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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Finishing the coated layer
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last 30 patents
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Substrate treating apparatus and substrate treating method
Patent number
11,977,332
Issue date
May 7, 2024
Semes Co., Ltd.
Hae-Won Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist composition and method of forming photoresist pattern
Patent number
11,971,659
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Chih Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Photoresist composition, coated substrate including the photoresist...
Patent number
11,960,206
Issue date
Apr 16, 2024
Rohm and Hass Electronic Materials LLC
Emad Aqad
C07 - ORGANIC CHEMISTRY
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Patent Grant
Photolithography method and photolithography system
Patent number
11,959,864
Issue date
Apr 16, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Actinic ray-sensitive or radiation-sensitive resin composition, res...
Patent number
11,953,829
Issue date
Apr 9, 2024
FUJIFILM Corporation
Kazunari Yagi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,955,336
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jing Hong Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method for manufacturing semiconductor device
Patent number
11,948,797
Issue date
Apr 2, 2024
Mitsubishi Electric Corporation
Takahiro Ueno
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Photoresist topcoat compositions and methods of processing photores...
Patent number
11,940,731
Issue date
Mar 26, 2024
Rohm and Haas Electronic Materials LLC
Irvinder Kaur
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Monomers, polymers and lithographic compositions comprising same
Patent number
11,932,713
Issue date
Mar 19, 2024
Rohm and Haas Electronic Materials LLC
Emad Aqad
C07 - ORGANIC CHEMISTRY
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Substrate processing apparatus and method of fabricating semiconduc...
Patent number
11,927,890
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Seok Heo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Single-volume baking chamber for mask clean
Patent number
11,921,422
Issue date
Mar 5, 2024
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Apparatus and method for treating substrate
Patent number
11,923,212
Issue date
Mar 5, 2024
Semes Co., Ltd.
Kyungsik Shin
H01 - BASIC ELECTRIC ELEMENTS
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Hard mask-forming composition and method for manufacturing electron...
Patent number
11,921,425
Issue date
Mar 5, 2024
Tokyo Ohka Kogyo Co., Ltd.
Junichi Tsuchiya
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Apparatus and method for treating substrate including process chamb...
Patent number
11,923,216
Issue date
Mar 5, 2024
Samsung Electronics Co., Ltd.
Seung Min Shin
H01 - BASIC ELECTRIC ELEMENTS
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Resist composition and patterning process
Patent number
11,914,291
Issue date
Feb 27, 2024
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Colored film, manufacturing method of same, and solid-state imaging...
Patent number
11,908,877
Issue date
Feb 20, 2024
FUJIFILM Corporation
Daisuke Hamada
H01 - BASIC ELECTRIC ELEMENTS
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Ambient controlled two-step thermal treatment for spin-on coating l...
Patent number
11,901,189
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chen-Fong Tsai
H01 - BASIC ELECTRIC ELEMENTS
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Method and apparatus for post exposure processing of photoresist wa...
Patent number
11,899,366
Issue date
Feb 13, 2024
Applied Materials, Inc.
Viachslav Babayan
H01 - BASIC ELECTRIC ELEMENTS
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Quantum dot light-emitting device, manufacturing method and display...
Patent number
11,903,230
Issue date
Feb 13, 2024
BOE Technology Group Co., Ltd.
Wenhai Mei
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Material for forming underlayer film, resist underlayer film, metho...
Patent number
11,886,119
Issue date
Jan 30, 2024
Mitsui Chemicals, Inc.
Koji Inoue
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Deposition of semiconductor integration films
Patent number
11,886,120
Issue date
Jan 30, 2024
Applied Materials, Inc.
Lakmal Charidu Kalutarage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Imprinting apparatus
Patent number
11,886,110
Issue date
Jan 30, 2024
Illumina, Inc.
Timothy J. Merkel
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Patent Grant
Film structure for electric field guided photoresist patterning pro...
Patent number
11,880,137
Issue date
Jan 23, 2024
Applied Materials, Inc.
Huixiong Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,869,789
Issue date
Jan 9, 2024
Tokyo Electron Limited
Tsuyoshi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
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Stable solutions of monoalkyl tin alkoxides and their hydrolysis an...
Patent number
11,868,046
Issue date
Jan 9, 2024
Inpria Corporation
Kai Jiang
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Patent Grant
Negative type photosensitive siloxane composition and methods for p...
Patent number
11,868,048
Issue date
Jan 9, 2024
Merck Patent GmbH
Masanobu Hayashi
C07 - ORGANIC CHEMISTRY
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Photosensitive resin composition, heterocyclic ring-containing poly...
Patent number
11,860,538
Issue date
Jan 2, 2024
FUJIFILM Corporation
Takeshi Kawabata
H01 - BASIC ELECTRIC ELEMENTS
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Photoresist system and method
Patent number
11,841,618
Issue date
Dec 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Jui Kuo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Photoresist compositions and methods
Patent number
11,829,069
Issue date
Nov 28, 2023
Rohm and Haas Electronic Materials LLC
Joshua Kaitz
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Negative-type photosensitive resin composition, cured film, element...
Patent number
11,822,243
Issue date
Nov 21, 2023
Toray Industries, Inc.
Yugo Tanigaki
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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last 30 patents
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Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20240142171
Publication date
May 2, 2024
SEMES CO., LTD.
Seung Hoon OH
F26 - DRYING
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Patent Application
EUV-INDUCED CONDENSATION OF POLYSILOXANE SOL-GEL THIN FILM
Publication number
20240134281
Publication date
Apr 25, 2024
Brewer Science, Inc.
Daniel Patrick Sweat
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
PHOTORESIST UNDERLAYER COMPOSITION
Publication number
20240126172
Publication date
Apr 18, 2024
Rohm and Haas Electronic Materials L.L.C.
Anton CHAVEZ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20240118607
Publication date
Apr 11, 2024
SEMES CO.,LTD
Hyun YOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
PROCESS AND APPARATUS FOR FEEDING A FLEXOGRAPHIC PRINTING PLATE PRO...
Publication number
20240118623
Publication date
Apr 11, 2024
ESKO-GRAPHICS IMAGING GMBH
Thomas Klein
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST UNDERLAYER FILM FORMATION COMPOSITION
Publication number
20240103369
Publication date
Mar 28, 2024
NISSAN CHEMICAL CORPORATION
Masahisa ENDO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FILM MANUFACTURING EQUIPMENT AND METHOD OF MANUFACTURING FILM
Publication number
20240100557
Publication date
Mar 28, 2024
Beyond Manufacture Inc.
Chun-Hao LUO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
STABLE SOLUTIONS OF MONOALKYL TIN ALKOXIDES AND THEIR HYDROLYSIS AN...
Publication number
20240094632
Publication date
Mar 21, 2024
INPRIA CORPORATION
Kai Jiang
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20240096623
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chieh-Hsin HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COLORED PHOTOSENSITIVE RESIN COMPOSITION AND MUTILAYER CURED FILM P...
Publication number
20240085791
Publication date
Mar 14, 2024
ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.
Seung-Keun KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240079256
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Tsuyoshi WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPERCRITICAL FLUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATU...
Publication number
20240069451
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
Sangjine PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST SYSTEM AND METHOD
Publication number
20240061339
Publication date
Feb 22, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
Hung-Jui Kuo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
SOLDER RESIST COMPOSITION, DRY FILM, PRINTED WIRING BOARD, AND METH...
Publication number
20240061334
Publication date
Feb 22, 2024
TAIYO INK MFG. CO., (KOREA) LTD.
Seok Bong LIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD OF FORMING PHOTOSENSITIVE ORGANOMETALLIC OXIDES BY CHEMICAL...
Publication number
20240045332
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD, APPARATUS AND SYSTEM FOR PROCESSING SEMICONDUCTOR STRUCTURE
Publication number
20240027911
Publication date
Jan 25, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC
Jing LIU
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
COMPOSITION INCLUDING QUANTUM DOT, MANUFACTURING METHOD QUANTUM DOT...
Publication number
20240027906
Publication date
Jan 25, 2024
Samsung SDI Co., Ltd.
Jinsuop YOUN
B82 - NANO-TECHNOLOGY
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Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20240030049
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Yukinobu OTSUKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
In-Situ Deposition and Densification Treatment for Metal-Comprising...
Publication number
20240019778
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Chen Kuo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD TO OPTIMIZE POST DEPOSITION BAKING CONDITION OF PHOTO RESIST...
Publication number
20240012325
Publication date
Jan 11, 2024
Applied Materials, Inc.
LUISA BOZANO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
ORGANOMETALLIC COMPOUND COMPRISING A METAL COMBINED WITH AT LEAST O...
Publication number
20230400764
Publication date
Dec 14, 2023
Samsung Electronics Co., Ltd.
Jin-Kyun Lee
C07 - ORGANIC CHEMISTRY
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Patent Application
PROCESSING APPARATUS FOR FORMING A COATING FILM ON A SUBSTRATE HAVI...
Publication number
20230395380
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Yasuaki NODA
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
RESIN, PHOTORESIST COMPOSITION, AND METHOD OF MANUFACTURING SEMICON...
Publication number
20230393467
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing company Ltd.
Siao-Shan WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
PHOTORESIST UNDER-LAYER AND METHOD OF FORMING PHOTORESIST PATTERN
Publication number
20230384679
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
An-Ren ZI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Semiconductor manufacturing method
Publication number
20230384678
Publication date
Nov 30, 2023
United Semiconductor (Xiamen) Co., Ltd.
Chien-Chung Tsai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
Publication number
20230386837
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wei LIAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
AMBIENT CONTROLLED TWO-STEP THERMAL TREATMENT FOR SPIN-ON COATING L...
Publication number
20230386852
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Fong Tsai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
BOTTOM ANTIREFLECTIVE COATING MATERIALS
Publication number
20230367216
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Chih Chen
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
PATTERN FORMING METHOD, KIT, AND RESIST COMPOSITION
Publication number
20230350290
Publication date
Nov 2, 2023
FUJIFILM CORPORATION
Tetsuya KAMIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
POLYMER CROSSLINK DE-CROSSLINK PROCESSES FOR RESIST PATTERNING
Publication number
20230350302
Publication date
Nov 2, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chung SU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY