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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/063
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Patents Grants
last 30 patents
Information
Patent Grant
Electron gun and charged particle beam device equipped with electro...
Patent number
11,978,609
Issue date
May 7, 2024
HITACHI HIGH-TECH CORPORATION
Minoru Kaneda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for examining a beam of charged particles
Patent number
11,961,705
Issue date
Apr 16, 2024
Carl Zeiss SMT GmbH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Non-contact angle measuring apparatus
Patent number
11,903,755
Issue date
Feb 20, 2024
Weng-Dah Ken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,657
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Filament-less electron source
Patent number
11,887,805
Issue date
Jan 30, 2024
FEI Company
John Stiller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron source devices, electron source assemblies, and methods fo...
Patent number
11,862,426
Issue date
Jan 2, 2024
Teledyne FLIR Detection, Inc.
James Mitchell Wells
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Corona/plasma treatment machine
Patent number
11,848,175
Issue date
Dec 19, 2023
3DT LLC
Donald J. Weyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron gun, electron gun component, electron beam applicator, and...
Patent number
11,842,879
Issue date
Dec 12, 2023
Photo electron Soul Inc.
Tomohiro Nishitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Height measuring device, charged particle beam apparatus, and heigh...
Patent number
11,754,388
Issue date
Sep 12, 2023
Jeol Ltd.
Yukinori Aida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mechanically-stable electron source
Patent number
11,749,492
Issue date
Sep 5, 2023
FEI Company
Kun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam writing apparatus and cathode life span prediction me...
Patent number
11,749,491
Issue date
Sep 5, 2023
NuFlare Technology, Inc.
Satoshi Nakahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged-particle source
Patent number
11,735,391
Issue date
Aug 22, 2023
IMS Nanofabrication GmbH
Stefan Gerhold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of recording an image using a particle microscope
Patent number
11,728,130
Issue date
Aug 15, 2023
Carl Zeiss SMT GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for plasma processing
Patent number
11,688,586
Issue date
Jun 27, 2023
Tokyo Electron Limited
Peter Ventzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron emitter and method of fabricating same
Patent number
11,688,579
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Juying Dou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing microrods for electron emitters, and associated...
Patent number
11,651,924
Issue date
May 16, 2023
FEI Company
Kun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for Schottky TFE inspection
Patent number
11,640,896
Issue date
May 2, 2023
NUFLARE TECHNOLOGY, INC.
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Incident axis alignment method for electron gun equipped with photo...
Patent number
11,417,494
Issue date
Aug 16, 2022
Photo electron Soul Inc.
Reiki Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control method for electron microscope and electron microscope
Patent number
11,404,238
Issue date
Aug 2, 2022
Jeol Ltd.
Mitsuru Koizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatuses and methods for plasma processing
Patent number
11,393,662
Issue date
Jul 19, 2022
Tokyo Electron Limited
Zhiying Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electron source, method for manufacturing the same, and electron be...
Patent number
11,322,329
Issue date
May 3, 2022
HITACHI HIGH-TECH CORPORATION
Toshiaki Kusunoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Space charge insensitive electron gun designs
Patent number
11,302,510
Issue date
Apr 12, 2022
KLA-Tencor Corporation
Christopher Sears
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope
Patent number
11,251,011
Issue date
Feb 15, 2022
HITACHI HIGH-TECH CORPORATION
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection tool, lithographic apparatus, electron beam source and a...
Patent number
11,243,179
Issue date
Feb 8, 2022
ASML Netherlands B.V.
Erwin Paul Smakman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron emitter and method of fabricating same
Patent number
11,201,032
Issue date
Dec 14, 2021
ASML Netherlands B.V.
Juying Dou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope
Patent number
11,087,947
Issue date
Aug 10, 2021
HITACHI HIGH-TECH CORPORATION
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle-optical apparatus and particle beam system
Patent number
11,087,949
Issue date
Aug 10, 2021
Carl Zeiss Microscopy GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated transmission electron microscope
Patent number
11,081,314
Issue date
Aug 3, 2021
National Technology & Engineering Solutions of Sandia, LLC
Katherine L. Jungjohann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source
Patent number
11,075,053
Issue date
Jul 27, 2021
ASML Netherlands B.V.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cold cathode field-emission electron gun, adjustment method for col...
Patent number
11,031,208
Issue date
Jun 8, 2021
Jeol Ltd.
Yuji Kohno
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ULTRA-PRECISION TIMING CLOCK METHOD AND APPARATUS
Publication number
20240115222
Publication date
Apr 11, 2024
Weng-Dah Ken
G04 - HOROLOGY
Information
Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS
Publication number
20240120168
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-BEAM IRRADIATION APPARATUS AND MAINTENANCE METHOD FOR ELEC...
Publication number
20240087836
Publication date
Mar 14, 2024
NHV CORPORATION
Masahiro NAGAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EMITTER, ELECTRON GUN IN WHICH SAME IS USED, ELECTRONIC DEVICE IN W...
Publication number
20240079198
Publication date
Mar 7, 2024
NATIONAL INSTITUTE FOR MATERIALS SCIENCE
Jie TANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND DEVICE PROVIDED...
Publication number
20240029989
Publication date
Jan 25, 2024
Denka Company Limited
Hiromitsu CHATANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE
Publication number
20230402246
Publication date
Dec 14, 2023
HITACHI HIGH-TECH CORPORATION
Hideo MORISHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Equipment and Method for Improved Edge Uniformity of Plasma Process...
Publication number
20230402255
Publication date
Dec 14, 2023
TOKYO ELECTRON LIMITED
Barton Lane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Creating Multiple Electron Beams with a Photocathode Film
Publication number
20230395349
Publication date
Dec 7, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON SOURCE, PLASMA SOURCE AND SWITCH DEVICE
Publication number
20230377828
Publication date
Nov 23, 2023
Kabushiki Kaisha Toshiba
Hisao MIYAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING ORGANOALUMINIUM...
Publication number
20230369007
Publication date
Nov 16, 2023
Applied Materials, Inc.
Graham Wright
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOTE SURFACE WAVE PROPAGATION FOR SEMICONDUCTOR CHAMBERS
Publication number
20230335376
Publication date
Oct 19, 2023
Yang YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Source, Method of Manufacturing the Same, And Electron Bea...
Publication number
20230317401
Publication date
Oct 5, 2023
Hitachi High-Tech Corporation
Toshiaki KUSUNOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON SOURCE AND METHOD FOR MANUFACTURING SAME, AND EMITTER AND...
Publication number
20230317395
Publication date
Oct 5, 2023
Denka Company Limited
Daisuke ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EMITTER AND DEVICE PROVIDED WITH SAME
Publication number
20230298846
Publication date
Sep 21, 2023
Denka Company Limited
Daisuke ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF NUCLEAR REPROGRAMMING
Publication number
20230282445
Publication date
Sep 7, 2023
KYOTO UNIVERSITY
Shinya Yamanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
Publication number
20230253178
Publication date
Aug 10, 2023
NUFLARE TECHNOLOGY, INC.
Victor KATSAP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN, ELECTRON RAY APPLYING DEVICE, AND ELECTRON BEAM PROJE...
Publication number
20230230794
Publication date
Jul 20, 2023
PHOTO ELECTRON SOUL INC.
Tomohiro Nishitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Plasma Processing
Publication number
20230230814
Publication date
Jul 20, 2023
TOKYO ELECTRON LIMITED
Peter Ventzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR DEPOSITING HARD CARBON LAYERS
Publication number
20230223234
Publication date
Jul 13, 2023
Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
Bert Scheffel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTRON GUN, ELECTRON GUN COMPONENT, ELECTRON BEAM APPLICATION DEV...
Publication number
20230207249
Publication date
Jun 29, 2023
PHOTO ELECTRON SOUL INC.
Tomohiro Nishitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Gun and Charged Particle Beam System
Publication number
20230178325
Publication date
Jun 8, 2023
Hitachi High-Tech Corporation
Masahiro FUKUTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILAMENT-LESS ELECTRON SOURCE
Publication number
20230101787
Publication date
Mar 30, 2023
FEI Company
John Stiller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM
Publication number
20230078095
Publication date
Mar 16, 2023
Samsung Electronics Co., Ltd.
Dougyong SUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...
Publication number
20230065475
Publication date
Mar 2, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230068224
Publication date
Mar 2, 2023
PSK INC.
Kwang Sung YOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR DETECTING DISCHARGE SITE
Publication number
20230028337
Publication date
Jan 26, 2023
NuFlare Technology, Inc.
Toru ARIIZUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON SOURCE BASED ON FIELD EMISSION AND PRODUCTION PROCESS FOR...
Publication number
20230005695
Publication date
Jan 5, 2023
Centre National de la Recherche Scientifique
Alain DEGIOVANNI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
Publication number
20230005704
Publication date
Jan 5, 2023
Zhongke Jingyuan Electron Limited, Beijing (CN)
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Source, Electron Beam Device, and Method for Manufacturing...
Publication number
20220415603
Publication date
Dec 29, 2022
Hitachi High-Tech Corporation
Toshiaki KUSUNOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON MICROSCOPE
Publication number
20220406558
Publication date
Dec 22, 2022
HITACHI HIGH-TECH CORPORATION
Hideo MORISHITA
H01 - BASIC ELECTRIC ELEMENTS