Gyroscopes

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B81B2201/0242

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/0242Gyroscopes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor MEMS structure
- Patent number 12,221,337
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro electro mechanical system (MEMs) device having metal sealing...
- Patent number 12,202,724
- Issue date Jan 21, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trim circuit and method of oscillator drive circuit phase calibration
- Patent number 12,203,774
- Issue date Jan 21, 2025
- NXP USA, INC.
- Raghavendra N Sridhar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective self-assembled monolayer patterning with sacrificial laye...
- Patent number 12,139,397
- Issue date Nov 12, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor device and sensor
- Patent number 12,140,430
- Issue date Nov 12, 2024
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Hideki Ueda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertia measurement device, vehicle, and electronic device
- Patent number 12,130,305
- Issue date Oct 29, 2024
- Seiko Epson Corporation
- Yusuke Kinoshita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for micro-vibrator and method of manufacturing in...
- Patent number 12,104,904
- Issue date Oct 1, 2024
- Denso Corporation
- Teruhisa Akashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
- Patent number 12,092,460
- Issue date Sep 17, 2024
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for thermally regulating sensor operation
- Patent number 12,078,653
- Issue date Sep 3, 2024
- SZ DJI Technology Co., Ltd
- Guoxiu Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor device and corresponding production method
- Patent number 12,077,429
- Issue date Sep 3, 2024
- Robert Bosch GmbH
- Lars Tebje
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Analysis method of a device, performed through a MEMS sensor, and s...
- Patent number 12,054,386
- Issue date Aug 6, 2024
- STMicroelectronics S.r.l.
- Enrico Rosario Alessi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Safety mechanism for sensors
- Patent number 12,044,697
- Issue date Jul 23, 2024
- Murata Manufacturing Co., Ltd.
- Lasse Aaltonen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor system with a microelectromechanical sensor element and meth...
- Patent number 12,043,539
- Issue date Jul 23, 2024
- Infineon Technologies Dresden GmbH & Co. KG
- Dirk Meinhold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor integrated device with electrical contacts between st...
- Patent number 12,024,422
- Issue date Jul 2, 2024
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS gyroscope
- Patent number 12,013,240
- Issue date Jun 18, 2024
- AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD
- Zhao Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for vibration immunity to suppress bias errors in sensor de...
- Patent number 12,012,327
- Issue date Jun 18, 2024
- Honeywell International Inc.
- Daniel Endean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Early-impact motion limiter for MEMS device
- Patent number 11,987,492
- Issue date May 21, 2024
- Murata Manufacturing Co., Ltd.
- Mikko Partanen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric body and MEMS device using same
- Patent number 11,968,902
- Issue date Apr 23, 2024
- National Institute of Advanced Industrial Science and Technology
- Masato Uehara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a micro-electro-mechanical device, and ME...
- Patent number 11,945,712
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for providing getters in microelectromechanical...
- Patent number 11,945,713
- Issue date Apr 2, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro hemispherical resonator gyroscope, and an assembly method and...
- Patent number 11,920,932
- Issue date Mar 5, 2024
- NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY
- Xuezhong Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined multi-axis gyroscopes with reduced stress sensitivity
- Patent number 11,898,845
- Issue date Feb 13, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Differential mems device and methods
- Patent number 11,892,465
- Issue date Feb 6, 2024
- Movella Inc.
- Sanjay Bhandari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wearable device with combined sensing capabilities
- Patent number 11,885,689
- Issue date Jan 30, 2024
- Pixart Imaging Incorporation
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor device
- Patent number 11,885,621
- Issue date Jan 30, 2024
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Koichiro Nakashima
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Robust method for gyroscope drive amplitude measurement
- Patent number 11,867,509
- Issue date Jan 9, 2024
- Invensense, Inc.
- Damiano Milani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertia measurement device, vehicle, and electronic device
- Patent number 11,860,185
- Issue date Jan 2, 2024
- Seiko Epson Corporation
- Yusuke Kinoshita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor control method
- Patent number 11,834,329
- Issue date Dec 5, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Marc Sansa Perna
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS
- Publication number 20250042718
- Publication date Feb 6, 2025
- STMicroelectronics International N.V.
- Manuel RIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250026632
- Publication date Jan 23, 2025
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Array Structures for Gyroscopes with High Resonant Frequencies
- Publication number 20250026629
- Publication date Jan 23, 2025
- NXP USA, Inc.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROTATION RATE SENSOR WITH A MICROMECHANICAL STRUCTURE, AND METHOD F...
- Publication number 20250011163
- Publication date Jan 9, 2025
- ROBERT BOSCH GmbH
- Kaushik Krishna Rangharajan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES
- Publication number 20250002331
- Publication date Jan 2, 2025
- NXP USA, Inc.
- Mostafa Soliman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SENSOR DEVICE WITH WAFER-LEVEL INTEGRATION O...
- Publication number 20250002332
- Publication date Jan 2, 2025
- STMicroelectronics International N.V.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20250002334
- Publication date Jan 2, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three-axis Gyroscope
- Publication number 20240425355
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Hsiung TSENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL MEMS DEVICE INTEGRATING A WAKE-UP ELEMENT, INERTIAL MEMS S...
- Publication number 20240425352
- Publication date Dec 26, 2024
- STMicroelectronics International N.V.
- Luca SEGHIZZI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertia Measurement Device, Vehicle, And Electronic Device
- Publication number 20240418744
- Publication date Dec 19, 2024
- SEIKO EPSON CORPORATION
- Yusuke KINOSHITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MAKING
- Publication number 20240409395
- Publication date Dec 12, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chih-Chung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
- Publication number 20240400380
- Publication date Dec 5, 2024
- STMicroelectronics International N.V.
- Patrick FEDELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS COMPONENT WITH UPSIDE-DOWN CHIP
- Publication number 20240391759
- Publication date Nov 28, 2024
- Murata Manufacturing Co., Ltd.
- Sami NURMI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20240383742
- Publication date Nov 21, 2024
- Zhunmao (Hangzhou) Technology Co.
- Haitao Ding
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT
- Publication number 20240383745
- Publication date Nov 21, 2024
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR SYSTEM WITH A MICROELECTROMECHANICAL SENSOR ELEMENT AND METH...
- Publication number 20240343555
- Publication date Oct 17, 2024
- Infineon Technologies Dresden GmbH & Co. KG
- Dirk MEINHOLD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
- Publication number 20240343558
- Publication date Oct 17, 2024
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240336474
- Publication date Oct 10, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANT SENSOR SYSTEM AND METHOD FOR OPERATING A RESONANT SENSOR S...
- Publication number 20240337491
- Publication date Oct 10, 2024
- ROBERT BOSCH GmbH
- Antonios Nikas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPER MECHANISM
- Publication number 20240327199
- Publication date Oct 3, 2024
- STMicroelectronics International N.V.
- Paola CARULLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD OF MEMS DEVICE
- Publication number 20240317580
- Publication date Sep 26, 2024
- Murata Manufacturing Co., Ltd.
- Fumiya KUROKAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD OF MEMS DEVICE
- Publication number 20240317578
- Publication date Sep 26, 2024
- Murata Manufacturing Co., Ltd.
- Fumiya KUROKAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL MEASUREMENT UNIT (IMU) WITH BLENDING OF OUTPUTS FROM AN AR...
- Publication number 20240302169
- Publication date Sep 12, 2024
- Honeywell International Inc.
- Christopher J. Mauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System, Method, and Apparatus for Sensor Drift Compensation
- Publication number 20240302185
- Publication date Sep 12, 2024
- Carnegie Mellon University
- Gary K. Fedder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20240228264
- Publication date Jul 11, 2024
- STMicroelectronics International N.V.
- Roseanne DUCA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AND METHOD OF MANUFACTURING MEMS SENSOR
- Publication number 20240208804
- Publication date Jun 27, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...
- Publication number 20240199408
- Publication date Jun 20, 2024
- STMicroelectronics S.r.l.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
- Publication number 20240199412
- Publication date Jun 20, 2024
- InvenSense, Inc.
- Camillo Pilla
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...
- Publication number 20240199415
- Publication date Jun 20, 2024
- STMicroelectronics International N.V.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STOPPER BUMP ON ROTOR
- Publication number 20240190698
- Publication date Jun 13, 2024
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor MEMS structure

Micro electro mechanical system (MEMs) device having metal sealing...

Trim circuit and method of oscillator drive circuit phase calibration

Method and system for fabricating a MEMS device

Anti-stiction process for MEMS device

Selective self-assembled monolayer patterning with sacrificial laye...

Sensor device and sensor

Inertia measurement device, vehicle, and electronic device

Support structure for micro-vibrator and method of manufacturing in...

Silicon MEMS gyroscopes with upper and lower sense plates

Systems and methods for thermally regulating sensor operation

Micromechanical sensor device and corresponding production method

Analysis method of a device, performed through a MEMS sensor, and s...

Safety mechanism for sensors

Sensor system with a microelectromechanical sensor element and meth...

Semiconductor integrated device with electrical contacts between st...

MEMS gyroscope

Methods for vibration immunity to suppress bias errors in sensor de...

Early-impact motion limiter for MEMS device

Piezoelectric body and MEMS device using same

Process for manufacturing a micro-electro-mechanical device, and ME...

Systems and methods for providing getters in microelectromechanical...

Micro hemispherical resonator gyroscope, and an assembly method and...

Micromachined multi-axis gyroscopes with reduced stress sensitivity

Differential mems device and methods

Wearable device with combined sensing capabilities

Sensor device

Robust method for gyroscope drive amplitude measurement

Inertia measurement device, vehicle, and electronic device

Sensor control method

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS

MEMS DEVICE

MEMS Array Structures for Gyroscopes with High Resonant Frequencies

ROTATION RATE SENSOR WITH A MICROMECHANICAL STRUCTURE, AND METHOD F...

COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES

MICROELECTROMECHANICAL SENSOR DEVICE WITH WAFER-LEVEL INTEGRATION O...

FORMING A PASSIVATION COATING FOR MEMS DEVICES

Three-axis Gyroscope

INERTIAL MEMS DEVICE INTEGRATING A WAKE-UP ELEMENT, INERTIAL MEMS S...

Inertia Measurement Device, Vehicle, And Electronic Device

SEMICONDUCTOR DEVICE AND METHOD OF MAKING

MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION

MEMS COMPONENT WITH UPSIDE-DOWN CHIP

MEMS DEVICE

MICROMECHANICAL COMPONENT

SENSOR SYSTEM WITH A MICROELECTROMECHANICAL SENSOR ELEMENT AND METH...

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

RESONANT SENSOR SYSTEM AND METHOD FOR OPERATING A RESONANT SENSOR S...

MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPER MECHANISM

MEMS DEVICE AND MANUFACTURING METHOD OF MEMS DEVICE

MEMS DEVICE AND MANUFACTURING METHOD OF MEMS DEVICE

INERTIAL MEASUREMENT UNIT (IMU) WITH BLENDING OF OUTPUTS FROM AN AR...

System, Method, and Apparatus for Sensor Drift Compensation

DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE

MEMS SENSOR AND METHOD OF MANUFACTURING MEMS SENSOR

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND ME...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...

STOPPER BUMP ON ROTOR