPROGRAMMING
- Publication number 20230282445
- Publication date Sep 7, 2023
- KYOTO UNIVERSITY
- Shinya Yamanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
- Publication number 20230253178
- Publication date Aug 10, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor KATSAP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, ELECTRON RAY APPLYING DEVICE, AND ELECTRON BEAM PROJE...
- Publication number 20230230794
- Publication date Jul 20, 2023
- PHOTO ELECTRON SOUL INC.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Plasma Processing
- Publication number 20230230814
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITING HARD CARBON LAYERS
- Publication number 20230223234
- Publication date Jul 13, 2023
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Bert Scheffel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON GUN, ELECTRON GUN COMPONENT, ELECTRON BEAM APPLICATION DEV...
- Publication number 20230207249
- Publication date Jun 29, 2023
- PHOTO ELECTRON SOUL INC.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Gun and Charged Particle Beam System
- Publication number 20230178325
- Publication date Jun 8, 2023
- Hitachi High-Tech Corporation
- Masahiro FUKUTA
- H01 - BASIC ELECTRIC ELEMENTS

Electron sources

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electrode for plasma processing apparatus and plasma processing app...

Method and apparatus for Schottky TFE inspection

Electron gun and electron beam application apparatus

Device to control uniformity of extracted ion beam

Systems, devices, and methods for ion beam modulation

Charged particle emission device, system, method, and program

Electron gun, electron beam applicator, emission axis verification...

Hybrid ion source for aluminum ion generation using organoaluminium...

Electron-beam irradiation apparatus and maintenance method for elec...

Electron source, method for manufacturing same, and device provided...

Emitter, electron gun in which same is used, electronic device in w...

Electron-beam irradiation apparatus and maintenance method for elec...

Electron source, method for manufacturing same, and device provided...

Electron gun and charged particle beam device equipped with electro...

Method and apparatus for examining a beam of charged particles

Non-contact angle measuring apparatus

Scanning electron microscope device and electron beam inspection ap...

Filament-less electron source

Electron source devices, electron source assemblies, and methods fo...

Corona/plasma treatment machine

Electron gun, electron gun component, electron beam applicator, and...

Height measuring device, charged particle beam apparatus, and heigh...

Mechanically-stable electron source

Electron beam writing apparatus and cathode life span prediction me...

Charged-particle source

Method of recording an image using a particle microscope

Method and apparatus for plasma processing

Electron emitter and method of fabricating same

Method of producing microrods for electron emitters, and associated...

Method and apparatus for Schottky TFE inspection

Patents Applicationslast 30 patents

SEMICONDUCTING COLD PHOTOCATHODE DEVICE USING ELECTRIC FIELD TO CON...

ELECTRON BEAM APPLICATION DEVICE AND METHOD FOR CREATING DETECTION...

LAMINATE, ELECTRON SOURCE AND ELECTRONIC DEVICE CONTAINING LAMINATE...

MULTIPLE ELECTRON BEAM OPTICS

CHARGED PARTICLE BEAM DEVICE

SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PA...

SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE

Charged Particle Gun and Charged Particle Beam Apparatus

ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELEC...

ULTRA-PRECISION TIMING CLOCK METHOD AND APPARATUS

ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS

ELECTRON-BEAM IRRADIATION APPARATUS AND MAINTENANCE METHOD FOR ELEC...

EMITTER, ELECTRON GUN IN WHICH SAME IS USED, ELECTRONIC DEVICE IN W...

ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND DEVICE PROVIDED...

ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE

Equipment and Method for Improved Edge Uniformity of Plasma Process...

Creating Multiple Electron Beams with a Photocathode Film

ELECTRON SOURCE, PLASMA SOURCE AND SWITCH DEVICE

HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING ORGANOALUMINIUM...

REMOTE SURFACE WAVE PROPAGATION FOR SEMICONDUCTOR CHAMBERS

Electron Source, Method of Manufacturing the Same, And Electron Bea...

ELECTRON SOURCE AND METHOD FOR MANUFACTURING SAME, AND EMITTER AND...

EMITTER AND DEVICE PROVIDED WITH SAME

METHOD OF NUCLEAR REPROGRAMMING

METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION

ELECTRON GUN, ELECTRON RAY APPLYING DEVICE, AND ELECTRON BEAM PROJE...

Method and Apparatus for Plasma Processing

APPARATUS AND METHOD FOR DEPOSITING HARD CARBON LAYERS

ELECTRON GUN, ELECTRON GUN COMPONENT, ELECTRON BEAM APPLICATION DEV...

Charged Particle Gun and Charged Particle Beam System