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B81C2201/0147
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
Current Industry
B81C2201/0147
Film patterning
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Patents Grants
last 30 patents
Information
Patent Grant
Bi-layer metal electrode for micromachined ultrasonic transducer de...
Patent number
11,766,696
Issue date
Sep 26, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing method of semiconductor structure
Patent number
11,708,262
Issue date
Jul 25, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yi-Hsien Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Haptic actuators fabricated by roll-to-roll processing
Patent number
11,078,071
Issue date
Aug 3, 2021
Encite LLC
Stephen Alan Marsh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stress isolation features for stacked dies
Patent number
10,287,161
Issue date
May 14, 2019
Analog Devices, Inc.
Xiaojie Xue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS scanning micromirror
Patent number
9,910,269
Issue date
Mar 6, 2018
ELMOS SEMICONDUCTOR AKTIENGESELLSCHAFT
Hendrikus Wilhelmus Leonardus Antonius Maria van Lierop
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
Publication number
20230406698
Publication date
Dec 21, 2023
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
Publication number
20230037849
Publication date
Feb 9, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
Publication number
20220185656
Publication date
Jun 16, 2022
Taiwan Semiconductor Manufacturing company Ltd.
YI-HSIEN CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Haptic Actuators Fabricated by Roll-to-Roll Processing
Publication number
20210340004
Publication date
Nov 4, 2021
ENCITE LLC
Stephen Alan Marsh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Haptic Actuators Fabricated by Roll-to-Roll Processing
Publication number
20200123001
Publication date
Apr 23, 2020
ENCITE LLC
Stephen Alan Marsh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRESS ISOLATION FEATURES FOR STACKED DIES
Publication number
20170022051
Publication date
Jan 26, 2017
Analog Devices, Inc.
Xiaojie Xue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SCANNING MICROMIRROR
Publication number
20140327946
Publication date
Nov 6, 2014
Hendrikus Wilhelmus Leonardus Antonius Maria van Lierop
B81 - MICRO-STRUCTURAL TECHNOLOGY