Heating of the reaction chamber or the substrate

Industry

CPC
C30B25/10

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Parent Industries

CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B25/00Single-crystal growth by chemical reaction of reactive gases

Current Industry

C30B25/10Heating of the reaction chamber or the substrate

Industries

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Multi-thermal CVD chambers with shared gas delivery and exhaust system
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Method for depositing an epitaxial layer on a front side of a semic...
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Method for manufacturing etched SiC substrate and grown SiC substra...
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Method of forming a source/drain
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High pressure spatial chemical vapor deposition system and related...
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Gallium nitride vapor phase epitaxy apparatus used in vapor phase e...
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Patents Applicationslast 30 patents

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SUBSTRATE WITH ß-GALLIUM OXIDE FILM AND PRODUCTION METHOD THEREFOR
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SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
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MACROCELL ARCHITECTURAL STRUCTURES FOR HEAT EXCHANGE IN EPITAXIAL G...
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REFLECTOR FOR PROCESS CHAMBER
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Heating of the reaction chamber or the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing semiconductor device

Method of fabricating hexagonal boron nitride

Methods of forming silicon carbide coated base substrates at multip...

Method of growing single crystal diamond assisted by polycrystallin...

Quartz susceptor for accurate non-contact temperature measurement

Epitaxial growth apparatus and method of producing epitaxial wafer

Methods for producing 2D materials by moving forming layers dispose...

Method of providing a wrinkle pattern or producing a substrate havi...

Method for epitaxially depositing a material on a substrate by flow...

In-situ film growth rate monitoring apparatus, systems, and methods...

Methods for manufacturing silicon carbide single crystal ingot and...

Method of manufacture of single crystal synthetic diamond material

Chamber architecture for epitaxial deposition and advanced epitaxia...

Apparatus and method for manufacturing hexagonal silicon crystal

Method for growing high-quality heteroepitaxial monoclinic gallium...

Semiconductor processing apparatus and methods for calibrating a se...

Multi-thermal CVD chambers with shared gas delivery and exhaust system

Method of producing a synthetic diamond

Deposition equipment with adjustable temperature source

Method for the deposition of monocrystalline or polycrystalline tin...

Methods for forming a silicon substrate with reduced grown-in nucle...

Methods for forming a silicon substrate with reduced grown-in nucle...

Silicon epitaxial wafer production method and silicon epitaxial wafer

Method for depositing an epitaxial layer on a front side of a semic...

Method for manufacturing etched SiC substrate and grown SiC substra...

Method for depositing boron containing silicon germanium layers

Method of forming a source/drain

High pressure spatial chemical vapor deposition system and related...

Epitaxial wafer production system for performing a correction based...

Gallium nitride vapor phase epitaxy apparatus used in vapor phase e...

Patents Applicationslast 30 patents

Method of Growing Single Crystal Diamond Assisted by Polycrystallin...

CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY

EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...

REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...

GALLIUM OXIDE FILM, AND MANUFACTURING DEVICE AND MANUFACTURING METH...

SUBSTRATE WITH ß-GALLIUM OXIDE FILM AND PRODUCTION METHOD THEREFOR

SEMICONDUCTOR SUBSTRATE, MANUFACTURING METHOD THEREOF AND MANUFACTU...

CHAMBER KITS, SYSTEMS, AND METHODS FOR CALIBRATING TEMPERATURE SENS...

VIRTUAL SENSOR FOR PREDICTING AND MONITORING TEMPERATURE OF CHAMBER...

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

SILICON CARBIDE WAFER AND METHOD OF FABRICATING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT

Batch Mode Silicon Carbide Epitaxial Reactor

COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL L...

MACROCELL ARCHITECTURAL STRUCTURES FOR HEAT EXCHANGE IN EPITAXIAL G...

MOVABLE CENTRAL REFLECTORS OF SEMICONDUCTOR PROCESSING EQUIPMENT, A...

GAS FLOW SUBSTRATE SUPPORTS, PROCESSING CHAMBERS, AND RELATED METHO...

EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS

GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...

REFLECTOR FOR PROCESS CHAMBER

CRYSTAL LAMINATION STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD OF M...

NANOCRYSTALLINE DIAMOND WITH AMORPHOUS INTERFACIAL LAYER

LARGE AREA DEVICE-QUALITY DIAMOND SUBSTRATES (LADDIS)

Deposition Equipment with Adjustable Temperature Source

SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR CALIBRATING A SE...

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

PREPARATION OF SHAPED CRYSTALLINE LAYERS

PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING THERMOE...

PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING TURBINE...