for making a masking layer

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B81C2201/0198

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/0198for making a masking layer

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-level microelectromechanical system structure with non-photod...
- Patent number 12,252,396
- Issue date Mar 18, 2025
- Texas Instruments Incorporated
- Christopher Murray Beard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 12,189,114
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic chip and fabrication method
- Patent number 12,134,097
- Issue date Nov 5, 2024
- Shanghai Tianma Micro-Electronics Co., Ltd.
- Wei Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,953,675
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
- Patent number 11,945,712
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
- Patent number 11,939,212
- Issue date Mar 26, 2024
- Industrial Technology Research Institute
- Heng-chung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,906,727
- Issue date Feb 20, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,693,230
- Issue date Jul 4, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,650,411
- Issue date May 16, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 11,618,674
- Issue date Apr 4, 2023
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 11,524,893
- Issue date Dec 13, 2022
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective deposition of a passivation film
- Patent number 11,515,154
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Andrea Leoncini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective step coverage for micro-fabricated structures
- Patent number 11,499,218
- Issue date Nov 15, 2022
- Si-Ware Systems
- Mostafa Medhat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a thin filtering membrane and an acoustic...
- Patent number 11,317,219
- Issue date Apr 26, 2022
- STMicroelectronics S.r.l.
- Matteo Perletti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming a semiconductor device using block copolymer mat...
- Patent number 11,282,741
- Issue date Mar 22, 2022
- Micron Technology, Inc.
- Dan B. Millward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing doubly re-entrant microstructures
- Patent number 10,927,005
- Issue date Feb 23, 2021
- The Regents of the University of California
- Muchen Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of achieving universal interfacing using suspended and/or f...
- Patent number 10,807,864
- Issue date Oct 20, 2020
- The Regents of the University of Colorado, a Body Corporate
- Joseph J. Brown
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 10,807,863
- Issue date Oct 20, 2020
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical-systems processing method, and micro-elect...
- Patent number 10,662,059
- Issue date May 26, 2020
- Hitachi, Ltd.
- Keiji Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of multilayered carbon MEMS devices
- Patent number 10,570,010
- Issue date Feb 25, 2020
- National Technology & Engineering Solutions of Sandia, LLC
- Patrick Sean Finnegan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a thin filtering membrane and an acoustic...
- Patent number 10,555,091
- Issue date Feb 4, 2020
- STMicroelectronics S.r.l.
- Matteo Perletti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 10,513,430
- Issue date Dec 24, 2019
- Sumitomo Precision Products Co., LTD
- Ryohei Uchino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Field emission devices and methods of making thereof
- Patent number 10,504,772
- Issue date Dec 10, 2019
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetically sealed MEMS device and its fabrication
- Patent number 10,427,932
- Issue date Oct 1, 2019
- Texas Instruments Incorporated
- John Charles Ehmke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor having a bossed diaphragm
- Patent number 10,370,243
- Issue date Aug 6, 2019
- Honeywell International Inc.
- Carl Stewart
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectronic device having a black s...
- Patent number 10,364,145
- Issue date Jul 30, 2019
- STMicroelectronics S.r.l.
- Roberto Somaschini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming a nanostructured polymer material including bloc...
- Patent number 10,153,200
- Issue date Dec 11, 2018
- Micron Technology, Inc.
- Dan B. Millward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system device and method for manufacturing t...
- Patent number 10,131,533
- Issue date Nov 20, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250074766
- Publication date Mar 6, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20250011157
- Publication date Jan 9, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank Senger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...
- Publication number 20240375942
- Publication date Nov 14, 2024
- Calient Technologies, Inc.
- Paul WALDROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
- Publication number 20240317577
- Publication date Sep 26, 2024
- Mitsubishi Electric Corporation
- Yusuke SHIRAYANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240280513
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Jae Hong LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY H...
- Publication number 20240262682
- Publication date Aug 8, 2024
- ROBERT BOSCH GmbH
- Raphael Schuler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...
- Publication number 20240199408
- Publication date Jun 20, 2024
- STMicroelectronics S.r.l.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20240192483
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
- Publication number 20240182298
- Publication date Jun 6, 2024
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A Method of Manufacturing a Micro-Fluid Probe
- Publication number 20230391613
- Publication date Dec 7, 2023
- CYTOSURGE AG
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A BONDING PAD FOR A MICROMECHANICAL SENSOR ELE...
- Publication number 20230219808
- Publication date Jul 13, 2023
- ROBERT BOSCH GmbH
- Andreas Prinzen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC CHIP AND FABRICATION METHOD
- Publication number 20230211345
- Publication date Jul 6, 2023
- SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD.
- Wei LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
- Publication number 20230202835
- Publication date Jun 29, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20230138044
- Publication date May 4, 2023
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
- Publication number 20230127477
- Publication date Apr 27, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Murray BEARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING AT LEAST ONE FIRST AND ONE SECOND MICROMIRROR...
- Publication number 20230066345
- Publication date Mar 2, 2023
- ROBERT BOSCH GmbH
- Heiko Stahl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS
- Publication number 20230067030
- Publication date Mar 2, 2023
- Atlantic Inertial Systems Limited
- Christopher Paul Fell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
- Publication number 20230045563
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL MIRROR DEVICE AN...
- Publication number 20220350134
- Publication date Nov 3, 2022
- STMicroelectronics S.r.l
- Roberto CARMINATI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
- Publication number 20220106188
- Publication date Apr 7, 2022
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...
- Publication number 20210380404
- Publication date Dec 9, 2021
- Industrial Technology Research Institute
- Heng-chung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEEP CAVITY ETCHING METHOD
- Publication number 20210371274
- Publication date Dec 2, 2021
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Xiaohui Zhong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...
- Publication number 20210363000
- Publication date Nov 25, 2021
- STMicroelectronics S.r.l.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating a Microfluidic Device
- Publication number 20210300752
- Publication date Sep 30, 2021
- IMEC vzw
- Giuseppe Fiorentino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER
- Publication number 20210002131
- Publication date Jan 7, 2021
- Murata Manufacturing Co., Ltd.
- Hidetoshi FUJII
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...
- Publication number 20200092659
- Publication date Mar 19, 2020
- STMicroelectronics S.r.l.
- Matteo PERLETTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FORMING A SEMICONDUCTOR DEVICE USING BLOCK COPOLYMER MAT...
- Publication number 20190115252
- Publication date Apr 18, 2019
- Micron Technology, Inc.
- Dan B. Millward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...
- Publication number 20190090067
- Publication date Mar 21, 2019
- STMicroelectronics S.r.l.
- Matteo PERLETTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...
- Publication number 20190062157
- Publication date Feb 28, 2019
- Hitachi, Ltd
- Keiji WATANABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY

for making a masking layer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for fabricating a MEMS device

Multi-level microelectromechanical system structure with non-photod...

Optical device production method

Method and system for fabricating a MEMS device

Microfluidic chip and fabrication method

Optical device production method

Process for manufacturing a micro-electro-mechanical device, and ME...

MEMS device, manufacturing method of the same, and integrated MEMS...

Optical device production method

Optical device

Optical device

Actuator layer patterning with topography

Method for manufacturing micromechanical structures in a device wafer

Selective deposition of a passivation film

Selective step coverage for micro-fabricated structures

Method for manufacturing a thin filtering membrane and an acoustic...

Methods of forming a semiconductor device using block copolymer mat...

Method for manufacturing doubly re-entrant microstructures

Methods of achieving universal interfacing using suspended and/or f...

Method for manufacturing micromechanical structures in a device wafer

Micro-electro-mechanical-systems processing method, and micro-elect...

Fabrication of multilayered carbon MEMS devices

Method for manufacturing a thin filtering membrane and an acoustic...

Semiconductor device

Field emission devices and methods of making thereof

Hermetically sealed MEMS device and its fabrication

Pressure sensor having a bossed diaphragm

Process for manufacturing a microelectronic device having a black s...

Methods of forming a nanostructured polymer material including bloc...

Microelectromechanical system device and method for manufacturing t...

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME

METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY H...

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...

OPTICAL DEVICE PRODUCTION METHOD

METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT

A Method of Manufacturing a Micro-Fluid Probe

METHOD FOR PRODUCING A BONDING PAD FOR A MICROMECHANICAL SENSOR ELE...

MICROFLUIDIC CHIP AND FABRICATION METHOD

ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY

OPTICAL DEVICE PRODUCTION METHOD

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...

METHOD FOR PRODUCING AT LEAST ONE FIRST AND ONE SECOND MICROMIRROR...

FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL MIRROR DEVICE AN...

ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY

MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...

DEEP CAVITY ETCHING METHOD

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...

Method for Fabricating a Microfluidic Device

METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER

METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...

METHODS OF FORMING A SEMICONDUCTOR DEVICE USING BLOCK COPOLYMER MAT...

METHOD FOR MANUFACTURING A THIN FILTERING MEMBRANE AND AN ACOUSTIC...

MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...