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B81C2201/0147
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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B81C2201/0147
Film patterning
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Patents Grants
last 30 patents
Information
Patent Grant
Electrically functional polymer microneedle array
Patent number
12,070,307
Issue date
Aug 27, 2024
International Business Machines Corporation
Neil Ebejer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bi-layer metal electrode for micromachined ultrasonic transducer de...
Patent number
11,766,696
Issue date
Sep 26, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing method of semiconductor structure
Patent number
11,708,262
Issue date
Jul 25, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yi-Hsien Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Haptic actuators fabricated by roll-to-roll processing
Patent number
11,078,071
Issue date
Aug 3, 2021
Encite LLC
Stephen Alan Marsh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stress isolation features for stacked dies
Patent number
10,287,161
Issue date
May 14, 2019
Analog Devices, Inc.
Xiaojie Xue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS scanning micromirror
Patent number
9,910,269
Issue date
Mar 6, 2018
ELMOS SEMICONDUCTOR AKTIENGESELLSCHAFT
Hendrikus Wilhelmus Leonardus Antonius Maria van Lierop
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
Publication number
20240425365
Publication date
Dec 26, 2024
SENSONICS TRANSDUCERS PRIVATE LIMITED
Brishbhan Singh PANWAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH A CAP LAYER HAVING GAPS AND METHOD OF MANUFACTURIN...
Publication number
20240409398
Publication date
Dec 12, 2024
Murata Manufacturing Co., Ltd.
Konsta HANNULA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTI-LEVEL MEMS PROCESS
Publication number
20240351864
Publication date
Oct 24, 2024
InvenSense, Inc.
Roberto Martini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
Publication number
20230406698
Publication date
Dec 21, 2023
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
Publication number
20230037849
Publication date
Feb 9, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
Publication number
20220185656
Publication date
Jun 16, 2022
Taiwan Semiconductor Manufacturing company Ltd.
YI-HSIEN CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Haptic Actuators Fabricated by Roll-to-Roll Processing
Publication number
20210340004
Publication date
Nov 4, 2021
ENCITE LLC
Stephen Alan Marsh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Haptic Actuators Fabricated by Roll-to-Roll Processing
Publication number
20200123001
Publication date
Apr 23, 2020
ENCITE LLC
Stephen Alan Marsh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRESS ISOLATION FEATURES FOR STACKED DIES
Publication number
20170022051
Publication date
Jan 26, 2017
Analog Devices, Inc.
Xiaojie Xue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SCANNING MICROMIRROR
Publication number
20140327946
Publication date
Nov 6, 2014
Hendrikus Wilhelmus Leonardus Antonius Maria van Lierop
B81 - MICRO-STRUCTURAL TECHNOLOGY