Increasing angular deflection

Industry

CPC
B81B3/0043

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0043Increasing angular deflection

Industries

Patents Grantslast 30 patents

Information Patent Grant
Two degree-of-freedom actuator and MEMS device
- Patent number 12,013,527
- Issue date Jun 18, 2024
- Huawei Technologies Co., Ltd.
- Shanshan Gu-Stoppel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar staggered comb drive for bidirectional MEMS actuation
- Patent number 11,909,332
- Issue date Feb 20, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Qin Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems scanner suspension system enabling high frequency and high mec...
- Patent number 11,662,570
- Issue date May 30, 2023
- Infineon Technologies AG
- Malika Bella
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Post-processing techniques on mems foundry fabricated devices for l...
- Patent number 11,535,511
- Issue date Dec 27, 2022
- United States of America as represented by the Secretary of the Air Force
- LaVern A Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device for large angle beamsteering
- Patent number 11,279,613
- Issue date Mar 22, 2022
- LaVern A. Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS electrothermal actuator for large angle beamsteering
- Patent number 11,163,152
- Issue date Nov 2, 2021
- United States of America as represented by the Secretary of the Air Force
- LaVern A Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar staggered comb drive for bidirectional MEMS actuation
- Patent number 11,101,746
- Issue date Aug 24, 2021
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Qin Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical z-inertial sensor
- Patent number 10,899,603
- Issue date Jan 26, 2021
- Robert Bosch GmbH
- Ralf Boessendoerfer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Displacement increasing mechanism and shutter device
- Patent number 10,831,017
- Issue date Nov 10, 2020
- Sumitomo Precision Products Co., LTD
- Mario Kiuchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a pressure sensor device
- Patent number 10,807,860
- Issue date Oct 20, 2020
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gyroscope structure and gyroscope
- Patent number 10,365,103
- Issue date Jul 30, 2019
- Murata Manufacturing Co., Ltd.
- Jaakko Ruohio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror driving device and driving method thereof
- Patent number 10,281,716
- Issue date May 7, 2019
- FUJIFILM Corporation
- Takayuki Naono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror
- Patent number 10,048,487
- Issue date Aug 14, 2018
- Robert Bosch GmbH
- Heiko Nitsche
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror drive device and driving method thereof
- Patent number 9,864,189
- Issue date Jan 9, 2018
- FUJIFILM Corporation
- Takayuki Naono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS hinges with enhanced rotatability
- Patent number 9,810,258
- Issue date Nov 7, 2017
- Raviv Erlich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror arrangement
- Patent number 9,753,280
- Issue date Sep 5, 2017
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung E.V.
- Ulrich Hofmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ring gyroscope structure and gyroscope
- Patent number 9,612,118
- Issue date Apr 4, 2017
- Murata Manufacturing Co., Ltd.
- Jaakko Ruohio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gyroscope structure and gyroscope
- Patent number 9,551,577
- Issue date Jan 24, 2017
- Murata Manufacturing Co., Ltd.
- Jaakko Ruohio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS hinges with enhanced rotatability
- Patent number 9,546,508
- Issue date Jan 17, 2017
- Apple Inc.
- Raviv Erlich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical reflection element
- Patent number 9,523,849
- Issue date Dec 20, 2016
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Toshiaki Horie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating element having meandering shape, and optical reflection e...
- Patent number 9,261,669
- Issue date Feb 16, 2016
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Toshiaki Horie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and methods for manufacturing and using same
- Patent number 9,148,075
- Issue date Sep 29, 2015
- STMicroelectronics International N.V.
- Sason Sourani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Assembly having a displaceable part and method for operating an ass...
- Patent number 8,736,934
- Issue date May 27, 2014
- Robert Bosch GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pivotable MEMS device
- Patent number 8,531,752
- Issue date Sep 10, 2013
- JDS Uniphase Corporation
- Abdul Jaleel K. Moidu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical switch device
- Patent number 6,912,336
- Issue date Jun 28, 2005
- Nippon Telegraph and Telephone Corporation
- Hiromu Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror actuator
- Patent number 6,747,390
- Issue date Jun 8, 2004
- Samsung Electronics Co., Ltd.
- Hae-seok Park
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Article comprising wedge-shaped electrodes
- Patent number 6,487,001
- Issue date Nov 26, 2002
- Agere Systems Inc.
- Dennis S. Greywall
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...
- Publication number 20240158223
- Publication date May 16, 2024
- Government of the United States, as represented by the Secretary of the Air F...
- John PK Walton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...
- Publication number 20230373781
- Publication date Nov 23, 2023
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Jan Rockstroh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL SCANNING DEVICE, DRIVING METHOD OF OPTICAL SCANNING DEVICE,...
- Publication number 20230314793
- Publication date Oct 5, 2023
- FUJIFILM CORPORATION
- Shinichiro Sonoda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO ESTIMATE PHASE AND AMPLITUDE FOR CONTROL OF A RESONANT ME...
- Publication number 20230234836
- Publication date Jul 27, 2023
- STMicroelectronics S.r.l
- Raffaele Enrico FURCERI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOVABLE APPARATUS
- Publication number 20220326512
- Publication date Oct 13, 2022
- Mizuki SHINKAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE A...
- Publication number 20220155584
- Publication date May 19, 2022
- The Regents of the University of Michigan
- Haijun Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device for Large Angle Beamsteering
- Publication number 20220119244
- Publication date Apr 21, 2022
- Government of the United States, as represented by the Secretary of the Air F...
- LaVern A. Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SCANNER SUSPENSION SYSTEM ENABLING HIGH FREQUENCY AND HIGH MEC...
- Publication number 20210396990
- Publication date Dec 23, 2021
- INFINEON TECHNOLOGIES AG
- Malika BELLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIPOLAR STAGGERED COMB DRIVE FOR BIDIRECTIONAL MEMS ACTUATION
- Publication number 20210367536
- Publication date Nov 25, 2021
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Qin Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TWO DEGREE-OF-FREEDOM ACTUATOR AND MEMS DEVICE
- Publication number 20210149187
- Publication date May 20, 2021
- Huawei Technologies Co., Ltd
- Shanshan GU-STOPPEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Post-Processing Techniques on MEMS Foundry Fabricated Devices for L...
- Publication number 20200283289
- Publication date Sep 10, 2020
- Government of the United States, as represented by the Secretary of the Air F...
- LaVern A Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Electrothermal Actuator for Large Angle Beamsteering
- Publication number 20200096761
- Publication date Mar 26, 2020
- Government of the United States, as represented by the Secretary of the Air F...
- LaVern A Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A PRESSURE SENSOR DEVICE
- Publication number 20190185316
- Publication date Jun 20, 2019
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL Z-INERTIAL SENSOR
- Publication number 20190135612
- Publication date May 9, 2019
- ROBERT BOSCH GmbH
- Ralf Boessendoerfer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device for Large Angle Beamsteering
- Publication number 20190039881
- Publication date Feb 7, 2019
- Government of the United States, as represented by Secretary of the Air Force
- LaVern A. Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS hinges with enhanced rotatability
- Publication number 20170152887
- Publication date Jun 1, 2017
- Raviv Erlich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT HAVING TWO AXES OF OSCILLATION AND METHOD...
- Publication number 20170101306
- Publication date Apr 13, 2017
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GYROSCOPE STRUCTURE AND GYROSCOPE
- Publication number 20170089702
- Publication date Mar 30, 2017
- Murata Manufacturing Co., Ltd.
- Jaakko RUOHIO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMIRROR ARRANGEMENT
- Publication number 20160299335
- Publication date Oct 13, 2016
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Ulrich Hofmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS HINGES WITH ENHANCED ROTATABILITY
- Publication number 20150345196
- Publication date Dec 3, 2015
- Raviv Erlich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RING GYROSCOPE STRUCTURE AND GYROSCOPE
- Publication number 20150211855
- Publication date Jul 30, 2015
- Murata Manufacturing Co., Ltd.
- Jaakko RUOHIO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GYROSCOPE STRUCTURE AND GYROSCOPE
- Publication number 20150211854
- Publication date Jul 30, 2015
- Murata Manufacturing Co., Ltd.
- Jaakko RUOHIO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL SCANNING DEVICE
- Publication number 20140320943
- Publication date Oct 30, 2014
- DENSO CORPORATION
- Koichi OYAMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS HINGES WITH ENHANCED ROTATABILITY
- Publication number 20140310914
- Publication date Oct 23, 2014
- RAVIV ERLICH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH INCREASED TILTING RANGE
- Publication number 20140035432
- Publication date Feb 6, 2014
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATING ELEMENT HAVING MEANDERING SHAPE, AND OPTICAL REFLECTION E...
- Publication number 20130271804
- Publication date Oct 17, 2013
- PANASONIC CORPORATION
- Toshiaki Horie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIVOTABLE MEMS DEVICE
- Publication number 20120281266
- Publication date Nov 8, 2012
- Abdul Jaleel K. Moidu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ASSEMBLY HAVING A DISPLACEABLE PART AND METHOD FOR OPERATING AN ASS...
- Publication number 20120250128
- Publication date Oct 4, 2012
- Stefan PINTER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Methods for Manufacturing and Using Same
- Publication number 20120206785
- Publication date Aug 16, 2012
- Sason SOURANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Increasing angular deflection

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Two degree-of-freedom actuator and MEMS device

Bipolar staggered comb drive for bidirectional MEMS actuation

Mems scanner suspension system enabling high frequency and high mec...

Post-processing techniques on mems foundry fabricated devices for l...

MEMS device for large angle beamsteering

MEMS electrothermal actuator for large angle beamsteering

Bipolar staggered comb drive for bidirectional MEMS actuation

Micromechanical z-inertial sensor

Displacement increasing mechanism and shutter device

Micromechanical component for a pressure sensor device

Gyroscope structure and gyroscope

Mirror driving device and driving method thereof

Micromirror

Mirror drive device and driving method thereof

MEMS hinges with enhanced rotatability

Micromirror arrangement

Ring gyroscope structure and gyroscope

Gyroscope structure and gyroscope

MEMS hinges with enhanced rotatability

Optical reflection element

Vibrating element having meandering shape, and optical reflection e...

MEMS device and methods for manufacturing and using same

Assembly having a displaceable part and method for operating an ass...

Pivotable MEMS device

Optical switch device

Micromirror actuator

Article comprising wedge-shaped electrodes

Patents Applicationslast 30 patents

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...

MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...

OPTICAL SCANNING DEVICE, DRIVING METHOD OF OPTICAL SCANNING DEVICE,...

METHOD TO ESTIMATE PHASE AND AMPLITUDE FOR CONTROL OF A RESONANT ME...

MOVABLE APPARATUS

COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE A...

MEMS Device for Large Angle Beamsteering

MEMS SCANNER SUSPENSION SYSTEM ENABLING HIGH FREQUENCY AND HIGH MEC...

BIPOLAR STAGGERED COMB DRIVE FOR BIDIRECTIONAL MEMS ACTUATION

TWO DEGREE-OF-FREEDOM ACTUATOR AND MEMS DEVICE

Post-Processing Techniques on MEMS Foundry Fabricated Devices for L...

MEMS Electrothermal Actuator for Large Angle Beamsteering

MICROMECHANICAL COMPONENT FOR A PRESSURE SENSOR DEVICE

MICROMECHANICAL Z-INERTIAL SENSOR

MEMS Device for Large Angle Beamsteering

MEMS hinges with enhanced rotatability

MICROMECHANICAL COMPONENT HAVING TWO AXES OF OSCILLATION AND METHOD...

GYROSCOPE STRUCTURE AND GYROSCOPE

MICROMIRROR ARRANGEMENT

MEMS HINGES WITH ENHANCED ROTATABILITY

RING GYROSCOPE STRUCTURE AND GYROSCOPE

GYROSCOPE STRUCTURE AND GYROSCOPE

OPTICAL SCANNING DEVICE

MEMS HINGES WITH ENHANCED ROTATABILITY

MEMS DEVICE WITH INCREASED TILTING RANGE

VIBRATING ELEMENT HAVING MEANDERING SHAPE, AND OPTICAL REFLECTION E...

PIVOTABLE MEMS DEVICE

ASSEMBLY HAVING A DISPLACEABLE PART AND METHOD FOR OPERATING AN ASS...

MEMS Device and Methods for Manufacturing and Using Same