Membership
Tour
Register
Log in
Methods for preserving structures not provided for in groups B81C1/00785 - B81C1/00825
Follow
Industry
CPC
B81C1/00833
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/00833
Methods for preserving structures not provided for in groups B81C1/00785 - B81C1/00825
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
MEMS device manufacturing method and mems device
Patent number
11,597,648
Issue date
Mar 7, 2023
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device for protecting FEOL element and BEOL element
Patent number
11,345,591
Issue date
May 31, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Ping-Chun Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for the exposure of a region on one face of an electronic d...
Patent number
10,809,621
Issue date
Oct 20, 2020
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Jean Charbonnier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device for protecting FEOL element and BEOL element
Patent number
10,508,028
Issue date
Dec 17, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Ping-Chun Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for protecting FEOL element and BEOL element
Patent number
10,155,660
Issue date
Dec 18, 2018
Taiwan Semiconductor Manufacturing Co., Ltd
Ping Chun Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-optical bench device with highly/selectively-controlled optic...
Patent number
10,120,134
Issue date
Nov 6, 2018
Si-Ware Systems
Bassam Saadany
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integration of active devices with passive components and MEMS devices
Patent number
9,751,753
Issue date
Sep 5, 2017
Newport Fab, LLC
Michael J. DeBar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mechanisms for forming micro-electro mechanical system device
Patent number
9,352,953
Issue date
May 31, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Ren Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mechanisms for forming micro-electro mechanical system device
Patent number
8,994,129
Issue date
Mar 31, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Ren Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Constrained oxidation of suspended micro- and nano-structures
Patent number
8,415,220
Issue date
Apr 9, 2013
International Business Machines Corporation
Tymon Barwicz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Protection of cavities opening onto a face of a microstructured ele...
Patent number
8,153,503
Issue date
Apr 10, 2012
Commissariat a l'Energie Atomique
Barbara Charlet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing an electronic assembly; an electronic asse...
Patent number
7,884,289
Issue date
Feb 8, 2011
NXP B.V.
Johannes W. Weekamp
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for stripping sacrificial layer in MEMS assembly
Patent number
7,432,572
Issue date
Oct 7, 2008
Texas Instruments Incorporated
Joshua Malone
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for stripping sacrificial layer in MEMS assembly
Patent number
6,951,769
Issue date
Oct 4, 2005
Texas Instruments Incorporated
Joshua Malone
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Self-shadowing MEM structures
Patent number
6,937,131
Issue date
Aug 30, 2005
Memx, Inc.
Murray Steven Rodgers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Self-shadowing MEM structures
Patent number
6,824,278
Issue date
Nov 30, 2004
Memx, Inc.
Murray Steven Rodgers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing semiconductor pressure sensor having refer...
Patent number
6,495,389
Issue date
Dec 17, 2002
Denso Corporation
Seiichiro Ishio
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR COMPONENT AND METHOD FOR MANUFACTURING A SEMICONDUCTO...
Publication number
20240190702
Publication date
Jun 13, 2024
ROBERT BOSCH GmbH
Gregor Schuermann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
Publication number
20220289564
Publication date
Sep 15, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ping-Chun YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE MANUFACTURING METHOD AND MEMS DEVICE
Publication number
20210147224
Publication date
May 20, 2021
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
Publication number
20200115223
Publication date
Apr 16, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Ping-Chun YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
Publication number
20190112184
Publication date
Apr 18, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Ping-Chun YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Vent Attachment System For Micro-Electromechanical Systems
Publication number
20180009655
Publication date
Jan 11, 2018
W.L. GORE & ASSOCIATES, INC.
Andrew J. Holliday
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Vent Attachment System For Micro-Electromechanical Systems
Publication number
20160167948
Publication date
Jun 16, 2016
W.L. GORE & ASSOCIATES, INC.
Andrew J. Holliday
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE
Publication number
20150021723
Publication date
Jan 22, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Ren CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM DEVICE AND SEMI-MANUFACTURE AND MANUF...
Publication number
20120146452
Publication date
Jun 14, 2012
Miradia, Inc.
HUA-SHU WU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Constrained Oxidation of Suspended Micro- and Nano-Structures
Publication number
20110207335
Publication date
Aug 25, 2011
International Business Machines Corporation
Tymon Barwicz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROTECTION OF CAVITIES OPENING ONTO A FACE OF A MICROSTRUCTURED ELE...
Publication number
20090263920
Publication date
Oct 22, 2009
COMMISSARIAT A L'ENERGIE ATOMIQUE
Barbara Charlet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING AN ELECTRONIC ASSEMBLY; AN ELECTRONIC ASSE...
Publication number
20090159331
Publication date
Jun 25, 2009
NXP B.V.
Johannes W. Weekamp
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF PERFORMING DOUBLE-SIDED PROCESSES UPON A WAFER
Publication number
20060030120
Publication date
Feb 9, 2006
Shih-Feng Shao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for stripping sacrificial layer in MEMS assembly
Publication number
20060014312
Publication date
Jan 19, 2006
Texas Instruments, Inc.
Joshua Malone
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Self-shadowing MEM structures
Publication number
20050101048
Publication date
May 12, 2005
Murray Steven Rodgers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Self-shadowing MEM structures
Publication number
20050088765
Publication date
Apr 28, 2005
Murray Steven Rodgers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Self-shadowing MEM structures
Publication number
20050087826
Publication date
Apr 28, 2005
Murray Steven Rodgers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for stripping sacrificial layer in MEMS assembly
Publication number
20040248417
Publication date
Dec 9, 2004
TEXAS INSTRUMENTS INCORPORATED
Joshua J. Malone
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Self-shadowing MEM structures
Publication number
20030174929
Publication date
Sep 18, 2003
Murray Steven Rodgers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromechanical device contact terminals free of particle generation
Publication number
20030107137
Publication date
Jun 12, 2003
Roger J. Stierman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for manufacturing semiconductor pressure sensor having refer...
Publication number
20020028529
Publication date
Mar 7, 2002
Seiichiro Ishio
B81 - MICRO-STRUCTURAL TECHNOLOGY