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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/0323Grooves

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Patents Grantslast 30 patents

Information Patent Grant
Substrates comprising nano-patterning surfaces and methods of prepa...
- Patent number 12,151,460
- Issue date Nov 26, 2024
- Illumina, Inc.
- M. Shane Bowen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS phase shifter and manufacturing method thereof
- Patent number 11,855,327
- Issue date Dec 26, 2023
- BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
- Ying Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure including scribe line structures and method...
- Patent number 11,767,219
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wei-Cheng Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS chip structure
- Patent number 11,713,239
- Issue date Aug 1, 2023
- Huawei Technologies Co., Ltd.
- Yiwen Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Use of an uncoupling structure for assembling a component having a...
- Patent number 11,267,697
- Issue date Mar 8, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Philippe Robert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrates comprising nano-patterning surfaces and methods of prepa...
- Patent number 11,110,683
- Issue date Sep 7, 2021
- Illumina, Inc.
- M. Shane Bowen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and method for fabricating the same
- Patent number 10,737,936
- Issue date Aug 11, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wei-Cheng Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrates comprising nano-patterning surfaces and methods of prepa...
- Patent number 10,682,829
- Issue date Jun 16, 2020
- Illumina, Inc.
- M. Shane Bowen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a MEMS sensor, and MEMS sensor
- Patent number 10,486,961
- Issue date Nov 26, 2019
- Infineon Technologies AG
- Matthias Steiert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and process
- Patent number 9,926,189
- Issue date Mar 27, 2018
- Cirrus Logic, Inc.
- Marek Sebastian Piechocinski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dry scribing methods, devices and systems
- Patent number 9,731,965
- Issue date Aug 15, 2017
- STMicroelectronics S.r.l.
- Matteo Perletti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming a substrate opening
- Patent number 9,443,756
- Issue date Sep 13, 2016
- Micron Technology, Inc.
- Mark Kiehlbauch
- B44 - DECORATIVE ARTS
Information Patent Grant
Microfluidic device and microtube thereof
- Patent number 8,992,859
- Issue date Mar 31, 2015
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production of microfluidic polymeric devices by photo-assisted and/...
- Patent number 8,636,022
- Issue date Jan 28, 2014
- Centre National de la Recherche Scientifique (Cnrs)
- Vincent Studer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process of making a microtube and microfluidic devices formed there...
- Patent number 8,585,910
- Issue date Nov 19, 2013
- Integrated Sensing Systems Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Photocurable perfluoropolyethers for use as novel materials in micr...
- Patent number 8,268,446
- Issue date Sep 18, 2012
- The University of North Carolina at Chapel Hill
- Joseph M. DeSimone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for etching microchannel networks within liquid crystal poly...
- Patent number 7,425,276
- Issue date Sep 16, 2008
- University of South Florida
- David P. Fries
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process of making a microtube and microfluidic devices formed there...
- Patent number 7,381,628
- Issue date Jun 3, 2008
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process of making a microtube and microfluidic devices formed there...
- Patent number 7,351,603
- Issue date Apr 1, 2008
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micro-electromechanical device and micro...
- Patent number 7,303,934
- Issue date Dec 4, 2007
- NXP B.V.
- Jozef Thomas Martinus Van Beek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for creating a 3-dimensional configuration on a substrate
- Patent number 7,169,989
- Issue date Jan 30, 2007
- Ben Gurion University of the Negev, Research and Development Authority
- Robert Steven Marks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low-temperature patterned wafer bonding with photosensitive benzocy...
- Patent number 6,942,750
- Issue date Sep 13, 2005
- The Regents of the University of Michigan
- Tsung-Kuan A. Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS Switch, Preparation Method thereof, and Electronic Apparatus
- Publication number 20240359973
- Publication date Oct 31, 2024
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...
- Publication number 20240262678
- Publication date Aug 8, 2024
- Beijing BOE Technology Development Co., Ltd.
- Jingwen GUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20240174511
- Publication date May 30, 2024
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical Acoustic Pressure-Generating Device with Imp...
- Publication number 20230416076
- Publication date Dec 28, 2023
- ROBERT BOSCH GmbH
- Holger Conrad
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME
- Publication number 20230365403
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- WEI-CHENG SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
- Publication number 20230016416
- Publication date Jan 19, 2023
- Rohm Co., Ltd.
- Toru HIGUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR ESTABLISHING UNIFORM LIQUID FILMS ON POLAR AND NON-POLA...
- Publication number 20220363343
- Publication date Nov 17, 2022
- Montana State University
- Leon G. Higley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PHASE SHIFTER AND MANUFACTURING METHOD THEREOF
- Publication number 20220311112
- Publication date Sep 29, 2022
- BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
- Ying WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPA...
- Publication number 20210379858
- Publication date Dec 9, 2021
- Illumina, Inc.
- M. Shane Bowen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME
- Publication number 20200346926
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- WEI-CHENG SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CHIP STRUCTURE
- Publication number 20200325015
- Publication date Oct 15, 2020
- Huawei Technologies Co., Ltd
- Yiwen CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPA...
- Publication number 20200282693
- Publication date Sep 10, 2020
- Illumina, Inc.
- M. Shane Bowen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND PROCESS
- Publication number 20180244516
- Publication date Aug 30, 2018
- Cirrus Logic International Semiconductor Ltd.
- Marek Sebastian PIECHOCINSKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME
- Publication number 20170341933
- Publication date Nov 30, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- WEI-CHENG SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DRY SCRIBING METHODS, DEVICES AND SYSTEMS
- Publication number 20170313582
- Publication date Nov 2, 2017
- STMicroelectronics S.r.l.
- Matteo Perletti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND PROCESS
- Publication number 20170217760
- Publication date Aug 3, 2017
- Cirrus Logic International Semiconductor Ltd.
- Marek Sebastian PIECHOCINSKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR ELEMENT AND METHODS FOR MANUFACTURING THE SAME
- Publication number 20160244326
- Publication date Aug 25, 2016
- INFINEON TECHNOLOGIES AG
- Christian BRETTHAUER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROCHIP AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20150239217
- Publication date Aug 27, 2015
- SONY CORPORATION
- Hidetoshi Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods of Forming a Substrate Opening
- Publication number 20140357086
- Publication date Dec 4, 2014
- Mark Kiehlbauch
- B44 - DECORATIVE ARTS
Information Patent Application
MICROFLUIDIC DEVICE AND MICROTUBE THEREOF
- Publication number 20140044900
- Publication date Feb 13, 2014
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOCURABLE PERFLUOROPOLYETHERS FOR USE AS NOVEL MATERIALS IN MICR...
- Publication number 20130011618
- Publication date Jan 10, 2013
- California Institute of Technology
- Joseph M. DeSimone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION OF MICROFLUIDIC POLYMERIC DEVICES BY PHOTO-ASSISTED AND/...
- Publication number 20090250130
- Publication date Oct 8, 2009
- Vincent Studer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...
- Publication number 20090220710
- Publication date Sep 3, 2009
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Photocurable perfluoropolyethers for use as novel materials in micr...
- Publication number 20090165320
- Publication date Jul 2, 2009
- Joseph M. DeSimone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO FLUIDIC DEVICES AND METHODS FOR PRODUCING SAME
- Publication number 20070286774
- Publication date Dec 13, 2007
- Claus Barholm-Hansen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Photocurable Perfluoropolyethers for Use as Novel Materials in Micr...
- Publication number 20070254278
- Publication date Nov 1, 2007
- Joseph M. DeSimone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Etching Microchannel Networks within Liquid Crystal Poly...
- Publication number 20060216654
- Publication date Sep 28, 2006
- UNIVERSITY OF SOUTH FLORIDA
- David P. Fries
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...
- Publication number 20060175303
- Publication date Aug 10, 2006
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a micro-electromechanical device and micro...
- Publication number 20060040505
- Publication date Feb 23, 2006
- Koninklijke Philips Electronics N.V.
- Jozef Thomas Martinus Van Beek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...
- Publication number 20060037187
- Publication date Feb 23, 2006
- Integrated Sensing Systems, Inc.
- Douglas Ray Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrates comprising nano-patterning surfaces and methods of prepa...

MEMS phase shifter and manufacturing method thereof

Semiconductor structure including scribe line structures and method...

MEMS chip structure

Use of an uncoupling structure for assembling a component having a...

Substrates comprising nano-patterning surfaces and methods of prepa...

Semiconductor structure and method for fabricating the same

Substrates comprising nano-patterning surfaces and methods of prepa...

Method for producing a MEMS sensor, and MEMS sensor

MEMS device and process

Dry scribing methods, devices and systems

Methods of forming a substrate opening

Microfluidic device and microtube thereof

Production of microfluidic polymeric devices by photo-assisted and/...

Process of making a microtube and microfluidic devices formed there...

Photocurable perfluoropolyethers for use as novel materials in micr...

Method for etching microchannel networks within liquid crystal poly...

Process of making a microtube and microfluidic devices formed there...

Process of making a microtube and microfluidic devices formed there...

Method for manufacturing a micro-electromechanical device and micro...

Process for creating a 3-dimensional configuration on a substrate

Low-temperature patterned wafer bonding with photosensitive benzocy...

Patents Applicationslast 30 patents

MEMS Switch, Preparation Method thereof, and Electronic Apparatus

MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...

MEMS DEVICE

Microelectromechanical Acoustic Pressure-Generating Device with Imp...

SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

PROCESS FOR ESTABLISHING UNIFORM LIQUID FILMS ON POLAR AND NON-POLA...

MEMS PHASE SHIFTER AND MANUFACTURING METHOD THEREOF

SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPA...

SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME

MEMS CHIP STRUCTURE

SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPA...

MEMS DEVICE AND PROCESS

SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME

DRY SCRIBING METHODS, DEVICES AND SYSTEMS

MEMS DEVICE AND PROCESS

SEMICONDUCTOR ELEMENT AND METHODS FOR MANUFACTURING THE SAME

MICROCHIP AND METHOD FOR MANUFACTURING THE SAME

Methods of Forming a Substrate Opening

MICROFLUIDIC DEVICE AND MICROTUBE THEREOF

PHOTOCURABLE PERFLUOROPOLYETHERS FOR USE AS NOVEL MATERIALS IN MICR...

PRODUCTION OF MICROFLUIDIC POLYMERIC DEVICES BY PHOTO-ASSISTED AND/...

PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...

Photocurable perfluoropolyethers for use as novel materials in micr...

MICRO FLUIDIC DEVICES AND METHODS FOR PRODUCING SAME

Photocurable Perfluoropolyethers for Use as Novel Materials in Micr...

Method for Etching Microchannel Networks within Liquid Crystal Poly...

PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...

Method for manufacturing a micro-electromechanical device and micro...

PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THERE...