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B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2201/00
Specific applications of micro-electromechanical systems
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B81B2201/0242
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Patents Grants
last 30 patents
Information
Patent Grant
Micro electro mechanical system (MEMs) device having metal sealing...
Patent number
12,202,724
Issue date
Jan 21, 2025
Taiwan Semiconductor Manufacturing Company Ltd.
Ching-Kai Shen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Trim circuit and method of oscillator drive circuit phase calibration
Patent number
12,203,774
Issue date
Jan 21, 2025
NXP USA, INC.
Raghavendra N Sridhar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for fabricating a MEMS device
Patent number
12,180,069
Issue date
Dec 31, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anti-stiction process for MEMS device
Patent number
12,157,667
Issue date
Dec 3, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Jui-Chun Weng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Selective self-assembled monolayer patterning with sacrificial laye...
Patent number
12,139,397
Issue date
Nov 12, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor device and sensor
Patent number
12,140,430
Issue date
Nov 12, 2024
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Hideki Ueda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Inertia measurement device, vehicle, and electronic device
Patent number
12,130,305
Issue date
Oct 29, 2024
Seiko Epson Corporation
Yusuke Kinoshita
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support structure for micro-vibrator and method of manufacturing in...
Patent number
12,104,904
Issue date
Oct 1, 2024
Denso Corporation
Teruhisa Akashi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
Patent number
12,092,460
Issue date
Sep 17, 2024
The Charles Stark Draper Laboratory, Inc.
Eugene H. Cook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for thermally regulating sensor operation
Patent number
12,078,653
Issue date
Sep 3, 2024
SZ DJI Technology Co., Ltd
Guoxiu Pan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical sensor device and corresponding production method
Patent number
12,077,429
Issue date
Sep 3, 2024
Robert Bosch GmbH
Lars Tebje
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Analysis method of a device, performed through a MEMS sensor, and s...
Patent number
12,054,386
Issue date
Aug 6, 2024
STMicroelectronics S.r.l.
Enrico Rosario Alessi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Safety mechanism for sensors
Patent number
12,044,697
Issue date
Jul 23, 2024
Murata Manufacturing Co., Ltd.
Lasse Aaltonen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor system with a microelectromechanical sensor element and meth...
Patent number
12,043,539
Issue date
Jul 23, 2024
Infineon Technologies Dresden GmbH & Co. KG
Dirk Meinhold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor integrated device with electrical contacts between st...
Patent number
12,024,422
Issue date
Jul 2, 2024
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS gyroscope
Patent number
12,013,240
Issue date
Jun 18, 2024
AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD
Zhao Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for vibration immunity to suppress bias errors in sensor de...
Patent number
12,012,327
Issue date
Jun 18, 2024
Honeywell International Inc.
Daniel Endean
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Early-impact motion limiter for MEMS device
Patent number
11,987,492
Issue date
May 21, 2024
Murata Manufacturing Co., Ltd.
Mikko Partanen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric body and MEMS device using same
Patent number
11,968,902
Issue date
Apr 23, 2024
National Institute of Advanced Industrial Science and Technology
Masato Uehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
Patent number
11,945,712
Issue date
Apr 2, 2024
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for providing getters in microelectromechanical...
Patent number
11,945,713
Issue date
Apr 2, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro hemispherical resonator gyroscope, and an assembly method and...
Patent number
11,920,932
Issue date
Mar 5, 2024
NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY
Xuezhong Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromachined multi-axis gyroscopes with reduced stress sensitivity
Patent number
11,898,845
Issue date
Feb 13, 2024
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Cenk Acar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Differential mems device and methods
Patent number
11,892,465
Issue date
Feb 6, 2024
Movella Inc.
Sanjay Bhandari
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wearable device with combined sensing capabilities
Patent number
11,885,689
Issue date
Jan 30, 2024
Pixart Imaging Incorporation
Chih-Ming Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor device
Patent number
11,885,621
Issue date
Jan 30, 2024
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Koichiro Nakashima
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Robust method for gyroscope drive amplitude measurement
Patent number
11,867,509
Issue date
Jan 9, 2024
Invensense, Inc.
Damiano Milani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Inertia measurement device, vehicle, and electronic device
Patent number
11,860,185
Issue date
Jan 2, 2024
Seiko Epson Corporation
Yusuke Kinoshita
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor control method
Patent number
11,834,329
Issue date
Dec 5, 2023
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Marc Sansa Perna
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS gyroscope with calibration of the scale factor in real time an...
Patent number
11,808,573
Issue date
Nov 7, 2023
STMicroelectronics S.r.l.
Luca Guerinoni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE
Publication number
20250026632
Publication date
Jan 23, 2025
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Array Structures for Gyroscopes with High Resonant Frequencies
Publication number
20250026629
Publication date
Jan 23, 2025
NXP USA, Inc.
Jun Tang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ROTATION RATE SENSOR WITH A MICROMECHANICAL STRUCTURE, AND METHOD F...
Publication number
20250011163
Publication date
Jan 9, 2025
ROBERT BOSCH GmbH
Kaushik Krishna Rangharajan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES
Publication number
20250002331
Publication date
Jan 2, 2025
NXP USA, Inc.
Mostafa Soliman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SENSOR DEVICE WITH WAFER-LEVEL INTEGRATION O...
Publication number
20250002332
Publication date
Jan 2, 2025
STMicroelectronics International N.V.
Giorgio ALLEGATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
Publication number
20250002334
Publication date
Jan 2, 2025
TEXAS INSTRUMENTS INCORPORATED
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Three-axis Gyroscope
Publication number
20240425355
Publication date
Dec 26, 2024
SensorTek technology Corp.
Shih-Hsiung TSENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL MEMS DEVICE INTEGRATING A WAKE-UP ELEMENT, INERTIAL MEMS S...
Publication number
20240425352
Publication date
Dec 26, 2024
STMicroelectronics International N.V.
Luca SEGHIZZI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Inertia Measurement Device, Vehicle, And Electronic Device
Publication number
20240418744
Publication date
Dec 19, 2024
SEIKO EPSON CORPORATION
Yusuke KINOSHITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MAKING
Publication number
20240409395
Publication date
Dec 12, 2024
Taiwan Semiconductor Manufacturing Company Limited
Chih-Chung LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
Publication number
20240400380
Publication date
Dec 5, 2024
STMicroelectronics International N.V.
Patrick FEDELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS COMPONENT WITH UPSIDE-DOWN CHIP
Publication number
20240391759
Publication date
Nov 28, 2024
Murata Manufacturing Co., Ltd.
Sami NURMI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20240383742
Publication date
Nov 21, 2024
Zhunmao (Hangzhou) Technology Co.
Haitao Ding
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT
Publication number
20240383745
Publication date
Nov 21, 2024
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR SYSTEM WITH A MICROELECTROMECHANICAL SENSOR ELEMENT AND METH...
Publication number
20240343555
Publication date
Oct 17, 2024
Infineon Technologies Dresden GmbH & Co. KG
Dirk MEINHOLD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
Publication number
20240343558
Publication date
Oct 17, 2024
Murata Manufacturing Co., Ltd.
Petteri KILPINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240336474
Publication date
Oct 10, 2024
AAC TECHNOLOGIES PTE. LTD
Houming Chong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RESONANT SENSOR SYSTEM AND METHOD FOR OPERATING A RESONANT SENSOR S...
Publication number
20240337491
Publication date
Oct 10, 2024
ROBERT BOSCH GmbH
Antonios Nikas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPER MECHANISM
Publication number
20240327199
Publication date
Oct 3, 2024
STMicroelectronics International N.V.
Paola CARULLI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD OF MEMS DEVICE
Publication number
20240317580
Publication date
Sep 26, 2024
Murata Manufacturing Co., Ltd.
Fumiya KUROKAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD OF MEMS DEVICE
Publication number
20240317578
Publication date
Sep 26, 2024
Murata Manufacturing Co., Ltd.
Fumiya KUROKAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL MEASUREMENT UNIT (IMU) WITH BLENDING OF OUTPUTS FROM AN AR...
Publication number
20240302169
Publication date
Sep 12, 2024
Honeywell International Inc.
Christopher J. Mauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
System, Method, and Apparatus for Sensor Drift Compensation
Publication number
20240302185
Publication date
Sep 12, 2024
Carnegie Mellon University
Gary K. Fedder
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20240228264
Publication date
Jul 11, 2024
STMicroelectronics International N.V.
Roseanne DUCA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR AND METHOD OF MANUFACTURING MEMS SENSOR
Publication number
20240208804
Publication date
Jun 27, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...
Publication number
20240199408
Publication date
Jun 20, 2024
STMicroelectronics S.r.l.
Giorgio ALLEGATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
Publication number
20240199412
Publication date
Jun 20, 2024
InvenSense, Inc.
Camillo Pilla
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...
Publication number
20240199415
Publication date
Jun 20, 2024
STMicroelectronics International N.V.
Federico VERCESI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STOPPER BUMP ON ROTOR
Publication number
20240190698
Publication date
Jun 13, 2024
Murata Manufacturing Co., Ltd.
Matti LIUKKU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micro-Electromechanical System
Publication number
20240182293
Publication date
Jun 6, 2024
TECHNISCHE UNIVERSITAT WIEN
Daniel PLATZ
B81 - MICRO-STRUCTURAL TECHNOLOGY