Heating of the reaction chamber or the substrate

Industry

CPC
C30B25/10

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Parent Industries

CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B25/00Single-crystal growth by chemical reaction of reactive gases

Current Industry

C30B25/10Heating of the reaction chamber or the substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Film deposition method and method for forming polycrystalline silic...
- Patent number 12,351,904
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kits and related methods for processing chambers to facilit...
- Patent number 12,354,855
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of preparing a silicon carbide crystal by deposition onto at...
- Patent number 12,338,544
- Issue date Jun 24, 2025
- OCI Company Ltd
- Gabok Kim
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vapor phase growth method using reflector with changeable pattern
- Patent number 12,338,543
- Issue date Jun 24, 2025
- NUFLARE TECHNOLOGY, INC.
- Yoshitaka Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition device and method of producing epitaxial wafer
- Patent number 12,327,724
- Issue date Jun 10, 2025
- Epicrew Corporation
- Akira Okabe
- C30 - CRYSTAL GROWTH
Information Patent Grant
Epitaxial growth device
- Patent number 12,327,722
- Issue date Jun 10, 2025
- ZHEJIANG QIUSHI SEMICONDUCTOR EQUIPMENT CO., LTD
- Liang Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor deposition monitoring device
- Patent number 12,283,497
- Issue date Apr 22, 2025
- Samsung Electronics Co., Ltd.
- Young Uk Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for heating multiple crucibles
- Patent number 12,281,412
- Issue date Apr 22, 2025
- Ebner Industrieofenbau GmbH
- Robert Ebner
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for producing epitaxial silicon wafer
- Patent number 12,278,105
- Issue date Apr 15, 2025
- Sumco Corporation
- Motoki Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon carbide ingot and method of fabricating the same
- Patent number 12,276,043
- Issue date Apr 15, 2025
- GlobalWafers Co., Ltd.
- Ching-Shan Lin
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Pre-heat ring and substrate processing device
- Patent number 12,258,676
- Issue date Mar 25, 2025
- Jiangsu Alpha-Semiconductor Equipment Co., Ltd.
- Liu Ziqiang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Systems and methods for a preheat ring in a semiconductor wafer rea...
- Patent number 12,252,806
- Issue date Mar 18, 2025
- GlobalWafers Co., Ltd.
- Chieh Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon carbide single crystal wafer, and methods for manufacturing...
- Patent number 12,252,808
- Issue date Mar 18, 2025
- Denso Corporation
- Isaho Kamata
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for producing SiC single crystal and method for suppressing...
- Patent number 12,247,318
- Issue date Mar 11, 2025
- Shin-Etsu Chemical Co., Ltd.
- Norio Yamagata
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for producing a SiC seed crystal for growth of a SiC ingot b...
- Patent number 12,247,319
- Issue date Mar 11, 2025
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus and method for manufacturing hexagonal crystals
- Patent number 12,247,315
- Issue date Mar 11, 2025
- LNBS CO. LTD.
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond substrate and method for manufacturing the same
- Patent number 12,241,175
- Issue date Mar 4, 2025
- Chih Shiue Yan
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,188,149
- Issue date Jan 7, 2025
- Sumitomo Electric Device Innovations, Inc.
- Kohei Miyashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating hexagonal boron nitride
- Patent number 12,180,584
- Issue date Dec 31, 2024
- Samsung Electronics Co., Ltd.
- Changseok Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming silicon carbide coated base substrates at multip...
- Patent number 12,180,611
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Yen Lin Leow
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of growing single crystal diamond assisted by polycrystallin...
- Patent number 12,173,427
- Issue date Dec 24, 2024
- Plasmability, LLC
- Robert J. Basnett
- C30 - CRYSTAL GROWTH
Information Patent Grant
Quartz susceptor for accurate non-contact temperature measurement
- Patent number 12,134,835
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- C30 - CRYSTAL GROWTH
Information Patent Grant
Epitaxial growth apparatus and method of producing epitaxial wafer
- Patent number 12,129,543
- Issue date Oct 29, 2024
- Sumco Corporation
- Haku Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for producing 2D materials by moving forming layers dispose...
- Patent number 12,110,610
- Issue date Oct 8, 2024
- General Graphene Corp.
- James Vig Sherrill
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of providing a wrinkle pattern or producing a substrate havi...
- Patent number 12,104,280
- Issue date Oct 1, 2024
- City University of Hong Kong
- Thuc Hue Ly
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for epitaxially depositing a material on a substrate by flow...
- Patent number 12,091,749
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
- Patent number 12,077,880
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for manufacturing silicon carbide single crystal ingot and...
- Patent number 12,071,709
- Issue date Aug 27, 2024
- Denso Corporation
- Isaho Kamata
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of manufacture of single crystal synthetic diamond material
- Patent number 12,065,756
- Issue date Aug 20, 2024
- Element Six Technologies Limited
- Ian Friel
- C30 - CRYSTAL GROWTH
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SILICON CARBIDE AND QUARTZ COMPOSITIONS FOR PROCESSING CHAMBERS, AN...
- Publication number 20250236987
- Publication date Jul 24, 2025
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- Kim Ramkumar VELLORE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING APPARATUS, CVD EQUIPMENT INCLUDING THE HEATING APPARATUS
- Publication number 20250179640
- Publication date Jun 5, 2025
- ADVANCED MICRO-FABRICATION EQUIPMENT INC.
- Zhenyu ZHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-HIGH THERMAL-CONDUCTIVITY DIAMOND AND SYNTHETIC METHOD THEREFOR
- Publication number 20250171926
- Publication date May 29, 2025
- ZHENGZHOU RESEARCH INSTITUTE FOR ABRASIVES & GRINDING CO., LTD.
- Xiaolei WU
- C30 - CRYSTAL GROWTH
Information Patent Application
EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...
- Publication number 20250146173
- Publication date May 8, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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TWO-CHAMBER REACTOR FOR EPITAXIAL DEPOSITION OF SEMICONDUCTOR MATER...
- Publication number 20250137122
- Publication date May 1, 2025
- LPE S.p.A.
- Maurilio Meschia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CRYSTALLINE WAFERS AND PROCESS FOR FORMING CRYSTALLINE WAFERS
- Publication number 20250140556
- Publication date May 1, 2025
- II-VI ADVANCED MATERIALS, LLC
- Y.K. Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMEN...
- Publication number 20250129511
- Publication date Apr 24, 2025
- Advanced Micro-Fabrication Equipment Inc. China
- Heng TAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUXILIARY FLOW PLATE FOR THICKNESS AND CONCENTRATION UNIFORMITY ADJ...
- Publication number 20250129509
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR
- Publication number 20250122643
- Publication date Apr 17, 2025
- Toyoda Gosei Co., Ltd.
- Koji OKUNO
- C30 - CRYSTAL GROWTH
Information Patent Application
Method of Growing Single Crystal Diamond Assisted by Polycrystallin...
- Publication number 20250059677
- Publication date Feb 20, 2025
- PLASMABILITY, LLC
- Robert J. Basnett
- C30 - CRYSTAL GROWTH
Information Patent Application
CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY
- Publication number 20250051910
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Shinichi OKI
- B08 - CLEANING
Information Patent Application
EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...
- Publication number 20250051959
- Publication date Feb 13, 2025
- SUMCO CORPORATION
- Masayuki TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...
- Publication number 20250034714
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Wentao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GALLIUM OXIDE FILM, AND MANUFACTURING DEVICE AND MANUFACTURING METH...
- Publication number 20250034752
- Publication date Jan 30, 2025
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Masaru HORI
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE WITH ß-GALLIUM OXIDE FILM AND PRODUCTION METHOD THEREFOR
- Publication number 20250015144
- Publication date Jan 9, 2025
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Masaru HORI
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR SUBSTRATE, MANUFACTURING METHOD THEREOF AND MANUFACTU...
- Publication number 20250014897
- Publication date Jan 9, 2025
- Rohm Co., Ltd.
- Makoto TAKAMURA
- C30 - CRYSTAL GROWTH
Information Patent Application
CHAMBER KITS, SYSTEMS, AND METHODS FOR CALIBRATING TEMPERATURE SENS...
- Publication number 20250003806
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- C30 - CRYSTAL GROWTH
Information Patent Application
VIRTUAL SENSOR FOR PREDICTING AND MONITORING TEMPERATURE OF CHAMBER...
- Publication number 20250003112
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- C30 - CRYSTAL GROWTH
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE WAFER AND METHOD OF FABRICATING THE SAME
- Publication number 20240401235
- Publication date Dec 5, 2024
- GLOBALWAFERS CO., LTD.
- Ching-Shan Lin
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240371636
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Min Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT
- Publication number 20240368803
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shikai LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Batch Mode Silicon Carbide Epitaxial Reactor
- Publication number 20240360589
- Publication date Oct 31, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL L...
- Publication number 20240363378
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Thomas ACKERMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MACROCELL ARCHITECTURAL STRUCTURES FOR HEAT EXCHANGE IN EPITAXIAL G...
- Publication number 20240360588
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Amir H. TAVAKOLI
- C30 - CRYSTAL GROWTH
Information Patent Application
MOVABLE CENTRAL REFLECTORS OF SEMICONDUCTOR PROCESSING EQUIPMENT, A...
- Publication number 20240360587
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW SUBSTRATE SUPPORTS, PROCESSING CHAMBERS, AND RELATED METHO...
- Publication number 20240363390
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Xinning LUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS
- Publication number 20240363327
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- F27 - FURNACES KILNS OVENS RETORTS
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GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...
- Publication number 20240360590
- Publication date Oct 31, 2024
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- Vishwas Kumar PANDEY
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REFLECTOR FOR PROCESS CHAMBER
- Publication number 20240352618
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- B08 - CLEANING

Heating of the reaction chamber or the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film deposition method and method for forming polycrystalline silic...

Process kits and related methods for processing chambers to facilit...

Method of preparing a silicon carbide crystal by deposition onto at...

Vapor phase growth method using reflector with changeable pattern

Vapor deposition device and method of producing epitaxial wafer

Epitaxial growth device

Semiconductor deposition monitoring device

Apparatus for heating multiple crucibles

Method for producing epitaxial silicon wafer

Silicon carbide ingot and method of fabricating the same

Pre-heat ring and substrate processing device

Systems and methods for a preheat ring in a semiconductor wafer rea...

Silicon carbide single crystal wafer, and methods for manufacturing...

Method for producing SiC single crystal and method for suppressing...

Method for producing a SiC seed crystal for growth of a SiC ingot b...

Apparatus and method for manufacturing hexagonal crystals

Diamond substrate and method for manufacturing the same

Method of manufacturing semiconductor device

Method of fabricating hexagonal boron nitride

Methods of forming silicon carbide coated base substrates at multip...

Method of growing single crystal diamond assisted by polycrystallin...

Quartz susceptor for accurate non-contact temperature measurement

Epitaxial growth apparatus and method of producing epitaxial wafer

Methods for producing 2D materials by moving forming layers dispose...

Method of providing a wrinkle pattern or producing a substrate havi...

Method for epitaxially depositing a material on a substrate by flow...

In-situ film growth rate monitoring apparatus, systems, and methods...

Methods for manufacturing silicon carbide single crystal ingot and...

Method of manufacture of single crystal synthetic diamond material

Chamber architecture for epitaxial deposition and advanced epitaxia...

Patents Applicationslast 30 patents

SILICON CARBIDE AND QUARTZ COMPOSITIONS FOR PROCESSING CHAMBERS, AN...

HEATING APPARATUS, CVD EQUIPMENT INCLUDING THE HEATING APPARATUS

ULTRA-HIGH THERMAL-CONDUCTIVITY DIAMOND AND SYNTHETIC METHOD THEREFOR

EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...

TWO-CHAMBER REACTOR FOR EPITAXIAL DEPOSITION OF SEMICONDUCTOR MATER...

CRYSTALLINE WAFERS AND PROCESS FOR FORMING CRYSTALLINE WAFERS

SEMICONDUCTOR PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMEN...

AUXILIARY FLOW PLATE FOR THICKNESS AND CONCENTRATION UNIFORMITY ADJ...

METHOD FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR

Method of Growing Single Crystal Diamond Assisted by Polycrystallin...

CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY

EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...

REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...

GALLIUM OXIDE FILM, AND MANUFACTURING DEVICE AND MANUFACTURING METH...

SUBSTRATE WITH ß-GALLIUM OXIDE FILM AND PRODUCTION METHOD THEREFOR

SEMICONDUCTOR SUBSTRATE, MANUFACTURING METHOD THEREOF AND MANUFACTU...

CHAMBER KITS, SYSTEMS, AND METHODS FOR CALIBRATING TEMPERATURE SENS...

VIRTUAL SENSOR FOR PREDICTING AND MONITORING TEMPERATURE OF CHAMBER...

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

SILICON CARBIDE WAFER AND METHOD OF FABRICATING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT

Batch Mode Silicon Carbide Epitaxial Reactor

COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL L...

MACROCELL ARCHITECTURAL STRUCTURES FOR HEAT EXCHANGE IN EPITAXIAL G...

MOVABLE CENTRAL REFLECTORS OF SEMICONDUCTOR PROCESSING EQUIPMENT, A...

GAS FLOW SUBSTRATE SUPPORTS, PROCESSING CHAMBERS, AND RELATED METHO...

EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS

GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...

REFLECTOR FOR PROCESS CHAMBER