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Finishing the coated layer
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last 30 patents
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Photoresist for semiconductor fabrication
Patent number
12,153,346
Issue date
Nov 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Cheng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Resin, photoresist composition, and method of manufacturing semicon...
Patent number
12,135,502
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Siao-Shan Wang
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Patent Grant
Method for measuring critical dimension
Patent number
12,130,559
Issue date
Oct 29, 2024
NANYA TECHNOLOGY CORPORATION
Chia-Chung Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Negative resist formulation for producing undercut pattern profiles
Patent number
12,124,166
Issue date
Oct 22, 2024
Merck Patent GmbH
Anupama Mukherjee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for measuring critical dimension
Patent number
12,117,733
Issue date
Oct 15, 2024
NANYA TECHNOLOGY CORPORATION
Chia-Chung Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Photoresist development with halide chemistries
Patent number
12,105,422
Issue date
Oct 1, 2024
Lam Research Corporation
Samantha Siamhwa Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Apparatus and methods for beam processing of substrates
Patent number
12,105,423
Issue date
Oct 1, 2024
Tokyo Electron Limited
Mirko Vukovic
H01 - BASIC ELECTRIC ELEMENTS
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Stable solutions of monoalkyl tin alkoxides and their hydrolysis an...
Patent number
12,105,418
Issue date
Oct 1, 2024
Inpria Corporation
Kai Jiang
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Patent Grant
Optical metalens systems
Patent number
12,092,791
Issue date
Sep 17, 2024
Imagia, Inc.
Gregory Kress
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Composition for forming silicon-containing resist underlayer film a...
Patent number
12,085,857
Issue date
Sep 10, 2024
Shin-Etsu Chemical Co., Ltd.
Tsutomu Ogihara
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Method of manufacturing semiconductor devices
Patent number
12,087,580
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wei Liao
H01 - BASIC ELECTRIC ELEMENTS
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Ambient controlled two-step thermal treatment for spin-on coating l...
Patent number
12,087,592
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chen-Fong Tsai
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Resin, photoresist composition, and method of manufacturing semicon...
Patent number
12,085,855
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Siao-Shan Wang
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Chemical-resistant protective film-forming composition containing p...
Patent number
12,077,633
Issue date
Sep 3, 2024
NISSAN CHEMICAL CORPORATION
Takafumi Endo
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Laminate, optical filter, solid image pickup element, image display...
Patent number
12,078,828
Issue date
Sep 3, 2024
FUJIFILM Corporation
Shunsuke Kitajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Organometallic radiation patternable coatings with low defectivity...
Patent number
12,072,626
Issue date
Aug 27, 2024
Inpria Corporation
Benjamin L. Clark
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Carboxylate, quencher, resist composition and method for producing...
Patent number
12,060,316
Issue date
Aug 13, 2024
Sumitomo Chemical Company, Limited
Katsuhiro Komuro
C07 - ORGANIC CHEMISTRY
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Substrate processing apparatus, estimation method of substrate proc...
Patent number
12,051,587
Issue date
Jul 30, 2024
Tokyo Electron Limited
Hiroshi Nakamura
H01 - BASIC ELECTRIC ELEMENTS
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Photoresist structure, patterned deposition layer, semiconductor ch...
Patent number
12,040,188
Issue date
Jul 16, 2024
Tencent Technology (Shenzhen) Company Limited
Wenlong Zhang
H01 - BASIC ELECTRIC ELEMENTS
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Method for manufacturing a horological component and component prod...
Patent number
12,037,695
Issue date
Jul 16, 2024
Nivarox-Far S.A.
Pierre Cusin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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Abnormality detection device of chemical solution, liquid processin...
Patent number
12,032,294
Issue date
Jul 9, 2024
Tokyo Electron Limited
Masato Hayashi
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Organotin patterning materials with ligands having silicon/germaniu...
Patent number
12,032,291
Issue date
Jul 9, 2024
Inpria Corporation
Robert E. Jilek
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist material and patterning process
Patent number
12,032,287
Issue date
Jul 9, 2024
Shin-Etsu Chemical Co., Ltd.
Tomohiro Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Multi-morphology block co-polymer films and processes for their pre...
Patent number
12,024,604
Issue date
Jul 2, 2024
Yissum Research Development Company of the Hebrew University of Jerusalem Ltd.
Roy Shenhar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist underlayer film-forming composition that contains triaryldia...
Patent number
12,025,916
Issue date
Jul 2, 2024
NISSAN CHEMICAL CORPORATION
Hirokazu Nishimaki
H01 - BASIC ELECTRIC ELEMENTS
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Film manufacturing equipment and method of manufacturing film
Patent number
12,017,248
Issue date
Jun 25, 2024
BEYOND MANUFACTURE INC.
Chun-Hao Luo
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Photosensitive material and method of lithography
Patent number
12,019,375
Issue date
Jun 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
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Polymer material, composition, and method of manufacturing semicond...
Patent number
12,018,107
Issue date
Jun 25, 2024
Kioxia Corporation
Koji Asakawa
H01 - BASIC ELECTRIC ELEMENTS
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Coloring composition, color filter, pattern forming method, solid-s...
Patent number
12,019,369
Issue date
Jun 25, 2024
FUJIFILM Corporation
Shoichi Nakamura
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Grant
Method of reducing undesired light influence in extreme ultraviolet...
Patent number
12,013,641
Issue date
Jun 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Tsung Shih
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES
Publication number
20240419078
Publication date
Dec 19, 2024
LAM RESEARCH CORPORATION
Samantha SiamHwa Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHODS FOR BEAM PROCESSING OF SUBSTRATES
Publication number
20240419080
Publication date
Dec 19, 2024
TOKYO ELECTRON LIMITED
Mirko Vukovic
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNED DARK MIRROR COATINGS FOR MULTI-FUNCTIONAL OPTICS
Publication number
20240419076
Publication date
Dec 19, 2024
The Aerospace Corporation
Sean C. STUART
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY SELECTIVE ADHESION AND STRENGTH PROMOTERS IN SEMICONDUCT...
Publication number
20240419079
Publication date
Dec 19, 2024
Geminatio, Inc.
Brennan Peterson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOLITHOGRAPHY METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR D...
Publication number
20240411227
Publication date
Dec 12, 2024
Korea Advanced Institute of Science and Technology
Sung Gap Im
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
Publication number
20240402596
Publication date
Dec 5, 2024
Shin-Etsu Chemical Co., Ltd.
Shohei IWAMORI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
Publication number
20240402600
Publication date
Dec 5, 2024
Sumitomo Chemical Company, Limited
Saki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METAL CONTAINING PHOTORESIST DEVELOPER COMPOSITION, AND METHOD OF F...
Publication number
20240393694
Publication date
Nov 28, 2024
Samsung SDI Co., Ltd.
Hyungrang MOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPOSITION FOR REMOVING EDGE BEADS FROM METAL-CONTAINING RESISTS,...
Publication number
20240393698
Publication date
Nov 28, 2024
Samsung SDI Co., Ltd.
Si-Kyun PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHODS OF MANUFACTURE
Publication number
20240393685
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsing-Chieh Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF FORMING PATTERNS
Publication number
20240393684
Publication date
Nov 28, 2024
Samsung SDI Co., Ltd.
Jongpil HO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20240385524
Publication date
Nov 21, 2024
SEMES CO., LTD.
Hee Man AHN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD OF FORMING PATTERNS
Publication number
20240385515
Publication date
Nov 21, 2024
Samsung SDI Co., Ltd.
Gyeonghun PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AMBIENT CONTROLLED TWO-STEP THERMAL TREATMENT FOR SPIN-ON COATING L...
Publication number
20240387188
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Fong Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIN, PHOTORESIST COMPOSITION, AND METHOD OF MANUFACTURING SEMICON...
Publication number
20240377739
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Siao-Shan WANG
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
POSITIVE TYPE PHOTORESIST COMPOSITION, METHOD OF FORMING PHOTORESIS...
Publication number
20240377740
Publication date
Nov 14, 2024
Samsung Electronics Co., Ltd.
Jooyoung Song
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
PHOTORESIST FOR SEMICONDUCTOR FABRICATION
Publication number
20240377732
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Cheng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
BOTTOM ANTIREFLECTIVE COATING MATERIALS
Publication number
20240377743
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Chih Chen
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Application
HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS
Publication number
20240376342
Publication date
Nov 14, 2024
Samsung SDI Co., Ltd.
Seil CHOI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ORGANOMETALLIC RADIATION PATTERNABLE COATINGS WITH LOW DEFECTIVITY...
Publication number
20240369923
Publication date
Nov 7, 2024
INPRIA CORPORATION
Benjamin L. Clark
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE PHOTORESIST COMPOSITION, NEGATIVE PHOTORESIST PATTERN LITH...
Publication number
20240369927
Publication date
Nov 7, 2024
Advanced Echem Materials Company Limited
Kuo Chu Yeh
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
COMPOSITION FOR REMOVING EDGE BEAD FROM METAL-CONTAINING RESISTS, A...
Publication number
20240369935
Publication date
Nov 7, 2024
Samsung SDI Co., Ltd.
Hyungrang MOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR MANUFACTURING ETCHING MASK PATTERN, AND RESIN COMPOSITIO...
Publication number
20240361686
Publication date
Oct 31, 2024
Tokyo Ohka Kogyo Co., Ltd.
Takehiro Seshimo
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Application
THINNER COMPOSITION, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICES...
Publication number
20240361693
Publication date
Oct 31, 2024
Mitsubishi Gas Chemical Company, Inc.
Takumi OKADA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR SELECTING PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR P...
Publication number
20240361697
Publication date
Oct 31, 2024
Resonac Corporation
Yuki IMAZU
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES
Publication number
20240361696
Publication date
Oct 31, 2024
LAM RESEARCH CORPORATION
Samantha SiamHwa Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...
Publication number
20240355617
Publication date
Oct 24, 2024
TOKYO ELECTRON LIMITED
Hiroshi Nakamura
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING R...
Publication number
20240345479
Publication date
Oct 17, 2024
Sumitomo Chemical Company, Limited
Yukako ANRYU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
ORGANOTIN PATTERNING MATERIALS WITH LIGANDS HAVING SILICON/GERMANIU...
Publication number
20240337941
Publication date
Oct 10, 2024
INPRIA CORPORATION
Robert E. Jilek
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
A Lithographic Printing Plate Precursor
Publication number
20240337942
Publication date
Oct 10, 2024
AGFA Offset BV
Hubertus Van Aert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY