Film patterning

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CPC
B81C2201/0147

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0147Film patterning

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrically functional polymer microneedle array
- Patent number 12,070,307
- Issue date Aug 27, 2024
- International Business Machines Corporation
- Neil Ebejer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bi-layer metal electrode for micromachined ultrasonic transducer de...
- Patent number 11,766,696
- Issue date Sep 26, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Haptic actuators fabricated by roll-to-roll processing
- Patent number 11,078,071
- Issue date Aug 3, 2021
- Encite LLC
- Stephen Alan Marsh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress isolation features for stacked dies
- Patent number 10,287,161
- Issue date May 14, 2019
- Analog Devices, Inc.
- Xiaojie Xue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS scanning micromirror
- Patent number 9,910,269
- Issue date Mar 6, 2018
- ELMOS SEMICONDUCTOR AKTIENGESELLSCHAFT
- Hendrikus Wilhelmus Leonardus Antonius Maria van Lierop
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250230037
- Publication date Jul 17, 2025
- Vanguard International Semiconductor Corporation
- ROHIT PULIKKAL KIZHAKKEYIL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250145456
- Publication date May 8, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Device Fabrication
- Publication number 20250136437
- Publication date May 1, 2025
- X-FAB Global Services GmbH
- Yves Dufour
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250074766
- Publication date Mar 6, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Array Structures for Gyroscopes with High Resonant Frequencies
- Publication number 20250026629
- Publication date Jan 23, 2025
- NXP USA, Inc.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250011165
- Publication date Jan 9, 2025
- Vanguard International Semiconductor Corporation
- JIA JIE XIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH A CAP LAYER HAVING GAPS AND METHOD OF MANUFACTURIN...
- Publication number 20240409398
- Publication date Dec 12, 2024
- Murata Manufacturing Co., Ltd.
- Konsta HANNULA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MEMS PROCESS
- Publication number 20240351864
- Publication date Oct 24, 2024
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
- Publication number 20230406698
- Publication date Dec 21, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20230037849
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220185656
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Haptic Actuators Fabricated by Roll-to-Roll Processing
- Publication number 20210340004
- Publication date Nov 4, 2021
- ENCITE LLC
- Stephen Alan Marsh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Haptic Actuators Fabricated by Roll-to-Roll Processing
- Publication number 20200123001
- Publication date Apr 23, 2020
- ENCITE LLC
- Stephen Alan Marsh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS ISOLATION FEATURES FOR STACKED DIES
- Publication number 20170022051
- Publication date Jan 26, 2017
- Analog Devices, Inc.
- Xiaojie Xue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SCANNING MICROMIRROR
- Publication number 20140327946
- Publication date Nov 6, 2014
- Hendrikus Wilhelmus Leonardus Antonius Maria van Lierop
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Film patterning

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for fabricating a MEMS device

Method and system for fabricating a MEMS device

Electrically functional polymer microneedle array

Bi-layer metal electrode for micromachined ultrasonic transducer de...

Manufacturing method of semiconductor structure

Haptic actuators fabricated by roll-to-roll processing

Stress isolation features for stacked dies

MEMS scanning micromirror

Patents Applicationslast 30 patents

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

Membrane Device Fabrication

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MEMS Array Structures for Gyroscopes with High Resonant Frequencies

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

MEMS DEVICE WITH A CAP LAYER HAVING GAPS AND METHOD OF MANUFACTURIN...

MULTI-LEVEL MEMS PROCESS

MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

Haptic Actuators Fabricated by Roll-to-Roll Processing

Haptic Actuators Fabricated by Roll-to-Roll Processing

STRESS ISOLATION FEATURES FOR STACKED DIES

MEMS SCANNING MICROMIRROR